CN212188191U - Dust separating device - Google Patents

Abstract

A dust separation device belongs to the photovoltaic field. The dust separation device comprises an air inlet pipe, an air outlet pipe, a first filtering pipe and a second filtering pipe. The dust separation device is provided with two sets of filtering structures, can work simultaneously and can also work alternately, so that maintenance is allowed to be carried out in a non-stop state, and the utilization rate of equipment is improved.

Description

Dust separating device

Technical Field

The application relates to the field of photovoltaics, in particular to a dust separation device.

Background

Currently, in the solar photovoltaic industry, the cell production process usually involves the use of a Plasma Enhanced Chemical Vapor Deposition (PECVD) coating process. In the process, the importance of the productivity and efficiency of the PECVD coating technology is more and more prominent.

The two-in-one device has characteristics that the single device does not have, and thus gradually moves from the design concept to practical industrial application. Therefore, in practical production, improved PECVD coating based on the two-in-one design concept has been developed.

However, due to the particularity of the process, compared with the conventional single PECVD coating device, the working stability of the two-in-one device becomes a practical problem which restricts the further application of the two-in-one device.

SUMMERY OF THE UTILITY MODEL

In order to improve and even solve the problem of the working stability of the PECVD coating equipment, the application provides a dust separation device.

The application is realized as follows:

in a first aspect, examples of the present application provide a dust separating device applied to a plasma enhanced chemical vapor deposition coating apparatus.

The dust separation device comprises an air inlet pipe, an air outlet pipe, a first filter pipe and a second filter pipe.

The intake pipe is bifurcated at one end to form a first intake branch pipe and a second intake branch pipe.

The outlet pipe is branched at one end to form a first outlet branch pipe and a second outlet branch pipe.

The first filter pipe is composed of a first pipe body and a first filter body inside the first pipe body.

The second filter pipe is composed of a second pipe body and a second filter body inside the second pipe body.

The head and the tail of the first pipe body are connected with the first air inlet branch pipe and the first air outlet branch pipe through the first valve respectively.

The head and the tail of the second pipe body are connected with the second air inlet branch pipe and the second air outlet branch pipe through a second valve which is independently opened and closed with the second valve.

The dust separating device comprises two sets of filtering passages, and the two filtering passages can work or work independently. Therefore, the two work simultaneously to obtain high filtering efficiency of the device. When only one of the two works, the other can be replaced or disassembled for maintenance and cleaning.

With reference to the first aspect, in a first possible embodiment of the first aspect of the present application, the first filter is a single body or an assembly.

With reference to the first aspect, in a second possible embodiment of the first aspect of the present application, the second filter is a single body or an assembly.

With reference to the first aspect or the first or second embodiment of the first aspect, in a third possible implementation of the first aspect of the present application, the first filter body extends over part or all of the lumen cross-section of the first tube body.

With reference to the third embodiment of the first aspect, in a fourth possible embodiment of the first aspect of the present application, the second filter body extends over part or all of the lumen cross-section of the second tubular body.

In a fifth possible embodiment of the first aspect of the present application in combination with the first aspect, the first filter body is a single body and is a screen.

With reference to the first aspect or the fifth embodiment of the first aspect, in a third possible embodiment of the first aspect of the present application, the first filter body is a single body and is a filter screen.

With reference to the first aspect, in a seventh possible embodiment of the first aspect of the present application, the second filter body is a single body and is a screen.

With reference to the first aspect, in an eighth possible embodiment of the first aspect of the present application, the first filter body is a combined body, and includes a first hollow tube, a plurality of first screens spirally arranged in an axial direction around an outer wall of the first hollow tube.

Or the second filter body is an assembly and comprises a second hollow pipe and a plurality of second filter screens spirally arranged around the outer wall of the second hollow pipe in the axial direction.

With reference to the first aspect or the seventh or eighth embodiment of the first aspect, in a ninth possible implementation of the first aspect of the present application, the first pipe body is a straight pipe or a curved pipe; or the second pipe body is a straight pipe or a bent pipe.

Optionally, the curved tube comprises a U-shaped tube.

In the process of realizing the scheme, the dust separation device can achieve at least the following effects through different structural forms.

(1) The filter screen is designed to be a hollow structure with a spiral net structure, so that the air exhaust speed is ensured, and the dust adsorption area is increased.

(2) The pipeline design is the square pipeline, and every passageway dress hand valve, 4 hand valves in total are used for the switching of pipeline. The filter screen can be conveniently and quickly detached anytime and anywhere to clean the filter screen.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

FIG. 1 is a schematic structural view of a dust separating apparatus in an embodiment of the present application;

FIG. 2 is a schematic view showing another dust separating apparatus according to an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a first filter in an embodiment of the present application;

FIG. 4 is a schematic structural diagram of a second filter in an embodiment of the present application;

fig. 5 is a schematic structural view of a third filter body in the embodiment of the present application.

Icon: 100-an air inlet pipe; 101-a first intake manifold; 102-a second intake manifold; 201-a first filtering pipe; 202-a second filtering conduit; 203-a first valve; 204-a second valve; 300-an air outlet pipe; 301-first outlet leg; 302-second outlet manifold; 400-square filter screen; 400 a-round filter screen; 500-a filter body; 501-hollow tube; 502-screen.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present application, it should be noted that the terms "upper", "inner", "outer", and the like refer to the orientation or positional relationship shown in the drawings, or the orientation or positional relationship which the product of the application is usually placed in when used, and are used only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

In the description of the present application, it is further noted that, unless expressly stated or limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

In the present application, all the embodiments, implementations, and features of the present application may be combined with each other without contradiction or conflict. In the present application, conventional equipment, devices, components, etc. are either commercially available or self-made in accordance with the present disclosure. In this application, some conventional operations and devices, apparatuses, components are omitted or only briefly described in order to highlight the importance of the present application.

For the PECVD coating equipment with two-in-one and high integration, the working stability is a real and visible problem. The vacuum equipment is particularly characterized in that the vacuum equipment is easy to crash and the vacuum pumping efficiency is low.

The inventors have found in their studies that the apparatus has the aforementioned problem in that a large amount of alumina and silicon nitride dusts are generated during the plating operation. The dust can be adsorbed on a vacuum pipeline and a vacuum pump rotor of the coating equipment, so that the problems of reduced vacuum-pumping efficiency, easy blockage of the vacuum pump and the like frequently occur.

Specifically, in actual industrial production, due to the particularity of the PECVD coating process, a large amount of alumina and silicon nitride dust is generated in the process, so that the vacuum pump is locked, and a large amount of dust enters the tail gas treatment equipment, so that an electrode head and a treatment chamber of the tail gas treatment equipment generate a large amount of dust deposition.

Therefore, one of the key factors to improve the operational stability of the aforementioned devices is: the purity of the air drawn from the apparatus is controlled, and in particular, the air is subjected to a filtering operation.

In the example, the dust content entering the vacuum pump and the tail gas treatment equipment is reduced from the inlet end of the equipment, so that the technical problems of prolonging the maintenance and use period of the vacuum pump, prolonging the maintenance period of the tail gas treatment equipment, reducing the shutdown failure of the tail gas treatment equipment caused by inlet silting and the like are solved. In other words, the dust separating apparatus proposed in the present application is an apparatus connected between a vacuum chamber and an arrangement for evacuation.

The filtration system may optionally have multiple sets for replacement, or alternate use for maintenance, in view of equipment maintenance, replacement of parts, etc.

In an example, the filter system is implemented in the form of a dust separation device.

The dust separating device provides a passage through which air flows and in which a separating apparatus is arranged for separating dust from the air. Also as mentioned above, in order to increase the redundancy, the channels for air circulation and the corresponding separation devices may be arranged in a plurality of groups, for example two groups in the example of the figures. Further, in other examples, the separation devices may be selected from three, four, five, and more groups.

The dust separating apparatus is of a generally annular configuration and has a duct for conducting gas from the vacuum chamber and a duct for conducting filtered air to the vacuum pump.

Specifically, in some alternative examples, referring to fig. 1, the dust separating apparatus includes an inlet duct 100, an outlet duct 300, a first filtering duct 201, and a second filtering duct 202.

The air inlet pipe 100 is branched at one end to form a first air inlet branch pipe 101 and a second air inlet branch pipe 102, so that the air inlet pipe 100 is in a three-way pipe structure. Accordingly, the outlet pipe 300 is branched at one end to form a first outlet branch pipe 301 and a second outlet branch pipe 302, so that the outlet pipe 300 has a three-way pipe structure.

The structure and size of the inlet pipe 100 and the outlet pipe 300 may be adaptively adjusted according to specific design requirements, and are not particularly limited. Usually, both are chosen to be implemented as round tubes (of course square tubes or other forms of tubes are also possible). While the two tubes may be flexible or rigid. For a solution implemented as a flexible tube, the flexible tube may alternatively be a corrugated tube. In addition, in order to prevent the flexible tube from being bent excessively to seal the tube cavity, the inner wall or the outer wall of the flexible tube can be selectively sleeved with a spring to provide proper bending resistance.

Furthermore, since the air flow is blocked by the filtering device during the transportation, there may be an air pressure difference between the front and rear transport portions of the filtering device. In order to facilitate rapid and stable filtration and transportation of air, the specifications of the corresponding pipelines can be correspondingly optimized. The specification of the pipe mainly refers to the inner diameter of the pipe (a path through which gas flows). Therefore, the dust separating device can be structurally designed as follows: the pipe diameter (inner diameter) of the inlet pipe 100 is greater than the pipe diameter (inner diameter) of the outlet pipe 300.

The structure for communicating the inlet duct 100 and the outlet duct 300 is a filter pipe, and therefore, the filter pipe is disposed between the inlet duct 100 and the outlet duct 300. While the filter tube is selectively connected between the inlet pipe 100 and the outlet pipe 300 in a detachable connection, as required for maintenance/repair and replacement.

Further, as previously mentioned, the dust separation device in the example comprises two sets of filtering means, and thus the two filtering ducts in the example are referred to and detailed as first filtering duct and second filtering duct, respectively.

The detachable filter pipes and the alternative use of the two sets of filter pipes are combined for the structural design of replacement and maintenance, the filter pipes are connected with the air inlet pipe 100 and the air outlet pipe 300 through switches, and the switches can control the air circulation of the two sets of filter pipes.

The two filter tubes may have the same configuration or different configurations, subject to the actual predetermined functional design. In the present example, the description will be given by taking the same example.

The first filtering pipe 201 is composed of a first pipe body and a first filtering body inside the first pipe body. The second filtering pipe 202 is composed of a second pipe body and a second filtering body inside the second pipe body.

The first pipe body is connected to the first inlet branch pipe 101 and the first outlet branch pipe 301 through the first valve 203. The head and the tail (two ends) of the second pipe are respectively connected with the second inlet branch pipe 102 and the second outlet branch pipe 302 through a second valve 204 which is independently opened and closed with the second valve 204. The valve can be selected from valves available in various fields, such as hand valves, butterfly valves or rotary valves, etc.

The tubular bodies of the two filtering pipes can be arbitrarily selected in their specific shapes, for example, the first tubular body is in the shape of a straight pipe or a curved pipe (mainly referring to the inner lumen). Alternatively, the second pipe body is a straight pipe or a curved pipe, such as a U-shaped pipe, as shown in fig. 2. Of course, in other examples, the tube may be formed in other shapes, such as a curved shape.

The pipe body and the filter body which form the filter pipe can be fixedly connected, so that the filter pipe is an integral independent structure. However, the pipe body and the filter body are detachably connected based on the consideration of convenient maintenance, improvement of service life and utilization rate. The detachable connection can be implemented by bolting, snapping, etc.

For any particular tubular body, the dimensions are significantly smaller than those of the tubular body, so that more space can be reserved for the filtering body, which can cover most of the tubular body, thus enabling a larger filtering area to be obtained and thus increasing the filtering efficiency. Accordingly, the first of the two filters extends over part or all of the lumen cross-section of the first tube. Alternatively, the second of the two filters extends over part or all of the lumen cross-section of the second tubular body.

The filtering body may be implemented in a single body or an assembly corresponding to the two filtering tubes, and may be optional. The monomer means that the filter body is a single structure, and the assembly means that the filter body is composed of a plurality of the filter bodies. Therefore, the first filter body can be a single body or an assembly. Meanwhile, the second filter body can also be a single body or a combined body.

The following can be given as an example of a specific configuration of the filter body.

The first filter body is selected as a single body, and in particular a filter screen. Of course, in any specific scheme, a plurality of first filtering bodies which exist as single bodies can be selectively installed in the first filtering pipe, so that the first filtering bodies in a single body form are arranged in the first pipe body, and the action and the effect of multi-stage filtering can be realized. Similarly, the second filtering body can also be a single body and is a filter screen. The filter screen may be selected as a square filter screen 400 having a square structure as shown in fig. 3, or may be a round filter screen 400a having a round structure as shown in fig. 4.

The placing/mounting position of the filter screen can also be designed appropriately. In some examples, the screen is disposed along a radial cross-section of the tubular body. I.e. the screen is perpendicular to the axial direction of the tube, so that the screen surface is at an angle of approximately 90 degrees to the axial direction of the tube. In other examples, the screen may be arranged obliquely, i.e. with a substantially acute angle between the screen surface and the axial direction of the tubular body. When the filter screen is the slope form and arranges, there may be hole/clearance between the inner wall of filter screen and body, consequently, can set up a plurality of filter screens in the body, each filter screen dispersion, crisscross setting in the body to cover more regions of body, and provide bigger filter area according to this.

As an alternative, in some examples, the two filter bodies (the first filter body and the second filter body) are of a combined structure. The assembly means that the filter body is formed by combining a plurality of components, and the components with different functions are combined. For example, referring to fig. 5, the filter body 500 includes a hollow tube 501 and a screen 502 (mesh is not shown).

In terms of material, the middle hollow tube 501 and the screen 502 can be made of stainless steel to provide sufficient structural strength and to resist dust erosion.

In terms of configuration, the screen 502 is bonded to the outer wall of the hollow tube 501 and extends outwardly. Specifically, as an example, the first filter body is a combined body and includes a first hollow tube, a plurality of first screens spirally arranged in an axial direction around an outer wall of the first hollow tube. The second filter body is a combined body and comprises a second hollow pipe and a plurality of second filter screens spirally arranged around the outer wall of the second hollow pipe in the axial direction.

Therefore, in the axial direction of the hollow pipe 501, the filter screens are staggered and dispersed, and meanwhile, the projection of the radial cross section of all the filter screens can cover most of the inner cavity of the pipe body. The filter body 500 realized based on such a structure can ensure the speed of air exhaust in the pipe body, and also increases the dust adsorption area. This filtration utilizes helical structure to increase the adsorption area of dust, and middle little passageway can let filterable tail gas flow through fast.

In addition, the filter screen 502 of the filter body 500 may be detachably (threadedly, or detachably) configured, so that the filter body 500 may have an adjustable performance. That is, the number and arrangement of the filter screens and the filtering specifications (such as mesh size, outer peripheral shape and surface area) are selectively adjusted according to the actual filtering conditions, so that the filter has high use flexibility.

Therefore, based on the scheme clarified above, the dust separation device in the example of the application has the characteristics of simple structure, convenient manufacture and low manufacturing cost, and meanwhile, the dust separation device has high dust adsorption efficiency (high air purification degree), is convenient, safe and efficient to disassemble and maintain, and can also ensure the effective utilization rate of PECVD coating equipment.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. The utility model provides a dust separator, is applied to plasma enhancement mode chemical vapor deposition coating equipment which characterized in that includes:

the air inlet pipe is branched at one end to form a first air inlet branch pipe and a second air inlet branch pipe;

an outlet pipe having one end branched to form a first outlet branch pipe and a second outlet branch pipe;

the first filtering pipe consists of a first pipe body and a first filtering body inside the first pipe body;

the second filtering pipe consists of a second pipe body and a second filtering body inside the second pipe body;

the head and the tail of the first pipe body are respectively connected with the first air inlet branch pipe and the first air outlet branch pipe through a first valve;

the head and the tail of the second pipe body are connected with the second air inlet branch pipe and the second air outlet branch pipe through a second valve which is independently opened and closed with a second valve.

2. The dust separating apparatus of claim 1, wherein the first filter is a single body or a combination body.

3. The dust separating apparatus of claim 1, wherein the second filter is a single body or a combination.

4. The dust separating device of any one of claims 1 to 3, wherein the first filter body extends over part or all of the cross section of the lumen of the first tubular body.

5. The dust separating apparatus of claim 4, wherein the second filter body extends over part or all of the cross-sectional area of the lumen of the second tubular body.

6. The dust separating apparatus of claim 1, wherein the first filter body is a single body and is a screen.

7. The dust separating apparatus of claim 6, wherein the second filter body is a single body and is a screen.

8. The dust separating apparatus of claim 1, wherein the second filter body is a single body and is a screen.

9. The dust separating apparatus according to claim 1, wherein the first filter body is a combined body and includes a first hollow tube, a plurality of first screens spirally arranged in an axial direction around an outer wall of the first hollow tube;

or the second filter body is an assembly and comprises a second hollow pipe and a plurality of second filter screens spirally arranged around the outer wall of the second hollow pipe in the axial direction.

10. The dust separating device according to claim 1, 8 or 9, wherein the first pipe body is a straight pipe or a curved pipe; or the second pipe body is a straight pipe or a bent pipe;

the bent pipe includes a U-shaped pipe.

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