CN212216485U - Liquid containing structure for mobile semiconductor processing pipeline cleaning device - Google Patents

Liquid containing structure for mobile semiconductor processing pipeline cleaning device Download PDF

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Publication number
CN212216485U
CN212216485U CN202020063477.5U CN202020063477U CN212216485U CN 212216485 U CN212216485 U CN 212216485U CN 202020063477 U CN202020063477 U CN 202020063477U CN 212216485 U CN212216485 U CN 212216485U
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pipeline
water
water pumping
rack
water tank
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CN202020063477.5U
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Chinese (zh)
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王迎来
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Jiangsu Huhu Electromechanical Technology Co.,Ltd.
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Wuxi Huhu Electromechanical Technology Co ltd
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Abstract

The utility model relates to a portable semiconductor processing procedure pipeline belt cleaning device is with flourishing liquid structure, include: the trolley comprises a rack, wherein the bottom of the rack is provided with a load wheel, and the side surface of the rack is provided with a trolley handle; the water tank is arranged in the rack, is communicated with at least three pipelines and is internally provided with a heater, the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with a cleaned pipeline and a second branch connected with a waste liquid drainage pipe; the water pumping pipeline is provided with a gas chamber which is connected with an external gas source through a gas inlet electromagnetic valve; the water tank is a PP water tank; a water pumping assembly. Therefore, on one hand, the corrosion-resistant effect is achieved, and the structure is convenient to match with other structures.

Description

Liquid containing structure for mobile semiconductor processing pipeline cleaning device
Technical Field
The utility model belongs to pipeline cleaning equipment field particularly, is a portable semiconductor processing procedure pipeline belt cleaning device is with flourishing liquid structure.
Background
At present, electromechanical pipeline cleaning services which can be provided in the market mostly adopt a method of manually holding a high-pressure water gun and putting the water gun into a pipe for cleaning. However, many delicate electromechanical components are susceptible to damage due to operator error. At the same time, this control method is greatly limited by the size of the pipeline. In recent years, manual pipeline cleaning equipment is also available on the market. However, the constant air pressure in the pipe is often ensured by relying on an external air source, and some merchants adopt the internal air source of the equipment to pump water and circulate, etc. It is therefore desirable to design a line cleaner that is safe to operate, efficient in cleaning, and capable of using both internal and external air sources. The liquid containing structure is a basic component of the pipeline cleaning machine, and is used for containing cleaning liquid and needs to have certain corrosion resistance.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model aims to provide a liquid containing structure for a movable type semiconductor processing procedure pipeline cleaning device.
In order to achieve the above object, the present invention provides a liquid containing structure for a mobile semiconductor process pipeline cleaning device, including:
the trolley comprises a rack, wherein the bottom of the rack is provided with a load wheel, and the side surface of the rack is provided with a trolley handle;
the water tank is arranged in the rack, is communicated with at least three pipelines and is internally provided with a heater, the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with a cleaned pipeline and a second branch connected with a waste liquid drainage pipe; the water pumping pipeline is provided with a gas chamber which is connected with an external gas source through a gas inlet electromagnetic valve; the water tank is a PP water tank;
the water pumping assembly is arranged in the rack and comprises a water pumping motor, an air blower and a circulating pump, wherein the water pumping motor is connected with a first branch of the water pumping pipeline, and the air blower and the circulating pump are used for controlling the pressure change in the water pumping pipeline.
Preferably, a dragging type filtering device which can be taken out in a sliding mode is arranged in the water tank, and the dragging type filtering device is arranged below a pipe orifice of the water return pipeline, wherein the pipe orifice of the water return pipeline is located in the water tank.
Preferably, the dragging type filtering device is a dragging type block net.
Optimally, basin and six pipeline intercommunications, including liquid medicine supplementary pipeline, pure water supplementary pipeline, return water pipeline, exhaust pipe way, first water pumping pipeline and second water pumping pipeline, first water pumping pipeline with the subassembly of drawing water is connected, the second water pumping pipeline with waste liquid drain pipe connects, be provided with the waste water pipeline solenoid valve of its break-make of control on the second water pumping pipeline.
Due to the adoption of the technical scheme, the utility model discloses following beneficial effect is reached: the utility model discloses portable semiconductor processing procedure pipeline belt cleaning device is with flourishing liquid structure, the adoption in the frame installation PP basin and with the pipeline of particular structure with the subassembly structure that draws water is connected, play certain corrosion-resistant effect on the one hand like this, be convenient for cooperate with other structures moreover to both can use outside air supply and can adopt inside air supply to guarantee intraductal atmospheric pressure.
Drawings
Fig. 1 is a top view of the present invention;
fig. 2 is a left side view of the present invention;
fig. 3 is a right side view of the present invention.
The designations in the figures illustrate the following:
1-a first cart handle; 2-a second cart handle; 3-dragging type blocking net; 4-PP sink; 5-a load wheel; 6-a pure water supplement port; 7-pH value detector; 8-a liquid level sensor; 9-a leak-proof tray; 10-a waste liquid discharge port; 11-a water pumping motor; 12-a blower; 14-touch screen; 15-water outlet; 16-liquid medicine replenishing port; 17-a water outlet; 18-a water return port; 19-EMO emergency stop button; 20-CDA/N2 interface; 21-a water return electromagnetic valve; 22-a water pumping electromagnetic valve; 23-a waste water line solenoid valve; 24-blower outlet valve.
Detailed Description
The invention will be further described with reference to examples of embodiments shown in the drawings.
Referring to fig. 1 to 3, the liquid containing structure for a semiconductor process line cleaning apparatus includes:
the trolley comprises a rack, wherein the bottom of the rack is provided with a load wheel 5, and the side surface of the rack is provided with a trolley handle (the trolley handle comprises a first trolley handle 1 and a second trolley handle 2, and the first trolley handle 1 is arranged above the second trolley handle 2);
the water tank is arranged in the rack, is communicated with at least three pipelines, and is internally provided with a heater, the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with a cleaned pipeline and a second branch connected with a waste liquid drainage pipe; the water pumping pipeline is provided with a gas chamber which is connected with an external gas source through a gas inlet electromagnetic valve; the water tank is a PP water tank;
the water pumping assembly is arranged in the rack and comprises a water pumping motor 11 connected with a first branch of the water pumping pipeline, a blower 12 for controlling the pressure change in the water pumping pipeline and a circulating pump.
In this embodiment, a pull-type filtering device that can be taken out in a sliding manner is disposed in the water tank 4 (a sliding groove may be disposed in the water tank 4, and the pull-type filtering device is disposed in the sliding groove), and the pull-type filtering device is disposed below a pipe orifice of the water return pipe in the water tank 4. In particular, the trailed filtration device is a trailed barrier net 3. Basin and six pipeline intercommunications, including liquid medicine supplementary pipeline, pure water supplementary pipeline, return water pipeline, exhaust pipeline, first water pumping pipeline and second water pumping pipeline, first water pumping pipeline with the subassembly of drawing water is connected, second water pumping pipeline with waste liquid drain pipe connects, be provided with the waste water pipeline solenoid valve 23 of its break-make of control on the second water pumping pipeline
The liquid containing structure for the semiconductor process pipeline cleaning device is applied as a part of the semiconductor process pipeline cleaning device. The semiconductor process pipeline cleaning device comprises:
a frame;
the water tank is arranged in the rack and is communicated with at least three pipelines, the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with the cleaned pipeline and a second branch connected with a waste liquid drainage pipe;
the water pumping pipeline is provided with a gas chamber which is connected with an external gas source through a gas inlet electromagnetic valve;
the water pumping assembly is arranged in the rack and comprises a water pumping motor 11 connected with a first branch of the water pumping pipeline, a blower 12 for controlling the pressure change in the water pumping pipeline and a circulating pump;
and the adjusting assembly comprises a water pumping solenoid valve 22 for controlling the water pumping motor 11, a blower outlet valve 24 for controlling the blower 12 and a water return solenoid valve 21 for controlling the conduction of a water return pipeline.
In this embodiment, the PP water tank 4 is communicated with six pipelines, the PP water tank 4 is an acid and alkali resistant water tank, and the inside of the PP water tank is provided with a heater capable of heating water and liquid medicine, and includes a liquid medicine supplementing pipeline, a pure water supplementing pipeline, a water return pipeline, an exhaust pipeline, a first water pumping pipeline and a second water pumping pipeline, the liquid medicine supplementing pipeline is provided with a liquid medicine supplementing port 16, the pure water supplementing pipeline is provided with a pure water supplementing port 6, the water return pipeline is provided with a water return port 18, water or liquid medicine returns to the PP water tank 4 after being circulated in the pipeline, the first water pumping pipeline is connected with the water pumping assembly, the second water pumping pipeline is connected with the waste liquid drainage pipe, the waste liquid drainage pipe is provided with a waste liquid outlet 10, and the second water pumping pipeline is provided with a waste water pipeline electromagnetic. CDA/N can be arranged at the end part of each pumping pipeline2 External interface 20, so that CDA/N2The external interface and the blower are communicated with the water pumping pipeline, so that when the water pumping device works, an external air source can be used, and the internal air source can be used for ensuring the air pressure in the pipe.
In order to improve the automation degree of the semiconductor process pipeline cleaning device and enable the semiconductor process pipeline cleaning device to automatically operate, the existing control system can be additionally arranged. The control system comprises a man-machine interaction system, the man-machine interaction system comprises a control panel (arranged in the electric cabinet), a touch screen 14 (the touch screen 14 is connected with the control panel), the adjusting assembly and an alarm device, the adjusting assembly comprises a pressure sensor for detecting the air pressure of the pumping pipeline, a liquid level sensor 8 for detecting the water level in the water tank and a water temperature sensor; the adjusting assembly and the alarm device are electrically connected with a control panel of the man-machine interaction system.
In this embodiment, the alarm device is a buzzer.
The invention also comprises an acid-base value detector 7 for detecting the acid-base value of the liquid in the PP water tank 4 and an EMO emergency stop button 19 for stopping the operation of equipment, wherein the acid-base value detector 7 and the EMO emergency stop button 19 are both electrically connected with the control board.
The PP water tank 4, the control assembly and the water pumping assembly are all arranged in a rack, and the rack is provided with a first cart handle 1, a second cart handle 2 and a loading wheel 5. The bottom of the frame is provided with a leakage-proof tray 9 for placing the leakage of the cleaning liquid.
The PP water tank 4 is internally provided with a dragging type filtering device which can be taken out in a sliding mode, a dragging type blocking net 3 is adopted in the embodiment, the dragging type blocking net 3 is arranged below a pipe orifice of the water return pipeline, wherein the pipe orifice is located in the PP water tank 4, and the dragging type blocking net 3 is used for intercepting undissolved blocky or particle solid impurities.
The control panel is a commercially available PLC control panel (such as Siemens 1200 series PLC controllers).
The control method of the pipeline cleaning machine adopts an external air source and comprises the following steps:
step 1, starting up, detecting whether a water outlet pipe and a water return pipe are connected completely and whether the PP water tank 4 is filled with water, if the detection meets the requirement, executing step 2, otherwise, sending a prompt, and repeatedly executing the detection;
step 2, preheating the PP water tank 4, detecting whether the temperature reaches a preset value after 1 minute, stopping heating and executing step 3 if the temperature reaches the preset value, and giving an alarm if the temperature does not reach the preset value and repeatedly executing step 2;
step 3, performing pressure maintaining test, starting an external air source, and starting an electromagnetic valve for air intake;
step 4, detecting whether a preset value is reached after air intake for 5 minutes, if not, giving an alarm and repeatedly executing the step 3, and if so, stopping air intake and executing the step 5;
step 5, detecting whether sealing conditions are met, whether the water return electromagnetic valve 21 is opened or not and whether the blower outlet valve 24 is closed or not, if any of the conditions is not met, sending an alarm prompt and repeatedly executing the step 5, otherwise, executing the step 6;
step 6, starting a circulating pump;
7, detecting whether the pressure of the PP water tank 4 exceeds the standard, if so, sending an alarm prompt and repeatedly executing the step 6, and if not, executing the step 8
And 8, performing operation check, detecting whether the cleaning time reaches a set value, if so, closing the circulating pump and all valves and prompting, and if not, returning to execute the step 7.
Further, the running check includes the steps of:
step 1, detecting whether the water temperature is too low, if so, giving an alarm for prompting, and otherwise, executing step 2;
and 2, detecting whether the water level is too low, if so, giving an alarm for prompting, and otherwise, executing the next step.
The application also discloses another control method of the pipeline cleaning machine, which comprises the following steps:
step 1, starting up, detecting whether a water outlet pipe and a water return pipe are connected completely and whether a PP water tank 4 is filled with water, executing step 2 if the detection meets the requirement, otherwise, sending a prompt, and repeatedly executing the detection;
step 2, preheating the PP water tank, detecting whether the temperature reaches a preset value after 1 minute, stopping heating and executing step 3 if the temperature reaches the preset value, and giving an alarm if the temperature does not reach the preset value and repeatedly executing step 2;
step 3, performing pressure maintaining test, starting an internal air source, opening an outlet valve 24 of the blower, and closing a water return electromagnetic valve 21;
step 4, detecting whether the blower outlet valve 24 is opened in place or not and whether the water return electromagnetic valve 21 is closed or not, if any one of the conditions is not met, giving an alarm to prompt, and repeatedly executing the step 4, otherwise, executing the step 5;
step 5, starting the air blower 12, performing pressure maintaining test, judging whether the pressure value of the pressure sensor reaches a preset value every 30 seconds after the air blower is started, if not, giving an alarm to prompt and repeating the step 5, otherwise, executing the step 6;
step 6, stopping the blower 12, waiting for two minutes to judge whether the sealing is qualified, if not, executing the step 3, otherwise, executing the step 7;
step 7, detecting whether the blower outlet valve 24 is closed or not and whether the water return electromagnetic valve 21 is opened or not, if any one of the conditions is not met, giving an alarm to prompt and repeating the step 7, otherwise, executing the step 8;
step 8, starting a circulating pump;
step 9, detecting whether the pressure of the PP water tank 4 exceeds the standard, if so, sending an alarm prompt and repeatedly executing the step 8, and if not, executing the step 10;
and 10, performing operation check, detecting whether the cleaning time reaches a set value, if so, closing the circulating pump and all valves and prompting, and if not, returning to execute the step 9.
The operation check comprises the following steps:
step 1, detecting whether the water temperature is too low, if so, giving an alarm for prompting, and otherwise, executing step 2;
and 2, detecting whether the water level is too low, if so, giving an alarm for prompting, and otherwise, executing the next step.
The preset values mentioned above can be preset after starting up or preset default values in advance by manufacturers.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable people skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims (4)

1. A liquid containing structure for a mobile semiconductor process pipeline cleaning device is characterized by comprising:
the trolley comprises a rack, wherein a load wheel (5) is arranged at the bottom of the rack, and a trolley handle is arranged on the side surface of the rack;
the water tank is arranged in the rack, is communicated with at least three pipelines and is internally provided with a heater, the at least three pipelines comprise a water inlet pipeline, a water pumping pipeline and a water return pipeline, and the water pumping pipeline is respectively provided with a first branch connected with a cleaned pipeline and a second branch connected with a waste liquid drainage pipe; the water pumping pipeline is provided with a gas chamber which is connected with an external gas source through a gas inlet electromagnetic valve; the water tank is a PP water tank;
the water pumping assembly is arranged in the rack and comprises a water pumping motor (11) connected with a first branch of the water pumping pipeline, a blower (12) for controlling the pressure change in the water pumping pipeline and a circulating pump.
2. The liquid containing structure for a mobile cleaning device of a semiconductor process line as claimed in claim 1, wherein: a dragging type filtering device which can be taken out in a sliding mode is arranged in the water tank (4), and the dragging type filtering device is arranged below a pipe orifice of the water return pipeline, wherein the pipe orifice is located in the water tank (4).
3. The liquid containing structure for a mobile cleaning device of a semiconductor process line as claimed in claim 2, wherein: the dragging type filtering device is a dragging type blocking net (3).
4. The liquid containing structure for a mobile cleaning device of a semiconductor process line as claimed in claim 1, wherein: basin and six pipeline intercommunications, including liquid medicine supplementary pipeline, pure water supplementary pipeline, return water pipeline, exhaust pipe way, first water pumping pipeline and second water pumping pipeline, first water pumping pipeline with the subassembly of drawing water is connected, the second water pumping pipeline with waste liquid drain pipe connects, be provided with waste water pipeline solenoid valve (23) of its break-make of control on the second water pumping pipeline.
CN202020063477.5U 2020-01-13 2020-01-13 Liquid containing structure for mobile semiconductor processing pipeline cleaning device Active CN212216485U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020063477.5U CN212216485U (en) 2020-01-13 2020-01-13 Liquid containing structure for mobile semiconductor processing pipeline cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020063477.5U CN212216485U (en) 2020-01-13 2020-01-13 Liquid containing structure for mobile semiconductor processing pipeline cleaning device

Publications (1)

Publication Number Publication Date
CN212216485U true CN212216485U (en) 2020-12-25

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ID=73914033

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Application Number Title Priority Date Filing Date
CN202020063477.5U Active CN212216485U (en) 2020-01-13 2020-01-13 Liquid containing structure for mobile semiconductor processing pipeline cleaning device

Country Status (1)

Country Link
CN (1) CN212216485U (en)

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Address after: 214000 3-1208, Tian'an smart city, 228 Linghu Avenue, Xinwu District, Wuxi City, Jiangsu Province

Patentee after: Jiangsu Huhu Electromechanical Technology Co.,Ltd.

Address before: 214000 10-1314, Shenzhen Hong Kong Metropolis Plaza, Xinwu District, Wuxi City, Jiangsu Province

Patentee before: Wuxi Huhu Electromechanical Technology Co.,Ltd.

CP03 Change of name, title or address