CN211896050U - 72-pair rod reduction furnace - Google Patents
72-pair rod reduction furnace Download PDFInfo
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- CN211896050U CN211896050U CN201921906852.1U CN201921906852U CN211896050U CN 211896050 U CN211896050 U CN 211896050U CN 201921906852 U CN201921906852 U CN 201921906852U CN 211896050 U CN211896050 U CN 211896050U
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Abstract
The utility model discloses a 72-pair rod reduction furnace, wherein 72 pairs of electrode rods are arranged in the furnace body of the reduction furnace, and the electrode rods are distributed in the reduction furnace in a concentric circle structure; the electrode rod constitutes 6 circle layer concentric circles structures, is first electrode rod circle layer, second electrode rod circle layer, third electrode rod circle layer, fourth electrode rod circle layer, fifth electrode rod circle layer and sixth electrode rod circle layer in proper order, and the radius on each electrode rod circle layer sets up to R1: r2: r3: r4: r5: r6 ═ 1:2:3:5:7: 8.5. The arrangement positions of the electrode rods in the reduction furnace are distributed, so that the problem that the furnace is easily turned over due to overhigh temperature at the center of the furnace body in the traditional reduction furnace is solved. And the arrangement positions of the electrode rods are also favorable for gas to smoothly enter the upper area of the furnace body, so that the uniform gas intake of the furnace body is realized, and the generation efficiency of each electrode rod is improved.
Description
Technical Field
The utility model belongs to the technical field of polycrystalline silicon, especially, relate to a 72 to excellent reducing furnace of production polycrystalline silicon.
Background
Polysilicon has semiconductor properties, is an extremely important excellent semiconductor material, and is a basic material widely used in the electronic industry for manufacturing semiconductor radios, recorders, refrigerators, color tvs, video recorders, electronic computers, and the like. Is the main raw material for producing solar cells. The polycrystalline silicon can also be used for producing solar battery packs of different types to convert solar energy into electric energy. The product is widely used in the fields of aerospace, aviation, urban construction, traffic, communication and the like.
The end use of polycrystalline silicon is mainly in the production of integrated circuits, discrete devices and solar cells. At present, the mainstream solar cells are silicon solar cells, 88% of the solar cells are sheet-shaped silicon solar cells, and the initial raw materials of the sheet-shaped silicon solar cells, no matter single crystal silicon solar cells or polycrystalline silicon solar cells, are polycrystalline silicon, so that the association degree of the polycrystalline silicon industry with the downstream electronic information industry and solar photovoltaic industry is very high, and therefore, the downstream electronic information industry and solar cell industry are the main force for pulling the production of the polycrystalline silicon materials to be greatly increased. Solar energy is an important new energy source which is rich and pollution-free in renewable energy sources, and is a key support field of all countries.
At present, in the production process of polycrystalline silicon, the largest reduction furnace operated at home and abroad is 36 pairs of rods, and in the operation control process of the existing 36 pairs of rod reduction furnaces, the temperature of a silicon core at the position close to a tail gas hole is higher under the influence of a gas field in the furnace, so that the distribution of a heat field and the gas field in the furnace is unbalanced, the distribution of the heat field and the gas field is unbalanced, the normal operation of the reduction furnace is directly restricted, the atomization is caused, the environment in the reduction furnace becomes turbid, fine silicon powder is generated, and the furnace is easy to reverse. The generated silicon powder brings a lot of adverse effects to reduction furnace system equipment and downstream processes, and poses serious challenges to product quality.
Therefore, a reduction furnace with more reasonable distribution of gas field and temperature field is needed.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a: in order to overcome the problems in the prior art, a 72-pair rod reduction furnace is provided, and the problem that the production of the reduction furnace is influenced due to the fact that the temperature of partial regions is abnormal and the gas inlet is abnormal in the traditional generation process is solved by arranging the distribution structure of the electrode rods in the furnace.
The purpose of the utility model is realized through the following technical scheme:
a72-pair rod reduction furnace is characterized in that 72 pairs of electrode rods are arranged in a furnace body of the reduction furnace and are distributed in the reduction furnace in a concentric circle structure; the electrode rod constitutes 6 circle layer concentric circles structures, is first electrode rod circle layer, second electrode rod circle layer, third electrode rod circle layer, fourth electrode rod circle layer, fifth electrode rod circle layer and sixth electrode rod circle layer in proper order, and the radius on each electrode rod circle layer sets up to R1: r2: r3: r4: r5: r6 ═ 1:2:3:5:7: 8.5.
The arrangement positions of the electrode rods in the reduction furnace are distributed, so that the problem that the furnace is easily turned over due to overhigh temperature at the center of the furnace body in the traditional reduction furnace is solved. And the arrangement positions of the electrode rods are also favorable for gas to smoothly enter the upper area of the furnace body, so that the uniform gas intake of the furnace body is realized, and the generation efficiency of each electrode rod is improved.
According to a preferred embodiment, a first heat conducting space is arranged between the third electrode ring layer and the fourth electrode ring layer, and a second heat conducting space is arranged between the fourth electrode ring layer and the fifth electrode ring layer.
According to a preferred embodiment, the first electrode ring layer is provided with 3 pairs of electrode rods, the second electrode ring layer is provided with 6 pairs of electrode rods, the third electrode ring layer is provided with 9 pairs of electrode rods, the fourth electrode ring layer is provided with 15 pairs of electrode rods, the fifth electrode ring layer is provided with 18 pairs of electrode rods, and the sixth electrode ring layer is provided with 21 pairs of electrode rods.
According to a preferred embodiment, the electrode rods in each electrode ring layer are arranged at equal intervals.
According to a preferred embodiment, the reduction furnace is also provided with a number of gas inlet nozzles equal to the number of the electrode rods.
According to a preferred embodiment, the air inlet nozzle is arranged adjacent to each electrode rod and above the circle arc of the circle layer where the corresponding electrode rod is located.
The main scheme and the further selection schemes of the utility model can be freely combined to form a plurality of schemes, which are the schemes that can be adopted and claimed by the utility model; and the utility model discloses also can the independent assortment between (each non-conflict selection) selection and between other choices. The technical solutions to be protected by the present invention, which are various combinations that can be known to those skilled in the art based on the prior art and the common general knowledge after understanding the present invention, are not exhaustive herein.
The utility model has the advantages that: the arrangement positions of the electrode rods in the reduction furnace are distributed, so that the problem that the furnace is easily turned over due to overhigh temperature at the center of the furnace body in the traditional reduction furnace is solved. And the arrangement positions of the electrode rods are also favorable for gas to smoothly enter the upper area of the furnace body, so that the uniform gas intake of the furnace body is realized, and the generation efficiency of each electrode rod is improved.
Drawings
FIG. 1 is a view showing a layout of electrode bars in a reduction furnace according to the present invention;
wherein 101-electrode rod, 102-first heat conducting area, 103-second heat conducting area.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that, in order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Additionally, the utility model discloses it is pointed out that, in the utility model, if do not write out structure, connection relation, positional relationship, power source relation etc. that concretely relates to very much, then the utility model relates to a structure, connection relation, positional relationship, power source relation etc. are technical personnel in the field on prior art's basis, can not learn through creative work.
Example 1:
referring to fig. 1, there is shown a distribution structure of electrode rods 101 in a furnace body of a 72-pair rod reducing furnace. The reducing furnace is characterized in that 72 pairs of electrode rods 101 are arranged in a furnace body of the reducing furnace, and the electrode rods 101 are distributed in the reducing furnace in a concentric circle structure.
Preferably, the electrode rod 101 forms a 6-ring concentric circle structure, which includes a first electrode ring layer, a second electrode ring layer, a third electrode ring layer, a fourth electrode ring layer, a fifth electrode ring layer, and a sixth electrode ring layer in sequence, and the radius of each electrode ring layer is set to R1: r2: r3: r4: r5: r6 ═ 1:2:3:5:7: 8.5.
And a first heat conduction space is arranged between the third electrode ring layer and the fourth electrode ring layer, and a second heat conduction space is arranged between the fourth electrode ring layer and the fifth electrode ring layer. The first heat conduction space 102 and the second heat conduction space 103 are structurally arranged to facilitate heat conduction of the central region electrode rod 101, so that uniform distribution of a temperature field in the furnace body is achieved.
Preferably, the first electrode ring layer is provided with 3 pairs of electrode rods 101. The second electrode ring layer is provided with 6 pairs of electrode rods 101. The third electrode ring layer is provided with 9 pairs of electrode rods 101. The fourth electrode ring layer is provided with 15 pairs of electrode rods 101. The fifth electrode ring layer is provided with 18 pairs of electrode rods 101. The sixth electrode ring layer is provided with 21 pairs of electrode rods 101. Further, the electrode rods 101 in each electrode ring layer are arranged at equal intervals.
The arrangement positions of the electrode rods 101 in the reduction furnace are distributed, so that the problem that the furnace is easily turned over due to overhigh temperature at the center of the furnace body in the traditional reduction furnace is solved. And the arrangement positions of the electrode rods are also favorable for gas to smoothly enter the upper area of the furnace body, so that the uniform gas intake of the furnace body is realized, and the generation efficiency of each electrode rod is improved.
Preferably, the height of the electrode rod is 300mmm, and the section specification of the silicon core is 15mm by 15 mm.
Preferably, the reduction furnace is also internally provided with air inlet nozzles with the number equal to that of the electrode rods 101. Furthermore, the air inlet nozzles are adjacently arranged on the sides of the electrode rods 101 and are positioned on the circular arcs of the circle layers where the corresponding electrode rods are positioned. The number and the positions of the air inlet nozzles are set, so that uniform air inlet of the reduction furnace is facilitated, and the production efficiency of the furnace body is improved.
The aforesaid the utility model discloses basic embodiment and each further alternative can the independent assortment in order to form a plurality of embodiments, is the utility model discloses can adopt and claim the embodiment of protection. In the scheme of the utility model, each selection example can be combined with any other basic examples and selection examples at will.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (6)
1. A72-pair rod reduction furnace is characterized in that 72 pairs of electrode rods (101) are arranged in a furnace body of the reduction furnace, and the electrode rods (101) are distributed in the reduction furnace in a concentric circle structure;
electrode bar (101) constitute 6 circle layers of concentric circles structure, are first electrode rod circle layer, second electrode rod circle layer, third electrode rod circle layer, fourth electrode rod circle layer, fifth electrode rod circle layer and sixth electrode rod circle layer in proper order, and the radius of each electrode rod circle layer sets up to R1: r2: r3: r4: r5: r6 ═ 1:2:3:5:7: 8.5.
2. The 72-pair rod reducing furnace according to claim 1, wherein a first heat conducting space is provided between the third electrode ring layer and the fourth electrode ring layer, and a second heat conducting space is provided between the fourth electrode ring layer and the fifth electrode ring layer.
3. A 72 pair rod reducing furnace according to claim 1, wherein the first electrode ring layer is provided with 3 pairs of electrode rods (101), the second electrode ring layer is provided with 6 pairs of electrode rods (101), the third electrode ring layer is provided with 9 pairs of electrode rods (101), the fourth electrode ring layer is provided with 15 pairs of electrode rods (101), the fifth electrode ring layer is provided with 18 pairs of electrode rods (101), and the sixth electrode ring layer is provided with 21 pairs of electrode rods (101).
4. A 72 pair rod reducing furnace according to claim 3, wherein the electrode rods (101) in the electrode ring layers are arranged at equal intervals.
5. A 72 pair rod reducing furnace according to claim 1, wherein the number of the gas inlet nozzles is equal to the number of the electrode rods (101).
6. A72 pair rod reducing furnace according to claim 5, wherein the gas inlet nozzles are arranged adjacent to the side of each electrode rod (101) and above the circular arc of the circle on which the corresponding electrode rod (101) is located.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921906852.1U CN211896050U (en) | 2019-11-06 | 2019-11-06 | 72-pair rod reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921906852.1U CN211896050U (en) | 2019-11-06 | 2019-11-06 | 72-pair rod reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211896050U true CN211896050U (en) | 2020-11-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921906852.1U Active CN211896050U (en) | 2019-11-06 | 2019-11-06 | 72-pair rod reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211896050U (en) |
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2019
- 2019-11-06 CN CN201921906852.1U patent/CN211896050U/en active Active
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