CN212223146U - Combined heater for czochralski silicon furnace - Google Patents
Combined heater for czochralski silicon furnace Download PDFInfo
- Publication number
- CN212223146U CN212223146U CN202020065114.5U CN202020065114U CN212223146U CN 212223146 U CN212223146 U CN 212223146U CN 202020065114 U CN202020065114 U CN 202020065114U CN 212223146 U CN212223146 U CN 212223146U
- Authority
- CN
- China
- Prior art keywords
- ring
- strip
- heating strip
- lower ring
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Resistance Heating (AREA)
Abstract
The utility model discloses a combination formula heater for czochralski silicon furnace, including fitting with a contraceptive ring, lower ring, heating strip, induced voltage board, gasket, six parts of fastening screw. The bar inslot on fitting with a contraceptive ring and the lower ring has two M8's screw hole, the bar inslot of fitting with a contraceptive ring and the inside bar inslot of lower ring joint respectively has the heating strip, will add the locking of heating strip both ends at the bar groove of fitting with a contraceptive ring and the lower ring inside through fastening screw, the bar inslot is provided with the gasket, the outer side symmetry of lower ring is provided with two sets of electric conduction boards. The utility model is formed by splicing and combining graphite and carbon/carbon or carbon/silicon carbide materials, thereby solving the problem that the raw materials of large-size heaters are expensive; the strength of the heater is improved, and the service life is prolonged; the utility model discloses a design of polylith heating strip concatenation heating main part, when breaking down, can change the heating strip of damage at will, realized the repairability of heater to use cost has been reduced.
Description
Technical Field
The utility model relates to a photovoltaic equipment field, in particular to combination formula heater for czochralski silicon furnace.
Background
Photovoltaic power generation is a green energy source which can be continuously developed, and is increasingly paid attention from all countries in the world and is vigorously developed. The monocrystalline silicon wafer is a core component of a solar cell, and restricts the development of photovoltaic power generation. In a Czochralski silicon furnace, a heater is used to heat and melt a polycrystalline silicon material.
At present, a solid isostatic pressing graphite bar is generally turned into a cylindrical graphite heater. However, the large-size graphite material is expensive, so that the cost for processing the large-size integral graphite heater is high, and the heating element is very easy to damage and difficult to repair. Along with the continuous increase of the size of the czochralski silicon single crystal furnace, the production cost and the replacement cost of the integral graphite heater are higher and higher, so that a heater with low cost needs to be developed urgently, and the heater with low cost can be repaired or maintained.
SUMMERY OF THE UTILITY MODEL
The utility model mainly aims to provide a combination formula heater for czochralski silicon furnace can effectively solve the problem among the background art.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a combined heater for a czochralski silicon furnace comprises: the gasket is machined by isostatic pressing graphite, the fastening screws are M8 screws made of carbon/carbon composite materials, the tensile strength is 150-200 MPa, and the resistance between the electric lead plates is 23M omega;
the ring of fitting with a contraceptive ring and the inside bar inslot of lower ring joint respectively have the heating strip, will add the locking of heating strip both ends at the ring of fitting with a contraceptive ring and the inside bar groove of lower ring through fastening screw, the bar inslot is provided with the gasket, promotes fixed stability through the gasket, the outer side symmetry of lower ring is provided with two sets of electric plates, through electroplax and external power switch-on, drives through the electroplax and fits with a contraceptive ring and the heating strip between the lower ring and generate heat, and this structure dismouting is simple, when breaking down, can change the heating strip of damage at will, has realized the repairability of heater to use cost has been reduced.
Preferably, the upper ring is annular and is processed by isostatic pressing graphite, the outer wall of the upper ring is provided with 20-40 strip-shaped grooves, the outer diameter is 500-1000 mm, the wall thickness is 15-25 mm, the height is 25-40 mm, and the resistivity is 8-11 [ mu ] omega.
Preferably, the upper ring is annular and is processed by isostatic pressing graphite, the outer wall of the upper ring is provided with 20-40 strip-shaped grooves, the outer diameter is 500-1000 mm, the wall thickness is 15-25 mm, the height is 25-40 mm, and the resistivity is 8-11 [ mu ] omega.
Preferably, the heating strip is S-shaped and is made of carbon/carbon composite materials, two ends of the heating strip are respectively provided with two phi 8 through holes, and the resistivity of the heating strip is 18-30 mu omega.
Preferably, the conductive plate is an L-shaped conductive plate formed by isostatic pressing graphite, and has a thickness of 10 to 15mm, a width of 30 to 50mm, and a resistivity of 8 to 11 [ mu ] omega.
Preferably, the heating strip is provided with strip heating strip or S type heating strip, strip heating strip and S type heating strip adopt carbon/carbon or carbon/carborundum combined material to process and form, and quantity is 20~40, and length is 200~600mm, and the width is 30~50mm, and thickness is 5~15 mm.
Preferably, the S-shaped heating strips are designed through an S-shaped structure, the size of each strip is reduced, heat dissipation is facilitated, and the stability of heat dissipation of the heating strips is improved.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. the utility model is formed by splicing and combining graphite and carbon/carbon or carbon/silicon carbide materials, thereby solving the problem that the raw materials of large-size heaters are expensive; the utility model discloses a carbon/carbon or carbon/carborundum material have improved the intensity of heater as the heating main part, have prolonged life.
2. The utility model discloses an electroplax and external power source switch-on drive through the electroplax and fit with a contraceptive ring and heat the strip down between the ring and generate heat, through the design of polylith heating strip concatenation heating main part, this structure dismouting is simple, when breaking down, can change the heating strip of damage at will, has realized the repairability of heater to use cost has been reduced.
Drawings
FIG. 1 is an overall structural view of a combined heater for a Czochralski silicon furnace according to the present invention;
FIG. 2 is a structural diagram of a heating strip in the combined heater for the czochralski silicon furnace.
In the figure: 1: ring fitting; 2: a lower ring; 3: heating the strip; 4: a charge leading plate; 5: a gasket; 6: fastening screws; 7: a strip-shaped heating strip; 8: s-shaped heating strips.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.
Referring to fig. 1, the combined heater for the czochralski silicon furnace comprises: six parts of an upper ring 1, a lower ring 2, a heating strip 3, a power lead plate 4, a gasket 5 and a fastening screw 6. The upper ring 1 is a ring processed by isostatic graphite, the outer wall of the upper ring is provided with 20-40 strip-shaped grooves, the outer diameter is 500-1000 mm, the wall thickness is 15-25 mm, the height is 25-40 mm, the resistivity is 8-11 mu omega.m, the lower ring 2 is a ring processed by isostatic graphite, the outer wall of the lower ring is provided with 20-40 strip-shaped grooves, the outer diameter is 500-1000 mm, the wall thickness is 15-25 mm, the height is 25-40 mm, and the resistivity is 8-11 mu omega.m, two M8 threaded holes are arranged in the strip-shaped grooves on the upper ring 1 and the lower ring 2, the heating strips 3 are S-shaped processed by carbon/carbon composite material, two phi 8 through holes are arranged at two ends of each heating strip, the resistivity is 18-30 mu omega.m, the number of the heating strips 3 is the same as that of the strip-shaped grooves in the upper ring 1 and the lower ring 2, the lead plate 4 is L-shaped processed by isostatic graphite, the thickness is 10-15 mm, the width is 30-50 mm, the resistivity is 8-11 mu omega.m, the gasket 5 is processed by isostatic pressing graphite, the fastening screw 6 is an M8 screw prepared by carbon/carbon composite materials, the tensile strength is 150-200 MPa, and the resistance between the electricity-leading plates 4 is 23M omega;
the ring of fitting with a contraceptive ring 1 and 2 inside bar inslots of lower ring joint respectively have heating strip 3, through fastening screw 6 with the locking of 3 both ends of heating strip 1 with the bar groove of 2 inside of lower ring, bar inslot is provided with gasket 5, promotes fixed stability through gasket 5, 2 outside symmetries of lower ring are provided with two sets of electroplax 4, through electroplax 4 and external power source switch-on, drive through electroplax 4 and fit with a contraceptive ring 1 and the heating strip 3 between the lower ring 2 generate heat, and this structural dismounting is simple, when breaking down, can change the heating strip of damage at will, has realized the repairability of heater to use cost has been reduced.
Example 2
Referring to fig. 1 and 2, the combined heater for the czochralski silicon furnace comprises: six parts of an upper ring 1, a lower ring 2, a heating strip 3, a power lead plate 4, a gasket 5 and a fastening screw 6. The upper ring 1 is a ring processed by isostatic graphite, the outer wall of the upper ring is provided with 20-40 strip-shaped grooves, the outer diameter is 500-1000 mm, the wall thickness is 15-25 mm, the height is 25-40 mm, the resistivity is 8-11 mu omega.m, the lower ring 2 is a ring processed by isostatic graphite, the outer wall of the lower ring is provided with 20-40 strip-shaped grooves, the outer diameter is 500-1000 mm, the wall thickness is 15-25 mm, the height is 25-40 mm, and the resistivity is 8-11 mu omega.m, two M8 threaded holes are arranged in the strip-shaped grooves on the upper ring 1 and the lower ring 2, the heating strips 3 are S-shaped processed by carbon/carbon composite material, two phi 8 through holes are arranged at two ends of each heating strip, the resistivity is 18-30 mu omega.m, the number of the heating strips 3 is the same as that of the strip-shaped grooves in the upper ring 1 and the lower ring 2, the lead plate 4 is L-shaped processed by isostatic graphite, the thickness is 10-15 mm, the width is 30-50 mm, the resistivity is 8-11 mu omega.m, the gasket 5 is processed by isostatic pressing graphite, the fastening screw 6 is an M8 screw prepared by carbon/carbon composite materials, the tensile strength is 150-200 MPa, and the resistance between the electricity-leading plates 4 is 23M omega;
the heating strips 3 are respectively clamped in the strip-shaped grooves in the upper ring 1 and the lower ring 2, two ends of each heating strip 3 are locked in the strip-shaped grooves in the upper ring 1 and the lower ring 2 through fastening screws 6, gaskets 5 are arranged in the strip-shaped grooves, the fixing stability is improved through the gaskets 5, two groups of electric lead plates 4 are symmetrically arranged on the outer side of the lower ring 2, the electric lead plates 4 are communicated with an external power supply, and the heating strips 3 between the upper ring 1 and the lower ring 2 are driven to generate heat through the electric lead plates 4;
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (8)
1. A combined heater for a czochralski silicon furnace is characterized in that: including fitting with a contraceptive ring (1), lower ring (2), heating strip (3), calling board (4), gasket (5), six parts of fastening screw (6), the bar inslot on fitting with a contraceptive ring (1) and lower ring (2) has two M8's screw hole, the bar inslot difference joint of fitting with a contraceptive ring (1) and the inside bar groove of lower ring (2) has heating strip (3), locks heating strip (3) both ends at the bar groove of fitting with a contraceptive ring (1) and the inside of lower ring (2) through fastening screw (6), and the bar inslot is provided with gasket (5), lower ring (2) outside symmetry is provided with two sets of calling board (4).
2. The combined heater for the czochralski silicon furnace as claimed in claim 1, wherein: the upper ring (1) is of a circular ring structure, the outer wall of the upper ring is provided with 20-40 strip-shaped grooves, the outer diameter is 500-1000 mm, the wall thickness is 15-25 mm, the height is 25-40 mm, and the resistivity is 8-11 mu omega.
3. The combined heater for the czochralski silicon furnace as claimed in claim 1, wherein: the lower ring (2) is of a circular ring structure, the outer wall of the lower ring is provided with 20-40 strip-shaped grooves, the outer diameter is 500-1000 mm, the wall thickness is 15-25 mm, the height is 25-40 mm, and the resistivity is 8-11 mu omega.
4. The combined heater for the czochralski silicon furnace as claimed in claim 1, wherein: two ends of the heating strip (3) are respectively provided with two phi 8 through holes, and the resistivity is 18-30 mu omega.
5. The combined heater for the czochralski silicon furnace as claimed in claim 1, wherein: the number of the heating strips (3) is the same as the number of the strip-shaped grooves in the upper ring (1) and the lower ring (2).
6. The combined heater for the czochralski silicon furnace as claimed in claim 1, wherein: the electric conduction plates (4) are L-shaped structural blocks, the thickness is 10-15 mm, the width is 30-50 mm, the resistivity is 8-11 mu omega.m, and the resistance between the two groups of electric conduction plates (4) is 23 m omega.
7. The combined heater for the czochralski silicon furnace as claimed in claim 1, wherein: the gasket (5) is processed by isostatic pressing graphite, and the tensile strength is 150-200 MPa.
8. The combined heater for the czochralski silicon furnace as claimed in claim 1, wherein: the heating strip (3) is provided with strip heating strip (7) or S type heating strip (8), strip heating strip (7) and S type heating strip (8) quantity is 20~40 pieces, and length is 200~600mm, and the width is 30~50mm, and thickness is 5~15 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020065114.5U CN212223146U (en) | 2020-01-13 | 2020-01-13 | Combined heater for czochralski silicon furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020065114.5U CN212223146U (en) | 2020-01-13 | 2020-01-13 | Combined heater for czochralski silicon furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212223146U true CN212223146U (en) | 2020-12-25 |
Family
ID=73913994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020065114.5U Active CN212223146U (en) | 2020-01-13 | 2020-01-13 | Combined heater for czochralski silicon furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212223146U (en) |
-
2020
- 2020-01-13 CN CN202020065114.5U patent/CN212223146U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN212223146U (en) | Combined heater for czochralski silicon furnace | |
| CN107059112B (en) | Bottom heater of semiconductor grade silicon single crystal furnace | |
| CN105197919B (en) | Carbon granular materials high temperature continuous gas is purified and graphitization electrothermal furnace | |
| CN202902877U (en) | A ceramic inner cylinder hanging piece installation structure for a cement kiln preheater | |
| CN201165563Y (en) | Graphitic heater for polysilicon casting ingot technology | |
| CN110544753A (en) | Novel take liquid cooling module of compound piece of pipeline formula copper nickel | |
| CN210134185U (en) | Polycrystal ingot furnace heater | |
| CN205023860U (en) | Continuous gas purification of carbon element granular material high temperature and graphitization electric heater | |
| CN210974930U (en) | Inner barrel for single crystal thermal field | |
| CN205050908U (en) | Power supply's basic battery module | |
| CN208337915U (en) | A kind of graphite heater | |
| CN206799791U (en) | Semiconductor grade monocrystal stove primary heater | |
| CN210012924U (en) | Graphite backplate | |
| CN202380134U (en) | Graphite/carbon felt composite electrode for monocrystalline silicon growth furnace | |
| CN221235657U (en) | Large-scale vacuum furnace heater | |
| CN206388692U (en) | The silicon wafer carrier of high intensity | |
| CN215800051U (en) | Top cover structure of reaction chamber of silicon carbide epitaxial furnace | |
| CN219951297U (en) | Device for reducing oxygen content of single crystal bar | |
| CN210443900U (en) | Centralized electric energy quality optimization device | |
| CN218321742U (en) | Spliced heating device for thermal field of single crystal furnace | |
| CN212587648U (en) | Anti-loosening electric core group | |
| CN216039933U (en) | Split type graphite heater for thermal field of monocrystalline silicon CZ furnace | |
| CN209461190U (en) | A kind of coaxial water-cooled cable applied to single crystal casting furnace | |
| CN211896050U (en) | 72-pair rod reduction furnace | |
| CN221028772U (en) | Heating device for single crystal furnace and single crystal furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 710608 Factory Building 2, No. 2299 Qinwang Second Road, Weibei New City, Xi'an Economic and Technological Development Zone, Shaanxi Province Patentee after: Shaanxi Meilan New Materials Co.,Ltd. Address before: No.56 Qinling North Road, Lintong District, Xi'an City, Shaanxi Province Patentee before: SHAANXI MEILANDO CARBON CO.,LTD. |