CN212188620U - Double-outlet type dynamic air distribution device - Google Patents
Double-outlet type dynamic air distribution device Download PDFInfo
- Publication number
- CN212188620U CN212188620U CN202020514152.4U CN202020514152U CN212188620U CN 212188620 U CN212188620 U CN 212188620U CN 202020514152 U CN202020514152 U CN 202020514152U CN 212188620 U CN212188620 U CN 212188620U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- gas
- outlet
- mixing chamber
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Accessories For Mixers (AREA)
Abstract
The utility model discloses a two export type developments distributing device, including mixing chamber, first standard gas outlet pipeline, second standard gas outlet pipeline and pipeline diverter valve, the pipeline diverter valve can switch first standard gas outlet pipeline with the export intercommunication of mixing chamber perhaps second standard gas outlet pipeline with the export intercommunication of mixing chamber, even there are exhaust pipe and gas supply pipeline on the first standard gas outlet pipeline, it has the flow regulation and control part to concatenate on the second standard gas outlet pipeline. The dynamic gas distribution device is suitable for both passive gas equipment and active gas equipment, and is wide in application range and convenient to popularize and apply.
Description
Technical Field
The utility model relates to a developments distribution technical field especially indicates a two export type developments distributing device.
Background
The dynamic gas distribution is that the raw gas with known concentration and the diluent gas continuously enter a mixer to be mixed according to a constant flow ratio, so that the standard gas with a certain concentration can be continuously prepared.
The existing dynamic gas distribution device is only provided with a standard gas outlet pipeline, one end of the standard gas outlet pipeline is provided with a gas inlet, the other end of the standard gas outlet pipeline is provided with a gas outlet, the gas inlet is communicated with an outlet of a mixing chamber, and the gas outlet is communicated with gas equipment.
The dynamic configuration device with the structure is only suitable for passive air-using equipment, but not suitable for active air-using equipment (such as pumping air-using equipment), and the application range is limited.
In view of this, it is a technical problem to be solved by those skilled in the art to increase the application range of the dynamic air distribution device.
SUMMERY OF THE UTILITY MODEL
For solving the technical problem, the utility model provides a two export type developments distributing device, including the mixing chamber, still include first standard gas and go out gas pipeline, second standard gas and go out gas pipeline and pipeline diverter valve, the pipeline diverter valve can switch first standard gas go out gas pipeline with the export intercommunication of mixing chamber perhaps second standard gas goes out gas pipeline with the export intercommunication of mixing chamber, even there are exhaust pipe and gas supply pipeline on the first standard gas outlet pipeline, it has the flow regulation and control part to concatenate on the second standard gas outlet pipeline.
The double-outlet dynamic gas distribution device is suitable for both passive gas equipment and active gas equipment, and is wide in application range and easy to popularize and apply.
Optionally, a flow meter is connected in series to the exhaust pipe.
Optionally, check valves are connected in series on the exhaust pipeline and the air supplementing pipeline.
Optionally, the mixing chamber further comprises a raw material gas inlet pipeline and a diluent gas inlet pipeline which are communicated with the inlet of the mixing chamber, and the raw material gas inlet pipeline and the diluent gas inlet pipeline are both connected in series with flow controllers.
Optionally, the mixing chamber further comprises a first three-way joint, and three interfaces of the first three-way joint are respectively communicated with the gas outlet of the raw gas inlet pipeline, the gas outlet of the diluent gas inlet pipeline and the inlet of the mixing chamber.
Optionally, the raw gas inlet pipeline and the dilution gas inlet pipeline are both connected in series with a self-operated control valve with adjustable opening pressure, and the self-operated control valve is located at the upstream of the flow controller.
Optionally, a pressure relief valve is connected to the outlet of the mixing chamber.
Optionally, the mixing chamber further comprises a pressure relief pipeline, an air inlet of the pressure relief pipeline is communicated with an outlet of the mixing chamber, and the pressure relief valve is connected to the pressure relief pipeline in series.
Optionally, the mixing device further comprises a second three-way joint, and three interfaces of the second three-way joint are respectively communicated with the outlet of the mixing chamber, the air inlet of the pressure relief pipeline and the air inlet of the pipeline switching valve.
Optionally, the system further comprises a raw gas tank and a dilution gas tank which are respectively connected to the gas inlet of the raw gas inlet pipeline and the gas inlet of the dilution gas inlet pipeline.
Drawings
Fig. 1 is a schematic view of an embodiment of a dual-outlet dynamic air distribution device provided by the present invention.
The reference numerals are explained below:
the gas mixing device comprises a mixing chamber 1, a raw material gas inlet pipeline 2, a diluent gas inlet pipeline 3, a first standard gas outlet pipeline 4, a second standard gas outlet pipeline 5, a pipeline switching valve 6, a gas exhaust pipeline 7, a gas supplementing pipeline 8, a flowmeter 9, a one-way valve 10, a flow regulation and control part 11, a flow controller 12, a self-operated control valve 13, a first three-way joint 14, a pressure release valve 15, a pressure release pipeline 16, a second three-way joint 17, a raw material gas tank 18 and a diluent gas tank 19.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the following provides a detailed description of the technical solution of the present invention with reference to the accompanying drawings.
As shown in the figure, the double-outlet dynamic air distribution device comprises a mixing chamber 1, a raw material gas inlet pipeline 2, a diluent gas inlet pipeline 3, a first standard gas outlet pipeline 4, a second standard gas outlet pipeline 5 and a pipeline switching valve 6, wherein the air outlet of the first standard gas outlet pipeline 4 and the air outlet of the second standard gas outlet pipeline 5 are the double outlets.
The raw gas inlet pipeline 2 and the dilution gas inlet pipeline 3 are communicated with the inlet of the mixing chamber 1, and the first standard gas outlet pipeline 4 and the second standard gas outlet pipeline 5 are communicated with the outlet of the mixing chamber 1 through a pipeline switching valve 6.
The pipeline switching valve 6 has two working positions, when in the first working position, the first standard gas outlet pipeline 4 is communicated with the outlet of the mixing chamber 1, and when in the second working position, the second standard gas outlet pipeline 5 is communicated with the outlet of the mixing chamber 1.
The inlet of the raw gas inlet pipeline 2 is connected with a raw gas tank 18, the inlet of the diluent gas inlet pipeline 3 is connected with a diluent gas tank 19, specifically, the raw gas tank 18 and the diluent gas tank 19 can be one part of a dynamic dilution device, namely, the dynamic dilution device is connected with the raw gas tank 18 and the diluent gas tank 19 when leaving a factory, and also can be an external air source which is automatically externally connected with the dynamic dilution device by a user.
The outlet of the first standard gas outlet pipeline 4 and the outlet of the second standard gas outlet pipeline 5 are used for connecting gas-using equipment. The gas equipment is external equipment which is externally connected with the dynamic diluting device by a user, and can be active gas equipment or passive gas equipment.
In the application process, the raw material gas and the diluent gas respectively enter the mixing chamber 1 through the raw material gas inlet pipeline 2 and the diluent gas inlet pipeline 3, the raw material gas and the diluent gas are mixed in the mixing chamber 1 to form standard gas, and the formed standard gas flows out through the first standard gas outlet pipeline 4 or the second standard gas outlet pipeline 5 and flows to gas utilization equipment.
Even have exhaust pipe 7 and air supplement pipe 8 on the first standard gas outlet pipeline 4, exhaust pipe 7 and air supplement pipe 8 all link in series has check valve 10 to control the air current direction. The second standard gas outlet pipeline 5 is connected with a flow regulating and controlling part 11 in series. Specifically, the flow rate control unit 11 may be a flow meter and a flow rate control valve which are connected in series, and of course, the flow meter and the flow rate control valve may also be integrally arranged in practical implementation.
When the gas equipment is active gas equipment, make its gas outlet of connecting at first standard gas and go out the gas outlet of pipeline 4, and switch pipeline diverter valve 6 to first work position, make first standard gas go out the export intercommunication of pipeline 4 and mixing chamber 1 (second standard gas goes out the export of pipeline 5 and mixing chamber 1 and is obstructed this moment), because even there is gas supply pipeline 8 on the first standard gas goes out the gas pipeline 4, so when gas equipment suction is big, standard gas goes out the gas quantity not enough, can go out supplementary gas in the pipeline 4 to first standard gas through gas supply pipeline 8, thereby can prevent to produce the negative pressure and damage dynamic gas distribution device. Meanwhile, the exhaust pipeline 7 is connected to the first standard gas outlet pipeline 4, so that whether gas supplementing is needed or not and whether gas supplementing is needed to be finished or not can be judged according to whether the exhaust of the exhaust pipeline 7 is needed or not, specifically, when the exhaust pipeline 7 does not exhaust gas, gas supplementing is needed, and when the exhaust pipeline 7 exhausts gas, gas supplementing is needed to be finished. In order to more clearly know whether the exhaust pipeline 7 exhausts or not, in a specific scheme, a flow meter 9 is connected in series on the exhaust pipeline.
When the gas equipment is passive gas equipment, the gas equipment is connected to the outlet of the second standard gas outlet pipeline 5, the pipeline switching valve 6 is switched to the second working position, the second standard gas outlet pipeline 5 is communicated with the outlet of the mixing chamber 1 (at the moment, the second standard gas outlet pipeline 5 is not communicated with the outlet of the mixing chamber 1), and the second standard gas outlet pipeline 5 is connected with the flow regulating and controlling component 11, so that the gas output of the standard gas can be regulated in combination with the gas consumption requirement of the passive gas equipment, and the gas consumption of the standard gas is matched with that of the passive gas equipment.
In conclusion, the dynamic gas distribution device is suitable for both passive gas equipment and active gas equipment, has a wide application range and is easy to popularize and apply.
Specifically, the raw gas inlet pipeline 2 and the diluent gas inlet pipeline 3 are respectively connected in series with a Mass Flow Controller (MFC) 12, which is a first Flow Controller and a second Flow Controller. The first flow controller is used for controlling the flow of the raw material gas, and the second flow controller is used for controlling the flow of the diluent gas, so that the raw material gas and the diluent gas are mixed according to a preset flow ratio, and the preparation of standard gas with preset concentration is ensured.
The raw gas inlet pipeline 2 and the dilution gas inlet pipeline 3 are also connected in series with self-operated control valves 13 which are respectively a first self-operated control valve and a second self-operated control valve, the first self-operated control valve 13 is positioned at the upstream of the first flow controller 12, and the second self-operated control valve 13 is positioned at the upstream of the second flow controller 12. The upstream is a position where the gas flows first and the downstream is a position where the gas flows later, with respect to the gas flow direction.
The self-operated control valve 13 uses the pressure of the medium in the valve as the valve opening force, uses the elastic force of the elastic component in the valve as the valve closing force, when the pressure of the medium in the valve is smaller than the elastic force of the elastic component in the valve, the valve is automatically closed, when the pressure of the medium in the valve is larger than the elastic force of the elastic component in the valve, the valve is automatically opened, when the valve is opened to a certain opening, the pressure of the medium in the valve is balanced with the elastic force of the elastic component in the valve, and at this time, the valve is stabilized at the opening.
The opening pressures of the first self-operated control valve and the second self-operated control valve are adjustable, namely the elastic forces of elastic components in the first self-operated control valve and the second self-operated control valve are adjustable, so that in application, the opening pressure of the first self-operated control valve and the opening pressure of the second self-operated control valve can be adjusted in advance according to the pressures at two ends specified by the first flow controller and the second flow controller, and therefore the first flow controller and the second flow controller can be guaranteed to operate within a reasonable pressure range, the first flow controller and the second flow controller can accurately control the flow of the raw material gas and the diluent gas, and the raw material gas and the diluent gas are guaranteed to be mixed according to a preset flow ratio.
Specifically, the double-outlet dynamic air distribution device is further provided with a first three-way joint 14, and three interfaces of the first three-way joint 14 are respectively communicated with an air outlet of the raw material gas inlet pipeline 2, an air outlet of the diluent gas inlet pipeline 3 and an inlet of the mixing chamber 1. The arrangement is favorable for improving the mixing uniformity of the raw material gas and the diluent gas.
Specifically, the outlet of the mixing chamber 1 is connected with a pressure release valve 15, when the outlet pressure of the mixing chamber 1 is too high, the pressure release valve 15 is opened, and part of gas is discharged through the pressure release valve 15 to realize pressure reduction, so that the operation safety of the dynamic gas distribution device is ensured.
In the scheme shown in the figure, the pressure release valve 15 is connected in series on a pressure release pipeline 16, an air inlet of the pressure release pipeline 16 is communicated with an outlet of the mixing chamber 1, and an air outlet of the pressure release pipeline 16 can be directly communicated with the atmosphere or connected with gas recovery equipment. A pressure relief pipeline 16 is arranged to facilitate the communication of the pressure relief valve 15 with the outlet of the mixing chamber 1.
In the scheme shown in the figure, a second three-way joint 17 is further arranged, and three interfaces of the second three-way joint 17 are respectively communicated with an outlet of the mixing chamber 1, an air inlet of the pressure relief pipeline 16 and an air inlet of the pipeline switching valve 6. Set up like this, when relief valve 15 opened, the inside pressure of first standard gas air outlet pipeline 4 or second standard gas air outlet pipeline 5 also can descend rapidly to can guarantee that flowmeter 9 and the flow regulation and control part 11 of connecting on the second standard gas air outlet pipeline 5 of connecting on the first standard gas air outlet pipeline 4 move in suitable pressure range.
To sum up, the utility model provides a two export type developments distributing device has application scope extensively, can accurate control flow than, the operation is stable safe, gas mixing homogeneity advantage such as good.
It is right above the utility model provides a two export type developments distributing device introduces in detail. The principles and embodiments of the present invention have been explained herein using specific examples, and the above descriptions of the embodiments are only used to help understand the method and its core ideas of the present invention. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, the present invention can be further modified and modified, and such modifications and modifications also fall within the protection scope of the appended claims.
Claims (10)
1. The utility model provides a two export type developments distributing device, includes mixing chamber (1), its characterized in that still includes first standard gas and goes out gas pipeline (4), second standard gas and go out gas pipeline (5) and pipeline diverter valve (6), pipeline diverter valve (6) can switch first standard gas go out gas pipeline (4) with the export intercommunication of mixing chamber (1) perhaps second standard gas goes out gas pipeline (5) with the export intercommunication of mixing chamber (1), even there are exhaust pipe (7) and gas supply pipeline (8) on first standard gas goes out gas pipeline (4), it has flow control part (11) to concatenate on second standard gas goes out gas pipeline (5).
2. The double outlet dynamic air distribution device according to claim 1, wherein a flow meter (9) is connected in series to the exhaust line (7).
3. Double outlet dynamic air distribution device according to claim 2, characterised in that a one-way valve (10) is connected in series to both the exhaust line (7) and the air supply line (8).
4. The double-outlet type dynamic air distribution device according to any one of claims 1 to 3, further comprising a raw material gas inlet pipeline (2) and a diluent gas inlet pipeline (3) which are communicated with the inlet of the mixing chamber (1), wherein the raw material gas inlet pipeline (2) and the diluent gas inlet pipeline (3) are connected with flow controllers (12) in series.
5. The double outlet type dynamic air distribution device according to claim 4, further comprising a first three-way joint (14), wherein three ports of the first three-way joint (14) are respectively communicated with an air outlet of the raw material gas inlet pipeline (2), an air outlet of the dilution gas inlet pipeline (3) and an inlet of the mixing chamber (1).
6. The double-outlet type dynamic air distribution device according to claim 4, wherein a self-operated control valve (13) with adjustable opening pressure is connected in series to each of the raw air inlet pipeline (2) and the diluent air inlet pipeline (3), and the self-operated control valve (13) is located upstream of the flow controller (12).
7. Dynamic gas distribution device of the double outlet type according to claim 6, characterized in that a pressure relief valve (15) is connected to the outlet of the mixing chamber (1).
8. The dynamic air distribution device of the double-outlet type according to claim 7, further comprising a pressure relief pipeline (16), wherein an air inlet of the pressure relief pipeline (16) is communicated with an outlet of the mixing chamber (1), and the pressure relief valve (15) is connected in series to the pressure relief pipeline (16).
9. The dual outlet type dynamic air distribution device according to claim 8, further comprising a second three-way joint (17), wherein three ports of the second three-way joint (17) are respectively communicated with the outlet of the mixing chamber (1), the air inlet of the pressure relief pipeline (16) and the air inlet of the pipeline switching valve (6).
10. The dual outlet type dynamic air distribution device according to claim 4, further comprising a raw material gas tank (18) and a diluent gas tank (19) which are connected to an inlet of the raw material gas inlet line (2) and an inlet of the diluent gas inlet line (3), respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020514152.4U CN212188620U (en) | 2020-04-09 | 2020-04-09 | Double-outlet type dynamic air distribution device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020514152.4U CN212188620U (en) | 2020-04-09 | 2020-04-09 | Double-outlet type dynamic air distribution device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212188620U true CN212188620U (en) | 2020-12-22 |
Family
ID=73828912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020514152.4U Active CN212188620U (en) | 2020-04-09 | 2020-04-09 | Double-outlet type dynamic air distribution device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212188620U (en) |
-
2020
- 2020-04-09 CN CN202020514152.4U patent/CN212188620U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102109055B (en) | Remote pressure and flow control system of self-operated regulator | |
| CN208719475U (en) | A kind of pressure balance control valve and mixed gas proportioner | |
| CN212188620U (en) | Double-outlet type dynamic air distribution device | |
| CN215586008U (en) | Mixed acid device capable of controlling concentration of mixed acid in semiconductor wet cleaning solution | |
| CN212855297U (en) | Uniform flue gas sampling device and SCR denitration accurate ammonia spraying system | |
| CN213236267U (en) | Automatic valve position maintaining control system for regulating valve | |
| CN112827376A (en) | Method for controlling concentration of mixed acid in semiconductor wet cleaning solution | |
| CN212188621U (en) | Dynamic air distribution device | |
| CN205806935U (en) | A kind of major and minor pipe switched system for mixed gas pressurization | |
| CN203253406U (en) | Conveying pump station for solution mixing | |
| CN215586009U (en) | Mixed acid system for semiconductor wet process | |
| CN214944453U (en) | Cooling water flow control system of gas turbine cooler | |
| CN206918642U (en) | A kind of tetrad valve group peculiar to vessel | |
| CN113405024A (en) | Multi-way bypass water mixing regulating valve | |
| CN214119703U (en) | Pressure regulating system for gas pipeline with gas connection | |
| CN205261230U (en) | Air mass flow governing system | |
| CN112823865A (en) | Gas-liquid mixing regulation and control system and regulation and control method | |
| CN213749676U (en) | Intelligent control system for input gas circuit of electron microscope | |
| CN218422502U (en) | Aerosol diluting device and measuring device based on pressure regulation | |
| CN207079065U (en) | A kind of Gas Stations sewage disposal system | |
| CN215597054U (en) | Multi-way bypass water mixing regulating valve | |
| CN212089251U (en) | Gas mixing device and beverage mixing machine with same | |
| CN219300518U (en) | Temperature-reducing water bypass device of temperature-reducing pressure reducer | |
| CN207364666U (en) | A kind of frequency conversion and unvarying pressure control methanol loading apparatus | |
| CN216260654U (en) | Dew point generator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |