CN212113658U - Auxiliary vehicle for craft - Google Patents
Auxiliary vehicle for craft Download PDFInfo
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- CN212113658U CN212113658U CN202020928725.8U CN202020928725U CN212113658U CN 212113658 U CN212113658 U CN 212113658U CN 202020928725 U CN202020928725 U CN 202020928725U CN 212113658 U CN212113658 U CN 212113658U
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- cross rod
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- blocking
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Abstract
The utility model discloses a process auxiliary vehicle, which comprises a frame with an opening at the upper end, two transverse guide rails arranged on the frame, a support frame connected with the two transverse guide rails in a sliding way, a front rolling shaft support and a rear rolling shaft support connected with the upper end of the support frame; the front roller support comprises a front cross rod and a plurality of front bearing rollers which are connected with the front cross rod and are arranged at intervals; the rear roller support comprises a plurality of rear bearing rollers which are arranged at intervals and connected with a rear cross rod. The utility model has the characteristics of can be with the light, safe and stable process cavity's of pushing or pulling out of flourishing piece pipe technology cavity.
Description
Technical Field
The utility model belongs to the technical field of semiconductor manufacturing equipment technique and specifically relates to a can improve flourishing intraductal chip stability's of piece technology auxiliary vehicle is related to.
Background
With the wide use of power semiconductor devices, power semiconductor thyristor elements have put higher technical requirements on production processes and matched tools and tools:
more stable, reliable practicality ensures power electronic equipment safe and stable operation.
At present, the high-temperature doping of the thyristor chip is to place the chip in a chip containing tube, place the chip containing tube on a quartz stool, and then send the chip containing tube into a high-temperature process cavity by hands and a stainless steel hook, or pull the chip containing tube out of the high-temperature process cavity.
The process can be carried out only by cooperation of two persons, the manual operation can cause the chip containing tube to shake, so that the chip in the tube is displaced and collided, the process is fine, and in addition, when the chip containing tube circularly enters and exits the process cavity, the temperature of the chip containing tube is very high, scalding can be caused during the operation, hands are lost, and process appliances are damaged.
Disclosure of Invention
The invention aims to overcome the defects that manual operation errors in the prior art can cause hand loss and possibly damage process appliances, and provides a process auxiliary vehicle capable of improving the stability of chips in a chip containing pipe.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a process auxiliary vehicle comprises a rack with an opening at the upper end, two transverse guide rails arranged on the rack, a support frame connected with the two transverse guide rails in a sliding manner, and a front rolling shaft support and a rear rolling shaft support connected with the upper end of the support frame; the front roller support comprises a front cross rod and a plurality of front bearing rollers which are connected with the front cross rod and are arranged at intervals; the rear roller support comprises a rear cross rod and a plurality of rear bearing rollers which are arranged at intervals and connected with the rear cross rod; the rear end of each front bearing roller and the front end of each rear bearing roller are connected with a middle cross rod, the right end of the rack is provided with a limiting and blocking mechanism, the support frame is connected with a push-pull handle through a connecting curved rod, and the side view of the structure formed by the front bearing roller support, the rear bearing roller support and the middle cross rod is in a V shape with an upward opening.
The V-shaped structure formed by the front roller support, the rear roller support and the middle cross rod is used for supporting the sheet containing pipe, the sheet containing pipe can transversely move along the two roller supports, friction force generated when the sheet containing pipe transversely moves is reduced due to the arrangement of each front bearing roller and each rear bearing roller, a worker holds the push-pull handle by hand, the V-shaped structure is driven by the support frame to move left and right, the sheet containing pipe is pushed to be close to the process cavity, and then the sheet containing pipe is pushed into the process cavity by hand; or drive the chip holding tube to leave the process cavity.
Use the utility model discloses afterwards, can be alone with the light, the safe and stable process cavity that pushes or pulls out of flourishing piece pipe, avoided the risk of flourishing piece pipe business turn over process cavity, guaranteed the stationarity of flourishing piece pipe in whole operation process, can not cause the displacement of the intraductal chip of flourishing piece and collide with.
Preferably, the rack is a box body with an opening at the upper end, a rectangular opening is formed in the upper portion of the right side of the box body, a left longitudinal rod is arranged on the inner surface of a left side plate of the box body, a right longitudinal rod is arranged on the inner side of the lower edge of the rectangular opening, the left ends of the two transverse guide rails are connected with the left longitudinal rod, and the right ends of the two transverse guide rails are connected with the right longitudinal rod.
The right vertical rod has the function of preventing the support frame from separating from the two transverse guide rails.
Preferably, the limiting and blocking mechanism comprises a blocking rod homing box arranged at the right front end of the rack, a blocking rod connecting shaft arranged in the blocking rod homing box, a blocking rod arranged on the blocking rod connecting shaft and a spring; one end of the blocking rod is rotatably connected with the connecting shaft of the blocking rod, and the side face, facing the push-pull handle, of the other end of the blocking rod is provided with a first soft contact blocking head.
The first soft contact prevention head is used for blocking the tablet containing pipe placed on the V-shaped structure and preventing the tablet containing pipe from sliding out of the V-shaped structure from the right end of the V-shaped structure.
Preferably, a second soft contact prevention head is arranged on the surface of one side, facing the limit stop mechanism, of the connecting curved rod.
The second soft contact prevention head is used for providing buffer between the connecting curved rod and the tablet containing pipe and preventing the tablet containing pipe from being damaged.
Preferably, the support frame comprises a left support structure and a right support structure which have the same structure, the left support structure comprises two sliding blocks, and a T-shaped rod is arranged between the two sliding blocks; the two sliding blocks are respectively connected with the two L-shaped rods, the upper ends of the T-shaped rods are fixedly connected with the middle cross rod, and the upper ends of the two L-shaped rods are respectively fixedly connected with the front cross rod and the rear cross rod.
Preferably, the cross section of the box body is rectangular, and 4 corners of the lower end of the box body are provided with feet.
Therefore, the utility model discloses following beneficial effect has: the process cavity can be pushed in or pulled out of the chip containing pipe easily, safely and stably, the risk that the chip containing pipe enters and exits the process cavity is avoided, the stability of the chip containing pipe in the whole operation process is guaranteed, and the displacement and the collision of chips in the chip containing pipe cannot be caused.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural diagram of the limiting blocking mechanism of the present invention.
Detailed Description
The invention is further described with reference to the accompanying drawings and the detailed description.
The embodiment shown in fig. 1 and 2 is a process auxiliary vehicle, which comprises a frame 1 with an opening at the upper end, two transverse guide rails 2 arranged on the frame, a support frame 3 connected with the two transverse guide rails in a sliding manner, a front roller support 4 connected with the upper end of the support frame and a rear roller support 7; the front roller support comprises a front cross bar 41 and a plurality of front bearing rollers 42 which are connected with the front cross bar and are arranged at intervals; the rear roller bracket comprises a rear cross rod 71 and a plurality of rear bearing rollers 72 which are connected with the rear cross rod and are arranged at intervals; the rear end of each front bearing roller and the front end of each rear bearing roller are connected with a middle cross rod 40, the right end of the rack is provided with a limiting and blocking mechanism 5, the support frame is connected with a push-pull handle 8 through a connecting curved rod 6, and the side view of the structure formed by the front bearing roller support, the rear bearing roller support and the middle cross rod is in a V shape with an upward opening.
The frame is upper end open-ended box, and box right side upper portion is equipped with rectangle opening 11, is equipped with left vertical pole 12 on the left side board internal surface of box, and rectangle opening lower limb inboard is equipped with right vertical pole 13, and two transverse guide left ends all are connected with left vertical pole, and two transverse guide right-hand members all are connected with right vertical pole.
And a second soft contact prevention head 61 is arranged on the surface of one side of the connecting curved rod facing the limiting and blocking mechanism.
The support frame comprises a left support structure 31 and a right support structure 32 which have the same structure, the left support structure comprises two sliding blocks 311, and a T-shaped rod 312 arranged between the two sliding blocks; the two sliding blocks are respectively connected with the two L-shaped rods 313, the upper ends of the T-shaped rods are fixedly connected with the middle cross rod, and the upper ends of the two L-shaped rods are respectively fixedly connected with the front cross rod and the rear cross rod.
The cross section of box is the rectangle, and 4 bights of box lower extreme all are equipped with lower margin 14.
As shown in fig. 2, the limit blocking mechanism comprises a blocking rod homing box 51 arranged at the right front end of the frame, a blocking rod connecting shaft 52 arranged in the blocking rod homing box, a blocking rod 53 arranged on the blocking rod connecting shaft and a spring 54; one end of the blocking rod is rotatably connected with the connecting shaft of the blocking rod, and the side surface of the other end of the blocking rod facing the push-pull handle is provided with a first soft contact blocking head 55.
The utility model discloses a use method as follows:
the method for pulling out the chip containing pipe in the process cavity comprises the following steps:
the film holding pipe in the process cavity is pulled to the V-shaped structure by using a tool, a worker holds the push-pull handle by hand, the V-shaped structure and the film holding pipe are driven by the support frame to move leftwards, and the blocking rod is rotated to block the right end of the film holding pipe;
the method comprises the following steps of pushing a sheet containing pipe in a process auxiliary vehicle into a process cavity, wherein the process cavity comprises the following steps:
a worker holds the push-pull handle, drives the V-shaped structure to move right through the support frame, pushes the wafer containing pipe to be close to the process cavity, and rotates the blocking rod to enable the blocking rod to be away from the right end of the wafer containing pipe; then, the tablet containing pipe is pushed into the process cavity by hands.
Use the utility model discloses afterwards, can be alone with the light, the safe and stable process cavity that pushes or pulls out of flourishing piece pipe, avoided the risk of flourishing piece pipe business turn over process cavity, guaranteed the stationarity of flourishing piece pipe in whole operation process, can not cause the displacement of the intraductal chip of flourishing piece and collide with.
It should be understood that the present embodiment is only for illustrating the present invention and is not intended to limit the scope of the present invention. Furthermore, it should be understood that various changes and modifications of the present invention may be made by those skilled in the art after reading the teachings of the present invention, and these equivalents also fall within the scope of the appended claims.
Claims (6)
1. A process auxiliary vehicle is characterized by comprising a rack (1) with an opening at the upper end, two transverse guide rails (2) arranged on the rack, a support frame (3) connected with the two transverse guide rails in a sliding manner, a front rolling shaft support (4) connected with the upper end of the support frame and a rear rolling shaft support (7); the front roller support comprises a front cross rod (41) and a plurality of front bearing rollers (42) which are connected with the front cross rod and are arranged at intervals; the rear roller support comprises a rear cross rod (71) and a plurality of rear bearing rollers (72) which are connected with the rear cross rod and are arranged at intervals; the rear end of each front bearing roller and the front end of each rear bearing roller are connected with a middle cross rod (40), the right end of the rack is provided with a limiting and blocking mechanism (5), the support frame is connected with a push-pull handle (8) through a connecting curved rod (6), and the side view of the structure formed by the front bearing roller support, the rear bearing roller support and the middle cross rod is in a V shape with an upward opening.
2. A process auxiliary vehicle as claimed in claim 1, wherein the frame is a box body with an open upper end, the upper part of the right side of the box body is provided with a rectangular opening (11), the inner surface of the left side plate of the box body is provided with a left vertical rod (12), the inner side of the lower edge of the rectangular opening is provided with a right vertical rod (13), the left ends of the two transverse guide rails are connected with the left vertical rod, and the right ends of the two transverse guide rails are connected with the right vertical rod.
3. A process auxiliary vehicle as claimed in claim 2, wherein the limit stop mechanism comprises a stop bar reset box (51) arranged at the right front end of the frame, a stop bar connecting shaft (52) arranged in the stop bar reset box, a stop bar (53) arranged on the stop bar connecting shaft and a spring (54); one end of the blocking rod is rotatably connected with the connecting shaft of the blocking rod, and the side surface of the other end of the blocking rod, which faces the push-pull handle, is provided with a first soft contact blocking head (55).
4. A process aid cart according to claim 1 wherein the surface of the side of the connecting curved bar facing the position limiting and blocking means is provided with a second soft contact blocking head (61).
5. A process aid cart according to claim 1 or 2 or 3 or 4 wherein the support frame comprises a left support structure (31) and a right support structure (32) of identical construction, said left support structure comprising two slides (311), a T-bar (312) disposed between the two slides; the two sliding blocks are respectively connected with two L-shaped rods (313), the upper ends of the T-shaped rods are fixedly connected with the middle cross rod, and the upper ends of the two L-shaped rods are respectively fixedly connected with the front cross rod and the rear cross rod.
6. A process aid cart according to claim 2 wherein the box is rectangular in cross-section and the feet (14) are provided at all 4 corners of the lower end of the box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020928725.8U CN212113658U (en) | 2020-05-27 | 2020-05-27 | Auxiliary vehicle for craft |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020928725.8U CN212113658U (en) | 2020-05-27 | 2020-05-27 | Auxiliary vehicle for craft |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212113658U true CN212113658U (en) | 2020-12-08 |
Family
ID=73615628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020928725.8U Active CN212113658U (en) | 2020-05-27 | 2020-05-27 | Auxiliary vehicle for craft |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212113658U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113913792A (en) * | 2021-10-09 | 2022-01-11 | 上海骐碳复合材料科技有限公司 | Transverse continuous progressive vapor deposition furnace and working method thereof |
-
2020
- 2020-05-27 CN CN202020928725.8U patent/CN212113658U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113913792A (en) * | 2021-10-09 | 2022-01-11 | 上海骐碳复合材料科技有限公司 | Transverse continuous progressive vapor deposition furnace and working method thereof |
| CN113913792B (en) * | 2021-10-09 | 2024-03-15 | 上海骐碳复合材料科技有限公司 | Transverse continuous progressive vapor deposition furnace and working method thereof |
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