CN212216493U - Pipeline structure of semiconductor processing pipeline cleaning device - Google Patents

Pipeline structure of semiconductor processing pipeline cleaning device Download PDF

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Publication number
CN212216493U
CN212216493U CN202020062419.0U CN202020062419U CN212216493U CN 212216493 U CN212216493 U CN 212216493U CN 202020062419 U CN202020062419 U CN 202020062419U CN 212216493 U CN212216493 U CN 212216493U
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pipeline
water
water pumping
water tank
pumping pipeline
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CN202020062419.0U
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Chinese (zh)
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王迎来
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Jiangsu Huhu Electromechanical Technology Co.,Ltd.
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Wuxi Huhu Electromechanical Technology Co ltd
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Abstract

The utility model relates to a pipeline structure of a pipeline cleaning device for semiconductor processing procedures, which comprises a water tank and at least three pipelines communicated with the water tank, wherein the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with a cleaned pipeline and a second branch connected with a waste liquid drainage pipe; the water pumping pipeline is provided with a gas chamber connected with an external gas source through a gas inlet electromagnetic valve, and a heater is further arranged in the water tank. Through being linked together basin and at least three pipeline to divide into the pipeline that draws water with the first branch road of being washd the pipe connection and with the second branch road of waste liquid drain pipe connection, thereby guarantee the requirement of wasing, ventilating.

Description

Pipeline structure of semiconductor processing pipeline cleaning device
Technical Field
The utility model belongs to pipeline cleaning equipment field particularly, is a semiconductor processing procedure pipeline belt cleaning device pipeline structure.
Background
With the rapid development of the electromechanical industry, the total amount of various electromechanical products is increased dramatically. Meanwhile, various pipelines including oil pipelines, exhaust pipelines and the like are arranged in the electromechanical products, and after the electromechanical products are used for a long time, oil dirt and dirt accumulation can be generated on the pipeline wall. Therefore, the pipelines in the electromechanical equipment must be regularly maintained, detected and cleaned, otherwise, a large amount of dirt is accumulated, and under a certain condition, the equipment is easy to stop running and short circuit to cause safety accidents. The requirements of semiconductor process pipelines are more stringent. The existing pipeline cleaning device for the semiconductor processing pipeline has a simple structure and is difficult to meet the requirement of cleaning the semiconductor processing pipeline.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model aims to provide a pipeline structure of a semiconductor processing procedure pipeline cleaning device.
In order to achieve the above object, the present invention provides a pipeline structure of a semiconductor process pipeline cleaning device, which comprises a water tank and at least three pipelines communicated with the water tank, wherein the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with a cleaned pipeline and a second branch connected with a waste liquid drainage pipe; the water pumping pipeline is provided with a gas chamber connected with an external gas source through a gas inlet electromagnetic valve, and a heater is further arranged in the water tank.
Optimally, basin and six pipeline intercommunications, including liquid medicine supplementary pipeline, pure water supplementary pipeline, return water pipeline, exhaust pipe way, first water pumping pipeline and second water pumping pipeline, first water pumping pipeline is connected with the subassembly that draws water, second water pumping pipeline and waste liquid drain pipe connection, be provided with the waste water pipeline solenoid valve of its break-make of control on the second water pumping pipeline.
Further, the water pumping assembly comprises a water pumping motor connected with the first branch of the water pumping pipeline, a blower for controlling the pressure change in the water pumping pipeline and a circulating pump.
Optimally, the water tank is a PP water tank.
Due to the adoption of the technical scheme, the utility model discloses following beneficial effect is reached: the utility model discloses semiconductor processing procedure pipeline belt cleaning device pipeline structure is through being linked together basin and at least three pipeline to divide into the drinking-water pipeline and the first branch road of being washd the tube coupling and the second branch road of being connected with waste liquid drain pipe, thereby guarantee the requirement of wasing, ventilating.
Drawings
Fig. 1 is a top view of the present invention;
fig. 2 is a left side view of the present invention;
fig. 3 is a right side view of the present invention.
The designations in the figures illustrate the following:
1-a first cart handle; 2-a second cart handle; 3-dragging type blocking net; 4-PP sink; 5-a load wheel; 6-a pure water supplement port; 7-pH value detector; 8-a liquid level sensor; 9-a leak-proof tray; 10-a waste liquid discharge port; 11-a water pumping motor; 12-a blower; 14-touch screen; 15-water outlet; 16-liquid medicine replenishing port; 17-a water outlet; 18-a water return port; 19-EMO emergency stop button; 20-CDA/N2 interface; 21-a water return electromagnetic valve; 22-a water pumping electromagnetic valve; 23-a waste water line solenoid valve; 24-blower outlet valve.
Detailed Description
The invention will be further described with reference to examples of embodiments shown in the drawings.
Referring to fig. 1 to 3, the pipeline structure of the semiconductor process pipeline cleaning device of the present application includes a water tank and at least three pipelines communicated with the water tank, where the at least three pipelines include a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is divided into a first branch connected with a cleaned pipeline and a second branch connected with a waste liquid drain pipe; the water pumping pipeline is provided with a gas chamber connected with an external gas source through a gas inlet electromagnetic valve, and a heater is further arranged in the water tank.
In this embodiment, the PP water tank 4 is communicated with six pipelines, the PP water tank 4 is an acid and alkali resistant water tank, and the inside of the PP water tank is provided with a heater capable of heating water and liquid medicine, and includes a liquid medicine supplementing pipeline, a pure water supplementing pipeline, a water return pipeline, an exhaust pipeline, a first water pumping pipeline and a second water pumping pipeline, the liquid medicine supplementing pipeline is provided with a liquid medicine supplementing port 16, the pure water supplementing pipeline is provided with a pure water supplementing port 6, the water return pipeline is provided with a water return port 18, water or liquid medicine returns to the PP water tank 4 after being circulated in the pipeline, the first water pumping pipeline is connected with the water pumping assembly, the second water pumping pipeline is connected with the waste liquid drainage pipe, the waste liquid drainage pipe is provided with a waste liquid outlet 10, and the second water pumping pipeline is provided with a waste water pipeline electromagnetic. In the present embodiment, the pumping assembly (provided in the housing) includes a pumping motor 11 connected to a first branch of the pumping line, a blower 12 controlling a pressure variation inside the pumping line, and a circulation pump.
The pipeline structure of the semiconductor process pipeline cleaning device is a partial structure of the semiconductor process pipeline cleaning device. The semiconductor process pipeline cleaning device comprises:
a frame;
the water tank is arranged in the rack and is communicated with at least three pipelines, the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with the cleaned pipeline and a second branch connected with a waste liquid drainage pipe;
the water pumping pipeline is provided with a gas chamber which is connected with an external gas source through a gas inlet electromagnetic valve (namely the gas chamber is connected with the external gas source through the gas inlet electromagnetic valve);
the water pumping assembly is arranged in the rack and comprises a water pumping motor 11 connected with a first branch of the water pumping pipeline, a blower 12 for controlling the pressure change in the water pumping pipeline and a circulating pump;
and the adjusting assembly comprises a water pumping solenoid valve 22 for controlling the water pumping motor 11, a blower outlet valve 24 for controlling the blower 12 and a water return solenoid valve 21 for controlling the conduction of a water return pipeline.
In this embodiment, the PP water tank 4 is communicated with six pipelines, the PP water tank 4 is an acid and alkali resistant water tank, and the inside of the PP water tank is provided with a heater capable of heating water and liquid medicine, and includes a liquid medicine supplementing pipeline, a pure water supplementing pipeline, a water return pipeline, an exhaust pipeline, a first water pumping pipeline and a second water pumping pipeline, the liquid medicine supplementing pipeline is provided with a liquid medicine supplementing port 16, the pure water supplementing pipeline is provided with a pure water supplementing port 6, the water return pipeline is provided with a water return port 18, water or liquid medicine returns to the PP water tank 4 after being circulated in the pipeline, the first water pumping pipeline is connected with the water pumping assembly, the second water pumping pipeline is connected with the waste liquid drainage pipe, the waste liquid drainage pipe is provided with a waste liquid outlet 10, and the second water pumping pipeline is provided with a waste water pipeline electromagnetic. CDA/N can be arranged at the end part of each pumping pipeline2 External interface 20, so that CDA/N2The external interface and the blower are communicated with the water pumping pipeline, so that when the water pumping device works, an external air source can be used, and the internal air source can be used for ensuring the air pressure in the pipe.
In order to improve the automation degree of the semiconductor process pipeline cleaning device and enable the semiconductor process pipeline cleaning device to automatically operate, the existing control system can be additionally arranged. The control system comprises a man-machine interaction system, the man-machine interaction system comprises a control panel (arranged in the electric cabinet), a touch screen 14 (the touch screen 14 is connected with the control panel), the adjusting assembly and an alarm device, the adjusting assembly comprises a pressure sensor for detecting the air pressure of the pumping pipeline, a liquid level sensor 8 for detecting the water level in the water tank and a water temperature sensor; the adjusting assembly and the alarm device are electrically connected with a control panel of the man-machine interaction system.
In this embodiment, the alarm device is a buzzer.
The utility model discloses still including detecting the pH value detector 7 and the EMO emergency stop button 19 that stops equipment moving of liquid pH value in the PP basin 4, pH value detector 7 with EMO emergency stop button 19 all with the control panel electricity is connected.
The PP basin 4, the control assembly with the subassembly that draws water all sets up in the frame, the frame is provided with first shallow handle 1 and second shallow handle 2 and load wheel 5 (the frame bottom is provided with load wheel 5 and its side is provided with the shallow handle, first shallow handle 1 and second shallow handle 2 setting are in the side of frame promptly). The bottom of the frame is provided with a leakage-proof tray 9 for placing the leakage of the cleaning liquid.
The PP water tank 4 is internally provided with a dragging type filtering device which can be taken out in a sliding mode, a dragging type blocking net 3 is adopted in the embodiment, the dragging type blocking net 3 is arranged below a pipe orifice of the water return pipeline, wherein the pipe orifice is located in the PP water tank 4, and the dragging type blocking net 3 is used for intercepting undissolved blocky or particle solid impurities.
The control panel is a commercially available PLC control panel (such as Siemens 1200 series PLC controllers).
The control method of the pipeline cleaning machine adopts an external air source and comprises the following steps:
step 1, starting up, detecting whether a water outlet pipe and a water return pipe are connected completely and whether the PP water tank 4 is filled with water, if the detection meets the requirement, executing step 2, otherwise, sending a prompt, and repeatedly executing the detection;
step 2, preheating the PP water tank 4, detecting whether the temperature reaches a preset value after 1 minute, stopping heating and executing step 3 if the temperature reaches the preset value, and giving an alarm if the temperature does not reach the preset value and repeatedly executing step 2;
step 3, performing pressure maintaining test, starting an external air source, and starting an electromagnetic valve for air intake;
step 4, detecting whether a preset value is reached after air intake for 5 minutes, if not, giving an alarm and repeatedly executing the step 3, and if so, stopping air intake and executing the step 5;
step 5, detecting whether sealing conditions are met, whether the water return electromagnetic valve 21 is opened or not and whether the blower outlet valve 24 is closed or not, if any of the conditions is not met, sending an alarm prompt and repeatedly executing the step 5, otherwise, executing the step 6;
step 6, starting a circulating pump;
7, detecting whether the pressure of the PP water tank 4 exceeds the standard, if so, sending an alarm prompt and repeatedly executing the step 6, and if not, executing the step 8
And 8, performing operation check, detecting whether the cleaning time reaches a set value, if so, closing the circulating pump and all valves and prompting, and if not, returning to execute the step 7.
Further, the running check includes the steps of:
step 1, detecting whether the water temperature is too low, if so, giving an alarm for prompting, and otherwise, executing step 2;
and 2, detecting whether the water level is too low, if so, giving an alarm for prompting, and otherwise, executing the next step.
The utility model also discloses another kind of control method of above-mentioned pipeline cleaning machine, including following step:
step 1, starting up, detecting whether a water outlet pipe and a water return pipe are connected completely and whether a PP water tank 4 is filled with water, executing step 2 if the detection meets the requirement, otherwise, sending a prompt, and repeatedly executing the detection;
step 2, preheating the PP water tank, detecting whether the temperature reaches a preset value after 1 minute, stopping heating and executing step 3 if the temperature reaches the preset value, and giving an alarm if the temperature does not reach the preset value and repeatedly executing step 2;
step 3, performing pressure maintaining test, starting an internal air source, opening an outlet valve 24 of the blower, and closing a water return electromagnetic valve 21;
step 4, detecting whether the blower outlet valve 24 is opened in place or not and whether the water return electromagnetic valve 21 is closed or not, if any one of the conditions is not met, giving an alarm to prompt, and repeatedly executing the step 4, otherwise, executing the step 5;
step 5, starting the air blower 12, performing pressure maintaining test, judging whether the pressure value of the pressure sensor reaches a preset value every 30 seconds after the air blower is started, if not, giving an alarm to prompt and repeating the step 5, otherwise, executing the step 6;
step 6, stopping the blower 12, waiting for two minutes to judge whether the sealing is qualified, if not, executing the step 3, otherwise, executing the step 7;
step 7, detecting whether the blower outlet valve 24 is closed or not and whether the water return electromagnetic valve 21 is opened or not, if any one of the conditions is not met, giving an alarm to prompt and repeating the step 7, otherwise, executing the step 8;
step 8, starting a circulating pump;
step 9, detecting whether the pressure of the PP water tank 4 exceeds the standard, if so, sending an alarm prompt and repeatedly executing the step 8, and if not, executing the step 10;
and 10, performing operation check, detecting whether the cleaning time reaches a set value, if so, closing the circulating pump and all valves and prompting, and if not, returning to execute the step 9.
The operation check comprises the following steps:
step 1, detecting whether the water temperature is too low, if so, giving an alarm for prompting, and otherwise, executing step 2;
and 2, detecting whether the water level is too low, if so, giving an alarm for prompting, and otherwise, executing the next step.
The preset values mentioned above can be preset after starting up or preset default values in advance by manufacturers.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable people skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims (4)

1. The utility model provides a semiconductor processing procedure pipeline belt cleaning device pipeline structure, it includes the basin and with at least three pipeline of basin intercommunication, its characterized in that: the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with the cleaned pipeline and a second branch connected with a waste liquid drainage pipe; the water pumping pipeline is provided with a gas chamber connected with an external gas source through a gas inlet electromagnetic valve, and a heater is further arranged in the water tank.
2. The semiconductor process line cleaning apparatus line structure of claim 1, wherein: the basin communicates with six pipelines, including liquid medicine supplementary pipeline, pure water supplementary pipeline, return water pipeline, exhaust pipe way, first water pumping pipeline and second water pumping pipeline, first water pumping pipeline is connected with the subassembly that draws water, second water pumping pipeline and waste liquid drain pipe connection, the waste water pipeline solenoid valve of its break-make of control is provided with on the second water pumping pipeline.
3. The semiconductor process line cleaning apparatus line structure of claim 2, wherein: the water pumping assembly comprises a water pumping motor connected with a first branch of the water pumping pipeline, a blower for controlling the pressure change in the water pumping pipeline and a circulating pump.
4. The semiconductor process line cleaning apparatus line structure of claim 1, wherein: the water tank is a PP water tank.
CN202020062419.0U 2020-01-13 2020-01-13 Pipeline structure of semiconductor processing pipeline cleaning device Active CN212216493U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020062419.0U CN212216493U (en) 2020-01-13 2020-01-13 Pipeline structure of semiconductor processing pipeline cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020062419.0U CN212216493U (en) 2020-01-13 2020-01-13 Pipeline structure of semiconductor processing pipeline cleaning device

Publications (1)

Publication Number Publication Date
CN212216493U true CN212216493U (en) 2020-12-25

Family

ID=73913533

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020062419.0U Active CN212216493U (en) 2020-01-13 2020-01-13 Pipeline structure of semiconductor processing pipeline cleaning device

Country Status (1)

Country Link
CN (1) CN212216493U (en)

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Address after: 214000 3-1208, Tian'an smart city, 228 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province

Patentee after: Jiangsu Huhu Electromechanical Technology Co.,Ltd.

Address before: 214000 10-1314, Shenzhen Hong Kong Metropolis Plaza, Xinwu District, Wuxi City, Jiangsu Province

Patentee before: Wuxi Huhu Electromechanical Technology Co.,Ltd.