CN212115605U - Microphone and audio equipment - Google Patents
Microphone and audio equipment Download PDFInfo
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- CN212115605U CN212115605U CN202021160423.7U CN202021160423U CN212115605U CN 212115605 U CN212115605 U CN 212115605U CN 202021160423 U CN202021160423 U CN 202021160423U CN 212115605 U CN212115605 U CN 212115605U
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- 244000126211 Hericium coralloides Species 0.000 claims abstract description 14
- 239000012528 membrane Substances 0.000 claims abstract description 14
- 239000003990 capacitor Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000013016 damping Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
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Abstract
The utility model discloses a microphone and audio equipment, the microphone comprises a substrate and a vibrating diaphragm component which is positioned above the substrate; the diaphragm assembly includes: the vibrating diaphragm, the vibrating diaphragm comb teeth, the fixed comb teeth and the driving sheet; the vibrating diaphragm comb teeth are connected with the vibrating diaphragm; a comb tooth air gap is formed between the fixed comb tooth and the vibrating diaphragm comb tooth, the vibrating diaphragm is used for driving the vibrating diaphragm comb tooth to move along the vibrating direction of the vibrating diaphragm, and the vibrating diaphragm and the fixed comb tooth form a variable capacitor; the driving sheet is arranged on the vibrating membrane and used for driving the vibrating membrane to displace in the vibrating direction, and/or the driving sheet is arranged on the fixed comb teeth and used for driving the fixed comb teeth to displace in the vibrating direction, so that the capacitance value of the variable capacitor is within a preset range. The utility model discloses technical scheme is when the vibrating diaphragm amplitude is great, and the sensitivity that the microphone detected is high.
Description
Technical Field
The utility model relates to a sensor technical field, in particular to microphone and applied this microphone's audio equipment.
Background
At present, part of microphones sense vibration of a vibrating diaphragm by arranging comb-teeth electrodes, specifically sense external sound pressure signals through the vibrating diaphragm, and displacement occurs between a moving electrode and a fixed electrode which are connected with the vibrating diaphragm, so that capacitance change between the moving electrode and the fixed electrode is caused, and a changed sensing signal is processed and output. Fig. 1 is a graph showing the variation of the relative surface area and capacitance between the moving electrode and the fixed electrode in the microphone of the prior art. As can be seen from fig. 1, since the relative surface area between the moving electrode and the fixed electrode affects the capacitance value, and the relationship between the relative surface area and the capacitance value is a nonlinear change, when the vibration amplitude of the diaphragm is large and the relative surface area is lower than a certain value, the change of the relative surface area has a small effect on the capacitance value, so that the change rate of the output sensing signal is low, and the sensitivity of the microphone is reduced.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a microphone aims at solving the microphone that has tooth comb motor and when vibrating diaphragm vibration amplitude is great, detects the technical problem that the sensitivity reduces.
In order to achieve the above object, the present invention provides a microphone, including: the vibration isolator comprises a substrate and a vibration diaphragm assembly positioned above the substrate; the diaphragm assembly includes:
a vibrating membrane;
the vibrating diaphragm comb teeth are connected with the vibrating diaphragm;
the vibrating diaphragm comb teeth are used for driving the vibrating diaphragm comb teeth to move along the vibrating direction of the vibrating diaphragm, and the vibrating diaphragm and the fixed comb teeth form a variable capacitor;
the driving sheet is arranged on the vibrating membrane and used for driving the vibrating membrane to displace in the vibrating direction, and/or the driving sheet is arranged on the fixed comb teeth and used for driving the fixed comb teeth to displace in the vibrating direction, so that the capacitance value of the variable capacitor is within a preset range.
Preferably, the diaphragm includes a main body portion and a plurality of connecting arms, the plurality of connecting arms connect the substrate and the main body portion, and the driving piece is provided on the connecting arms.
Preferably, the driving plate is arranged at one end of the connecting arm far away from the main body part.
Preferably, the number of the vibrating diaphragm comb teeth and the number of the driving sheets are multiple, the vibrating diaphragm comb teeth are arranged in pairs, and the driving sheets are arranged in pairs.
Preferably, the main body part comprises two oppositely arranged first connecting edges and two oppositely arranged second connecting edges; the vibrating diaphragm comb tooth with the quantity of linking arm is two, two the vibrating diaphragm comb tooth respectively with two first connecting edge is connected, two the linking arm respectively with two the second is connected the limit and is connected.
Preferably, the main body part comprises a plurality of outer edges, and the joints of the outer edges form top angles; the vibrating diaphragm comb teeth are connected with the outer edge, the connecting arms are connected with the top corner, the number of the vibrating diaphragm comb teeth and the number of the connecting arms are multiple, and the vibrating diaphragm comb teeth and the connecting arms are wound around the main body portion and are arranged at intervals in sequence.
Preferably, the number of the driving pieces is multiple, and the multiple driving pieces are respectively arranged in one-to-one correspondence with the connecting arms.
Preferably, the diaphragm comb teeth include a plurality of moving teeth connected to the diaphragm, a tooth gap is formed between adjacent moving teeth, and the fixed comb teeth include a plurality of fixed teeth inserted into the tooth gap.
Preferably, the driving piece is a piezoelectric driving piece or a thermal driving piece.
The utility model discloses still provide an audio equipment, include as above the microphone.
The utility model discloses set up fixed broach and vibrating diaphragm broach and form electric capacity, compare in the microphone that sets up the backplate among the prior art, the utility model discloses a vibration detection mode of fixed broach and vibrating diaphragm broach makes the product damping reduce about an order of magnitude to show the SNR that has promoted the microphone; through setting up the driver blade drive vibrating diaphragm and removing to can be so that the relative surface area between vibrating diaphragm broach and the fixed broach is in predetermineeing the within range, in order to guarantee that variable capacitance's capacitance change rate is greater than the default, make when the vibrating diaphragm amplitude is great, the sensitivity that the microphone detected is high.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a graph showing the variation of the relative surface area and capacitance between a moving electrode and a fixed electrode in a prior art microphone;
fig. 2 is a schematic perspective view of a microphone according to an embodiment of the present invention;
fig. 3 is a schematic top view of another embodiment of the microphone of the present invention;
fig. 4 is a schematic top view of a microphone according to another embodiment of the present invention.
The reference numbers illustrate:
| 1 | |
11 | |
| 13 | |
3 | Vibrating |
| 31 | |
311 | |
| 3111 | First connecting |
3113 | Second connecting |
| 3115 | |
3117 | |
| 313 | Connecting arm | 33 | Vibrating |
| 331 | |
35 | Fixed |
| 351 | Fixed |
37 | Driving sheet |
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
The utility model provides a microphone.
Referring to fig. 2, the utility model discloses technical scheme's microphone includes: a substrate 1 and a diaphragm assembly 3 positioned above the substrate 1; the diaphragm assembly 3 includes: the vibrating diaphragm comb teeth 33 are connected with the vibrating diaphragm 31; a comb air gap is formed between the fixed comb 35 and the vibrating diaphragm comb 33, the vibrating diaphragm 31 is used for driving the vibrating diaphragm comb 33 to move along the vibrating direction of the vibrating diaphragm 31, and the vibrating diaphragm 31 and the fixed comb 35 form a variable capacitor; the driving plate 37 is disposed on the diaphragm 31 and is used for driving the diaphragm 31 to displace in the vibration direction, and/or the driving plate 37 is disposed on the fixed comb teeth 35 and is used for driving the fixed comb teeth 35 to displace in the vibration direction, so that the capacitance value of the variable capacitor is within a preset range.
Specifically, a vibration signal or a pressure signal is input from the outside, the diaphragm 31 is excited by the vibration signal or the pressure signal to vibrate, the diaphragm comb teeth 33 vibrate along with the diaphragm 31, and the relative surface area between the fixed comb teeth 35 and the diaphragm comb teeth 33 changes, so that the capacitance value of the variable capacitor formed between the fixed comb teeth 35 and the diaphragm comb teeth 33 changes, and then an electric signal is obtained through further signal processing and transmitted to an external electronic device. The driving plate 37 applies a directional excitation signal to the diaphragm 31 to reduce the vibration amplitude of the diaphragm 31, so that the relative surface area between the diaphragm comb teeth 33 and the fixed comb teeth 35 is maintained within a preset range to ensure that the capacitance change rate of the variable capacitor is greater than a preset value, and further generates and outputs an induction signal according to the capacitance value of the variable capacitor and the excitation signal input to the driving plate 37. In one embodiment, the predetermined range is a relative surface area corresponding to the x-axis shown in fig. 1. The driving plate 37 is a piezoelectric driving plate or a thermal driving plate to drive the diaphragm comb 33 to move by a piezoelectric principle or a thermal driving principle.
In another embodiment, the driving plate 37 is provided to the fixed comb teeth 35 and is used to drive the fixed comb teeth 35 to displace in the vibration direction. In the same principle as the embodiment in which the driving plate 37 is disposed on the diaphragm 31, the driving plate 37 drives the fixed comb teeth 35 to move, so that the relative surface area between the diaphragm comb teeth 33 and the fixed comb teeth 35 is maintained within a preset range, thereby ensuring that the capacitance change rate of the variable capacitor is greater than a preset value. Of course, the driving plate 37 may be plural and disposed on the vibrating membrane 31 and the fixed comb-tooth 35 respectively to drive the vibrating membrane 31 and the fixed comb-tooth 35 respectively, and maintain the relative surface area between the vibrating membrane comb-tooth 33 and the fixed comb-tooth 35 within a preset range.
The utility model discloses set up fixed broach 35 and vibrating diaphragm broach 33 and form electric capacity, compare in the microphone that sets up the backplate among the prior art, the utility model discloses a vibration detection mode through fixed broach 35 and vibrating diaphragm broach 33 makes the product damping reduce about an order of magnitude to show the SNR that has promoted the microphone; the driving sheet 37 is arranged to drive the vibrating membrane 31 to move, so that the relative surface area between the vibrating membrane comb teeth 33 and the fixed comb teeth 35 is within a preset range, the capacitance change rate of the variable capacitor is ensured to be larger than a preset value, and the sensitivity of microphone detection is high when the vibrating membrane amplitude is large.
Further, the diaphragm comb teeth 33 include a plurality of moving teeth 331 connected to the diaphragm 31, a tooth gap is formed between adjacent moving teeth 331, and the fixed comb teeth 35 include a plurality of fixed teeth 351 inserted into the tooth gap. Specifically, a fixed tooth 351 may be inserted into a tooth gap to form a structure in which the moving teeth 331 and the fixed tooth 351 are sequentially staggered, thereby increasing the surface area oppositely disposed between the diaphragm comb teeth 33 and the fixed comb teeth 35.
Further, the diaphragm 31 includes a main body portion 311 and a plurality of connecting arms 313, the plurality of connecting arms 313 connecting the substrate 1 and the main body portion 311, the driving piece 37 being provided on the connecting arms 313. The driving plate 37 drives the connecting arm 313 to effect vibration of the diaphragm 31. Still further, the driving plate 37 is provided at an end of the connecting arm 313 remote from the main body portion 311. The substrate 1 comprises a support frame 11 and an insulating layer 13 arranged on the support frame 11, a connecting arm 313 connects the insulating layer 13 and a main body part 311, the main body part 311 is suspended on the support frame 11, and fixed comb teeth 35 are arranged on the support frame 11 through the insulating layer 13, so that the fixed comb teeth 35 and the vibrating diaphragm comb teeth 33 are both insulated from the support frame 11. Since one end of the driving arm is connected to the insulating layer 13 and the other end is connected to the main body 311, the displacement amplitude of the end connected to the main body 311 is larger than that of the end connected to the insulating layer 13, and the driving plate 37 is disposed at the end of the connecting arm 313 far from the main body 311, so that the main body 311 can be influenced by inputting a small excitation signal to the driving plate 37.
Referring to fig. 3 and 4, the number of the diaphragm comb teeth 33 and the driving plates 37 is plural, the plural diaphragm comb teeth 33 are arranged in pairs, and the plural driving plates 37 are arranged in pairs. In this embodiment, the number of the diaphragm comb teeth 33 and the driving plate 37 is not limited, and a person skilled in the art can determine the number of the diaphragm comb teeth 33 and the driving plate 37 according to actual needs, and the diaphragm comb teeth 33 and the driving plate 37 are respectively arranged in pairs to ensure the balance of the vibration of the diaphragm 31.
Referring to fig. 3, the main body 311 includes two opposite first connecting edges 3111 and two opposite second connecting edges 3113; the number of the diaphragm comb teeth 33 and the connecting arms 313 is two, the two diaphragm comb teeth 33 are connected to the two first connecting sides 3111, and the two connecting arms 313 are connected to the two second connecting sides 3113. In the embodiment shown in fig. 3, the first connecting edge 3111 is parallel to the minor axis of the main body 311, and the second connecting edge 3113 is parallel to the major axis of the main body 311, i.e., the connecting arm 313 connects the main body 311 and the insulating layer 13 from both sides of the minor axis of the main body 311; the number of the driving plates 37 is two, and the two driving plates 37 are respectively arranged on the two connecting arms 313, namely, the driving plates 37 affect the vibration of the main body part 311 from the two sides of the short axis of the main body part 311.
Referring to fig. 4, the body portion 311 includes a plurality of outer edges 3115, and a vertex angle 3117 is formed at a connection point of each of the outer edges 3115; the diaphragm comb teeth 33 are connected to the outer edge 3115, the connecting arms 313 are connected to the apex angle 3117, and the number of the diaphragm comb teeth 33 and the connecting arms 313 is plural and is sequentially provided at intervals around the main body portion 311. In the embodiment shown in fig. 4, the number of the diaphragm comb teeth 33, the connecting arms 313 and the driving plates 37 is four, the diaphragm comb teeth 33 and the connecting arms 313 are arranged at intervals in order around the main body portion 311, the four diaphragm comb teeth 33 are arranged opposite to each other in pairs and connected to the outer edge 3115, and the four connecting arms 313 are arranged opposite to each other in pairs and connected to the apex angle 3117. The connecting arm 313 connects the main body 311 and the insulating layer 13 from the top corner 3117 of the main body 311, and the driving piece 37 affects the vibration of the diaphragm 31 from the top corner 3117 of the main body 311.
The number of the driving plates 37 is plural, and the plural driving plates 37 are respectively provided in one-to-one correspondence with the connecting arms 313 to affect the vibration of each connecting arm 313. Of course, the number of the driving plates 37 and the connecting arms 313 may not be the same, i.e. some of the connecting arms 313 are not connected to the driving plates 37.
The utility model also provides an audio equipment, including foretell microphone. Since the audio device adopts all technical solutions of all the embodiments, at least all the beneficial effects brought by the technical solutions of the embodiments are achieved, and no further description is given here.
The audio device may further include a housing accommodating the microphone, a circuit board electrically connected to the microphone, and the like, wherein the housing may have a vibration cavity and a resonance cavity, so that the vibration film 31 can easily generate a vibration response under a fine air vibration, and the microphone has a high sensitivity. An asic (application Specific Integrated circuit) chip may be provided on the circuit board to provide external bias to the microphone, effective bias will maintain stable acoustic and electrical parameters of the microphone throughout the operating temperature range, supporting microphone designs with different sensitivities.
The above is only the preferred embodiment of the present invention, not so limiting the patent scope of the present invention, all of which are in the utility model discloses a conceive, utilize the equivalent structure transform that the content of the specification and the attached drawings did, or directly/indirectly use all to include in other relevant technical fields the patent protection scope of the present invention.
Claims (10)
1. A microphone, comprising: the vibration isolator comprises a substrate and a vibration diaphragm assembly positioned above the substrate; the diaphragm assembly includes:
a vibrating membrane;
the vibrating diaphragm comb teeth are connected with the vibrating diaphragm;
the vibrating diaphragm comb teeth are used for driving the vibrating diaphragm comb teeth to move along the vibrating direction of the vibrating diaphragm, and the vibrating diaphragm and the fixed comb teeth form a variable capacitor;
the driving sheet is arranged on the vibrating membrane and used for driving the vibrating membrane to displace in the vibrating direction, and/or the driving sheet is arranged on the fixed comb teeth and used for driving the fixed comb teeth to displace in the vibrating direction, so that the capacitance value of the variable capacitor is within a preset range.
2. The microphone of claim 1, wherein the diaphragm includes a main body portion and a plurality of connecting arms connecting the substrate and the main body portion, the driving plate being provided on the connecting arms.
3. The microphone of claim 2, wherein the driving plate is disposed at an end of the connecting arm remote from the main body portion.
4. The microphone as claimed in claim 2, wherein the number of the diaphragm comb teeth and the driving plate is plural, the plural diaphragm comb teeth are arranged opposite to each other, and the plural driving plates are arranged opposite to each other.
5. The microphone of claim 4, wherein the main body portion includes two oppositely disposed first connecting edges and two oppositely disposed second connecting edges; the vibrating diaphragm comb tooth with the quantity of linking arm is two, two the vibrating diaphragm comb tooth respectively with two first connecting edge is connected, two the linking arm respectively with two the second is connected the limit and is connected.
6. The microphone of claim 4, wherein the body portion includes a plurality of outer edges, wherein a vertex angle is formed at a connection of two of the outer edges; the vibrating diaphragm comb teeth are connected with the outer edge, the connecting arms are connected with the top corner, the number of the vibrating diaphragm comb teeth and the number of the connecting arms are multiple, and the vibrating diaphragm comb teeth and the connecting arms are wound around the main body portion and are arranged at intervals in sequence.
7. The microphone as claimed in claim 5 or 6, wherein the number of the driving pieces is plural, and the plural driving pieces are respectively provided in one-to-one correspondence with the connecting arms.
8. The microphone according to any one of claims 1 to 6, wherein the diaphragm comb teeth include a plurality of moving teeth connected to the diaphragm, a tooth gap is formed between adjacent moving teeth, and the fixed comb teeth include a plurality of fixed teeth inserted into the tooth gap.
9. The microphone of any one of claims 1 to 6, wherein the driving plate is a piezoelectric driving plate or a thermal driving plate.
10. An audio device, characterized in that it comprises a microphone according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021160423.7U CN212115605U (en) | 2020-06-19 | 2020-06-19 | Microphone and audio equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021160423.7U CN212115605U (en) | 2020-06-19 | 2020-06-19 | Microphone and audio equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212115605U true CN212115605U (en) | 2020-12-08 |
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ID=73615106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021160423.7U Active CN212115605U (en) | 2020-06-19 | 2020-06-19 | Microphone and audio equipment |
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| Country | Link |
|---|---|
| CN (1) | CN212115605U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117376759A (en) * | 2023-12-07 | 2024-01-09 | 苏州敏芯微电子技术股份有限公司 | Microphone assembly and microphone |
-
2020
- 2020-06-19 CN CN202021160423.7U patent/CN212115605U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117376759A (en) * | 2023-12-07 | 2024-01-09 | 苏州敏芯微电子技术股份有限公司 | Microphone assembly and microphone |
| CN117376759B (en) * | 2023-12-07 | 2024-02-02 | 苏州敏芯微电子技术股份有限公司 | Microphone assembly and microphone |
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