CN212218161U

CN212218161U - Groove grinding disc

Info

Publication number: CN212218161U
Application number: CN201922157786.9U
Authority: CN
Inventors: 徐超群; 方从富; 彭正一; 赵再兴; 徐西鹏
Original assignee: Huaqiao University
Current assignee: Huaqiao University
Priority date: 2019-12-05
Filing date: 2019-12-05
Publication date: 2020-12-25
Anticipated expiration: 2029-12-05

Abstract

The utility model provides a groove grinding disc, wherein a groove is arranged on the grinding disc; the groove is formed by coupling a plurality of concentric circular grooves with gradually enlarged radiuses and a plurality of spiral line grooves arranged at equal intervals; the center of the spiral line is concentric with the center of the concentric circular groove; the grinding disc is divided into a first area, a second area and a third area from inside to outside along the radial direction; the distance between the concentric circular grooves of the first area and the third area is larger than that of the second area. By applying the technical scheme, the flowing performance of the grinding fluid in the grinding and polishing process can be improved, and the problem of grinding disc blockage and abrasion is obviously improved.

Description

Groove grinding disc

Technical Field

The utility model relates to a grinding and polishing technical field specifically indicates a groove abrasive disc.

Background

With the rapid development and wide application of semiconductor technology, the processing of semiconductor materials tends to be more and more precise. Grinding and polishing are an important processing method in precision and ultra-precision processing, and play a key role in the semiconductor manufacturing process due to the advantage of high processing precision.

In recent years, with the increasing size of wafer specifications and the increasing demand for surface quality, polishing and grinding techniques are faced with higher requirements and challenges. The traditional free abrasive particle grinding and polishing technology is not suitable for the problems of low processing efficiency, large environmental pollution, poor surface shape precision caused by random motion of free abrasive particles and the like. Therefore, the fixed abrasive grinding and polishing technology is produced, and the fixed abrasive processing technology has the advantages of high processing efficiency, controllable movement of the fixed abrasive, high processing surface shape precision, good process controllability, small environmental pollution and the like. In the grinding and polishing process, the problems of unsmooth chip removal, blockage, uneven temperature distribution and the like are easily caused by uneven flow field distribution. The clogged chips accumulate together and produce a deeper cut in the surface of the workpiece, resulting in a reduction in the surface roughness of the workpiece. The unsmooth flow of the grinding fluid can cause that heat generated by friction cannot be dissipated along with the grinding fluid, so that local temperature on the surface of a workpiece is too high, and the workpiece can be burned. In order to solve the problem of poor flow of the grinding fluid, it has been proposed to machine grooves in the grinding disc specifically for the flow of grinding fluid and debris. Therefore, scholars at home and abroad make a great deal of research on the grinding disc with the groove. Research shows that factors such as the shape and the pattern of the grooves have important influence on the flow rate and the distribution of the grinding fluid in a processing area, and the proper groove pattern is the most important way for improving the grinding disc. The traditional processing method is difficult to realize for processing the millstone with complex pattern groove type, the production efficiency is very low, and the requirement for a private customized millstone is not realistic.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a groove abrasive disc realizes improving the mobility of the lapping liquid among the grinding and polishing process, obviously improves the problem that the mill blockked up wearing and tearing.

In order to solve the technical problem, the utility model provides a groove grinding disc, which is provided with a groove; the groove is formed by coupling a plurality of concentric circular grooves with gradually enlarged radiuses and a plurality of spiral line grooves arranged at equal intervals; the center of the spiral line is concentric with the center of the concentric circular groove;

the grinding disc is divided into a first area, a second area and a third area from inside to outside along the radial direction; the distance between the concentric circular grooves of the first area and the third area is larger than that of the second area.

In a preferred embodiment, the spiral line grooves include a coarse spiral line groove and a fine spiral line groove; two thin spiral line grooves are equidistantly arranged between the two thick spiral line grooves.

In a preferred embodiment, the diameter of the surface of the grinding disc is 300 to 2000 mm.

In a preferred embodiment, the depth of the concentric grooves is 2 to 3 mm; the width of the concentric circular groove is 2-3 mm; the distance interval between the concentric circular grooves of the first area and the third area is 10-16 mm; the distance between the concentric grooves of the second area is 5-10 mm.

In a preferred embodiment, the number of the concentric grooves is 8 to 60.

In a preferred embodiment, the depth of the spiral groove is 2 to 3 mm; the width of the coarse spiral line groove is 3-5 mm; the width of the fine spiral line groove is 1 to 2 mm.

In a preferred embodiment, the number of the coarse spiral grooves is 20 to 40; the number of the fine spiral line grooves is 40 to 60.

In a preferred embodiment, the helix angle of the helical groove is 20 °; the spiral line is in the shape of an Archimedes spiral.

Compared with the prior art, the technical scheme of the utility model possess following beneficial effect:

the utility model provides a groove abrasive disc, the flow direction of the in-process grinding fluid of abrasive finishing is identical with the direction of helix slot, and the cell wall is little to the resistance that grinding fluid flows, is favorable to the chip removal ability, has improved the surface quality of work piece. The concentric circular grooves are closed, have strong holding capacity, can quickly fill the whole disc surface with grinding liquid, improve the grinding environment, shorten the time of a dry friction stage, and reduce the deformation, burning and surface quality reduction of workpieces caused by dry friction. The design of concentric circles slot and helix slot coupling combines to complain the advantage, the utility model discloses a complicated pattern slot abrasive disc contrast ordinary slot abrasive disc, workpiece surface roughness is lower, and the flatness is more excellent, and the result of processing is obviously better. Compared with the traditional machining, the method for preparing the complex pattern groove die by the lost foam method has the advantages that the complex pattern groove die is formed by one-time dissolving die, and is suitable for rapid forming of the complex pattern groove; compared with chemical processing, the surface quality can be well controlled. The preparation process is simple, the efficiency is high, the price is low, the precision of the groove of the produced millstone is high, and the method is suitable for the customized production of flexible single pieces. The method has the advantages that the grinding disc required by customers with different requirements is rapidly provided, the problem that the mold is difficult to take in the traditional mold removing process is solved, and the working efficiency can be greatly improved in special machining and scientific research. The flow property of the grinding fluid in the grinding and polishing process can be greatly improved, the problem of grinding disc blockage and abrasion is obviously solved, and compared with a workpiece processed by a common pattern groove grinding disc, the processed workpiece has better surface quality and has important significance for improving the precision and ultra-precision processing precision and processing efficiency of semiconductors.

Drawings

FIG. 1 is a schematic diagram showing the distribution of spiral grooves and concentric grooves on a groove grinding disc according to a preferred embodiment of the present invention;

fig. 2 is a schematic cross-sectional view of a groove grinding disk according to a preferred embodiment of the present invention.

Detailed Description

The invention is further described with reference to the drawings and the detailed description.

A groove grinding disc, referring to fig. 1 to 2, grooves are provided on the grinding disc; the groove is formed by coupling a plurality of concentric circular grooves 1 with gradually enlarged radiuses and a plurality of spiral grooves 2 arranged at equal intervals; the center of the spiral line groove 2 is concentric with the center of the concentric circle groove 1; the grinding disc is divided into a first area 3, a second area 4 and a third area 5 from inside to outside along the radial direction; the distance between the concentric grooves 1 of the first region 3 and the third region 5 is greater than the distance between the concentric grooves 1 of the second region 4. The diameter of the disc surface of the grinding disc is 300-2000 mm. The section groove type of the concentric groove 1 and the spiral groove 2 is rectangular, or can be pentagonal, hexagonal, circular, semicircular or the combination of the above patterns. In this embodiment, the helix angle of the helical groove is 20 °; the spiral line is in the shape of an Archimedes spiral. Specifically, the depth of the concentric circular groove 1 is 2 to 3 mm; the width of the concentric circular groove 1 is 2-3 mm; the distance between the concentric circular grooves 1 of the first area 3 and the third area 5 is 10-16 mm; the distance between the concentric grooves 1 of the second region 4 is 5 to 10 mm. The number of the concentric grooves 1 is 8 to 60.

The spiral line grooves 2 comprise thick spiral line grooves 21 and thin spiral line grooves 22; two fine spiral line grooves 22 are equidistantly arranged between the two coarse spiral line grooves 21. The depth of the spiral line groove 2 is 2-3 mm; the width of the coarse spiral line groove 21 is 3-5 mm; the fine spiral line groove 22 has a width of 1 to 2 mm. The number of the coarse spiral grooves 21 is 20 to 40; the number of the fine spiral line grooves 22 is 40 to 60.

The following describes a method for manufacturing a groove grinding disc, comprising the following steps:

step 1: establishing a grinding tool model by using SolidWorks;

step 2: preparing a soluble mold by adopting a 3D printing additive manufacturing technology; in the embodiment, 3D printing is performed, and the selected material is a water-soluble PVA material;

and step 3: processing a metal matrix disc by adopting a conventional milling process;

and 4, step 4: preparing a mixed material of a supporting layer, wherein the mixed material comprises the following components: 63-70% of 3301# resin and the balance of 306# resin, mixing, adding a curing agent, wherein the curing agent is methyl tetrahydrophthalic anhydride, and the mixed resin and the methyl tetrahydrophthalic anhydride are prepared and uniformly stirred according to the volume ratio of 1: 1; bubbles mixed in the grinding disc during stirring are removed by proper heating, so that the defect that the strength of the grinding disc is reduced due to the fact that a cavity is formed in the grinding disc after solidification is avoided;

and 5: and pasting a layer of oil-proof paper around the base disc or fixing an annular check ring to form a sealed cavity, so that the resin cannot seep out, the height of the oil-proof paper is more than 5mm, and a height mark is made on the oil-proof paper. Uniformly spreading the prepared mixed material of the supporting and curing layer on a metal substrate disc, scraping the metal substrate disc by using a scraper to ensure that the height of the mixed material of the supporting layer is between 2 and 3mm, and then flatly placing the substrate disc under an ultraviolet lamp environment for curing to form the supporting layer;

step 6: preparing a mixed material of a working layer, wherein the main components are a supporting layer mixed material and a micro powder grinding material, and the additive is fumed silica and a dispersing agent, wherein the mass fraction ratio of the supporting layer mixed material to the micro powder grinding material is 3: 1 to 9: 1, adding fumed silica and a dispersing agent respectively according to 0.5-1% of the mass of the main components, stirring for more than 10min until the mixture is uniform, and properly heating to remove bubbles mixed in the mixture during stirring;

and 7: uniformly and flatly paving the mixed material of the working layer on the supporting and curing layer, scraping the mixed material by using a scraper to ensure that the mixed material height of the working layer is between 1.5 and 2mm, flatly placing the groove die into the paved mixed material, raising the mixed material height to about 2.5mm, flatly placing the basal body disc into an ultraviolet environment, and irradiating for 2 to 3 hours for curing;

and 8: after solidification, taking off the oil-proof paper or the check ring on the substrate disc, putting the grinding disc into water for soaking, wherein the PVA material has good water solubility, and directly washing off impurities on the surface of the grinding disc by water after the mould is dissolved;

and step 9: and (4) oppositely grinding by using a grinding disc, and finishing the processing surface of the grinding disc to prepare the grinding disc tool with the grooves with complex patterns.

The above, only be the preferred embodiment of the present invention, but the design concept of the present invention is not limited to this, and any skilled person familiar with the technical field is in the technical scope disclosed in the present invention, and it is right to utilize this concept to perform insubstantial changes to the present invention, all belong to the act of infringing the protection scope of the present invention.

Claims

1. A groove grinding disc is characterized in that a groove is formed in the grinding disc; the groove is formed by coupling a plurality of concentric circular grooves with gradually enlarged radiuses and a plurality of spiral line grooves arranged at equal intervals; the center of the spiral line is concentric with the center of the concentric circular groove;

2. The groove grinding disc of claim 1, wherein the helical grooves comprise coarse helical grooves and fine helical grooves; two thin spiral line grooves are equidistantly arranged between the two thick spiral line grooves.

3. The groove grinding disc of claim 1 wherein the disc face diameter of the disc is 300 to 2000 mm.

4. The groove grinding disc of claim 1, wherein the depth of the concentric grooves is 2 to 3 mm; the width of the concentric circular groove is 2-3 mm; the distance interval between the concentric circular grooves of the first area and the third area is 10-16 mm; the distance between the concentric grooves of the second area is 5-10 mm.

5. The groove grinding disc of claim 4, wherein the number of the concentric grooves is 8 to 60.

6. The groove grinding disc of claim 2, wherein the depth of the spiral grooves is 2 to 3 mm; the width of the coarse spiral line groove is 3-5 mm; the width of the fine spiral line groove is 1 to 2 mm.

7. The groove grinding disc of claim 6, wherein the number of the coarse spiral grooves is 20 to 40; the number of the fine spiral line grooves is 40 to 60.

8. The groove grinding disc of claim 7 wherein the helix angle of the helical groove is 20 °; the spiral line is in the shape of an Archimedes spiral.