CN212251177U - Cavity assembly and silicon wafer processing equipment - Google Patents

Abstract

The utility model provides a cavity subassembly and silicon chip processing equipment, wherein, the cavity subassembly includes: a cavity having an opening; the valve plate is arranged at the opening, and one end of the valve plate is hinged with the cavity; one end of the driving cylinder is hinged with the valve plate; the driving cylinder base is fixedly arranged, the other end of the driving cylinder is hinged to the driving cylinder base, and the driving cylinder rotates through the telescopic driving valve plate. Through the technical scheme of the utility model, reduced the part of valve plate switch effectively, simplified the structure, shortened the time of valve plate switch, still promoted the packing force to the valve plate, be favorable to promoting sealed effect, reduce drive power.

Description

Cavity assembly and silicon wafer processing equipment

Technical Field

The utility model relates to a vacuum apparatus technical field particularly, relates to a cavity subassembly and a silicon chip processing equipment.

Background

In vacuum equipment, most of vacuum gate valves are gate valve structures with main motion vertical lifting and auxiliary motion horizontal motion. When the door is opened and closed, the structure needs two steps of actions, more time is consumed, the time beat of equipment is increased, the production efficiency is reduced, in addition, the structure needs to specially manufacture an additional structure for realizing the horizontal movement of the auxiliary movement, and the complexity of the device is increased.

Other vacuum apparatus, the valve plate is the flap formula structure, this structure has a main shaft, the valve plate is connected with the main shaft through the connecting block, drive arrangement is the cylinder usually, through the linear motion of hinge structure with the cylinder, turn into the circular motion of main shaft, in this kind of structure, need the main shaft to drive the valve plate, and adopt the connecting block to connect the valve plate, this cooperation should not set up to complete rigid connection, influence sealed effect, set up to flexible adjustable structure in some vacuum apparatus, but the installation is comparatively complicated, and after using a period, there is the risk of aversion, influence sealed effect.

SUMMERY OF THE UTILITY MODEL

The present invention aims at least solving one of the technical problems existing in the prior art or the related art.

In view of this, an object of the present invention is to provide a chamber assembly.

Another object of the present invention is to provide a silicon wafer processing apparatus.

In order to achieve the above object, the present invention provides a cavity assembly, including: a cavity having an opening; the valve plate is arranged at the opening, and one end of the valve plate is hinged with the cavity; one end of the driving cylinder is hinged with the valve plate; the driving cylinder base is fixedly arranged, the other end of the driving cylinder is hinged to the driving cylinder base, and the driving cylinder rotates through the telescopic driving valve plate.

In the technical scheme, the valve plate is arranged at the opening of the cavity and hinged with the cavity, when the driving cylinder pushes the valve plate to rotate, the opening can be directly opened or closed without alignment, namely the valve plate can be opened or closed only by rotating in situ, the number of actions and the action stroke are reduced, the opening and closing time of the cavity is favorably and greatly prolonged, so that the non-process time is shortened, the production efficiency is favorably improved, the valve plate is directly hinged with the cavity, the valve plate is directly driven by the driving cylinder to rotate, the number of intermediate parts is small, the structure is simple, the assembly is easy, and as one end of the driving cylinder is hinged with the valve plate, when the driving cylinder extends to drive the valve plate to close the opening, a certain thrust effect is achieved, the valve plate can be compressed, and the sealing; in addition, the valve plate is hinged to the cavity, so that the valve plate cannot shift even if being used for a long time, and the sealing effect is kept.

In the above technical solution, the cavity assembly further includes: a valve plate base; the valve plate base is detachably connected with the valve plate through the first mounting holes; one end of the driving cylinder is hinged with the valve plate base.

In the above technical solution, the cavity assembly further includes: the first rotating shaft is fixedly connected with the valve plate base; one end of the rod end joint bearing is rotatably connected with the first rotating shaft; the driving cylinder comprises a cylinder body and a cylinder rod which are mutually matched in a telescopic mode, and the other end of the rod end joint bearing is in bolted connection with the cylinder rod.

In any one of the above technical solutions, the chamber assembly further includes: the cavity is arranged at the top of the frame, and the driving cylinder base is arranged at the side part of the frame; the frame is provided with a plurality of groups of second mounting holes, and the driving cylinder base is detachably arranged on the frame through the group of second mounting holes.

In the above technical solution, the cavity assembly further includes: and the driving cylinder base are rotationally connected through the second rotating shaft.

In the above technical solution, the cavity assembly further includes: and the position sensor is arranged on the cavity or the frame and is used for sensing the opening and closing state of the valve plate and/or the opening degree of the valve plate.

In any one of the above technical solutions, the driving cylinder includes any one of an air cylinder, a hydraulic cylinder, and an electric cylinder.

In any one of the above technical solutions, the chamber assembly further includes: the sealing element is arranged at the opening position of the sealing element, the valve plate and/or the cavity.

In the technical scheme, the open end of the cavity is provided with a dovetail groove, and the sealing element is arranged in the dovetail groove.

The utility model discloses technical scheme of second aspect provides a silicon chip processing equipment, include: the process chamber is suitable for providing a process treatment space for the silicon wafer; in the cavity assembly according to any of the first aspect, the cavity of the cavity assembly is connected to the process cavity, the cavity is adapted to provide a loading and unloading and/or processing space for the silicon wafer, and the opening of the cavity is adapted to allow the silicon wafer to enter and exit the cavity.

In this technical scheme, by adopting the cavity assembly of any one of the above technical schemes, all beneficial effects of the above technical scheme are achieved, and are not described herein again; the cavity is suitable for and provides loading and unloading and/or process space for the silicon chip, the opening is suitable for and supplies silicon chip business turn over cavity, the inner space of outside atmospheric environment and cavity has been linked together through the opening promptly, because the valve plate of cavity subassembly can be opened and close fast, the action time of opening the door and closing the door has been shortened promptly, can reduce the outside air that gets into in the cavity like this, thereby be favorable to promoting the heat preservation effect of cavity and the clean degree in the cavity, thereby reduce the calorific loss of the support plate in the cavity, promote the temperature stability of support plate, can also promote the cleanliness factor of support plate, pollution abatement, and then promote silicon chip processingquality's stability and.

Additional aspects and advantages of the invention will be set forth in part in the description which follows, or may be learned by practice of the invention.

Drawings

Fig. 1 is a schematic side view of a chamber body assembly according to an embodiment of the present invention;

fig. 2 is a schematic side view of a chamber body assembly according to another embodiment of the present invention;

fig. 3 is a schematic front view of a chamber body assembly according to another embodiment of the present invention;

fig. 4 is a schematic top view of a chamber body assembly according to an embodiment of the present invention;

fig. 5 is a schematic view illustrating a stress analysis of the chamber assembly according to an embodiment of the present invention.

Wherein, the correspondence between the reference numbers and the part names in fig. 1 to 5 is:

10 chamber, 100 sealing element, 102 hinge, 1020 hinge main, 1022 hinge pair, 12 valve plate, 120 valve plate base, 122 first mounting hole, 124 first position sensor, 14 driving cylinder, 140 cylinder body, 142 cylinder rod, 144 first rotating shaft, 146 second rotating shaft, 16 driving cylinder base, 18 fisheye joint, 20 frame and 200 second mounting hole.

Detailed Description

In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings, which are illustrated in the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.

Some embodiments of the present invention are described below with reference to fig. 1 to 5.

As shown in fig. 1 to 5, the chamber assembly according to an embodiment of the present invention includes a chamber 10, a valve plate 12, a driving cylinder 14 and a driving cylinder base 16.

Specifically, the cavity 10 has an opening; the valve plate 12 is arranged at the opening, and one end of the valve plate 12 is hinged with the cavity 10; one end of the driving cylinder 14 is hinged with the valve plate 12, the other end of the driving cylinder 14 is hinged with the driving cylinder base 16, and the driving cylinder base 16 is fixedly arranged, wherein the driving cylinder 14 drives the valve plate 12 to rotate through extension and retraction.

In this embodiment, the valve plate 12 is disposed at the opening of the cavity 10 and hinged to the cavity 10, when the driving cylinder 14 pushes the valve plate 12 to rotate, the opening can be directly opened or closed without alignment, that is, the valve plate 12 only needs to rotate in situ to open or close the opening, so that the number of actions and the action stroke are reduced, which is beneficial to greatly improving the door opening and closing time of the cavity 10, thereby shortening the non-process time and improving the production efficiency, and the valve plate 12 is directly hinged to the cavity 10, the valve plate 12 rotates and is directly driven by the driving cylinder 14, the number of intermediate components is small, the structure is simple, the assembly is easy, and because one end of the driving cylinder 14 is hinged to the valve plate 12, when the driving cylinder 14 extends to drive the valve plate 12 to close the opening, a certain thrust effect is achieved, the valve plate 12 can; in addition, valve plate 12 is hinged on cavity 10, even if long-time use, can not take place to shift, is favorable to keeping sealed effect.

In the above embodiment, the chamber assembly further includes: a valve plate base 120; a plurality of sets of first mounting holes 122 provided in valve plate 12, valve plate base 120 being detachably connected to valve plate 12 through a set of first mounting holes 122; one end of the drive cylinder 14 is hinged to the valve plate seat 120.

In this embodiment, a plurality of sets of first mounting holes 122 are disposed on valve plate 12, so that valve plate base 120 can select one set from the plurality of sets of first mounting holes 122 to connect with valve plate 12, and can also select another set of first mounting holes 122 to connect with valve plate 12, that is, valve plate base 120 can be mounted at different positions on valve plate 12, so that when valve plate 12 is closed, valve plate 12 and driving cylinder 14 can have different included angles, so that driving cylinder 14 can generate different thrusts for valve plate 12, which is beneficial to adjusting the sealing effect of valve plate 12 on cavity 10; valve plate base 120 is detachably connected to valve plate 12, which facilitates the adjustment of position of valve plate base 120 and the attachment and detachment of drive cylinder 14, and facilitates the maintenance of drive cylinder 14.

In the above embodiment, the chamber assembly further includes: a first shaft 144 fixedly connected to the valve plate base 120; a rod end knuckle bearing, one end of which is rotatably connected with the first rotating shaft 144; the drive cylinder 14 includes a cylinder block 140 and a cylinder rod 142 that telescopically engage each other, with the other end of the rod end knuckle bearing bolted to the cylinder rod 142.

In this embodiment, the rod end joint bearing is rotatably connected to the first rotating shaft 144 and is bolted to the cylinder rod 142 of the driving cylinder 14, so that the structure is simple, the installation is convenient, the rod end joint bearing is flexible to rotate, the friction force is small, and the sluggish feeling generated when the driving cylinder 14 pushes the valve plate 12 to rotate is favorably reduced, thereby increasing the switching speed of the valve plate 12 and reducing the non-process time.

It will be appreciated that the rod end knuckle bearing, i.e., the fisheye joint 18.

In any of the above embodiments, the chamber body assembly further comprises: the cavity 10 is arranged at the top of the frame 20, and the driving cylinder base 16 is arranged at the side part of the frame 20; the frame 20 is provided with a plurality of sets of second mounting holes 200, and the drive cylinder base 16 is detachably provided on the frame 20 through the set of second mounting holes 200.

In this embodiment, by providing the frame 20, it is convenient to install the chamber 10 and the driving cylinder 14 on the one hand, and to provide support and counter-acting force for the driving cylinder 14, so that the driving cylinder 14 can push the valve plate 12 to rotate by telescoping; through the arrangement of a plurality of groups of second mounting holes 200, the driving cylinder base 16 can be mounted at different positions on the frame 20, so that different included angles can be formed between the driving cylinder 14 and the valve plate 12, and different pressing forces can be provided for the valve plate 12 to seal the cavity 10; the drive cylinder base 16 is detachable, which facilitates both position adjustment and detachment of the drive cylinder 14, thereby facilitating the convenience of maintenance of the drive cylinder 14.

In the above embodiment, the chamber assembly further includes: second pivot 146, actuating cylinder 14 and actuating cylinder base 16 rotate through second pivot 146 and connect, and second pivot 146 only plays the connection effect promptly, itself need not drive actuating cylinder 14 or actuating cylinder base 16 and rotate, simple structure, easily production and assembly.

In the above embodiment, the chamber assembly further includes: the position sensor is arranged on the cavity 10 or the frame 20, and the position sensor is arranged to be in contact with the valve plate 12 in a closed state or in contact with the valve plate 12 in an open state so as to sense the opening and closing state of the valve plate 12, so that whether the valve plate 12 is opened in place or closed in place can be determined, and automatic control is convenient to realize.

In other embodiments, a position sensor is used to sense the opening of valve plate 12, which may likewise determine whether valve plate 12 is open or closed in place.

In still other embodiments, the chamber body assembly may be provided with two position sensors, one for sensing the opening and closing state of the valve plate 12, such as a proximity switch and a pressure sensor; another method for sensing the opening degree of valve plate 12 can accurately measure the opening angle of valve plate 12, such as an ultrasonic sensor, an infrared sensor, etc.

In any of the above embodiments, the driving cylinder 14 includes any one of a pneumatic cylinder, a hydraulic cylinder, and an electric cylinder.

In any of the above embodiments, the chamber body assembly further comprises: sealing member 100 is provided with sealing member 100 on valve plate 12 to when valve plate 12 rotates to seal the opening, sealing member 100 can be compressed, sealing of cavity 10 is realized, the heat preservation effect in cavity 10 is promoted, and the condition that the pollutant in the outside atmosphere enters into cavity 10 is reduced.

In other embodiments, the sealing member 100 is disposed at an opening position of the cavity 10; in still other embodiments, a seal 100 is provided at both the location of the opening of cavity 10 and on valve plate 12.

In the above embodiment, the open end of the cavity 10 is provided with a dovetail groove, and the sealing member 100 is provided in the dovetail groove; it can be understood that the mouth of the dovetail groove is small and the bottom is large, the sealing element 100 is installed in the dovetail groove, when the valve plate 12 is opened, the sealing element 100 is limited by the contracted small mouth and is not easily taken out by the valve plate 12, so that the working stability and reliability of the sealing element 100 are improved, and the sealing effect is ensured.

An embodiment of the second aspect of the present invention provides a silicon wafer processing apparatus, including: the process chamber 10 is suitable for providing a process treatment space for the silicon wafer; in the chamber assembly according to any of the embodiments of the first aspect, the chamber 10 of the chamber assembly is connected to the process chamber 10, the chamber 10 is suitable for providing a loading and unloading and/or processing space for the silicon wafer, and an opening of the chamber 10 is suitable for the silicon wafer to enter and exit the chamber 10; the valve plate 12 of the chamber assembly communicates with the external atmosphere and the internal space of the chamber 10 by opening and blocks the external atmosphere and the internal space of the chamber 10 by closing.

In this embodiment, by using the cavity assembly of any one of the embodiments, all the beneficial effects of the embodiments are achieved, and are not described herein again; cavity 10 is suitable for providing loading and unloading and/or process space for the silicon chip, the opening is suitable for supplying silicon chip business turn over cavity 10, the inner space of outside atmospheric environment and cavity 10 has been linked together through the opening promptly, because valve plate 12 of cavity subassembly can open and close fast, the action time of opening the door and closing the door has been shortened promptly, can reduce the outside air that gets into in cavity 10 like this, thereby be favorable to promoting the heat preservation effect of cavity 10 and the clean degree in cavity 10, thereby reduce the calorific loss in cavity 10, promote the temperature stability in the cavity, can also promote the cleanliness factor in the cavity, pollution abatement, and then promote silicon chip processingquality's stability and reliability.

It is understood that the silicon wafer processing apparatus includes a plasma enhanced chemical vapor deposition apparatus or a physical vapor deposition apparatus.

According to the cavity assembly of a specific embodiment that this application provided, on the equal effect that realizes vacuum seal, can reduce the switch door time, increase equipment life, the while be convenient for equipment maintenance.

Specifically, the cavity assembly comprises a cavity 10, a valve plate 12, a driving cylinder 14, a frame 20 and the like.

As shown in fig. 1, the valve plate 12 is mounted on the chamber 10 through a hinge 102, and is hinged to the chamber 10, wherein the hinge main 1020 is fixed on the valve plate 12 through a bolt, the hinge sub 1022 is fixed on the chamber 10 through a bolt, and the hinge 102 structure can realize the circular motion of the valve plate 12 around the hinge 102, as shown in fig. 1, the valve plate 12 is rotated clockwise by 90 ° to close the door, wherein the chamber 10 has only a partial schematic view.

Valve plate base 120 is mounted on valve plate 12 and secured thereto by bolts. Fisheye joint 18, i.e., a rod end joint bearing, is connected to valve plate base 120 via first shaft 144, wherein fisheye joint 18 and first shaft 144 can perform a rotational motion, and valve plate base 120 is fixedly connected to first shaft 144.

The driving cylinder 14 is connected with the fisheye joint 18 through threads, and the fisheye joint 18 can be directly and spirally installed on the driving cylinder 14 in a rotating mode. The drive cylinder base 16 is connected to the drive cylinder 14 via a second rotating shaft 146, wherein the drive cylinder 14 and the second rotating shaft 146 can perform a rotational movement, and the drive cylinder base 16 is fixedly connected to the second rotating shaft 146.

The driving cylinder base 16 is fixedly connected with the frame 20 through bolts, and the frame 20 is the foundation of the whole device and keeps the stability of the device. The chamber 10 is fixedly connected with the frame 20 through bolts, and the chamber 10 is positioned at the top of the frame 20.

As shown in fig. 1, a sealing member 100, such as an O-ring, is mounted on an end surface of the cavity 10, i.e., at an opening position of the cavity, and the end surface has a dovetail groove feature, so that the O-ring can be clamped in the dovetail groove.

It will be appreciated that the seal is not limited to an O-ring, and may be of other shapes to achieve a sealing effect.

The driving cylinder 14 provides driving power, and may be any one of an air cylinder, a hydraulic cylinder and an electric cylinder, wherein the cylinder rod 142 can slide along the axial direction of the cylinder body 140 to realize the telescopic action.

As shown in fig. 1, the position of valve plate 12 in fig. 1 is defined as an open position.

In the door closing action, the cylinder rod 142 extends to push the valve plate 12, the valve plate 12 performs circular motion due to the constraint of the hinge 102, when the valve plate 12 moves to the position shown in fig. 2, which is defined as a door closing position, the first position sensor 124 is triggered to feed back the completion of door closing, and the closing of the valve is realized.

And in the door opening action, the cylinder rod 142 retracts to pull the valve plate 12 to move circularly along the hinge 102 to reach the door opening position, and a second position sensor (not shown) is triggered to feed back the completion of door opening, so that the valve is opened.

The angle between the door opening position and the door closing position of the valve plate 12 is 0-90 degrees, and the range can be further expanded according to actual requirements.

As shown in fig. 5, the driving force F provided by the driving cylinder 14, the component Fx of the driving force F in the horizontal direction, Fx, compresses the O-ring, and makes the valve plate 12 and the O-ring completely attached, and at the same time, the O-ring and the cavity 10 completely attached, thereby realizing vacuum sealing. Because the end face of the cavity 10 is provided with the dovetail groove, the O-shaped ring is clamped in the cavity 10, and thus the valve plate 12 can be ensured not to pull out the O-shaped ring to influence the sealing property when the door is opened.

As shown in fig. 3, the valve plate 12 is provided with a plurality of first mounting holes 122, the first mounting holes 122 are horizontally arranged in n rows and 2 columns, that is, the first mounting holes 122 have a plurality of groups, and the first mounting holes 122 can realize the mounting and positioning adjustment of the valve plate base 120, so as to realize the adjustment of the included angle θ in fig. 5.

As shown in fig. 5, it can be understood that the angle θ is the angle between the axis of the drive cylinder 14 and the perpendicular to the valve plate 12 in the closed door state. When the driving force F is constant, the smaller the angle θ, the larger the component Fx of the driving force F in the horizontal direction, or the larger the component Fx in the perpendicular direction of the valve plate 12 in the closed state, the higher the pressure on the O-ring, thereby improving the sealing effect; this adjustment makes it possible to exploit to the maximum the component of force of the actuating cylinder 14 perpendicular to the valve plate 12.

As shown in fig. 4, the frame 20 is provided with a second mounting hole 200, and the second mounting hole 200 has n horizontal rows and 2 horizontal columns. The second mounting hole 200 can realize the mounting and positioning adjustment of the driving cylinder base 16, and further realize the adjustment of the angle theta in fig. 5. When the driving force F is constant, the smaller the θ angle, the larger the component force Fx of the driving force F in the horizontal direction, that is, the larger the component force Fx in the vertical direction of the valve plate 12 in the closed state, the relatively larger the pressure against the O-ring. This adjustment makes it possible to exploit to the maximum the component of force of the actuating cylinder 14 perpendicular to the valve plate 12.

The acting force of the driving cylinder directly acts on the valve plate, the valve plate is hinged with the cavity sealing surface through the hinge, the cavity structure does not need to be adjusted or other components do not need to be added, the component force of the driving cylinder perpendicular to the valve plate is utilized to the maximum extent, the driving force is reduced, and energy is saved. Simple structure and convenient operation.

Above combine the figure to describe in detail the technical scheme of the utility model, through the utility model discloses a technical scheme has reduced the part of valve plate switch effectively, has simplified the structure, has shortened the time of valve plate switch, has still promoted the packing force to the valve plate, is favorable to promoting sealed effect, reduces drive power.

In the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless expressly limited otherwise. The terms "mounted," "connected," "fixed," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; "coupled" may be direct or indirect through an intermediary. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "front", "back", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or unit indicated must have a specific direction, be constructed and operated in a specific orientation, and therefore, should not be construed as limiting the present invention.

In the description of the present specification, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A chamber body assembly, comprising:

a cavity having an opening;

the valve plate is arranged at the opening, and one end of the valve plate is hinged with the cavity;

one end of the driving cylinder is hinged with the valve plate;

a driving cylinder base which is fixedly arranged, the other end of the driving cylinder is hinged with the driving cylinder base,

wherein, the actuating cylinder drives the valve plate to rotate through stretching.

2. The chamber body assembly of claim 1, further comprising:

a valve plate base;

the valve plate base is detachably connected with the valve plate through the first mounting holes;

one end of the driving cylinder is hinged with the valve plate base.

3. The chamber body assembly of claim 2, further comprising:

the first rotating shaft is fixedly connected with the valve plate base;

one end of the rod end joint bearing is rotatably connected with the first rotating shaft;

the driving cylinder comprises a cylinder body and a cylinder rod which are mutually matched in a telescopic mode, and the other end of the rod end joint bearing is bolted with the cylinder rod.

4. The chamber body assembly of any of claims 1-3, further comprising:

the cavity is arranged at the top of the frame, and the driving cylinder base is arranged at the side part of the frame;

the frame is provided with a plurality of groups of second mounting holes, and the driving cylinder base is detachably arranged on the frame through a group of second mounting holes.

5. The chamber body assembly of claim 4, further comprising:

and the driving cylinder base are rotatably connected through the second rotating shaft.

6. The chamber body assembly of claim 4, further comprising:

and the position sensor is arranged on the cavity or the frame and is used for sensing the opening and closing state of the valve plate and/or the opening degree of the valve plate.

7. The chamber body assembly of any of claims 1-3,

the driving cylinder comprises any one of an air cylinder, a hydraulic cylinder and an electric cylinder.

8. The chamber body assembly of any of claims 1-3, further comprising:

and the opening position of the valve plate and/or the cavity is provided with the sealing element.

9. The chamber body assembly of claim 8,

the opening end of the cavity is provided with a dovetail groove, and the sealing element is arranged in the dovetail groove.

10. A silicon wafer processing apparatus, comprising:

the process chamber is suitable for providing a process treatment space for the silicon wafer;

the chamber body assembly of any of claims 1-9, wherein the chamber body of the chamber body assembly is coupled to the process chamber body, the chamber body is adapted to provide a loading and/or processing space for the wafer, and the opening of the chamber body is adapted to allow the wafer to enter and exit the chamber body.

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