CN212197199U - Substrate conveying apparatus - Google Patents

Abstract

The utility model discloses a substrate conveying equipment, it contains two first transmission groups and an at least second transmission group. The first transmission set comprises at least two first fluted disc sets and a first chain, and the first chain is sleeved on the two first fluted disc sets. The second transmission set comprises at least two second gear disc sets and a second chain. The first chain comprises a plurality of first strands, each first strand comprising two first link plates, the second chain comprises a plurality of second strands, each second strand comprising two second link plates. Each first chain plate and each second chain plate are mutually connected with one base plate fixing frame together, and the plurality of base plate fixing frames can move along with the first chains and the second chains. The substrate holder is used for holding a substrate.

Description

Substrate conveying apparatus

Technical Field

The utility model relates to a conveying equipment, especially a base plate conveying equipment.

Background

The conventional substrate conveying equipment for conveying the circuit board has a complex internal structure, so that the manufacturing cost of the whole substrate conveying equipment cannot be reduced, and due to the complex internal structure, a large amount of time is consumed for assembly during manufacturing, subsequent maintenance and the like. Therefore, it is one of the important issues for manufacturers of substrate transport equipment to manufacture substrate transport equipment with relatively simple internal structure and relatively low manufacturing cost.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a substrate conveying equipment mainly is used for improving current substrate conveying equipment, especially is used for carrying the substrate conveying equipment of circuit board, and its inner structure is complicated, and leads to the holistic high problem of manufacturing cost of substrate conveying equipment.

The utility model discloses one of them embodiment is a base plate conveying equipment, and it contains: two first transmission groups, each first transmission group comprising: at least two first fluted disc sets; at least one first chain, two first fluted disc groups are located to first chain cover, and first chain contains a plurality of first chain meshes, and each first chain mesh contains: two first link plates, each first link plate comprising two first link plate perforations; the two first rollers are arranged between the two first chain plates; the two first bolts penetrate through the through holes of the two first chain plates and the through holes of the two first rollers, and the two first bolts are used for fixing the two first chain plates and the two first rollers; at least one second transmission set, the second transmission set is located between two first transmission sets, the second transmission set includes: at least two second gear sets; at least a second chain, two second head gear groups are located to the second chain cover, and the second chain contains a plurality of second chain meshes, and each second chain mesh contains: two second link plates, each second link plate comprising two second link plate perforations; the two second rollers are arranged between the two second chain plates; the two second bolts penetrate through the through holes of the two second chain plates and the through holes of the two second rollers, and the two second bolts are used for fixing the two second chain plates and the two second rollers; the base plate fixing frames are fixed with at least one first chain plate of each first chain, at least one second chain plate of each second chain and each base plate fixing frame, each base plate fixing frame can move along with the first chain and the second chain, and each base plate fixing frame is used for fixing a base plate.

Preferably, the first transmission set further comprises a plurality of first connecting assemblies, each first connecting assembly is connected with at least one first chain plate of each first chain, and each first connecting assembly is connected with each base plate holding frame.

Preferably, two first link plates of each first chain are respectively defined as a first outer link plate and a first inner link plate, the first outer link plate is provided with a first outer body and a first outer extension part, and the first outer extension part is formed by extending outwards from one side of the first outer body; the first inner chain plate is provided with a first inner body and a first inner extension part, and the first inner extension part is formed by extending outwards from one side of the first inner body; each first connecting component comprises at least one first connecting plate, at least one first screw and at least one first nut, the first connecting plate and the first outer chain plate of each first chain are fixed with each other, the first connecting plate is provided with at least one first connecting through hole, the first inner extending portion is provided with at least one first inner extending through hole, the first screw penetrates through the first connecting through hole of the first connecting plate and the first inner extending through hole of the first inner extending portion, and the first screw and the first nut are matched with each other, so that the first connecting plate and the first inner extending portion jointly fix a part of the substrate fixing frame.

Preferably, the first screw of each first connection assembly is a U-shaped screw, each first connection assembly includes two first nuts, each first connection assembly further includes a first auxiliary fixing plate, the first auxiliary fixing plate has two first auxiliary through holes, each first connection plate has two first connection through holes, the first inner extension portion has two first inner extension through holes, two sides of the first inner extension portion are respectively formed with a first avoidance notch, each first inner extension through hole is communicated with the adjacent first avoidance notch, the first avoidance notch is communicated with the outer, two ends of the first screw are respectively penetrated through the two first connection through holes, the two first inner extension through holes and the two first auxiliary through holes to be mutually locked with the two first nuts.

Preferably, the second drive train further comprises a plurality of second connecting members, each second connecting member being connected to at least one second link plate of each second link, each second connecting member being connected to each base plate holder.

Preferably, one of the second link plates of each of the second links has a second body and a second extension part, and the second extension part is formed by extending outwards from one side of the second body; each second connecting component comprises at least one second connecting plate, at least one second screw and at least one second screw cap, the second connecting plate is provided with at least one second connecting through hole, the second extending part is provided with at least one second extending through hole, the second screw penetrates through the second connecting through hole of the second connecting plate and the second extending through hole of the second extending part, and the second screw cap are matched with each other, so that the second connecting plate and the first inner extending part jointly fix a part of the substrate fixing frame.

Preferably, the second screw of each second connecting assembly is a U-shaped screw, each second connecting assembly includes two second nuts, each second connecting assembly further includes a second auxiliary fixing plate, the second auxiliary fixing plate has two second auxiliary through holes, each second connecting plate has two second connecting through holes, the second extending portion has two second extending through holes, two side edges of the second extending portion are respectively formed with a second avoiding notch, each second extending through hole is communicated with an adjacent second avoiding notch, each second avoiding notch is communicated with the outside, and two ends of the second screw are respectively penetrated through the two second connecting through holes, the two second extending through holes and the two second auxiliary through holes to be locked with the two second nuts.

Preferably, the substrate conveying apparatus includes two second transmission sets, wherein one of the second bodies of each of the second chains of one of the second transmission sets extends in a direction of one of the first transmission sets to form a second extending portion, and one of the second bodies of each of the second chains of the other one of the second transmission sets extends in a direction of the other one of the first transmission sets to form a second extending portion.

Preferably, each first transmission set further includes at least one auxiliary chain, the auxiliary chain is sleeved on the two first fluted disc sets, the auxiliary chain includes a plurality of auxiliary chain meshes, each auxiliary chain mesh includes: two auxiliary link plates comprising two auxiliary link plate perforations; the two auxiliary rollers are arranged between the two auxiliary chain plates; and the two auxiliary bolts penetrate through the through holes of the two auxiliary chain plates and the through holes of the two auxiliary rollers, and are used for fixing the two auxiliary chain plates and the two auxiliary rollers mutually.

Preferably, each first transmission set further includes a plurality of auxiliary guide wheel sets, one side of one of the auxiliary link plates of at least one of the auxiliary chains is provided with one auxiliary guide wheel set, each auxiliary guide wheel set includes a fixing seat and a guide wheel, the fixing seat is used for being fixed to the auxiliary link plate, the guide wheel is pivoted to the fixing seat, and the guide wheel can rotate relative to the fixing seat.

To sum up, the utility model discloses a base plate conveying equipment sees through designs such as the second chain interconnect that makes the first chain of base plate holder and two first transmission groups and at least one second transmission group, can reduce the inside structure complexity of base plate conveying equipment by a wide margin to can reduce the holistic manufacturing cost of base plate conveying equipment by a wide margin.

For a further understanding of the features and technical content of the present invention, reference should be made to the following detailed description and accompanying drawings, which are only intended to illustrate the present invention, and not to limit the scope of the present invention.

Drawings

Fig. 1 is a schematic side view of the substrate conveying apparatus according to the present invention.

Fig. 2 is a schematic view of a substrate holder of the substrate conveying apparatus according to the present invention.

Fig. 3 is a schematic perspective view of the substrate conveying apparatus according to the present invention.

Fig. 4 is a schematic view of two first transmission sets and a second transmission set of the substrate conveying apparatus according to the present invention.

Fig. 5 is a partially enlarged schematic view of the substrate conveying apparatus according to the present invention.

Fig. 6 is a partially enlarged schematic view of the first transmission set of the substrate conveying apparatus according to the present invention.

Fig. 7 is a partially exploded view of the first transmission set of the substrate conveying apparatus according to the present invention.

Fig. 8 is a partially enlarged schematic view of the first transmission set of the substrate conveying apparatus according to the present invention.

Fig. 9 to 10 are schematic partial exploded views of the first chain and the first connecting component of the first transmission set of the substrate conveying apparatus according to the present invention.

Fig. 11 is a side view of the first chain and the first connecting component of the first transmission set of the substrate conveying apparatus according to the present invention.

Fig. 12 is a schematic view of two first transmission sets, two second transmission sets and a plurality of substrate holders of the substrate conveying apparatus according to the present invention.

Fig. 13 is a partially exploded view of the second transmission set of the substrate conveying apparatus according to the present invention.

Fig. 14 is a side view of the two first transmission sets, the two second transmission sets and the plurality of substrate holders of the substrate conveying apparatus according to the present invention.

Detailed Description

In the following description, reference is made to or shown in the accompanying drawings for the purpose of illustrating the general principles of the invention, and not for the purpose of limiting the same.

Please refer to fig. 1 to 4 together, fig. 1 shows a side schematic view of the substrate conveying apparatus of the present invention, fig. 2 shows a schematic view of the substrate holding frame of the substrate conveying apparatus of the present invention, fig. 3 shows a three-dimensional schematic view of the substrate conveying apparatus of the present invention, and fig. 4 shows schematic views of two first transmission sets and a second transmission set of the substrate conveying apparatus of the present invention.

The substrate conveyance apparatus E includes: a plurality of substrate holders E1, two first transmission sets E2 and two second transmission sets E3. It should be noted that, in the following description, the substrate transportation apparatus E includes two second driving sets E3 as an example, but in practical applications, the number of the second driving sets E3 included in the substrate transportation apparatus E is not limited to two, for example, the substrate transportation apparatus E may include only one second driving set E3, or the substrate transportation apparatus E may include more than three second driving sets E3; the substrate transport apparatus E may include a plurality of second driving groups E3 as the size of the substrate S is larger.

As shown in fig. 1 to 3, the substrate holder E1 may include: a crossbar structure E11, two longitudinal structures E12 and a plurality of holding structures E13. The cross bar structure E11 is used to connect two first transmission sets E2 and two second transmission sets E3, and the cross bar structure E11 can move along with the first chains 1 of each first transmission set E2 and the second chains 3 of each second transmission set E3.

One end of the two longitudinal structures E12 is connected to the crossbar structure E11 and the two longitudinal structures E12 are arranged facing each other. A plurality of holding structures E13 are fixedly disposed on the crossbar structure E11 and the two longitudinal structures E12. The substrate S is fixedly disposed between the rail structure E11 and the two longitudinal structures E12, and the holding structures E13 are used to limit the moving range of the substrate S relative to the rail structure E11 and the two longitudinal structures E12.

In practical applications, the connection between each longitudinal structure E12 and the crossbar structure E11 may be implemented by a locking member such as a screw or a nut, or each longitudinal structure E12 may be integrally formed with the crossbar structure E11. Each holding structure E13 may be, for example, a groove for holding the substrate S, or each holding structure E13 may be, for example, a clamp or the like, without limitation. In various embodiments, the substrate holder E1 may not include the holding structure E13, and the two longitudinal structures E12 may include grooves for receiving the substrate S, or the cross bar structure E11 may include grooves for receiving the substrate S according to requirements, and the substrate S cannot move easily relative to the substrate holder E1 when the substrate S is disposed in the grooves. The substrate holder E1 is not limited to the above-mentioned embodiment and the embodiment shown in fig. 2, and any structure or member that can hold the substrate S is within the scope of the present invention.

As shown in fig. 1, 3 and 4, the substrate conveying apparatus E of the present invention may be actuated in a specific manner: first, the transfer apparatus sets a plurality of substrates S one by one in each substrate holder E1; next, when the transferring apparatus sets a substrate S in the substrate holder E1, the related control device (for example, various computer apparatuses) controls the first transmission set E2 and the second transmission set E3 to operate, so that the substrate holder E1 holding the substrate S moves clockwise along with the first chain 1 of the first transmission set E2 and the second chain 3 of the second transmission set E3; finally, the substrate transport apparatus E repeats the above two steps until all the plurality of substrates S are placed on the substrate holder E1.

When each substrate holder E1 moves from one end (left side in fig. 1) of the substrate transport apparatus E to the other end (right side in fig. 1) of the substrate transport apparatus E, the relevant transfer apparatus will unload the substrate S from the substrate holder E1. In a specific application, the substrate S is, for example, various circuit boards, and the substrate conveying device E can be applied to a system for baking circuit boards, spraying circuit board surfaces, etc., and the substrate S can move in the associated baking room or spraying room through the substrate conveying device E. Of course, the substrate conveying apparatus E of the present invention may be applied to various manufacturing systems for manufacturing the substrate S according to the requirements.

As shown in fig. 3, it should be noted that, in order to clearly show the shapes of the plurality of components included in the first transmission set E2 and the second transmission set E3 of the substrate transportation apparatus E and the connection relationship between the plurality of components, in fig. 3 to 14 of the present invention, only the cross bar structure E11 included in the substrate holder E1 is shown.

As shown in fig. 3 to 5, fig. 5 is a partially enlarged schematic view of the first transmission set E2 according to the present invention. Each first transmission group E2 includes: two first disk groups E21, two first auxiliary disk groups E22, two auxiliary chains E23, and one first chain 1. Each of the first disk sets E21 includes a plurality of first disks E211, each of the first disks E211 is fixed to each other, each of the first auxiliary disk sets E22 includes a plurality of first auxiliary disks E221, and each of the first auxiliary disks E221 is fixed to each other. The first chain 1 and the two auxiliary chains E23 are sleeved on the two first chain wheel sets E21 and the two first auxiliary chain wheel sets E22, and the first chain 1 can be driven by the two first chain wheel sets E21 and the two first auxiliary chain wheel sets E22 to rotate. One of the first chain wheel sets E21 may be connected to an associated drive (e.g. a motor) which is capable of rotating the first chain 1 via the first chain wheel set E21. The two first auxiliary chain wheel sets E22 are mainly used to make the first chain 1 rotate more smoothly.

The number of the first disc group E21 is not limited to two, and in different embodiments, each first transmission group E2 may include more than three first disc groups E21; the number of the first auxiliary gear disk groups E22 is not limited to two, and in different embodiments, the substrate conveying apparatus E may not have the first auxiliary gear disk group E22, or the substrate conveying apparatus E may include a single first auxiliary gear disk group E22, or the substrate conveying apparatus E may include more than three first auxiliary gear disk groups E22.

Please refer to fig. 6 to fig. 10 together, fig. 6 is a schematic diagram showing a local enlarged view of the first transmission set of the substrate conveying apparatus of the present invention, fig. 7 is a schematic diagram showing a local exploded view of the first transmission set of the substrate conveying apparatus of the present invention, fig. 8 is a schematic diagram showing a local enlarged view of the first transmission set of the substrate conveying apparatus of the present invention, and fig. 9 to 10 are schematic diagrams showing a local exploded view of the first chain and the first connection assembly of the first transmission set of the substrate conveying apparatus of the present invention. As shown in fig. 6 and 7, each auxiliary chain E23 includes a plurality of auxiliary links E231, and each auxiliary link E231 includes two auxiliary link plates E232, two auxiliary rollers E233, and two auxiliary bolts E234. Each of the auxiliary link plates E232 includes two auxiliary link plate perforations E2321, two auxiliary rollers E233 are disposed between the two auxiliary link plates E232, each of the auxiliary rollers E233 includes a perforation, and two auxiliary bolts E234 penetrate the two auxiliary link plate perforations E2321 of the two auxiliary link plates E232 and the perforations of the two auxiliary rollers E233 to fix the two auxiliary link plates E232 and the two auxiliary rollers E233 to each other. The two auxiliary link plates E232, the two auxiliary rollers E233 and the two auxiliary bolts E234, which are fixed to each other, together form a gap P for receiving the single tooth E2111 of the first tooth plate E211 of the first tooth plate group E21.

In the case that the weight of the substrate S held by each substrate holder E1 is relatively heavy, the two auxiliary chains E23 can make the first sprocket group E21 smoothly drive the plurality of substrate holders E1 to move via the first chain 1. In other words, in different embodiments, the substrate conveying apparatus E may not be provided with the two auxiliary chains E23, and each first transmission group E2 of the substrate conveying apparatus E may include only the first chain 1. Through the arrangement of the two auxiliary chains E23, the acting force of the substrate holder E1 and the substrate carried by the substrate holder on the first chain 1 can be reduced, and the service life of the first chain 1 can be increased, that is, under the condition that each first transmission set E2 includes both the first chain 1 and the auxiliary chain E23, the service life of the first chain 1 can be longer than that of the first chain 1 under the condition that each first transmission set E2 includes only the first chain 1, especially in the application scenario where the substrate conveying equipment E is used for conveying substrates with a weight of more than 8 kg.

In particular, the connection relationship between the members included in each auxiliary chain E23 is only an exemplary form, and in practical applications, the auxiliary chain E23 may be a block chain or a roller chain, and the like, which is not limited herein.

It is worth mentioning that each first transmission set E2 may further comprise a plurality of auxiliary guide wheel sets E24. Each auxiliary guide wheel set E24 includes a fixing base E241 and a guide wheel E242, the fixing base E241 is used for being fixed on one side of the auxiliary chain plate E232, the guide wheel E242 is pivoted to the fixing base E241, and the guide wheel E242 can rotate relative to the fixing base E241. When the auxiliary chain E23 moves along with the first chain wheel set E21, the plurality of auxiliary guide wheel sets E24 can correspondingly abut against the related wall structure around the auxiliary chain E23, and the auxiliary guide wheel set E24 can assist the auxiliary chain E23 to move relative to the wall structure around the auxiliary chain E23.

As shown in fig. 7 to 10, each first chain 1 includes a plurality of first links 1A, and each first link 1A includes: two first chain plates, two first rollers 13 and two first bolts 14. Each first link plate includes a link plate aperture. For the following description, the two first link plates are defined as a first outer link plate 11 and a first inner link plate 12, respectively. The first outer link plate 11 includes two first outer link plate perforations 11A, and the first inner link plate 12 includes two first inner link plate perforations 12A. Two first rollers 13 are disposed between the first outer link plate 11 and the first inner link plate 12, each first roller 13 has a through hole, two first bolts 14 penetrate through the through holes of the two first outer link plate through holes 11A, the two first inner link plate through holes 12A, and the two first bolts 14, so that the first outer link plate 11, the first inner link plate 12, and the two first rollers 13 are fixed to each other.

As shown in fig. 7, it is particularly noted that in the embodiment where the first transmission set E2 includes two auxiliary chains E23, the two auxiliary chains E23 and the respective first chains 1 may share a plurality of pins, that is, a single pin may simultaneously pass through the auxiliary link plate perforations E2321 of the respective auxiliary link plates E232 of the respective auxiliary chains E23 and the first outer link plate perforations 11A and the first inner link plate perforations 12A of the first chains 1, and the single pin simultaneously fixes the four auxiliary link plates E232 of the two auxiliary chains E23, the first outer link plate 11 and the first inner link plate 12 to each other.

As shown in fig. 8 to 10, at least one first link plate of each first link 1A is interconnected with a portion of one base plate holder E1, and the manner in which each first link plate of first link 1A is connected with base plate holder E1 is not limited thereto. For example, each first transmission set E2 may further include a plurality of first link assemblies 2, and at least one first link plate of each first link 1A may be connected with a base plate holder E1 through one first link assembly 2.

In more detail, the first outer link plate 11 of each first link 1A has a first outer body 111 and a first outer extension 112, the first outer body 111 has two first outer link plate through holes 11A, and the first outer extension 112 is formed by extending outward from a narrow side surface of the first outer body 111. The first inner link plate 12 of each first link 1A has a first inner body 121 and a first inner extension 122, the first inner body 121 has two first inner link plate through holes 12A, and the first inner extension 122 is formed by extending outward a narrow side surface of the first inner body 121. When the first outer link plate 11 and the first inner link plate 12 of each first link 1A are fixed to each other, the first outer extension 112 and the first inner extension 122 are respectively formed by extending the first outer body 111 and the first inner body 121 in the same direction.

Each first connection element 2 includes a first connection plate 21, a first screw 22 and a plurality of first nuts 23. Each first connecting plate 21 may include a first fixing portion 211 and a first connecting portion 212, the first fixing portion 211 and the first connecting portion 212 are connected to each other, and the first connecting plate 21 may be substantially L-shaped; in practical applications, the first fixing portion 211 and the first connecting portion 212 may be integrally formed. The first fixing portion 211 has a fixing through hole 2111, the first outer extension portion 112 of the first outer link plate 11 of each first chain 1A may have a first outer extension through hole 1121, and the fixing through hole 2111 and the first outer extension through hole 1121 of the first connecting plate 21 may be mutually fixed with a screw or at least one nut.

The first connection portion 212 of each first connection plate 21 has two first connection through holes 2121. When the first fixing portion 211 of each first connecting plate 21 and the first outer link plate 11 are fixed to each other, the first connecting portion 212 of the first connecting plate 21 is disposed to face the first inner extension 122 of the first inner link plate 12, the first inner extension 122 has two first inner extension through holes 1221, and the first screw 22 of each first connecting element 2 may be a U-shaped screw, and two ends of the first screw 22 respectively pass through the two first connecting through holes 2121 of the first connecting portion 212 and the two first inner extension through holes 1221 of the first inner extension 122 and are mutually locked with the plurality of first nuts 23, whereby the first connecting plate 21, the first inner extension 122, the first screw 22 and the plurality of first nuts 23 commonly hold a portion of the substrate holder E1. It is to be noted that, in the drawings of the present embodiment, the first screw 22 is exemplified as a U-shaped screw, but the type of the first screw 22 is not limited thereto, and in different embodiments, the first screw 22 may also be a general screw. In addition, the number of the first screws 22 included in each first connection component 2 is not limited to a single one, and may vary according to the requirement.

It should be noted that, in the above illustration, the first outer extension 112 is connected to the first connecting plate 21, the first connecting plate 21 and the first inner extension 122 cooperate with the first screw 22 and the plurality of first nuts 23 to jointly hold the substrate holder E1, but in different embodiments, the first connecting element 2 may not include the first connecting plate 21, and the first outer extension 112 may directly extend to form the first connecting plate 21, so that the first outer extension 112 and the first inner extension 122 may cooperate with the first screw 22 and the plurality of first nuts 23 to hold a portion of the substrate holder E1.

As shown in fig. 8 and 10, the first connecting assembly 2 may further include a first auxiliary fixing plate 24, the first auxiliary fixing plate 24 has two first auxiliary through holes 241, two sides of the first inner extension portion 122 are respectively formed with a first avoiding gap 1222, each first inner extension through hole 1221 is communicated with the adjacent first avoiding gap 1222, and the first avoiding gap 1222 is communicated with the outside, that is, two opposite narrow sides of each first inner extension portion 122 are respectively recessed with a first inner extension through hole 1221, and two corresponding narrow sides are respectively formed with a first avoiding gap 1222. Two ends of the first screw 22, which is a U-shaped screw, respectively penetrate through the two first connecting through holes 2121, the two first inner extending through holes 1221, and the two first auxiliary through holes 241, and are mutually fastened to the two first nuts 23. In practical applications, the distance between two adjacent first inner extensions 122 can be further reduced by forming the first inner extensions 122 with the first escape notches 1222.

As shown in fig. 11, the first outer extension 112 of the first outer link plate 11 and the first inner extension 122 of the first inner link plate 12 of the first chain 1 are respectively formed by extending the first outer body 111 and the first inner body 121 in the same direction, the first connecting plate 21 connected to the first outer extension 112 and the first inner extension 122 cooperate with the first screw 22 and the first nut 23 to be locked with each other, and the first inner extension 122 and the first connecting plate 21 locked with each other by the first screw 22 and the first nut 23 clamp a portion of the substrate fixing frame E1 together. In practical applications, a side of the first connecting plate 21 and the first inner extension 122 contacting the substrate holder E1 may be flat, and the first connecting plate 21 and the first inner extension 122 may better hold a portion of the substrate holder E1.

Referring to fig. 4 again, the substrate transport apparatus E includes two second driving sets E3, and two second driving sets E3 are located between the two first driving sets E2. Each second transmission group E3 comprises: two second gear disk sets E31, two second auxiliary gear disk sets E32 and a second chain 3. The second gear set E31 may include a plurality of second gear sets E311, and each of the second auxiliary gear sets E32 may include a plurality of second auxiliary gear sets E321, wherein the second gear set E31 and the second auxiliary gear set E32 are the same as the first gear set E21 and the first auxiliary gear set E22, and thus, the description thereof is omitted. The numbers of the second gear disk set E31 and the second auxiliary gear disk set E32 are not limited to those shown in fig. 4.

As shown in fig. 12 to 14, each second chain 3 includes a plurality of second links 3A, and each second link 3A includes: two second link plates 31, two second rollers 32 and two second pins 33. Each second link plate 31 includes two second link plate perforations 31A, two second rollers 32 are disposed between the two second link plates 31, each second roller 32 has a perforation, two second bolts 33 penetrate the perforations of the two second link plate perforations 31A and the two second rollers 32, and the two second bolts 33 are used to fix the two second link plates 31 and the two second rollers 32 to each other.

A second link plate 31 of each second chain 3A is interconnected with a base plate holder E1, and the manner in which a second link plate 31 of each second chain 3A is interconnected with a base plate holder E1 is not limited thereto. For example, each second transmission group E3 further includes a plurality of second connecting members 4, and one of the second link plates 31 of each second link 3A may be connected with a base plate holder E1 through one of the second connecting members 4.

In more detail, one of the second link plates 31 of each of the second links 3A may have a second body 311 and a second extension 312. The second body 311 has two second link plate through holes 31A, and the second extension 312 is formed by extending outward from a narrow side surface of the second body 311. In practical applications, the second link plate 31 having the second body 311 and the second extension 312 may have an L-like appearance.

Each second connecting member 4 includes a second connecting plate 41, a second screw 42 and a plurality of second nuts 43. The second connecting plate 41 has two second connecting holes 411, the second screw 42 may be a U-shaped screw, each of the second extending portions 312 may have two second extending holes 3121, and two ends of the second screw 42 pass through the two second connecting holes 411 of the second connecting plate 41 and the two second extending holes 3121 of the second extending portions 312 to be locked with the plurality of second nuts 43, so that the second connecting plate 41 and the second extending portions 312 cooperate with the second screw 42 and the plurality of second nuts 43 to jointly hold a portion of the substrate holder E1. It is to be noted that, in the drawings of the present embodiment, the second screw 42 is a U-shaped screw, but the type of the second screw 42 is not limited thereto, and in different embodiments, the second screw 42 may also be a general screw. The number of the second screws 42 included in the second connecting member 4 is not limited to a single one, and may vary according to the requirement.

As shown in fig. 13, the second connecting member 4 may further include a second auxiliary fixing plate 44, the second auxiliary fixing plate 44 has two second auxiliary through holes 441, each second connecting plate 41 has two second connecting through holes 411, the second extending portion 312 has two second extending through holes 3121, two narrow sides of the second extending portion 312 are respectively formed with a second avoiding gap 3122, each second extending through hole 3121 communicates with the adjacent second avoiding gap 3122, and the second avoiding gap 3122 communicates with the outside, that is, two narrow sides of the second extending portion 312 opposite to each other are respectively concavely formed with one of the second extending through holes 3121 and one of the second avoiding gaps 3122 is formed corresponding to each narrow side. Two ends of the second screw 42, which is a U-shaped screw, are respectively inserted into the two second connecting holes 411, the two second extending holes 3121, and the two second auxiliary holes 441, and are fastened to the two second nuts 43. In practical applications, the second extending portion 312 is formed with the second avoiding gap 3122, so that the distance between two adjacent second extending portions 312 can be further reduced.

As shown in fig. 14, a side view of two first transmission sets, two second transmission sets and a plurality of substrate holders of the substrate conveying apparatus of the present invention is shown. The second body 311 of each second chain 3A of one of the second transmission sets E3 extends in the direction of one of the first transmission sets E2 to form a second extension 312, and the second body 311 of each second chain 3A of the other second transmission set E3 extends in the direction of the other first transmission set E2 to form a second extension 312. Through the first chains 1 of the two first transmission sets E2 and the second chains 3 of the two second transmission sets E3, and the design of the first connecting assembly 2 and the second connecting assembly 4, the substrate holders E1 can be stably connected with the two first chains 1 and the two second chains 3, and the substrate conveying equipment can bear the weight of relatively heavy substrates.

It is noted that, in the above description, each second chain 3A cooperates with each second connecting assembly 4 to jointly hold one substrate holder E1, but in practical applications, each second chain 3A may be directly fixed to substrate holder E1 without passing through second connecting assembly 4, for example, substrate holder E1 may have a through hole, and at least one screw may pass through the through hole of substrate holder E1 and the through hole of at least one second link plate 31 of second chain 3A to be locked to at least one nut.

To sum up, the utility model discloses a base plate conveying equipment sees through designs such as the first chain that makes base plate fixing frame and first transmission group and the second chain reciprocal anchorage of second transmission group, will reduce the holistic manufacturing cost of base plate conveying equipment by a wide margin, and sees through the setting of second transmission group, and base plate conveying equipment more can the heavy base plate of weight relative (for example, weight is greater than 8 kilograms of base plate). Additionally, the utility model discloses a base plate conveying equipment sees through the setting of components such as first coupling assembling and second coupling assembling, can strengthen the joint strength of first chain, second chain and base plate fixing frame, and relevant personnel also can dismouting first coupling assembling and second even subassembly easily, and make base plate fixing frame, first chain and second chain reciprocal anchorage.

The above only is the feasible embodiment of preferred of the utility model, therefore not limit the patent scope of the utility model, the event holds the application the utility model discloses the equivalent technical change that the description and the drawing content were done all contains in the utility model discloses a protection within range.

Claims (10)

1. A substrate transport apparatus, comprising:

two first transmission sets, each of the first transmission sets comprising:

at least two first fluted disc sets; and

at least one first chain, the first chain is sleeved on the two first fluted disc groups, the first chain comprises a plurality of first chain meshes, and each first chain mesh comprises:

two first link plates, each of the first link plates comprising two first link plate perforations;

the two first rollers are arranged between the two first chain plates; and

two first bolts, which penetrate through the through holes of the two first chain plates and the through holes of the two first rollers, and are used for fixing the two first chain plates and the two first rollers;

at least one second transmission set, the second transmission set being located between two of the first transmission sets, the second transmission set comprising:

at least two second gear sets; and

at least one second chain, the second chain is sleeved on the two second gear disc groups, the second chain comprises a plurality of second chain meshes, and each second chain mesh comprises:

two second link plates, each of the second link plates comprising two second link plate perforations;

the two second rollers are arranged between the two second chain plates; and

the two second bolts penetrate through the through holes of the two second chain plates and the through holes of the two second rollers, and the two second bolts are used for fixing the two second chain plates and the two second rollers;

the base plate fixing frames are fixed with at least one first chain plate of each first chain, at least one second chain plate of each second chain and each base plate fixing frame, each base plate fixing frame can move along with the first chain and the second chain, and each base plate fixing frame is used for fixing a base plate.

2. The substrate transport apparatus of claim 1, wherein the first drive train further comprises a plurality of first link assemblies, each of the first link assemblies being coupled to at least one of the first link plates of each of the first orders, each of the first link assemblies being coupled to each of the substrate holders.

3. The substrate transport apparatus of claim 2, wherein two of the first link plates of each of the first orders are respectively defined as a first outer link plate and a first inner link plate, the first outer link plate having a first outer body and a first outer extension, the first outer extension being formed by extending outwardly from one side of the first outer body; the first inner chain plate is provided with a first inner body and a first inner extension part, and the first inner extension part is formed by extending outwards from one side of the first inner body; each of the first connecting components includes at least one first connecting plate, at least one first screw and at least one first nut, the first connecting plate is fixed to the first outer link plate of each of the first links, the first connecting plate has at least one first connecting through hole, the first inner extending portion has at least one first inner extending through hole, the first screw is inserted into the first connecting through hole of the first connecting plate and the first inner extending through hole of the first inner extending portion, and the first screw and the first nut are matched with each other, so that the first connecting plate and the first inner extending portion jointly hold a portion of the substrate holding frame.

4. The substrate transport apparatus according to claim 3, wherein the first screw of each of the first connection members is a U-shaped screw, each of the first connection members includes two of the first nuts, each of the first connection members further includes a first auxiliary fixing plate, the first auxiliary fixing plate has two first auxiliary through-holes, each of the first connection plates has two first connection through-holes, the first inner extension part is provided with two first inner extension through holes, two side edges of the first inner extension part are respectively provided with a first avoidance notch, each first inner extension through hole is communicated with the adjacent first avoidance notch, the first avoiding notch is communicated with the outside, and two ends of the first screw are respectively arranged in the two first connecting through holes, the two first inner extending through holes and the two first auxiliary through holes in a penetrating manner and are mutually locked with the two first screw caps.

5. The substrate transport apparatus of any of claims 1-4, wherein the second drive train further comprises a plurality of second link assemblies, each of the second link assemblies being connected to at least one of the second link plates of each of the second orders, each of the second link assemblies being connected to each of the substrate holders.

6. The substrate conveying apparatus according to claim 5, wherein one of the second link plates of each of the second links has a second body and a second extension portion, the second extension portion being formed by extending outward from one side of the second body; each second connecting component comprises at least one second connecting plate, at least one second screw and at least one second nut, the second connecting plate is provided with at least one second connecting through hole, the second extending part is provided with at least one second extending through hole, the second screw penetrates through the second connecting through hole of the second connecting plate and the second extending through hole of the second extending part, and the second screw and the second nut are matched with each other, so that the second connecting plate and the first inner extending part jointly fix a part of the substrate fixing frame.

7. The substrate transport apparatus according to claim 6, wherein the second screw of each of the second connecting members is a U-shaped screw, each of the second connecting members includes two second nuts, each of the second connecting members further includes a second auxiliary fixing plate, the second auxiliary fixing plate has two second auxiliary through holes, each of the second connecting plates has two second connecting through holes, the second extending part is provided with two second extending through holes, two side edges of the second extending part are respectively provided with a second avoiding gap, each second extending through hole is communicated with the adjacent second avoiding gap, and each second avoidance notch is communicated with the outside, and two ends of the second screw are respectively penetrated through the two second connecting through holes, the two second extending through holes and the two second auxiliary through holes to be mutually locked with the two second screw caps.

8. The substrate transport apparatus of claim 7, wherein the substrate transport apparatus comprises two second transmission sets, wherein one of the second bodies of each of the second chains of one of the second transmission sets extends in a direction of one of the first transmission sets to form the second extension, and one of the second bodies of each of the second chains of the other of the second transmission sets extends in a direction of the other of the first transmission sets to form the second extension.

9. The substrate transport apparatus according to claim 1, wherein each of the first transmission sets further comprises at least one auxiliary chain sleeved on the two first sprocket sets, the auxiliary chain comprises a plurality of auxiliary chains, each of the auxiliary chains comprises:

two auxiliary link plates comprising two auxiliary link plate perforations;

the two auxiliary rollers are arranged between the two auxiliary chain plates; and

and the two auxiliary bolts penetrate through the two auxiliary chain plate through holes and the two auxiliary idler wheels through holes, and the two auxiliary bolts are used for fixing the two auxiliary chain plates and the two auxiliary idler wheels.

10. The apparatus for conveying substrates as claimed in claim 9, wherein each of the first transmission sets further comprises a plurality of auxiliary guide wheel sets, one of the auxiliary guide wheel sets is disposed on one side of one of the auxiliary link plates of at least one of the auxiliary chains, each of the auxiliary guide wheel sets comprises a fixing seat for fixing to the auxiliary link plate and a guide wheel pivoted to the fixing seat, and the guide wheel is capable of rotating relative to the fixing seat.

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