CN212265120U - Multifunctional micro machining tool - Google Patents
Multifunctional micro machining tool Download PDFInfo
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- CN212265120U CN212265120U CN202020730822.6U CN202020730822U CN212265120U CN 212265120 U CN212265120 U CN 212265120U CN 202020730822 U CN202020730822 U CN 202020730822U CN 212265120 U CN212265120 U CN 212265120U
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Abstract
The utility model discloses a multifunctional micro machining tool, which comprises a support module, a macroscopic three-dimensional motion platform, a microscopic three-dimensional motion platform, an ultrasonic vibration workbench module and a workpiece clamp module; the supporting module comprises a base, a platform, a rotating table, an upright post and two sliding tables, wherein the platform is arranged on the base, the rotating table is rotatably arranged on the platform, an upright post rotating motor can drive the rotating table to rotate, the upright post is fixedly arranged on the rotating table, the two sliding tables are respectively and slidably arranged on two sides of the upright post, and an electric main shaft module or an ultrasonic vibration main shaft module is arranged on each sliding table; the ultrasonic vibration worktable module and the workpiece clamp module are respectively arranged on the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform. The utility model provides high a precision and efficiency of a lot of micro-machining.
Description
Technical Field
The utility model relates to a micro-machining technical field especially relates to a multi-functional micro-machining machine tool.
Background
Micro machining has wide application in many fields such as precision molds, aerospace, precision instruments, biomedical treatment and the like, and many micro machining methods such as micro electric discharge machining, micro electrolytic machining, micro ultrasonic machining, micro turning, micro milling and micro grinding are developed at present.
Although there are fine processing methods suitable for different objects to be processed, there are some problems as follows: firstly, the processing methods can only process a plurality of simple structures generally, and for complex structures or finer processing, a single processing method is difficult to meet the processing requirements, and a plurality of processing means are required to process complex microstructures; for micro-machining, in order to meet the requirement that multiple times of machining can be completed by one-time clamping for machining precision, the machining requirement is difficult to meet for a single-function micro-machining tool, and the precision cannot be guaranteed by repeated clamping; compared with a single processing method, certain composite processing methods have obvious advantages in the aspects of processing quality and processing efficiency, and cannot implement composite processing on a single-function micro-machining tool; and fourthly, no matter which micro machining method is adopted, the precision requirement on the machine tool motion platform is very high, the cost of the machine tool motion platform accounts for most of the development cost of the whole machine tool, and the single-function micro machining machine tool motion platform is only provided for one machining method, so that the high-precision motion platform cannot be utilized more efficiently.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a multi-functional micro machining machine tool to solve the problem that above-mentioned prior art exists, improve the precision and the efficiency of micro machining many times.
In order to achieve the above object, the utility model provides a following scheme:
the utility model provides a multifunctional micro machining tool, which comprises a support module, a macroscopic three-dimensional motion platform, a microscopic three-dimensional motion platform, an ultrasonic vibration workbench module and a workpiece clamp module; the supporting module comprises a base, a platform, a rotating table, an upright post and two sliding tables, wherein the platform is arranged on the base, the rotating table is rotatably arranged on the platform, an upright post rotating motor can drive the rotating table to rotate, the upright post is fixedly arranged on the rotating table, the two sliding tables are respectively arranged on two sides of the upright post in a sliding manner, and an electric main shaft module or an ultrasonic vibration main shaft module is arranged on each sliding table; the ultrasonic vibration worktable module and the workpiece clamp module are respectively arranged on the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform.
Preferably, the macroscopic three-dimensional motion platform comprises a macroscopic Z-axis lifting table, a macroscopic Y-axis motion platform installed on the macroscopic Z-axis lifting table, and a macroscopic X-axis motion platform installed on the macroscopic Y-axis motion platform; the micro three-dimensional motion platform comprises a micro Z-axis lifting platform, a micro Y-axis motion platform arranged on the micro Z-axis lifting platform and a micro X-axis motion platform arranged on the micro Y-axis motion platform; the device also comprises a nanoscopic three-dimensional motion platform which is arranged on the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform, wherein the nanoscopic three-dimensional motion platform is a three-dimensional motion platform driven by piezoelectric ceramics.
Preferably, four level adjusters are arranged between the platform and the base, and the level state of the platform can be adjusted through the four level adjusters; the two sliding tables are respectively in sliding fit with the upright post through vertical guide rails, and the sliding table further comprises two vertical guide rail servo motors; the sliding tables correspond to the vertical guide rail servo motors one by one, and the vertical guide rail servo motors can drive the corresponding sliding tables to slide up and down along the vertical guide rails.
Preferably, the electric spindle module comprises an electric spindle support seat fixedly connected with the sliding table and an electric spindle arranged on the electric spindle support seat; the ultrasonic vibration main shaft module comprises an ultrasonic vibration main shaft servo motor, a main shaft base plate, a main shaft seat and a tool electrode, wherein the main shaft seat is connected with the sliding table, the ultrasonic vibration main shaft servo motor passes through the main shaft base plate and is installed on the main shaft seat, an output shaft of the ultrasonic vibration main shaft servo motor is connected with an ultrasonic vibration main shaft through a coupler, and the tool electrode is connected with the ultrasonic vibration main shaft.
Preferably, the electric spindle module further comprises a micro electric spark/electrochemical machining spindle module installed on the electric spindle module, the micro electric spark/electrochemical machining spindle module comprises an insulating sleeve, an electric leading support piece and a tool electrode, the top end of the insulating sleeve is connected with the bottom end of the electric spindle, the electric leading support piece is fixedly connected with a shell of the electric spindle, the tool electrode is connected with the bottom end of the insulating sleeve, a carbon brush is arranged at the bottom of the electric leading support piece, and the tool electrode below the insulating sleeve is in contact with the carbon brush.
Preferably, the device also comprises a CCD online monitoring module arranged on the platform, wherein the CCD online monitoring module comprises a universal support arm base arranged on the platform, a universal rotating CCD camera support arm arranged on the universal support arm base and a CCD camera arranged on the universal rotating CCD camera support arm.
Preferably, the device also comprises a constant-tension control wire electrode electric spark grinding unit arranged on the microscopic three-dimensional motion platform, wherein the constant-tension control wire electrode electric spark grinding unit comprises a grinding base, and a wire releasing mechanism, a wire feeding mechanism and a wire collecting mechanism are arranged on the grinding base; the wire releasing mechanism comprises a magnetic powder brake arranged on the grinding base and a wire releasing wheel fixedly connected with a rotating shaft of the magnetic powder brake, and the magnetic powder brake is electrically connected with a controller; the wire feeding mechanism comprises a constant tension sensing mechanism, ceramic rods and a plurality of conveying rod mechanisms, the constant tension sensing mechanism comprises a support frame arranged on the grinding base and a plurality of tension detection guide wheels rotatably arranged on the support frame, one of the tension detection guide wheels is connected with a tension sensor, a working liquid tank is further arranged on the grinding base, two ceramic rods are arranged in the working liquid tank in parallel, the distance between the two ceramic rods can be adjusted, and each conveying rod mechanism comprises a support rod vertically arranged on the grinding base and a wire guide wheel rotatably connected with the support rod; the wire collecting mechanism comprises a wire collecting support arranged on the grinding base, a wire collecting motor fixedly arranged on the wire collecting support, a driving wheel fixedly connected with a rotating shaft of the wire collecting motor and a driven wheel rotatably arranged on a pressing block, one end of the pressing block is rotatably connected with the wire collecting support, and the other end of the pressing block is connected with the wire collecting support through a vertical pressing bolt; the wire winding motor and the tension sensor are respectively and electrically connected with a constant tension control system.
Preferably, the ultrasonic vibration workbench module comprises an ultrasonic vibration workbench liquid tank and a workbench ultrasonic vibration system arranged on the ultrasonic vibration workbench liquid tank.
Preferably, the workpiece clamp module comprises a first workpiece clamp module and a second workpiece clamp module, and the first workpiece clamp module comprises a workpiece placing table and a pressing aluminum block fixedly connected with the workpiece placing table through a fastening bolt; the first workpiece clamp module and the ultrasonic vibration workbench module are respectively connected with the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform through a three-dimensional force sensor module, and the three-dimensional force sensor module comprises a working liquid groove adapter plate, a three-dimensional force sensor and a three-dimensional force sensor adapter plate which are sequentially connected; the second workpiece clamp module is a working liquid groove and is installed on the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform through an adapter plate.
The utility model discloses for prior art gain following technological effect:
the utility model discloses a multi-functional micro machining machine tool has improved precision and the efficiency of a lot of micro machining. The utility model discloses a multi-functional micro machining machine can realize among fine electric spark processing, fine electrolytic machining, fine ultrasonic machining, fine lathe work, fine milling, fine abrasive machining one kind processing or multiple combined machining. The utility model relates to special processing technologies such as electric spark, electrolysis, ultrasound and the like, and mechanical processing technologies such as turning, milling, grinding, drilling and the like; the micro electric discharge machining, the micro electrolytic machining, the micro ultrasonic machining, the micro turning machining, the micro milling machining, the micro grinding machining, the micro drilling machining, the micro ultrasonic vibration assisted electric discharge machining, the micro ultrasonic vibration assisted electrolytic machining, the electrophoresis assisted micro ultrasonic machining, the rotary ultrasonic machining, the micro ultrasonic vibration assisted milling machining, the micro ultrasonic vibration assisted drilling machining, the micro ultrasonic vibration assisted grinding machining, the electric discharge grinding machining and the like can be realized.
The utility model provides a stand can 360 rotations, changes main shaft or sharing macroscopical, microcosmic, receive through the stand and sees three kinds of three-dimensional workstations, and this structural design is reasonable and compact, and key spare part high-usage. The micro electric spark/electrolytic machining module, the ultrasonic machining module, the turning module, the milling module and the grinding module can be used for independent machining and composite machining along with rotation of the stand column, various composite machining can be completed without dismounting a cutter or a workpiece in the machining process, precision errors generated in the dismounting process are reduced or even eliminated, and machining precision is high.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a first schematic structural view of a multifunctional micro-machining tool of the present invention;
FIG. 2 is a schematic structural view of a multifunctional micro-machining tool of the present invention;
FIG. 3 is a schematic structural view of a support module in the multifunctional micro-machining tool of the present invention;
FIG. 4 is a schematic structural view of a macro three-dimensional motion platform in the multifunctional micro-machining tool of the present invention;
FIG. 5 is a schematic structural view of a micro three-dimensional motion platform in the multifunctional micro-machining tool of the present invention;
FIG. 6 is a schematic structural view of a three-dimensional motion platform for a multifunctional micro-machining tool according to the present invention;
FIG. 7 is a schematic structural view of an electric spindle module in the multifunctional micro-machining tool of the present invention;
FIG. 8 is a schematic structural view of an ultrasonic vibration spindle module in the multifunctional micro-machining tool of the present invention;
FIG. 9 is a schematic structural diagram of a micro electric discharge machining/electrochemical machining spindle module in the multifunctional micro machining tool of the present invention;
FIG. 10 is a schematic structural view of a constant tension control wire electrode EDM grinding unit in the multifunctional micro-machining tool of the present invention;
FIG. 11 is a schematic structural view of an ultrasonic vibration table module in the multifunctional micro-machining tool of the present invention;
FIG. 12 is a schematic structural view of a three-dimensional force sensor module in the multifunctional micro-machining tool of the present invention;
FIG. 13 is a schematic structural view of a CCD on-line monitoring module in the multifunctional micro-machining tool of the present invention;
FIG. 14 is a schematic view of a first workpiece holder of the multi-functional micro-machining tool of the present invention;
FIG. 15 is a schematic view of a second workpiece holder of the multifunctional micro-machining tool of the present invention;
wherein: 1. a vertical guide rail servo motor; 2. a sliding table; 3. a vertical guide rail; 4. a column; 5. a rotating table; 6. a rotating electric machine; 7. a platform; 8. a level regulator; 9. a reinforced concrete base; 10. a macroscopic X-axis motion stage; 11. a macro Y-axis motion stage; 12. a macroscopic Z-axis lifting table; 13. a microscopic X-axis motion platform; 14. a microscopic Y-axis motion platform; 15. a microscopic Z-axis lifting table; 16. an electric spindle supporting seat; 17. an electric spindle; 18. an ultrasonic vibration main shaft servo motor; 19. a main shaft backing plate; 20. a main shaft seat; 21. a coupling; 22. a tool electrode; 23. screwing the expansion bolt; 24. a lead support; 25. an insulating sleeve; 26. a carbon brush; 27. grinding the base; 28. a table ultrasonic vibration system; 29. ultrasonically vibrating the working liquid tank; 30. a working liquid tank adapter plate; 31. a three-dimensional force sensor; 32. a three-dimensional force sensor adapter plate; 33. a CCD camera; 34. a universally rotating CCD camera support arm; 35. a gimbal arm base; 36. fastening a bolt; 37. compressing the aluminum block; 38. a workpiece placing table; 39. a dust cover support frame; 40. an electric spindle module; 41. an ultrasonic vibration main shaft module; 42. a CCD online detection module; 43. an ultrasonic vibration table module; 44. a three-dimensional force sensor module; 45. a microscopic three-dimensional motion platform; 46. a first workpiece clamp module; 47. a macroscopic three-dimensional motion platform; 48. micro electric spark/electrolytic machining main shaft module; 49. a second workpiece clamp module; 50. and the constant tension control wire electrode electric spark grinding unit.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The utility model aims at providing a multi-functional micro machining machine tool to solve the problem that above-mentioned prior art exists, improve the precision and the efficiency of micro machining many times.
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.
As shown in fig. 1 to 15: the multifunctional micro machining tool comprises a supporting module, a macroscopic three-dimensional motion platform 47, a microscopic three-dimensional motion platform 45, a nanoscopic three-dimensional motion platform, an ultrasonic vibration workbench module 43, an electric spindle module 40, an ultrasonic vibration spindle module 41, a micro electric spark/electrolytic machining spindle module 48, a CCD (charge coupled device) online monitoring module 42, a constant-tension control line electrode electric spark grinding unit, a three-dimensional force sensor module 44, a workpiece clamp module and a dust cover supporting frame 39.
The supporting module comprises a reinforced concrete base 9, a platform 7, a rotating platform 5, an upright post 4 and two sliding tables 2, wherein the platform 7 is arranged on the base, the platform 7 and the upright post 4 are made of marble, the rotating platform 5 is rotationally arranged on the platform 7, a rotating motor 6 of the upright post 4 can drive the rotating platform 5 to rotate, the upright post 4 is fixedly arranged on the rotating platform 5, the two sliding tables 2 are respectively arranged on two sides of the upright post 4 in a sliding manner, and an electric main shaft module 40 or an ultrasonic vibration main shaft module 41 is arranged on the sliding tables 2; the macroscopic three-dimensional motion platform 47 and the microscopic three-dimensional motion platform 45 are respectively arranged above the platform 7, and the ultrasonic vibration workbench module 43 and the workpiece clamp module are respectively arranged on the macroscopic three-dimensional motion platform 47 or the microscopic three-dimensional motion platform 45.
The macroscopic three-dimensional motion platform 47 comprises a macroscopic Z-axis lifting platform 12, a macroscopic Y-axis motion platform 11 arranged on the macroscopic Z-axis lifting platform 12 and a macroscopic X-axis motion platform 10 arranged on the macroscopic Y-axis motion platform 11; the microscopic three-dimensional motion platform 45 comprises a microscopic Z-axis lifting platform 15, a microscopic Y-axis motion platform 14 arranged on the microscopic Z-axis lifting platform 15 and a microscopic X-axis motion platform 13 arranged on the microscopic Y-axis motion platform 14; the nanoscopic three-dimensional motion platform is arranged on the macroscopic three-dimensional motion platform 47 or the microscopic three-dimensional motion platform 45, and is a three-dimensional motion platform driven by piezoelectric ceramics.
Four level regulators 8 are arranged between the platform 7 and the reinforced concrete base 9, and the level state of the platform 7 can be regulated through the four level regulators 8; the two sliding tables 2 are respectively in sliding fit with the upright post 4 through the vertical guide rail 3, and the two sliding tables also comprise two vertical guide rail servo motors 1; the sliding tables 2 correspond to the vertical guide rail servo motors 1 one by one, and the vertical guide rail servo motors 1 can drive the corresponding sliding tables 2 to slide up and down along the vertical guide rails 3.
The electric spindle module 40 comprises an electric spindle support base 16 fixedly connected with the sliding table 2 and an electric spindle 17 arranged on the electric spindle support base 16; the ultrasonic vibration main shaft module 41 comprises an ultrasonic vibration main shaft servo motor 18, a main shaft backing plate 19, a main shaft seat 20 and a tool electrode 22, the main shaft seat 20 is connected with the sliding table 2, the ultrasonic vibration main shaft servo motor 18 is installed on the main shaft seat 20 through the main shaft backing plate 19, an output shaft of the ultrasonic vibration main shaft servo motor 18 is connected with an ultrasonic vibration main shaft through a coupler 21, and the tool electrode 22 is connected with the ultrasonic vibration main shaft.
The micro electric spark/electrochemical machining spindle module 48 comprises an insulating sleeve 25, an electric leading support piece 24 and a tool electrode 22, wherein the top end of the insulating sleeve 25 is connected with the bottom end of the electric spindle 17, the electric leading support piece 24 is fixedly connected with the shell of the electric spindle 17, the tool electrode 22 is connected with the bottom end of the insulating sleeve 25, a screwing and spreading bolt 23 is arranged on the electric leading support piece 24, a carbon brush is arranged at the bottom of the electric leading support piece 24, and the tool electrode 22 below the insulating sleeve 25 is in contact with.
The CCD on-line monitoring module 42 includes a gimbal arm base 35 installed on the platform 7, a universally rotating CCD camera support arm 34 installed on the gimbal arm base 35, and a CCD camera 33 disposed on the universally rotating CCD camera support arm 34.
The constant tension control wire electrode electric spark grinding unit is arranged on the microscopic three-dimensional motion platform 45 and comprises a grinding base 27, and a wire releasing mechanism, a wire feeding mechanism and a wire collecting mechanism are arranged on the grinding base 27; the wire releasing mechanism comprises a magnetic powder brake arranged on the grinding base 27 and a wire releasing wheel fixedly connected with a rotating shaft of the magnetic powder brake, and the magnetic powder brake is electrically connected with a controller; the wire feeding mechanism comprises a constant tension sensing mechanism, ceramic rods and a plurality of transmission rod mechanisms, the constant tension sensing mechanism comprises a support frame arranged on the grinding base 27 and a plurality of tension detection guide wheels rotatably arranged on the support frame, one of the tension detection guide wheels is connected with a tension sensor, a working liquid tank is also arranged on the grinding base 27, two ceramic rods are arranged in the working liquid tank in parallel, the distance between the two ceramic rods can be adjusted, and the transmission rod mechanisms comprise support rods vertically arranged on the grinding base 27 and wire guide wheels rotatably connected with the support rods; the wire collecting mechanism comprises a wire collecting support arranged on the grinding base 27, a wire collecting motor fixedly arranged on the wire collecting support, a driving wheel fixedly connected with a rotating shaft of the wire collecting motor and a driven wheel rotatably arranged on a pressing block, one end of the pressing block is rotatably connected with the wire collecting support, and the other end of the pressing block is connected with the wire collecting support through a vertical compression bolt; the wire collecting motor and the tension sensor are respectively and electrically connected with the constant tension control system.
The ultrasonic vibration table module 43 includes an ultrasonic vibration work liquid tank 29 and a table ultrasonic vibration system 28 mounted on the ultrasonic vibration work liquid tank 29.
The workpiece clamp module comprises a first workpiece clamp module 46 and a second workpiece clamp module 49, wherein the first workpiece clamp module 46 comprises a workpiece placing table 38 and a pressing aluminum block 37 fixedly connected with the workpiece placing table 38 through a fastening bolt 36; the first workpiece clamp module 46 and the ultrasonic vibration workbench module 43 are respectively connected with a macroscopic three-dimensional motion platform 47 or a microscopic three-dimensional motion platform 45 through a three-dimensional force sensor module 44, and the three-dimensional force sensor module 44 comprises a working liquid groove adapter plate 30, a three-dimensional force sensor 31 and a three-dimensional force sensor adapter plate 32 which are sequentially connected; the second workpiece clamp module 49 is included as a working liquid tank, and the second workpiece clamp module 49 is mounted on the macro three-dimensional motion platform 47 or the micro three-dimensional motion platform 45 through an adapter plate.
First embodiment
The micro electric spark/electrolytic machining spindle module 48 is installed on the upright post 4, the tool electrode 22 is installed on the micro electric spark/electrolytic machining spindle, the constant tension control wire electrode electric spark grinding machining unit 50 is installed on the macroscopic three-dimensional motion platform 47, the second workpiece clamp module 49 is installed on the microscopic three-dimensional motion platform 45, and the machining workpiece is installed in a working liquid tank in the workpiece clamp 2 module 49. Before micro electric discharge machining, the tool electrode needs to be machined on line, the rotating motor 6 is controlled to rotate to enable the upright post to rotate until the micro electric discharge/electrolytic machining main shaft is positioned right above the constant-tension control wire electrode electric discharge grinding machining unit 50, the sliding table 2 and the macroscopic three-dimensional motion platform 47 are controlled to move, and the tool electrode 22 is subjected to wire electrode electric discharge on-line grinding machining to enable the tool electrode to reach the required micro size. After the tool electrode 22 is ground and machined on line, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate 180 degrees, the micro electric spark/electrochemical machining main shaft is positioned above the second workpiece clamp module 49, and the sliding table 2 and the micro three-dimensional moving platform 45 are controlled to move to conduct micro electric spark machining on the workpiece.
Second embodiment
The micro electric spark/electrolytic machining spindle module 48 is installed on the upright post 4, the tool electrode 22 is installed on the micro electric spark/electrolytic machining spindle, the constant tension control wire electrode electric spark grinding machining unit 50 is installed on the macroscopic three-dimensional motion platform 47, the second workpiece clamp module 49 is installed on the microscopic three-dimensional motion platform 45, and the machining workpiece is installed in a working liquid tank in the workpiece clamp 2 module 49. Before micro electrochemical machining, the tool electrode 22 needs to be machined on line, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate until the micro electric spark/electrochemical machining main shaft is positioned right above the constant-tension control wire electrode electric spark grinding machining unit 50, the sliding table 2 and the macroscopic three-dimensional motion platform 47 are controlled to move, and the tool electrode 22 is subjected to wire electrode electric spark on-line grinding machining to enable the tool electrode 22 to reach the required micro size. After the tool electrode 22 is ground and machined on line, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate 180 degrees, the micro electric spark/electrochemical machining main shaft is positioned above the second workpiece clamp module 49, and the sliding table 2 and the micro three-dimensional moving platform 45 are controlled to move to conduct micro electrochemical machining on the workpiece.
Third embodiment
The ultrasonic vibration main shaft module 41 is arranged on the upright post 4, the tool electrode 22 is arranged on the ultrasonic vibration main shaft, the constant tension control wire electrode electric spark grinding unit 50 is arranged on the macroscopic three-dimensional motion platform 47, the ultrasonic vibration workbench module 43 is arranged on the microscopic three-dimensional motion platform 45 through the three-dimensional force sensor module 44, and the processed workpiece is arranged on the workbench ultrasonic vibration system 28. Before the micro-ultrasonic machining, the tool electrode 22 needs to be machined on line, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate until the micro-ultrasonic machining main shaft is positioned right above the constant-tension control wire electrode electric spark grinding machining unit 50, the sliding table 2 and the macroscopic three-dimensional motion platform 47 are controlled to move, the tool electrode 22 is subjected to wire electrode electric spark on-line grinding machining, and the tool electrode 22 is enabled to reach the required micro size. After the on-line grinding of the tool electrode, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate 180 degrees, the micro-ultrasonic machining main shaft is positioned above the ultrasonic vibration workbench module 43, micro-ultrasonic vibration can be applied to a workpiece or a micro-tool during machining, the sliding table 2 and the micro three-dimensional motion platform 45 are controlled to move, and the micro-ultrasonic machining with constant-force feeding is carried out on the workpiece.
Fourth embodiment
The electric spindle module 40 is installed on the upright post 4, the workpiece is installed on the electric spindle 17, the miniature lathe tool is installed on the three-dimensional force sensor module 44 through a fixture, and the three-dimensional force sensor module 44 is installed on the microscopic three-dimensional motion platform 45. When the nanometer turning processing is carried out, the micro turning tool is installed on the nanoscopic three-dimensional motion platform through the clamp, and the nanoscopic three-dimensional motion platform is installed on the microscopic three-dimensional motion platform 45 through the three-dimensional pressure sensor module 44. And during micro turning, the sliding table 2 and the micro-nano composite three-dimensional motion platform are controlled to move, and the workpiece arranged on the main shaft is subjected to constant-force turning.
Fifth embodiment
The electric spindle module 40 is installed on the upright post 4, the miniature milling cutter is installed on the electric spindle 17, the workpiece is installed in the workpiece fixture 1 module 46, and the workpiece fixture 1 module 46 is installed on the microscopic three-dimensional motion platform 45 through the three-dimensional force sensor module 44. When the nano-scale milling processing is carried out, the workpiece is installed on the nanoscopic three-dimensional motion platform through the clamp, and the nanoscopic three-dimensional motion platform is installed on the microscopic three-dimensional motion platform 45 through the three-dimensional pressure sensor module 44. And during micro milling, the sliding table 2 and the micro-nano composite three-dimensional motion platform are controlled to move, and the workpiece is subjected to constant-force milling.
Sixth embodiment
The electric spindle module 40 is installed on the upright post 4, the electroplating diamond tool is installed on the electric spindle 17, the workpiece is installed in the ultrasonic vibration workbench module 43, and the ultrasonic vibration workbench module 43 is installed on the microscopic three-dimensional motion platform 45 through the three-dimensional force sensor module 44. During the rotary ultrasonic machining, the ultrasonic vibration system 28 of the workbench is turned on to drive the power supply, the sliding table 2 and the microscopic three-dimensional motion platform 45 are controlled to move, and the rotary ultrasonic machining with constant-force feeding is performed on the workpiece.
Seventh embodiment
The ultrasonic vibration main shaft module 41 is arranged on the upright post 4, the tool electrode 22 is arranged on the ultrasonic vibration main shaft, the constant tension control wire electrode electric spark grinding unit 50 is arranged on the macroscopic three-dimensional motion platform 47, the second workpiece clamp module 49 is arranged on the microscopic three-dimensional motion platform 45, and the processing workpiece is arranged in a working liquid tank in the second workpiece clamp module 49. Before the micro ultrasonic vibration assisted electric spark machining, the tool electrode 22 needs to be machined on line, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate until the ultrasonic vibration main shaft is positioned right above the constant-tension control wire electrode electric spark grinding machining unit 50, the sliding table 2 and the macroscopic three-dimensional motion platform 47 are controlled to move, and the tool electrode 22 is subjected to wire electrode electric spark on-line grinding machining to enable the tool electrode to reach the required micro size. After the tool electrode is ground and machined on line, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate 180 degrees, the ultrasonic vibration main shaft is positioned above the second workpiece clamp module 49, the ultrasonic vibration main shaft driving power supply is turned on, the sliding table 2 and the microcosmic three-dimensional motion platform 45 are controlled to move, and micro ultrasonic vibration assisted electric spark machining is carried out on the workpiece.
Eighth embodiment
The ultrasonic vibration main shaft module 41 is arranged on the upright post 4, the tool electrode 22 is arranged on the ultrasonic vibration main shaft, the constant tension control wire electrode electric spark grinding unit 50 is arranged on the macroscopic three-dimensional motion platform 47, the second workpiece clamp module 49 is arranged on the microscopic three-dimensional motion platform 45, and the processing workpiece is arranged in a working liquid tank in the second workpiece clamp module 49. Before the electrochemical machining is assisted by the micro ultrasonic vibration, the tool electrode 22 needs to be machined on line, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate until the ultrasonic vibration main shaft is positioned right above the constant-tension control wire electrode electric spark grinding machining unit 50, the sliding table 2 and the macroscopic three-dimensional motion platform 47 are controlled to move, the wire electrode electric spark on-line grinding machining is carried out on the tool electrode 22, and the tool electrode 22 can reach the required micro size. After the tool electrode 22 is ground on line, the rotating motor 6 is controlled to rotate to enable the upright post 4 to rotate 180 degrees, the ultrasonic vibration main shaft is positioned above the second workpiece clamp module 49, the ultrasonic vibration main shaft driving power supply is turned on, the sliding table 2 and the microcosmic three-dimensional motion platform 45 are controlled to move, and the workpiece is subjected to micro ultrasonic vibration assisted electrochemical machining.
In the description of the present invention, it should be noted that the terms "center", "top", "bottom", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the concrete implementation and the application scope. In summary, the content of the present specification should not be construed as a limitation of the present invention.
Claims (9)
1. The utility model provides a multi-functional fine processing machine tool which characterized in that: the ultrasonic vibration device comprises a support module, a macroscopic three-dimensional motion platform, a microscopic three-dimensional motion platform, an ultrasonic vibration workbench module and a workpiece clamp module; the supporting module comprises a base, a platform, a rotating table, an upright post and two sliding tables, wherein the platform is arranged on the base, the rotating table is rotatably arranged on the platform, an upright post rotating motor can drive the rotating table to rotate, the upright post is fixedly arranged on the rotating table, the two sliding tables are respectively arranged on two sides of the upright post in a sliding manner, and an electric main shaft module or an ultrasonic vibration main shaft module is arranged on each sliding table; the ultrasonic vibration worktable module and the workpiece clamp module are respectively arranged on the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform.
2. The multifunctional microfabrication machine tool according to claim 1, wherein: the macroscopic three-dimensional motion platform comprises a macroscopic Z-axis lifting table, a macroscopic Y-axis motion platform arranged on the macroscopic Z-axis lifting table and a macroscopic X-axis motion platform arranged on the macroscopic Y-axis motion platform; the micro three-dimensional motion platform comprises a micro Z-axis lifting platform, a micro Y-axis motion platform arranged on the micro Z-axis lifting platform and a micro X-axis motion platform arranged on the micro Y-axis motion platform; the device also comprises a nanoscopic three-dimensional motion platform which is arranged on the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform, wherein the nanoscopic three-dimensional motion platform is a three-dimensional motion platform driven by piezoelectric ceramics.
3. The multifunctional microfabrication machine tool according to claim 1, wherein: four level regulators are arranged between the platform and the base, and the level state of the platform can be regulated through the four level regulators; the two sliding tables are respectively in sliding fit with the upright post through vertical guide rails, and the sliding table further comprises two vertical guide rail servo motors; the sliding tables correspond to the vertical guide rail servo motors one by one, and the vertical guide rail servo motors can drive the corresponding sliding tables to slide up and down along the vertical guide rails.
4. The multifunctional microfabrication machine tool according to claim 1, wherein: the electric spindle module comprises an electric spindle supporting seat fixedly connected with the sliding table and an electric spindle arranged on the electric spindle supporting seat; the ultrasonic vibration main shaft module comprises an ultrasonic vibration main shaft servo motor, a main shaft base plate, a main shaft seat and a tool electrode, wherein the main shaft seat is connected with the sliding table, the ultrasonic vibration main shaft servo motor passes through the main shaft base plate and is installed on the main shaft seat, an output shaft of the ultrasonic vibration main shaft servo motor is connected with an ultrasonic vibration main shaft through a coupler, and the tool electrode is connected with the ultrasonic vibration main shaft.
5. The multifunctional microfabrication machine tool according to claim 4, wherein: the electric spindle is characterized by further comprising a micro electric spark/electrolytic machining spindle module arranged on the electric spindle module, wherein the micro electric spark/electrolytic machining spindle module comprises an insulating sleeve, an electric leading support piece and a tool electrode, the top end of the insulating sleeve is connected with the bottom end of the electric spindle, the electric leading support piece is fixedly connected with a shell of the electric spindle, the tool electrode is connected with the bottom end of the insulating sleeve, a carbon brush is arranged at the bottom of the electric leading support piece, and the tool electrode below the insulating sleeve is in contact with the carbon brush.
6. The multifunctional microfabrication machine tool according to claim 1, wherein: the CCD on-line monitoring module comprises a universal support arm base arranged on the platform, a universal rotary CCD camera support arm arranged on the universal support arm base and a CCD camera arranged on the universal rotary CCD camera support arm.
7. The multifunctional microfabrication machine tool according to claim 1, wherein: the electric spark grinding unit comprises a grinding base, and a wire releasing mechanism, a wire feeding mechanism and a wire collecting mechanism are arranged on the grinding base; the wire releasing mechanism comprises a magnetic powder brake arranged on the grinding base and a wire releasing wheel fixedly connected with a rotating shaft of the magnetic powder brake, and the magnetic powder brake is electrically connected with a controller; the wire feeding mechanism comprises a constant tension sensing mechanism, ceramic rods and a plurality of conveying rod mechanisms, the constant tension sensing mechanism comprises a support frame arranged on the grinding base and a plurality of tension detection guide wheels rotatably arranged on the support frame, one of the tension detection guide wheels is connected with a tension sensor, a working liquid tank is further arranged on the grinding base, two ceramic rods are arranged in the working liquid tank in parallel, the distance between the two ceramic rods can be adjusted, and each conveying rod mechanism comprises a support rod vertically arranged on the grinding base and a wire guide wheel rotatably connected with the support rod; the wire collecting mechanism comprises a wire collecting support arranged on the grinding base, a wire collecting motor fixedly arranged on the wire collecting support, a driving wheel fixedly connected with a rotating shaft of the wire collecting motor and a driven wheel rotatably arranged on a pressing block, one end of the pressing block is rotatably connected with the wire collecting support, and the other end of the pressing block is connected with the wire collecting support through a vertical pressing bolt; the wire winding motor and the tension sensor are respectively and electrically connected with a constant tension control system.
8. The multifunctional microfabrication machine tool according to claim 1, wherein: the ultrasonic vibration workbench module comprises an ultrasonic vibration working liquid tank and a workbench ultrasonic vibration system arranged on the ultrasonic vibration working liquid tank.
9. The multifunctional microfabrication machine tool according to claim 8, wherein: the workpiece clamp module comprises a first workpiece clamp module and a second workpiece clamp module, wherein the first workpiece clamp module comprises a workpiece placing table and a compression aluminum block fixedly connected with the workpiece placing table through a fastening bolt; the first workpiece clamp module and the ultrasonic vibration workbench module are respectively connected with the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform through a three-dimensional force sensor module, and the three-dimensional force sensor module comprises a working liquid groove adapter plate, a three-dimensional force sensor and a three-dimensional force sensor adapter plate which are sequentially connected; the second workpiece clamp module is a working liquid groove and is installed on the macroscopic three-dimensional motion platform or the microscopic three-dimensional motion platform through an adapter plate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020730822.6U CN212265120U (en) | 2020-05-07 | 2020-05-07 | Multifunctional micro machining tool |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020730822.6U CN212265120U (en) | 2020-05-07 | 2020-05-07 | Multifunctional micro machining tool |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111390556A (en) * | 2020-05-07 | 2020-07-10 | 岭南师范学院 | Multifunctional micro machining tool |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111390556A (en) * | 2020-05-07 | 2020-07-10 | 岭南师范学院 | Multifunctional micro machining tool |
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