CN212120635U - Coating device of film for large-area perovskite solar cell module - Google Patents
Coating device of film for large-area perovskite solar cell module Download PDFInfo
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- CN212120635U CN212120635U CN202020407176.XU CN202020407176U CN212120635U CN 212120635 U CN212120635 U CN 212120635U CN 202020407176 U CN202020407176 U CN 202020407176U CN 212120635 U CN212120635 U CN 212120635U
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Abstract
The utility model discloses a coating unit of film for large tracts of land perovskite solar module, include: a base; the coating platform is arranged on the base, and a substrate of the perovskite solar cell module is fixed on the upper surface of the coating platform; a coating head which is movably arranged on the base along a coating direction and is arranged along the direction vertical to the coating direction, wherein the coating head is positioned above the coating platform and is used for coating a solution for forming a thin film on the surface of the substrate; the distance sensors are arranged at two ends of the coating head; wherein the local spacing between the coating head and the substrate is continuously adjustable. Utilize this kind of coating equipment, contrast mode commonly used, the utility model discloses can improve the film forming homogeneity on the thick base plate of large tracts of land, the parameter is stable controllable.
Description
Technical Field
The utility model relates to a novel coating device, concretely relates to coating solution forms device of film on the higher surface of base plate thickness error tolerance among the large tracts of land perovskite solar cell field.
Background
In the past few years, perovskite solar cells have been developed rapidly due to their outstanding advantages, and perovskite solar cells are simple to manufacture, have low cost, and can be used to manufacture flexible and transparent cells. Meanwhile, the band gap width is more appropriate, and the color of the battery can be controlled by changing the band gap to prepare the color battery. Moreover, the charge diffusion length is up to micron order, and the charge lifetime is longer. In addition, the perovskite crystal material can present the properties of both an n-type semiconductor and a p-type semiconductor due to the unique defect characteristics, so that the application of the perovskite crystal material is more diversified. Therefore, perovskite solar cells and related materials become research directions in the photovoltaic field, photoelectric conversion efficiency of more than 25% is obtained at present, the use cost of the solar cells can be greatly reduced, and the application prospect is very wide.
The perovskite solar cell mainly comprises a hole blocking layer, an electron transport layer, a perovskite light absorption layer, a hole transport layer and a counter electrode.
At present, the quality of the film of each layer of the perovskite battery is generally considered as the key of the whole battery, the flatness and the compactness of the perovskite battery directly influence the electron mobility, the electron service life and the photoelectric conversion performance of the perovskite battery, and the importance of the manufacturing process is conceivable.
The current mainstream large-area battery coating device is mainly non-contact coating, such as: patent document 1 slot coating and patent document 2 bar coating. At present, hard platforms such as marble are almost adopted in coating devices to ensure the levelness of the platforms and the stability of equipment during working, but perovskite batteries are not completely flexible at present, and most substrates are still rigid substrates such as conductive glass. Although the processing precision of the thickness of the conductive glass is very high and can reach +/-0.05 mm, the error is very large for the perovskite thin film with the nanometer thickness in each layer. The factors influencing the film thickness by non-contact coating mainly lie in that: 1 coating speed, 2 coating liquid amount, 3 gap between coating head and substrate. The gap adjustment is carried out before coating, so that the local gap can be controlled, but the flatness of the marble platform cannot make up for the processing error of a rigid substrate, and the gap between a coating head and the substrate cannot be equal everywhere when large-area coating is carried out; and the coating based on marble platform, carries out the patterning coating, and is difficult to automatically and accurately align the substrate and the coating head.
Prior art documents:
patent documents:
patent document 1: chinese patent publication CN 108816641A;
patent document 2: chinese patent publication CN 108580174A.
SUMMERY OF THE UTILITY MODEL
Problem that utility model will solve:
in view of the above problems, the present invention is to provide a coating apparatus capable of automatically adjusting a coating gap and a coating position.
Means for solving the problems:
in order to solve the technical problem, the utility model discloses a coating unit of film for large tracts of land perovskite solar module, include:
a base;
the coating platform is arranged on the base, and a substrate of the perovskite solar cell module is fixed on the upper surface of the coating platform;
a coating head which is movably arranged on the base along a coating direction and is arranged along the direction vertical to the coating direction, wherein the coating head is positioned above the coating platform and is used for coating a solution for forming a thin film on the surface of the substrate;
the distance sensors are arranged at two ends of the coating head;
wherein the local spacing between the coating head and the substrate is continuously adjustable.
In the present invention, both ends of the coating head may be mounted to the base through a coating head height adjuster so as to be continuously adjustable with respect to the height of the base, and/or both sides of the coating table in the coating direction may be mounted to the base through a table height adjuster so as to be continuously adjustable with respect to the height of the base, so that adjustment of a local pitch between the coating head and the substrate in the coating direction may be achieved.
In the present invention, both ends of the coating head may be mounted to the base by a coating head height adjuster so as to be continuously adjustable with respect to the height of the base, and/or both sides of the coating table in a direction perpendicular to the coating direction may be mounted to the base by a table height adjuster so as to be continuously adjustable with respect to the height of the base, so that adjustment of a local pitch between the coating head and the substrate in the direction perpendicular to the coating direction may be achieved.
In the present invention, the applicator head height adjuster may be hydraulic pressure or a screw, and/or the stage height adjuster may be hydraulic pressure or a screw.
In the present invention, the stage height adjuster may be provided along an edge of the coating stage.
Further, in the present invention, it is also possible that slide rails are provided on both sides of the base along the coating direction, the slide rails are located on both sides of the coating platform, and slide seats are slidably provided on the slide rails, the slide seats are connected to both ends of the coating head, so that the coating head can be movably mounted on the base along the coating direction.
Further, in the present invention, the coating platform may be provided with a vision alignment system, which includes a lens, an image processor, and a motor for adjusting the position of the coating platform, the image processor may process the image acquired by the lens to determine a positional deviation of the coating head with respect to the substrate, and the motor may adjust the position of the coating platform based on the positional deviation to align the substrate with the coating head.
Further, the utility model discloses in, also can, coating platform installs temperature control system, including laying in the part heating device in the coating platform, distribution are in coating platform inside upper surface just is used for the thermocouple of real time monitoring actual measurement temperature and connects in heating device and supplies control heating device to open the heating switch who closes.
In the present invention, the distance sensor may be a laser sensor or a pen sensor.
According to the utility model, the position of the coating platform is automatically adjusted through the vision alignment system, so that the relative position of the solar cell substrate fixed on the coating platform and the coating head is adjusted; when coating, the local distance between the substrate and the coating head is sensed by the distance sensor, and after feedback, the local distance is automatically adjusted to ensure that the local distance between the substrate and the coating head is kept constant in the whole coating process, thereby forming a liquid film with uniform thickness. Utilize this kind of coating equipment, contrast mode commonly used, the utility model discloses can improve the film forming homogeneity on the thick base plate of large tracts of land, the parameter is stable controllable.
Drawings
Fig. 1 is a plan view of a coating apparatus according to an embodiment of the present invention;
fig. 2 is a front view of a coating apparatus according to an embodiment of the present invention;
fig. 3 is a bottom view of a coating platform according to an embodiment of the present invention;
fig. 4 is a plan view of a coating apparatus according to another embodiment of the present invention;
fig. 5 is a front view of a coating apparatus according to another embodiment of the present invention;
fig. 6 is a cross-sectional view of a perovskite solar cell fabricated using the coating apparatus of the present invention;
reference numerals:
1 coating head
2 distance sensor
3 coating platform
4 sliding rail
5 base
6 base plate
7 vision alignment system
7a vision alignment fixing frame
8 platform distance adjuster
9 coating head height adjuster
10 marking point
11 etching line
12 conductive layer
13 hole blocking layer
14 electron transport layer
15 perovskite light-absorbing layer
16 hole transport layer
17 pairs of electrodes.
Detailed Description
The present invention is further described below in conjunction with the following embodiments and the accompanying drawings, it being understood that the drawings and the following embodiments are illustrative of the present invention only and are not limiting.
The utility model discloses can provide an easy to operate, equipment low cost does benefit to the industrialization, and is applicable to the technology and the device that carry out the coating on the hard basement of large tracts of land. The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular description of the invention, as illustrated in the accompanying drawings.
As shown in fig. 1 to 3, the utility model provides a coating device for solving the above technical problem, which is suitable for various substrate thicknesses and coating operations requiring higher flatness, especially suitable for the substrate with larger thickness deviation due to lower production precision. The coating device is provided with: a base 5; the coating device comprises a square coating platform 3, a base 5 and a substrate 6, wherein the square coating platform 3 is arranged on the base, and the upper surface of the coating platform 3 is used for fixing the perovskite solar cell module through mechanical positioning or vacuum adsorption; a platform height adjuster 8 with continuously adjustable height, which is arranged between the coating platform 3 and the base 5 and is used for adjusting the height of the coating platform 3; the coating head 1 is arranged above the coating platform 3 and is arranged along the direction vertical to the coating direction; the distance sensors 2 are arranged at two ends of the coating head 1, are tightly attached to one side of the coating head 1 close to the coating advancing direction and are used for monitoring the local distance between the coating head 1 and the substrate 6; the sliding rails 4 are arranged along the coating direction and correspond to two ends of the coating head 1; the coating head height adjuster 9 is arranged between the slide rail 4 and the coating head 1 and is used for adjusting the height of the coating head 1; and a vision alignment system 7 for confirming and adjusting the relative positions of the coating head 1 and the coating platform 3 before coating so as to align the battery substrate 6 above the coating head 1 and the coating platform 3. It should be noted that "continuously adjustable" here means that adjustment can be performed in the form of stepless adjustment.
The vision alignment system 7 is installed on the base 5, and when the substrate 6 is a transparent substrate with better transmittance, the vision alignment system 7 can be installed above or below the substrate 6; when the transmittance of the substrate 6 is poor, the vision alignment system 7 is installed at the same side of the mark point 10 with respect to the substrate 6. For example, as shown in fig. 2, since the mark point 10 is located on the lower surface of the substrate 6, the vision alignment system 7 is installed below the substrate 6, and specifically, on the lower surface of the coating platform 3; or for example, as shown in fig. 5, since the mark points 10 are located on the upper surface of the substrate 6, the vision alignment system 7 is installed above the substrate 6, and specifically, is installed by the vision alignment fixture 7a erected on the base 5. In the present embodiment, the vision alignment system 7 is a mature product, and includes a CCD camera, an industrial lens, a light source and an image processor, the object is illuminated by the light source, the CCD camera and the industrial lens are used to take a picture to obtain images of the mark points 10 located at the four corners of the substrate 6, and then the images are analyzed by the image processor. Since the relative position of the lens of the vision alignment system 7 and the coating platform 3 is known, the actual position of the substrate 6 relative to the coating platform 3 can be obtained by performing position calculation on the image of the mark point 10, and then the position deviation of the coating head 1 and the substrate 6 can be obtained by comparing the actual position with the preset position of the coating head 1 relative to the coating platform 3. The vision alignment system 7 further comprises a motor which is arranged on the coating platform 3 and used for adjusting the position of the coating platform 3, and the position of the coating platform 3 is adjusted through the motor based on the position deviation so as to align the substrate 6 with the coating head 1, so that the rapid and high-precision positioning is realized.
The vision alignment fixing frame 7a includes four columns and four beams connecting adjacent columns, as shown in fig. 4 and 5, two ends of one pair of beams (for example, a pair of beams at the top and bottom in fig. 4) that are opposite and parallel can translate along another pair of beams (for example, a pair of beams at the left and right in fig. 4) that are opposite and parallel, a screw rod that is arranged along the beam is arranged on a movable pair of beams, four lenses of the vision alignment system 7 are arranged on the movable pair of beams through the screw rod, and the lenses can move along the beams through the screw rod, so that the vision alignment fixing frame is applicable to substrates with different sizes. The movable cross member is not limited to the upper and lower pair of cross members in the above example, and a mode in which the upper and lower pair of cross members are fixed and the left and right pair of cross members are movable may be employed. And the height of the visual alignment fixing frame 7a is higher than that of the coating head 1 so as to prevent the lens from colliding with the coating head 1 when the crossbeam moves. The visual alignment fixing frame 7a is suitable for the condition that the mark point 10 is above the substrate 6 and the transmittance of the substrate 6 is poor. The vision alignment fixture 7a is more suitable for coating by moving the coating head 1, because the lens of the vision alignment system 7 is not directly mounted under the coating platform 3, and the vision alignment requires the premise that the relative position between the coating platform 3 and the base 5 is known. The visual alignment holder 7a may be applied to the coating by moving the coating table 3, but a position sensor may be additionally provided to check the relationship between the coating table 3 and the base 5. When the device is used, firstly, the position of the lens is adjusted to the area where the mark point 10 can be observed according to the size of the substrate 6 and then fixed, at the moment, the position of the lens relative to the base 5 is known, and because the coating platform 3 is not moved during coating and the coating head 1 moves, the relative position of the coating platform 3 and the base 5 is known, so that the relative position of the lens and the coating platform is obtained, and the subsequent positioning steps are the same as above and are not repeated.
The coating platform 3 is mounted on a base 5. The coating head 1 is mounted on the base 5 and positioned above the coating platform 3, and the coating head 1 is arranged along the direction vertical to the coating direction and can move along the coating direction, so as to coat the solution for forming the film on the surface of the substrate. The distance sensors 2 are provided at both ends of the coating head 1 for monitoring a local distance between the coating head 1 and the substrate 6, and specifically, the distance sensors 2 are provided at a side of the coating head 1 close to a coating advancing direction. And the local distance between the coating head 1 and the substrate 6 is continuously adjustable. In the coating process, the coating head 1 and the coating platform 3 move relatively along the coating direction, the local distance between the coating head 1 and the substrate 6 is monitored in real time through the distance sensor 2, and is adjusted when the local distance is too large or too small, so that the distance between the coating head 1 and the substrate 6 is equal everywhere in the whole coating process, the thickness of a coated liquid film is uniform, and then the film with uniform thickness is obtained through processing. Preferably, the distance sensor is a laser sensor or a pen sensor. Preferably, the material of the coating platform 3 is teflon, or fluoroplastic, stainless steel 316, anodized aluminum or titanium alloy. Since the perovskite precursor solution is chemically corrosive, the base can be prevented from being chemically corroded in the operation process by selecting the materials. Preferably, the exit orifice of the coating head 1 is discontinuous to enable direct patterning of the coating film. The coating head 1 is a slit coating head, a scraper coating head or a wire rod coating head. The coating head 1 is made of materials resistant to polar solvent corrosion, acid and alkali and strong oxidation reducing agents, and can be made of glass, stainless steel 316, anodic aluminum oxide, titanium alloy, polytetrafluoroethylene or fluorine-containing plastic.
The coating head height adjusters 9 are provided at both ends of the coating head 1, the coating head height adjusters 9 allow the coating head 1 to move in a direction perpendicular to the coating table 3 while the coating head 1 moves in the coating direction to perform the coating work, and the two coating head height adjusters 9 at both ends of the coating head 1 can independently perform height adjustment according to the detection results of the corresponding distance sensors 2, respectively. A plurality of level height adjusters 8 are disposed at the edge of the coating level 3, and each level height adjuster 8 can independently perform height adjustment according to the detection result of the distance sensor 2. Since the thickness error of the thick substrate can reach more than 50 micrometers, even when the surface of the coating platform 3 is horizontal, the coating surface of the substrate 6 is not necessarily horizontal actually, usually, unevenness may be front-back height difference, left-right height difference or middle-periphery height difference according to the coating direction, and all are continuously changed, and the amplitude is micrometer, so that the levelness of the substrate 6 needs to be finely adjusted in real time in the coating process according to the detection result of the distance sensors 2, the two distance sensors 2 are both connected to a control computer, and the control computer is respectively connected with and controls each coating head height adjuster 9 and each platform height adjuster 8.
Specifically, when the detection result of one of the two distance sensors 2 at both ends of the coating head 1 does not coincide with the set parameter, it is considered that there is unevenness in the direction perpendicular to the coating direction (i.e., the left-right direction), and at this time, it is preferable to adjust the coating head height adjuster 9 so that the height of the corresponding end portion of the coating head 1 is lowered if the detection result is larger than the set parameter, and conversely, the height of the end portion of the coating head 1 is raised if the detection result is smaller than the set parameter until the detection result coincides with the set parameter. In addition to the coating head height adjuster 9, the height of the coating surface plate 3 may be adjusted by surface plate height adjusters 8 provided on both sides of the coating surface plate 3 in the coating direction to adjust a local distance between the coating head and the substrate, and the detection result may be made to coincide with a set parameter. When the detection results of the two distance sensors 2 are not consistent with the set parameters in the coating process, it is determined that there is unevenness in the coating direction (i.e., the front-rear direction), and at this time, it is preferable to use the adjustment platform height adjuster 8, to raise the height of the coating platform 3 on either side in the coating direction if the detection result is greater than the set parameters, and to lower the height of the coating platform 3 on either side in the coating direction if the detection result is less than the set parameters. In addition to the use of the level height adjuster 8, the height of the coating head 1 can be adjusted by synchronously raising or lowering two coating head height adjusters 9 provided at both ends of the coating head 1 to adjust the local distance between the coating head and the substrate, and the detection result can be made to coincide with the set parameter.
In general, the adjustment of the distance between the coating head 1 and the substrate 6 needs to be performed simultaneously in both the coating direction and in the direction perpendicular to the coating direction, and therefore, it is preferable to arrange the coating apparatus in such a manner that both ends of the coating head 1 are continuously height-adjustable with respect to the base 5, and/or that the four ends of the coating platform in both the above-mentioned directions are continuously height-adjustable with respect to the base 5. Preferably, the applicator head height adjuster 9 is hydraulic or lead screw and/or the platform height adjuster 8 is hydraulic or lead screw. In the present embodiment, the coating table 3 is square, and the table height adjusters 8 are provided at four corners of the square coating table 3, thereby simultaneously realizing adjustment of local pitches between the coating head 1 and the substrate 6 in the coating direction and in the direction perpendicular to the coating direction.
The slide rails 4 are arranged on two sides of the base 5 along the coating direction and located on two sides of the coating platform 3, and the slide rails 4 are slidably provided with slide seats which are connected to two ends of the coating head 1, so that the coating head 1 can be movably mounted on the base 5 along the coating direction. In the coating process, the sliding seat slides along the sliding rail 4, so that the coating head 1 and the coating platform 3 move relatively along the sliding rail 4. Preferably, both ends of the coating head 1 are mounted to the slide base by means of a coating head height adjuster 9, so that the adjustment of the local spacing between the coating head 1 and the substrate 6 in the coating direction and perpendicular to the coating direction is achieved simultaneously. The coating head and/or the coating platform are/is internally provided with a servo motor, the servo motor is controlled by a computer to ensure that the relative movement speed of the coating head 1 and the coating platform 3 along the slide rail 4 is continuously adjustable, and the thickness of a liquid film is controlled by combining the adjustment of the solution amount of the perovskite precursor. The coating platform is also provided with a temperature control system, the temperature control system comprises a heating device arranged in part of the coating platform, a thermocouple distributed on the upper surface inside the platform and used for monitoring the actual measurement temperature in real time, and a heating switch connected to the heating device and used for controlling the heating device to be turned on and off, wherein the heating device is a heating pipe, and the heating device is a mature product which can be directly purchased. The heating switch may be a temperature setting button or a touch screen. The provision of a temperature control system makes it suitable for use with some very temperature-coated perovskite precursor solutions. Further, the temperature control system enables the temperature uniformity of the coating platform 3 to be +/-1 ℃ and the temperature control precision to be +/-1 ℃.
In this embodiment, the substrate 6 is fixed on the coating stage 3 by mechanical positioning or vacuum suction, and the relative position between the substrate 6 and the coating head 1, including left-right alignment and angular deflection angle alignment, is automatically corrected by the vision alignment system 7. And then the coating head 1 and the coating platform 3 perform relative displacement along the slide rail 4 to start coating operation, in the coating process, the local distance between the substrate 6 and the coating head 1 is monitored in real time through the distance sensor 2, and after feedback, the distance between the substrate 6 and the coating head 1 is equal everywhere through the automatic adjustment platform distance adjuster 8 and/or the coating head height adjuster 9, so that a precursor liquid film with uniform thickness is formed, a high-quality perovskite thin film is formed after heat treatment, and coating gap errors caused by the processing precision of a large-area hard thick substrate are avoided.
As shown in fig. 1 to 6, the coating method of the coating apparatus based on the thin film for a large-area perovskite solar cell module of the present invention includes the steps of:
1) the mark points 10 are made on the conductive substrate by a laser etching machine or a chemical etching method, so that the relative position between the mark points and the coating head is convenient to position in the later period.
2) Blow dry after rinsing electrically conductive basement with the washing liquid use on electrically conductive basement's the base plate 6 the utility model discloses each layer of coating equipment preparation includes hole barrier layer 13, electron transport layer 14, perovskite light-absorption layer 15, hole transport layer 16 and counter electrode 17 layer in proper order.
3) The preparation method comprises the following steps: the substrate 6 is placed on the coating platform 3 by means of vacuum or mechanical positioning, coating parameters including but not limited to coating gap, coating speed and coating amount are set, automatic operation is started, the visual alignment system automatically searches for the mark point 10 on the substrate 6, the relative position of the substrate 6 and the coating head 1 is adjusted, the coating platform 3 and/or the coating head 1 automatically adjusts the coating gap (i.e. the distance between the coating head 1 and the substrate 6), the change of the coating gap is fed back in real time by the distance sensor 2 in the coating process, and the coating gap is further adjusted according to the change, so that a uniform film is prepared, and then annealing is carried out.
Wherein the cleaning solution comprises acetone, an alkaline detergent, deionized water and acetone, and is sequentially subjected to ultrasonic cleaning(ii) a The conductive substrate is FTO glass; the hole blocking layer is TiO2The compact layer is prepared by adopting the coating machine of the utility model through perovskite precursor solution containing tetraisopropyl titanate, acetylacetone, hydrochloric acid, ethanol and water; the electron transmission layer is formed by coating nano titanium dioxide slurry; the hole transport layer is formed by coating NiOxAnd the counter electrode is formed by coating conductive solution; the perovskite precursor solution is prepared by mixing lead iodide and CH3NH3Adding I powder and dimethyl sulfoxide into N, N-dimethylformamide, and stirring to obtain CH3NH3PbI3A perovskite precursor solution.
By means of the method, the alternate use of the acetone and the alkali detergent can effectively remove surface stains, including oil stains, fingerprints and other difficult-to-clean dirt. Furthermore, compared with other transparent conductive glass, such as ITO, AZO and the like, FTO glass has higher heat resistance and chemical resistance. And, TiO2The compact layer can prevent the recombination of holes and electrons in the battery at the current collecting electrode, so that the photoelectric conversion efficiency of the battery is improved. Choose precursor solution for use, adopt the utility model discloses coating equipment films, and the film is fine and close, level and smooth, and is favorable to the enlarging of film forming process, is applicable to and films on large tracts of land base plate.
The present invention will be described in further detail with reference to specific examples.
Example 1
1) And etching the FTO conductive layer 12 on the substrate 6 by using a laser etching machine to form a mark point 10 for visual alignment, wherein an etching line 11 is used for distinguishing the anode and the cathode of the battery.
2) The substrate 6 is cleaned. And ultrasonically cleaning the substrate for 6 ten minutes by using acetone, an alkaline detergent, deionized water and acetone respectively, and then drying.
3）TiO2And (4) preparing a compact layer. Preparing a TiO2 dense layer (a hole blocking layer 13) on the FTO conductive layer 12, wherein a precursor solution solvent is ethanol, and the precursor solution solvent comprises the following components: tetraisopropyl titanate (0.3 mol/L), acetylacetone (0.45 mol/L), hydrochloric acid (0.09 mol/L), and water (1.8 mol/L). Absorbing the precursor solution, and dripping the precursor solution on a cleaned FTO substrateThe solution was spread over the entire FTO surface, and a film was formed by spin coating at a speed of 3000rpm for 20 seconds. Then sintered in a muffle furnace at 510 ℃ for 30 min.
4）TiO2And (3) preparing a mesoporous layer. On the TiO2 compact layer (hole barrier layer 13), the TiO is prepared by screen printing nano titanium dioxide slurry2The mesoporous layer serves as an electron transport layer 14 and is then sintered in a muffle furnace at 510 ℃ for 30 min.
5) And (3) preparing a perovskite precursor solution. 461 mg of lead iodide (PbI) is measured2) 159 mg of CH3NH3Powder I, 78 mg of dimethyl sulfoxide was mixed with 600 mg of N, N-Dimethylformamide (DMF), and the mixture was stirred at room temperature for 1 hour to form CH3NH3PbI3A perovskite precursor solution.
6) And (4) preparing a perovskite light absorption layer. Use the utility model discloses carry on coating rod's coating unit and coat. And (3) placing the substrate 6 on the coating platform 3, fixing by vacuum adsorption, automatically aligning by using the mark points, dropwise adding the precursor solution between the coating head 1 and the substrate 6, operating the coating device, and performing heat treatment after wet film coating to obtain the perovskite light-absorbing layer 15.
7) And preparing a hole transport layer. Screen printing NiO on the perovskite light absorption layer 15xThe slurry serves as the hole transport layer 16.
8) And preparing a counter electrode. And (3) on the hole transport layer 16, screen printing carbon paste is used as a counter electrode 17, and the counter electrode 17 is in contact with the perovskite light absorption layer 15 of the previous unit and the conducting layer 12 of the next unit to form an internal series structure, so that the perovskite solar cell with the series structure is obtained.
The utility model discloses can satisfy the unable requirement that satisfies of following 2 point coating machine on the market simultaneously:
1. the thickness of the thick substrate has errors, if the coating is carried out in fixed gaps, the thickness of the wet film on the surface of the coated finished product is different everywhere, and the coating of the utility model can ensure that the thickness of the wet film of the coated finished product tends to be equal everywhere;
2. patterning coating is higher to base plate and coating head relative position requirement, and the naked eye is counterpointed usually and is placed, the precision poor with consuming time long, the utility model discloses a thereby vision counterpoint system realizes quick, the location of high accuracy compensaties this problem.
Example 2
The coating device of the utility model is used for respectively manufacturing TiO2Dense layer, TiO2Mesoporous layer, CH3NH3PbI3A light absorbing layer, a CuSCN hole transport layer and a counter electrode.
The coating steps 1) to 2) are the same as in example 1, and are not described herein.
3）TiO2And (4) preparing a compact layer. Preparing a TiO2 dense layer (a hole blocking layer 13) on the FTO conductive layer 12, wherein a precursor solution solvent is ethanol, and the precursor solution solvent comprises the following components: tetraisopropyl titanate (0.3 mol/L), acetylacetone (0.45 mol/L), hydrochloric acid (0.09 mol/L), and water (1.8 mol/L). Use the utility model discloses carry on coating unit of silk stick coating head and coat, adopt the blade coating method film forming, put base plate 6 on coating platform 3, vacuum adsorption is fixed, utilize mark point automatic alignment, with precursor solution dropwise add between coating head 1 and base plate 6, coating speed 5mm/s, coating clearance 0.3mm, dropping liquid volume 200 mu L. Then sintered in a muffle furnace at 510 ℃ for 30 min.
4）TiO2And (3) preparing a mesoporous layer. Preparing TiO by coating nanometer titanium dioxide suspension on a TiO2 dense layer (a hole barrier layer 13) by blade2Mesoporous layer is as electron transport layer 14, uses the utility model discloses carry on silk stick coating head, put base plate 6 on coating platform 3, vacuum adsorption is fixed, utilize mark point automatic alignment, with nanometer titanium dioxide suspension dropwise add between coating head 1 and base plate 6, coating speed 5mm/s, coating clearance 0.3mm, dropping liquid volume 200 mu L. Then sintered in a muffle furnace at 510 ℃ for 30 min.
5) And (3) preparing a perovskite precursor solution. 461 mg of lead iodide (PbI) is measured2) 159 mg of CH3NH3Powder I, 78 mg of dimethyl sulfoxide was mixed with 600 mg of N, N-Dimethylformamide (DMF), and the mixture was stirred at room temperature for 1 hour to form CH3NH3PbI3A perovskite precursor solution.
6) And (4) preparing a perovskite light absorption layer. Use the utility model discloses carry on the scraper blade and scribble the leftover of bolt of cloth and scribble, put base plate 6 on coating platform 3, vacuum adsorption is fixed, utilize mark point automatic alignment, with precursor solution dropwise add scribble leftover of cloth 1 and base plate 6 between, the leftover of bolt of cloth and base plate angle modulation to 10 are scribbled to the scraper blade, and coating speed 2.5mm/s, coating clearance 0.3mm, dropping liquid volume 160 ul. The coating apparatus was operated, and heat treatment was performed after the wet film coating was completed to obtain the perovskite light absorbing layer 15.
7) And preparing a hole transport layer. On perovskite light-absorbing layer 15, use the utility model discloses carry on the silk stick and scribble the leftover of bolt of cloth and scribble, knife coating CuSCN's ethyl sulfide solution is as hole transport layer 16. The substrate 6 is placed on the coating platform 3, vacuum adsorption and fixation are carried out, the mark points are used for automatic alignment, and the ethyl sulfide solution of CuSCN is dripped between the coating head 1 and the substrate 6, the coating speed is 5mm/s, the coating gap is 0.3mm, and the dripping amount is 200 mul.
8) And preparing a counter electrode. On hole transport layer 16, use the utility model discloses the silk stick coating head that carries on coats, and blade coating carbon thick liquids is as counter electrode 17, puts base plate 6 on coating platform 3, and vacuum adsorption is fixed, utilize mark point automatic alignment, and the carbon thick liquids dropwise add between coating head 1 and base plate 6, and coating speed 2mm/s, coating clearance 0.3mm, dropping liquid volume 200 mul. The counter electrode 17 contacts both the perovskite light absorption layer 15 of the former unit and the conductive layer 12 of the latter unit to form an internal series structure, so that the perovskite solar cell of the series structure is obtained.
Will in embodiment 2 the utility model discloses applied each layer coating, except that the light-absorbing layer in embodiment 1, made with the screen printing technology, the raw materials loss is the utility model discloses a hundredfold, and the unable assurance of thickness homogeneity. This embodiment light-absorbing layer uses the utility model discloses carried on the scraper blade and scribbled the leftover of bolt of cloth, this is scribbled leftover of bolt of cloth and has utilized liquid surface tension, can scribble the thinner wet film of thickness.
Comparative example 1
The coating is performed using a conventional coating apparatus without a distance sensor. The specific coating procedure was the same as in example 1. In appearance, according to the coating apparatus of embodiments 1 and 2 of the present invention and the battery manufactured by the corresponding coating process, the front color of the light absorbing layer is uniform and flawless, while the battery manufactured by the coating apparatus of comparative example 1 has fine texture or color difference.
Prove from this the utility model discloses can satisfy the unable requirement that satisfies of coating machine on following 2 points market simultaneously:
1. the thickness of the thick substrate has errors, if the coating is carried out in fixed gaps, the thickness of the wet film on the surface of the coated finished product is different everywhere, and the coating of the utility model can ensure that the thickness of the wet film of the coated finished product tends to be equal everywhere;
2. patterning coating is higher to base plate and coating head relative position requirement, and the naked eye is counterpointed usually and is placed, the precision poor with consuming time long, the utility model discloses a thereby vision counterpoint system realizes quick, the location of high accuracy compensaties this problem.
The above embodiments have been described in further detail to illustrate the objects, technical solutions and advantages of the present invention, and it should be understood that the above is only a specific embodiment of the present invention, and is not limited to the scope of the present invention, and the present invention can be embodied in various forms without departing from the spirit of the essential characteristics of the present invention, so that the embodiments of the present invention are intended to be illustrative and not restrictive, since the scope of the present invention is defined by the claims rather than the specification, and all changes that fall within the range defined by the claims or the range equivalent thereto are intended to be embraced by the claims. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. An apparatus for coating a thin film for a large-area perovskite solar cell module, comprising:
a base;
the coating platform is arranged on the base, and a substrate of the perovskite solar cell module is fixed on the upper surface of the coating platform;
a coating head which is movably arranged on the base along a coating direction and is arranged along the direction vertical to the coating direction, wherein the coating head is positioned above the coating platform and is used for coating a solution for forming a thin film on the surface of the substrate;
the distance sensors are arranged at two ends of the coating head;
wherein the local spacing between the coating head and the substrate is continuously adjustable.
2. The apparatus for coating a thin film for a large-area perovskite solar cell module as claimed in claim 1, wherein both ends of the coating head are mounted to the base by a coating head height adjuster so as to be continuously adjustable in height with respect to the base, and/or both sides of the coating stage in the coating direction are mounted to the base by a stage height adjuster so as to be continuously adjustable in height with respect to the base, to achieve adjustment of a local pitch between the coating head and the substrate in the coating direction.
3. The apparatus for coating a thin film for a large-area perovskite solar cell module as claimed in claim 1, wherein both ends of the coating head are mounted to the base by coating head height adjusters so as to be continuously adjustable in height with respect to the base, and/or the coating platform is mounted to the base on both sides perpendicular to a coating direction by platform height adjusters so as to be continuously adjustable in height with respect to the base, to achieve adjustment of a local pitch between the coating head and the substrate in a direction perpendicular to the coating direction.
4. The apparatus for coating a thin film for a large area perovskite solar cell module as claimed in claim 2 or 3, wherein the coating head height adjuster is hydraulic pressure or screw rod, and/or the platform height adjuster is hydraulic pressure or screw rod.
5. The apparatus for coating a thin film for a large area perovskite solar cell module as claimed in claim 2 or 3, wherein the mesa height adjuster is provided along an edge of the coating mesa.
6. The apparatus for coating a thin film for a large-area perovskite solar cell module as claimed in claim 1, wherein slide rails are provided on both sides of the base in the coating direction, the slide rails are provided on both sides of the coating platform, and slide blocks are slidably provided on the slide rails, the slide blocks are connected to both ends of the coating head, so that the coating head is movably mounted on the base in the coating direction.
7. The apparatus for coating a thin film for a large-area perovskite solar cell module as claimed in claim 1, wherein the coating platform is mounted with a vision alignment system comprising a lens, an image processor and a motor for adjusting the position of the coating platform, the image processor processes the image obtained by the lens to determine the positional deviation of the coating head relative to the substrate, and the motor adjusts the position of the coating platform based on the positional deviation to align the substrate with the coating head.
8. The apparatus for coating a thin film for a large-area perovskite solar cell module as claimed in claim 1, wherein the coating platform is equipped with a temperature control system comprising a heating device disposed in a part of the coating platform, a thermocouple disposed on the upper surface of the coating platform for real-time monitoring of measured temperature, and a heating switch connected to the heating device for controlling the heating device to be turned on or off.
9. The apparatus for coating a thin film for a large-area perovskite solar cell module as claimed in claim 1, wherein the distance sensor is a laser sensor or a pen sensor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020407176.XU CN212120635U (en) | 2020-03-26 | 2020-03-26 | Coating device of film for large-area perovskite solar cell module |
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| CN202020407176.XU CN212120635U (en) | 2020-03-26 | 2020-03-26 | Coating device of film for large-area perovskite solar cell module |
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| CN212120635U true CN212120635U (en) | 2020-12-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111282772A (en) * | 2020-03-26 | 2020-06-16 | 中国科学院上海硅酸盐研究所 | Coating device and coating method for thin film for large-area perovskite solar cell module |
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2020
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111282772A (en) * | 2020-03-26 | 2020-06-16 | 中国科学院上海硅酸盐研究所 | Coating device and coating method for thin film for large-area perovskite solar cell module |
| CN111282772B (en) * | 2020-03-26 | 2023-09-08 | 中国科学院上海硅酸盐研究所 | Coating device and coating method for thin film for large-area perovskite solar cell module |
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