CN113913792A - Transverse continuous progressive vapor deposition furnace and working method thereof - Google Patents
Transverse continuous progressive vapor deposition furnace and working method thereof Download PDFInfo
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- CN113913792A CN113913792A CN202111175247.3A CN202111175247A CN113913792A CN 113913792 A CN113913792 A CN 113913792A CN 202111175247 A CN202111175247 A CN 202111175247A CN 113913792 A CN113913792 A CN 113913792A
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- 238000007740 vapor deposition Methods 0.000 title claims abstract description 36
- 230000000750 progressive effect Effects 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 149
- 238000000151 deposition Methods 0.000 claims abstract description 92
- 230000008021 deposition Effects 0.000 claims abstract description 90
- 238000001816 cooling Methods 0.000 claims abstract description 46
- 230000006698 induction Effects 0.000 claims abstract description 37
- 238000002360 preparation method Methods 0.000 claims abstract description 18
- 230000009471 action Effects 0.000 claims abstract description 12
- 239000002131 composite material Substances 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 claims description 55
- 238000007789 sealing Methods 0.000 claims description 49
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
- 238000010438 heat treatment Methods 0.000 claims description 29
- 238000009423 ventilation Methods 0.000 claims description 24
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 22
- 238000007664 blowing Methods 0.000 claims description 17
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 12
- 239000001294 propane Substances 0.000 claims description 11
- 238000007599 discharging Methods 0.000 claims description 10
- 230000007306 turnover Effects 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 238000004321 preservation Methods 0.000 description 6
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 5
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 5
- 210000000078 claw Anatomy 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 239000007770 graphite material Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
Abstract
The invention discloses a transverse continuous progressive vapor deposition furnace and a working method thereof, and relates to the field of composite material manufacturing equipment. The device comprises a furnace body which is transversely arranged, push-pull clamping mechanisms which are arranged at the side parts of the front end and the rear end outside the furnace body, a bearing shaft which is clamped by at least one push-pull clamping mechanism to keep transverse arrangement, an induction coil which is sleeved at the middle part of the bearing shaft, a propelling mechanism and a take-down cooling mechanism; the end parts of the jacking heads of the first push-pull mechanism and the second push-pull mechanism are respectively provided with a first clamping plate which is attached to the outer cambered surface of the bearing shaft and is clamped in an extruding manner. The invention can lead the prefabricated body to be taken out by the taking-off cooling mechanism at the tail end after finishing the preparation, deposition and cooling actions continuously, and finishes the preparation process from the prefabricated body to the composite material.
Description
Technical Field
The invention belongs to the field of composite material manufacturing equipment, and particularly relates to a transverse continuous progressive vapor deposition furnace and a working method of the transverse continuous progressive vapor deposition furnace.
Background
The composite material is a high-performance composite material of a carbon fiber reinforced carbon matrix, has the characteristics of high strength, corrosion resistance, strong designability and the like, is widely applied to various fields such as aerospace, aviation, traffic and the like, and has higher requirements on the quality of composite material products along with social development and technological progress.
Chemical vapor deposition is a process widely used to produce composite materials. Most of the existing vapor deposition furnaces or deposition systems introduce carbon source gas into the deposition furnace from the bottom of the deposition furnace through a multi-path gas inlet pipeline, the carbon source gas is directly introduced into the bottom of a deposition chamber in the furnace body at a certain flow and flow rate, and after pyrolysis, matrix carbon is formed and deposited in the interior or on the surface of a blank product. Due to the air inlet structure of the existing deposition furnace, carbon source gas directly enters a material tray at the bottom of a deposition chamber from an air inlet pipeline and rapidly enters a high-temperature area in the middle of the deposition furnace at the speed of 1-3 m/s, so that the temperature of a product at the bottom of the deposition furnace is too low to reach the deposition temperature, the carbon source gas rapidly passes through the product at the bottom, the product at the middle is not deposited on the product at the bottom, the deposition effect of the product at the bottom in the deposition furnace is poor, the product quality of different positions in the deposition furnace is inconsistent, or the quality of different parts on the same product is inconsistent.
And because the existing deposition furnace is a single furnace chamber, the steps of preheating and cooling are not needed when a general prefabricated body is placed in the deposition furnace for preparation, and the prefabricated body is directly heated and cooled in the furnace chamber, the problems of long preparation time consumption and low efficiency caused when the single deposition furnace is used for preparation are caused, and the transverse continuous progressive vapor deposition furnace and the working method thereof have important significance.
Disclosure of Invention
The invention provides a transverse continuous progressive vapor deposition furnace and a working method thereof, which solve the problems.
In order to solve the technical problems, the invention is realized by the following technical scheme:
the invention relates to a transverse continuous progressive vapor deposition furnace, which comprises a transversely arranged furnace body, push-pull clamping mechanisms arranged at the side parts of the front end and the rear end outside the furnace body, a bearing shaft clamped by at least one push-pull clamping mechanism to keep transverse arrangement, an induction coil sleeved at the middle part of the bearing shaft, and a propelling mechanism positioned at the front end or the rear end outside the furnace body and used for propelling a prefabricated body which is annularly arranged on the bearing shaft;
the furnace body is internally provided with a preparation area, a deposition area and a cooling area which are sequentially formed from front to back in the advancing direction of the furnace body, and the front end and the back end of the furnace body are respectively provided with a split first sealing door and a split second sealing door.
Further, the induction coil is arranged on the inner side of the furnace wall in the furnace body and forms a distance with the inner surface of the furnace wall, a furnace wall heat preservation layer and a muffle layer are sequentially arranged in the induction coil, and a distance is arranged between the heat preservation layer and the muffle layer.
Furthermore, the bearing shaft is hollow, one end of the bearing shaft is of a sealed insulating tubular structure, the other end of the bearing shaft is provided with a vent pipe with an electromagnetic valve, the side part of one end of the vent pipe is provided with a vent hole, and the position, corresponding to the induction coil, on the bearing shaft is uniformly provided with vent holes in a surrounding manner; the outer surface of the bearing shaft is transversely provided with a plurality of convex strips which support the inner side wall of the prefabricated part; and the upper part and the lower part of the second sealing door are respectively provided with a semicircular opening which corresponds to the vent pipe to form a joint closed through hole.
Furthermore, a telescopic gas receiving structure matched with the vent is arranged outside the furnace body; the telescopic structure of receiving is including telescopic machanism and be located telescopic machanism top and lift first one end and blow vent matched with and have the connection cap of sealing washer, be provided with the first connecting pipe of ventilating on the connection cap.
Furthermore, the push-pull type clamping mechanism comprises at least two first push-pull mechanisms which are positioned at the front end or the rear end side part outside the furnace body and are fixedly installed by a fixing frame, and at least two second push-pull mechanisms which are positioned at the rear end or the front end side part outside the furnace body and are fixedly installed by the fixing frame.
Furthermore, the first push-pull mechanism and the second push-pull mechanism are all hydraulic cylinders, air cylinders or servo electric cylinders, the end parts of the jacking heads of the first push-pull mechanism and the second push-pull mechanism are respectively provided with a first clamping plate which is attached to the cambered surface of the bearing shaft to be clamped in an extrusion manner, and the surfaces of the jacking rods of the first push-pull mechanism and the second push-pull mechanism and the surface of the first clamping plate are respectively provided with a water-cooling protective sleeve.
Furthermore, the propulsion mechanism comprises a first bowl-shaped pushing piece and a third push-pull mechanism, wherein the first bowl-shaped pushing piece is opposite to the front end or the rear end of the furnace body, the third push-pull mechanism is arranged at the rear part of the first bowl-shaped pushing piece, and the third push-pull mechanism adopts a hydraulic cylinder, an air cylinder or a servo electric cylinder.
Furthermore, the diameter of the first pot type pushing piece is consistent with that of the prefabricated body, and the edge of the first pot type pushing piece is abutted against the edge of the prefabricated body in the moving process; the length of the first pot body type pushing piece is larger than that of the first clamping plate.
Furthermore, the rear end or the front end outside the furnace body is used for taking down the prefabricated body from the bearing shaft, the taking-down cooling mechanism comprises a second bowl-shaped pushing piece and a fourth push-pull mechanism, the second bowl-shaped pushing piece is opposite to the position of a furnace mouth at the rear end or the front end of the furnace body, the fourth push-pull mechanism is arranged at the rear part of the second bowl-shaped pushing piece, and the fourth push-pull mechanism adopts a hydraulic cylinder, an air cylinder or a servo electric cylinder; the second bowl type pushing piece is provided with a turnover sealing door matched with the opening position, the bottom of the second bowl type pushing piece is provided with a ventilation end, and the ventilation end is connected with a second ventilation connecting pipe.
Further, a gas blowing pipe and a gas discharging pipe are arranged on the side wall of the furnace body; the gas blowing pipe is used for blowing nitrogen and propane gas into the furnace, and the internal gas is pumped out by the gas discharge pipe after the whole furnace body works; specifically, when the first sealing door or the second sealing door is opened or closed, the propane gas stops feeding and the vacuumizing is stopped, the flow rate of the inert gas is kept at the micro positive pressure in the furnace, and the specific pressure is controlled to be more than 110 kpa.
A working method of a transverse continuous progressive vapor deposition furnace comprises the following steps:
s01, in the initial state, the second push-pull mechanism jacks out the lifting head to clamp the bearing shaft, the first push-pull mechanism jacks back the lifting head, the prefabricated bodies to be processed are sleeved on one end of the bearing shaft one by one to serve as a preparation area, the advancing mechanism advances the prefabricated bodies to the bearing shaft one by one and adds new prefabricated bodies one by one, and the arranged prefabricated bodies are advanced to the position of an induction coil serving as a deposition area one by one on the bearing shaft;
s02, closing the first sealing door and the second sealing door, blowing inert protective gas nitrogen into the first sealing door through a gas blowing pipe, simultaneously performing vacuum pumping, simultaneously introducing methane and nitrogen through a first ventilation connecting pipe through a connecting cap at the end part of a telescopic mechanism, discharging the methane and the nitrogen from a gas outlet hole on a bearing shaft of the deposition area, and performing heating deposition reaction on the prefabricated body of the deposition area through an induction coil after reaching a micro-positive pressure state;
s03, after the heating deposition reaction of the prefabricated body in the deposition area is finished, when the door is opened or closed through the first closing door or the second sealing door, advancing a length of preform by advancing mechanism to allow adjacent undeposited preforms to occupy the deposition position, advancing the deposited preform to the cooling zone, and adding new preform again to the starting end, heating and depositing the new prefabricated body replacing the deposition position again, stopping the gas supply of the propane gas when the first closing door or the second closing door is opened or closed, and the vacuumizing is stopped, the telescopic mechanism drives the connecting cap to withdraw from the connection with the air vent and retract, when the two sealing doors are closed, keeping the flow of the inert gas at a micro positive pressure in the furnace, controlling the specific pressure to be more than 110kpa, and continuously repeating the step of S02 after the first sealing door or the second sealing door is closed;
s04, repeating the step S03 in a circulating mode until the starting end pushes a new prefabricated part to a position corresponding to the first push-pull mechanism, and the prefabricated part which is firstly reacted and cooled at the tail end is close to a position corresponding to the second push-pull mechanism;
s05, the jacking head of the second push-pull mechanism retracts, and the first push-pull mechanism extends out to clamp the bearing shaft; taking out the prefabricated body after the reaction of the tail end is finished by the taking-down cooling mechanism, then closing the turnover type sealing door, introducing nitrogen gas into the ventilation end through a second ventilation connecting pipe for cooling, opening the turnover type sealing door after cooling is finished, and taking out the cooled material;
s06, the second push-pull mechanism jacking head extends out to clamp the bearing shaft, the first push-pull mechanism retracts, a new prefabricated body is continuously added at the starting end until the starting end pushes the new prefabricated body to pass through the position corresponding to the first push-pull mechanism, the deposited prefabricated body is pushed forwards and carries out heating deposition reaction at the deposition position, and the prefabricated body which is firstly reacted and cooled at the tail end is close to the position corresponding to the second push-pull mechanism;
s07, repeating the steps S06-S07 to enable the preform on the bearing shaft to continuously and progressively complete the preparation, deposition and cooling actions in the furnace, and continuously taking out the composite material prepared from the preform A by a taking-off cooling mechanism at the tail end.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention relates to a transverse continuous progressive vapor deposition furnace, which adopts a structure that a transverse bearing shaft is arranged in the furnace to bear a prefabricated body from the starting end, an induction coil arranged in the middle is used for heating the prefabricated body to form deposition, a preparation area, a deposition area and a cooling area are naturally formed in the furnace, a propelling mechanism at the initial feeding end of the prefabricated body continuously advances the prefabricated body which is newly added to the front part of the bearing shaft and is communicated with the prefabricated body in the whole process, so that the prefabricated body is continuously prepared, deposited and cooled, and then taken out by a tail end taking-off cooling mechanism to complete the preparation process from the prefabricated body to a composite material, the transverse continuous progressive vapor deposition furnace has the advantages that the whole process is continuous, progressive and can be completed by adopting a furnace body, compared with the existing intermittent deposition furnace, the energy loss caused by repeated temperature rise and fall is greatly reduced, the deposition speed and efficiency are improved;
2. the transverse continuous progressive vapor deposition furnace has more uniform deposition effect and better deposition efficiency compared with the existing intermittent deposition furnace due to the deposition heating at the local position adopted in the furnace.
3 the transverse continuous progressive vapor deposition furnace adopts the first push-pull mechanism and the second push-pull mechanism which are arranged at the side parts of the front end and the rear end of the furnace body to clamp the bearing shaft, so that at least one push-pull mechanism can be ensured to clamp, the bearing shaft is kept transversely arranged in the furnace body, and the feeding and discharging actions are convenient;
4. the transverse continuous progressive vapor deposition furnace can select any one end as a starting end and the corresponding other end as a tail end according to needs, and greatly facilitates the working convenience and the use efficiency of the prefabricated body deposition vapor deposition furnace.
Of course, it is not necessary for any product in which the invention is practiced to achieve all of the above-described advantages at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the overall structure of a transverse continuous progressive vapor deposition furnace according to the present invention;
FIG. 2 is a view of FIG. 1 illustrating the operation of the deposition furnace of FIG. 1;
FIG. 3 is a view of FIG. 2 illustrating an operating state of the deposition furnace of FIG. 1;
FIG. 4 is a view of FIG. 3 illustrating an operating state of the deposition furnace of FIG. 1;
FIG. 5 is a view illustrating an operation state of the deposition furnace shown in FIG. 1;
FIG. 6 is a view showing an operation state of the deposition furnace shown in FIG. 1;
FIG. 7 is a schematic structural view of the load bearing shaft of FIG. 1;
FIG. 8 is a cross-sectional view taken along line C-C of FIG. 7;
FIG. 9 is a schematic structural view of the second split closure door of FIG. 1;
FIG. 10 is a structural sectional view of the furnace body in FIG. 1;
FIG. 11 is a schematic structural view of the telescoping mechanism of FIG. 1;
FIG. 12 is a schematic view of the first push-pull mechanism of FIG. 1;
FIG. 13 is a sectional view B-B of the take-down cooling mechanism of embodiment 1 of FIG. 5 in cooperation with a carrier shaft and a preform;
FIG. 14 is a schematic view of the first bowl-type pusher shoe of FIG. 1;
FIG. 15 is a schematic structural view of a cooling mechanism according to embodiment 2 of the present invention;
FIG. 16 is a schematic diagram of the structure of the cooling mechanism of embodiment 2 in cooperation with a carrier shaft and a preform;
in the drawings, the components represented by the respective reference numerals are listed below:
1-furnace body, 101-first closing door, 102-second closing door, 103-gas blowing pipe, 104-gas discharging pipe, 105-muffle layer, 106-furnace wall heat preservation layer, 2-bearing shaft, 201-gas outlet hole, 202-raised line, 203-gas pipe, 204-electromagnetic valve, 205-gas vent, 3-induction coil, 301-induction heating power supply, 4-first push-pull mechanism, 401-first clamping plate, 5-second push-pull mechanism, 6-pushing mechanism, 601-third push-pull mechanism, 602-first pot type push-pull member, 7-taking down cooling mechanism, 701-fourth push-pull mechanism, 702-second pot type push-pull member, 704-second clamping plate, 704-fifth push-pull mechanism, 705-turnover sealing door, 706-a ventilation end, 707-a second ventilation connecting pipe, 708-a ball screw, 709-a connecting pipe, 710-a sliding block, 711-a motor, 712-a sixth push-pull structure, 713-a claw head, 8-a telescopic mechanism, 801-a connecting cap, 802-a first ventilation connecting pipe and A-a prefabricated body.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "lateral," "front and rear ends," "side," "front to rear," and the like, indicate an orientation or positional relationship, merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced components or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be considered as limiting the present invention.
Specific example 1:
referring to fig. 1 to 14, a transverse continuous progressive vapor deposition furnace according to the present invention includes:
the device comprises a furnace body 1 which is transversely arranged, push-pull clamping mechanisms which are arranged at the lateral parts of the front end and the rear end outside the furnace body 1, a bearing shaft 2 which is clamped by at least one push-pull clamping mechanism to keep transverse arrangement, an induction coil 3 which is sleeved at the middle part of the bearing shaft 2, and a propelling mechanism 6 which is positioned at the front end or the rear end outside the furnace body 1 and used for propelling the annularly-installed prefabricated body A from the bearing shaft 2; the furnace body 1 is of a steel structure, and the inner wall of the furnace body is provided with a high-temperature resistant ceramic layer or a water cooling layer structure;
a preparation area, a deposition area and a cooling area are sequentially formed in the furnace body 1 from front to back in the advancing direction of the furnace body, and a split first sealing door 101 and a split second sealing door 102 are respectively arranged at the front end and the rear end of the furnace body 1; the first sealing door 101 and the second sealing door 102 are both arranged at two ends of the furnace body 1 in a hinge mode and can be opened and closed at any time; the action to be performed each time the first closing door 101 and the second closing door 102 are opened and closed is required to be very rapid, generally completed within 5-8 seconds, to prevent the inside shielding gas, in this particular embodiment nitrogen, which is an inert gas, from overflowing too much.
The induction coil 3 is arranged on the inner side of the furnace wall in the furnace body 1 and forms a 5cm distance with the inner surface of the furnace wall, a furnace wall heat preservation layer 106 and a muffle layer 105 are sequentially arranged inside the induction coil 3, a 5cm distance is arranged between the heat preservation layer and the muffle layer 105, an insulation layer is arranged on the induction coil 3 and is used for insulation treatment, and the heat preservation layer is conductive and aims to prevent short circuit.
The bearing shaft 2 is hollow, one end of the bearing shaft is of a sealed insulating tubular structure, the other end of the bearing shaft 2 is provided with a vent pipe 203 with an electromagnetic valve 204, the side part of one end of the vent pipe 203 is provided with a vent hole 205, and air outlet holes 201 are uniformly distributed on the bearing shaft 2 in a surrounding manner at positions corresponding to the induction coil 3; a plurality of convex strips 202 are transversely arranged on the outer surface of the bearing shaft 2, and the convex strips 202 support the inner side wall of the prefabricated body A; in this embodiment, the protruding strips 202 are specifically three protruding strips arranged around an equal radian; the upper and lower parts of the second closing door 102 are respectively provided with a semicircular opening 1021 corresponding to the vent pipe 203 and forming a joint sealing through hole.
Wherein, the outside of the furnace body 1 is provided with a telescopic gas receiving structure matched with the vent 205; the telescopic gas receiving structure comprises a telescopic mechanism 8 and a connecting cap 801 which is located at one end of a jacking head of the telescopic mechanism 8 and is matched with the vent 205 and provided with a sealing ring, wherein a first ventilation connecting pipe 802 is arranged on the connecting cap 801.
The induction coil 3 is a medium/high frequency type induction heating coil driven by an induction heating power supply 301, the induction coil 3 is arranged on the inner surface of the furnace wall in the furnace body 1, and a muffle layer 105 and a furnace wall heat insulation layer 106 are sequentially arranged outside the induction coil 3, namely the induction coil is positioned between the muffle layer 105 and the inner wall of the furnace body 1; in this specific embodiment, the preform a is a cylinder, the specific material is a carbon fiber preform, the inner diameter of the cylinder is 500mm inches, the wall thickness is 12mm, the outer diameter of the corresponding bearing shaft 2 is 28 inches, the negative tolerance of 20 micrometers is provided, the bearing shaft 2 is made of a hollow graphite material or a carbon-carbon material, and in this specific embodiment, 1.72g/cm is specifically adopted3The distance between the outer wall of the cylinder and the inner wall of the muffle in the furnace body 1 is 50mm, and the outer side of the muffle is provided with a heat-insulating material which is specifically made of a heat-insulating ceramic material in the specific embodiment; the induction coil 3 in this embodiment specifically uses an induction heating coil with a rated power of 150kw, each heating is specifically increased by an initial power of 10kw and an incremental power of 10kw, and the corresponding temperature change is that the temperature at the heating position in the furnace is gradually increased from an initial normal temperature along with the increase of the power, the temperature is increased from the normal temperature by an incremental amount of 5 ℃ per minute until reaching a temperature point of 1050 ℃, and the time length for maintaining the single preform a in the furnace by induction heating is specifically 12 hours in this embodiment; the whole vapor deposition furnace comprisesThe PLC control system of the platform controls the operation action, sequence, time and force of each mechanism; different corresponding heating powers can be used for preforms a of different sizes, for example a 30-inch cylinder with a larger inner diameter, providing an induction coil 3 with a relatively larger power rating, which can reach 180kw, and a power rating of 250kw for a 36-inch cylinder;
the push-pull type clamping mechanism comprises at least two first push-pull mechanisms 4 which are positioned at the front end or the rear end side part outside the furnace body 1 and are fixedly installed by a fixing frame, and at least two second push-pull mechanisms 5 which are positioned at the rear end or the front end side part outside the furnace body 1 and are fixedly installed by the fixing frame; in this embodiment, the three first push-pull mechanisms 4 and the three second push-pull mechanisms 5 which are stably arranged in a triangular manner are arranged to clamp the bearing shaft 2.
The first push-pull mechanism 4 and the second push-pull mechanism 5 both adopt hydraulic cylinders, air cylinders or servo electric cylinders, the end parts of the jacking heads of the first push-pull mechanism 4 and the second push-pull mechanism 5 are respectively provided with a first clamping plate 401 which is attached to the outer cambered surface of the bearing shaft 2 and clamped in an extrusion manner, and the first clamping plate 401 is made of a hollow graphite material or a carbon-carbon material; the surfaces of the jacking rods of the first push-pull mechanism 4 and the second push-pull mechanism 5 and the surface of the first clamping plate 401 are provided with water-cooling protective sleeves, so that the influence on the expansion deformation of the jacking rods and the first clamping plate 401 due to overhigh temperature in the furnace cavity is prevented.
The propelling mechanism 6 comprises a first bowl-shaped pushing piece 602 opposite to the front end or rear end fire hole of the furnace body 1 and a third push-pull mechanism 601 arranged at the rear part of the first bowl-shaped pushing piece 602, wherein the third push-pull mechanism 601 adopts a hydraulic cylinder, an air cylinder or a servo electric cylinder.
Wherein, the diameter of the first bowl-shaped pushing piece 602 is consistent with that of the prefabricated body A, and the edge of the first bowl-shaped pushing piece 602 is abutted against the edge of the prefabricated body A in the moving process; the first bowl pusher shoe 602 has a length greater than the length of the first clamping plate 401, in particular 10cm longer.
The rear end or the front end outside the furnace body 1 is used for taking down the prefabricated part A from the bearing shaft 2, the cooling mechanism 7 comprises a second pot-shaped pushing piece 702 opposite to the position of a furnace mouth at the rear end or the front end of the furnace body 1 and a fourth push-pull mechanism 701 arranged at the rear part of the second pot-shaped pushing piece 702, and the fourth push-pull mechanism 701 adopts a hydraulic cylinder, an air cylinder or a servo electric cylinder; the second bowl-shaped pushing element 702 is provided with a turnover sealing door 705 matched with the opening position, the bottom of the second bowl-shaped pushing element 702 is provided with a ventilation end 706, and the ventilation end 706 is connected with a second ventilation connecting pipe 707.
At least two fifth push-pull mechanisms 704 are arranged on the outer side of the second bowl-shaped pushing piece 702 in a surrounding mode, the fifth push-pull mechanisms 704 are all hydraulic cylinders, air cylinders or servo electric cylinders, and a second clamping plate 703 which is attached to the outer arc surface of the prefabricated body A and clamped in an extruding mode is arranged at the end portion of a jacking head of each fifth push-pull mechanism 704;
the diameter of the second bowl-shaped pushing piece 702 is larger than that of the prefabricated body A, so that the second bowl-shaped pushing piece 702 can cover the prefabricated body A in the moving process, and the prefabricated body A is clamped by the fifth push-pull mechanism 704 in cooperation with the second clamping plate 703; the length of the second bowl pusher 702 is greater than the sum of the lengths of the first clamping plate 401, preform a and breather pipe 203.
Wherein, a gas blowing pipe 103 and a gas discharging pipe 104 are arranged on the side wall of the furnace body 1; the gas blowing pipe 103 is used for blowing nitrogen gas and propane gas into the furnace, and the internal gas is pumped out by the gas discharge pipe 104 after the whole furnace body finishes working; specifically, when the first sealing door 101 or the second sealing door 102 is opened or closed, the propane gas stops being supplied and the evacuation is stopped, and the inert gas flow rate is maintained at a slight positive pressure in the furnace, specifically, the pressure is controlled to be 110kpa or more.
A working method of a transverse continuous progressive vapor deposition furnace comprises the following steps:
s01, in an initial state, the second push-pull mechanism 5 extends out of the jacking head to clamp the bearing shaft 2, the jacking head of the first push-pull mechanism 4 retracts, the prefabricated bodies A to be processed are sleeved on the position of one end of the bearing shaft 2 as a preparation area one by one, and the advancing mechanism 6 advances the prefabricated bodies A to the position of the induction coil 3 as a deposition area one by one in a reciprocating manner and adds new prefabricated bodies A one by one, so that the arranged prefabricated bodies A are advanced on the bearing shaft 2 one by one to the position of the induction coil 3 as a deposition area;
s02, closing the first sealing door 101 and the second sealing door 102, blowing inert protective gas nitrogen into the gas blowing pipe 103, vacuumizing, introducing methane and nitrogen into the gas blowing pipe through a first ventilation connecting pipe 802 through a connecting cap 801 at the end of the telescopic mechanism 8, discharging the gas from a gas outlet 201 on the bearing shaft 2 of the deposition area, and heating and depositing the preform A in the deposition area by the induction coil 3 after reaching a micro-positive pressure state; during vacuum pumping, the flow rate of nitrogen gas is 4000L/min, the flow rate of propane gas is 320L/min, and the preform A in the deposition area is heated by the induction coil 3 for deposition reaction, the heating process and the action are slow heating, the preform A is gradually heated from the normal temperature state to the deposition temperature of 1050 ℃ and kept at the constant temperature, and the retention time for deposition of a single preform A is 12 hr;
s03, after the heating deposition reaction of the preform A in the deposition area is completed, the pushing mechanism 6 continues to push a length of the adjacent undeposited preform A to occupy the deposition position through the first closed door 101 or the second closed door 102 during the door opening or closing action, the deposited preform A is pushed forward to the cooling area, and a new preform A is added again to the starting end, the heating deposition reaction is carried out again on the new preform A replacing the deposition position, when the door opening or closing action of the first closed door 101 or the second closed door 102 is performed, the propane gas stops feeding and the vacuumizing is stopped, the telescopic mechanism 8 drives the connecting cap 801 to withdraw from the connection with the vent 205 and retract, when the two closed doors are closed, the inert gas flow keeps the micro-positive pressure in the furnace, the specific pressure is controlled to be above 110kpa, when the first closed door 101 or the second closed door 102 is closed, continuing to repeat the step of S02;
s04, repeating the step S03 in a circulating mode until the starting end pushes a new prefabricated part A to a position corresponding to the first push-pull mechanism 4, and the prefabricated part A which is firstly reacted and cooled at the tail end is close to a position corresponding to the second push-pull mechanism 5;
s05, the lifting head is retracted by the second push-pull mechanism 5, and the first push-pull mechanism 4 extends out to clamp the bearing shaft 2; and taking out the prefabricated body A after the reaction of the tail end is finished by taking down the cooling mechanism 7, then closing the turnover sealing door 705, introducing nitrogen gas into the ventilation end 706 through the second ventilation connecting pipe 707 for cooling, opening the turnover sealing door 705 after cooling is finished, and taking out the cooled material.
S06, the lifting head of the second push-pull mechanism 5 extends out to clamp the bearing shaft 2, the first push-pull mechanism 4 retracts, a new prefabricated body A is continuously added at the starting end until the starting end pushes the new prefabricated body A to correspond to the first push-pull mechanism 4, the deposited prefabricated body A is pushed forwards and carries out heating deposition reaction at the deposition position, and the prefabricated body A which is firstly reacted and cooled at the tail end is close to the position corresponding to the second push-pull mechanism 5;
s07, repeating the steps S06-S07 to enable the preform A on the bearing shaft 2 to be continuously and progressively prepared, deposited and cooled in the furnace, and continuously taking out the composite material prepared from the preform A at the tail end by the taking-off and cooling mechanism 7;
the experimental procedure described above is as follows: vacuumizing → heating → constant temperature → ventilating → closing gas → cooling, wherein the flow rate of nitrogen is 4000L/min, the flow rate of propane is 320L/min, the deposition temperature is 1050 ℃, and the retention time is 12hr during vacuumizing.
Compared with the existing intermittent deposition furnace, the deposition furnace with the same size and volume can prepare the same number of carbon-carbon cylinders by the data statistics of quantitative and qualitative words, the gas quantity used by the transverse continuous progressive vapor deposition furnace of the technical scheme is 0.6 times of that of the intermittent deposition furnace, the preparation time of a single carbon-carbon cylinder is saved by at least 0.5hr, the deposition thickness of the position point is obtained by collecting 6 equidistant position points on the surface of the carbon-carbon cylinder prepared by the transverse continuous progressive vapor deposition furnace in the technical scheme, the deposition thickness difference is 2-3mm, the uniformity is higher, the 6 equidistant position points on the surface of the cylinder prepared by the intermittent deposition furnace are adopted, the deposition thickness difference of the positions of the points is 8-12mm, the fluctuation is relatively large, and the technical scheme has better and more uniform deposition efficiency.
Specific example 2:
as shown in fig. 15 to 16, the present embodiment differs from embodiment 1 in that:
the specific structure of the take-down cooling mechanism 7 comprises a second bowl-shaped pushing and pulling member 702, a fourth pushing and pulling mechanism 701, a turnover type sealing door 705, a ventilation end 706, a second ventilation connecting pipe 707, a connecting pipe 709 which is horizontally arranged in the middle of the second bowl-shaped pushing and pulling member 702 transversely and has a diameter corresponding to that of the bearing shaft 2, a ball lifting screw 708 which is vertically arranged at the rear end of the second bowl-shaped pushing and pulling member 702, and two sixth pushing and pulling structures 712 which are connected with a ball nut through a sliding block 710 and are matched with the ball lifting screw 708 for lifting up and down, wherein the ball lifting screw 708 is driven by a motor 711 at the end in a rotating fit manner, the sixth pushing and pulling structures 712 are specifically electric cylinders, oil cylinders or air cylinder structures, and a lifting head at the end is provided with an L-shaped claw 713; when the taking-down cooling mechanism 7 extends into the furnace body 1 through the fourth push-pull mechanism 701 to take a component, the ball lifting screw 708 is used for adjusting the distance between the sixth push-pull structure 712 to be larger than the diameter of the prefabricated component a, then the claw head 713 just falls at the gap between the prefabricated component a at the tail end and the previous prefabricated component a until the component is extended into the furnace body, the ball lifting screw 708 is used for driving the sixth push-pull structure 712 to reduce the vertical distance so that the claw head 713 just falls at the gap, the sixth push-pull structure 712 is used for pulling back so that the prefabricated component a to be prepared and cooled slides into the second bowl-shaped pushing piece 702 through the connecting pipe 709, and then the cooling operation of the sealing, cooling and nitrogen filling actions is carried out as in the specific embodiment 1;
the ball screw 708 is disposed in the second bowl-shaped pushing member 702 and does not intersect with the connecting pipe 709, i.e. the ball screw 708 is not on the diameter of the second bowl-shaped pushing member 702, after the second bowl-shaped pushing member 702 moves into the furnace body 1, the end of the connecting pipe 709 is attached to the end of the bearing shaft 2, and the vent pipe is located in the connecting pipe 709 and is not affected.
Has the advantages that:
1. the invention relates to a transverse continuous progressive vapor deposition furnace, which adopts a structure that a transverse bearing shaft is arranged in the furnace to bear a prefabricated body from the starting end, an induction coil arranged in the middle is used for heating the prefabricated body to form deposition, a preparation area, a deposition area and a cooling area are naturally formed in the furnace, a propelling mechanism at the initial feeding end of the prefabricated body continuously advances the prefabricated body which is newly added to the front part of the bearing shaft and is communicated with the prefabricated body in the whole process, so that the prefabricated body is continuously prepared, deposited and cooled, and then taken out by a tail end taking-off cooling mechanism to complete the preparation process from the prefabricated body to a composite material, the transverse continuous progressive vapor deposition furnace has the advantages that the whole process is continuous, progressive and can be completed by adopting a furnace body, compared with the existing intermittent deposition furnace, the energy loss caused by repeated temperature rise and fall is greatly reduced, the deposition speed and efficiency are improved;
2. the transverse continuous progressive vapor deposition furnace has more uniform deposition effect and better deposition efficiency compared with the existing intermittent deposition furnace due to the deposition heating at the local position adopted in the furnace.
3 the transverse continuous progressive vapor deposition furnace adopts the first push-pull mechanism and the second push-pull mechanism which are arranged at the side parts of the front end and the rear end of the furnace body to clamp the bearing shaft, so that at least one push-pull mechanism can be ensured to clamp, the bearing shaft is kept transversely arranged in the furnace body, and the feeding and discharging actions are convenient;
4. the transverse continuous progressive vapor deposition furnace can select any one end as a starting end and the corresponding other end as a tail end according to needs, and greatly facilitates the working convenience and the use efficiency of the prefabricated body deposition vapor deposition furnace.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (9)
1. A transverse, continuous, progressive vapor deposition furnace, comprising:
the device comprises a furnace body (1) which is transversely arranged, push-pull clamping mechanisms which are arranged at the side parts of the front end and the rear end outside the furnace body (1), a bearing shaft (2) which is clamped by at least one push-pull clamping mechanism to keep transverse arrangement, an induction coil (3) which is sleeved at the middle part of the bearing shaft (2), and a propelling mechanism (6) which is arranged at the front end or the rear end outside the furnace body (1) and used for propelling the annularly-installed prefabricated body (A) from the bearing shaft (2);
the furnace body (1) is internally provided with a preparation area, a deposition area and a cooling area which are sequentially formed from front to back in the advancing direction of the furnace body, and the front end and the back end of the furnace body (1) are respectively provided with a split first sealing door (101) and a split second sealing door (102).
2. The transverse continuous progressive vapor deposition furnace according to claim 1, wherein the induction coil (3) is a medium/high frequency type induction heating coil driven by an induction heating power supply (301), the induction coil (3) is disposed inside the furnace wall of the furnace body (1) and spaced from the inner surface of the furnace wall, a furnace wall insulating layer (106) and a muffle layer (105) are sequentially disposed inside the induction coil (3), and a space is provided between the insulating layer (106) and the muffle layer (105).
3. The transverse continuous progressive vapor deposition furnace according to claim 1, wherein the bearing shaft (2) is an insulating tubular structure with a hollow interior and a sealed end, the other end of the bearing shaft (2) is provided with a vent pipe (203) with a solenoid valve (204), the lateral part of one end of the vent pipe (203) is provided with a vent hole (205), and the bearing shaft (2) is provided with air outlet holes (201) at positions corresponding to the induction coil (3) in a surrounding and uniform manner; a plurality of convex strips (202) are transversely arranged on the outer surface of the bearing shaft (2), and the convex strips (202) support the inner side wall of the prefabricated body (A); the upper part and the lower part of the second sealing door (102) are respectively provided with a semicircular opening (1021) which corresponds to the vent pipe (203) to form a joint sealing through hole.
4. The transverse continuous progressive vapor deposition furnace according to claim 1, characterized in that the furnace body (1) is externally provided with a telescopic gas receiving structure matched with the gas vent (205); the telescopic structure of receiving gas includes telescopic machanism (8) and is located telescopic machanism (8) top and lifts first one end and blow vent (205) matched with have the connection cap (801) of sealing washer, be provided with first connecting pipe (802) of ventilating on the connection cap (801).
5. The transverse continuous progressive vapor deposition furnace according to claim 1, wherein the push-pull type clamping mechanism comprises at least two first push-pull mechanisms (4) which are arranged and fixed by a fixed frame and positioned at the outer front end or the outer rear end side part of the furnace body (1), and at least two second push-pull mechanisms (5) which are arranged and fixed by a fixed frame and positioned at the outer rear end or the outer front end side part of the furnace body (1); the water-cooling type hydraulic lifting mechanism is characterized in that the first push-pull mechanism (4) and the second push-pull mechanism (5) are all hydraulic cylinders, air cylinders or servo electric cylinders, the first push-pull mechanism (4) and the second push-pull mechanism (5) are identical in structure, the end part of the lifting head is provided with a first clamping plate (401) which is attached to the outer arc surface of the bearing shaft (2) and is clamped in an extruding mode, and the surfaces of the lifting rod of the first push-pull mechanism (4) and the second push-pull mechanism (5) and the surface of the first clamping plate (401) are provided with water-cooling protective sleeves.
6. The transverse continuous progressive vapor deposition furnace according to claim 1, wherein the propulsion mechanism (6) comprises a first pot-shaped pusher shoe (602) opposite to the front or rear furnace opening of the furnace body (1) and a third push-pull mechanism (601) arranged at the rear part of the first pot-shaped pusher shoe (602), and the third push-pull mechanism (601) adopts a hydraulic cylinder, an air cylinder or a servo electric cylinder; the first pot body type pushing piece (602) is consistent with the diameter of the prefabricated body (A), and the edge of the first pot body type pushing piece (602) is abutted against the edge of the prefabricated body (A) in the moving process; the length of the first bowl-shaped pusher shoe (602) is greater than the length of the first clamping plate (401).
7. The furnace according to claim 1, wherein the outer rear end or front end of the furnace body (1) is used for taking down the prefabricated body (A) from the bearing shaft (2) by a taking-down cooling mechanism (7); the taking-down cooling mechanism (7) comprises a second pot body type pushing piece (702) opposite to the position of a furnace opening at the rear end or the front end of the furnace body (1) and a fourth push-pull mechanism (701) arranged at the rear part of the second pot body type pushing piece (702), and the fourth push-pull mechanism (701) adopts a hydraulic cylinder, an air cylinder or a servo electric cylinder; the turnover type sealing door (705) matched with the opening position is arranged on the second pot body type pushing piece (702), the bottom of the second pot body type pushing piece (702) is provided with a ventilation end (706), and the ventilation end (706) is connected with a second ventilation connecting pipe (707).
8. The transverse continuous progressive vapor deposition furnace according to claim 1, wherein a gas blowing pipe (103) and a gas discharging pipe (104) are installed on a side wall of the furnace body (1); the gas blowing pipe (103) is used for blowing nitrogen and propane gas into the furnace, and the internal gas is extracted by the gas discharging pipe (104) after the whole furnace body finishes working; specifically, when the first closing door (101) or the second closing door (102) is opened or closed, the propane gas stops being supplied and the evacuation is stopped, the inert gas flow rate is kept at a slight positive pressure in the furnace, and the specific pressure is controlled to be 110kpa or more.
9. A method of operating a transverse continuous progressive vapor deposition furnace as claimed in any one of claims 1 to 8, comprising the steps of:
s01, in an initial state, a second push-pull mechanism (5) is used for extending out to clamp the bearing shaft (2), the jacking head of the first push-pull mechanism (4) is retracted, the prefabricated bodies (A) to be processed are sleeved on one end of the bearing shaft (2) one by one to serve as a preparation area, the prefabricated bodies (A) are pushed to and fro by a pushing mechanism (6) and new prefabricated bodies (A) are added one by one, and the arranged prefabricated bodies (A) are pushed to the position of an induction coil (3) serving as a deposition area one by one on the bearing shaft (2);
s02, closing the first sealing door (101) and the second sealing door (102), blowing inert protective gas nitrogen into the first sealing door (101) through a gas blowing pipe (103), simultaneously performing vacuum pumping, simultaneously introducing methane and nitrogen into the first sealing door through a first ventilation connecting pipe (802) through a connecting cap (801) at the end part of a telescopic mechanism (8), discharging the methane and the nitrogen from a position of an air outlet (201) on a bearing shaft (2) of the deposition area, and performing heating deposition reaction on the preform (A) of the deposition area through an induction coil (3) after reaching a micro-positive pressure state;
s03, after the heating deposition reaction of the preforms (A) in the deposition area is completed, the pushing mechanism (6) continues to push the length of one preform (A) through the first closing door (101) or the second sealing door (102) during the door opening or closing action, so that the adjacent undeposited preform (A) occupies the deposition position, the deposited preform (A) is pushed to the cooling area, a new preform (A) is added again to the starting end, the heating deposition reaction is carried out again on the new preform (A) replacing the deposition position, when the first closing door (101) or the second sealing door (102) is opened or closed, the propane gas stops feeding and the vacuum pumping is stopped, the telescopic mechanism (8) drives the connecting cap (801) to withdraw from the connection with the vent (205) and retract, when the two sealing doors are closed, the inert gas flow rate keeps micro positive pressure in the furnace, controlling the specific pressure to be above 110kpa, and continuously repeating the step of S02 after the first sealing door (101) or the second sealing door (102) is closed;
s04, repeating the step S03 in a circulating mode until the starting end pushes a new prefabricated part (A) to a position corresponding to the first push-pull mechanism (4), and the prefabricated part (A) which is firstly reacted and cooled at the tail end is close to a position corresponding to the second push-pull mechanism (5);
s05, the jacking head of the second push-pull mechanism (5) retracts, and the first push-pull mechanism (4) extends out to clamp the bearing shaft (2); taking out the prefabricated body (A) after the reaction of the tail end is finished by the taking-down cooling mechanism (7), then closing the turnover type sealing door (705), introducing nitrogen into the ventilation end (706) through a second ventilation connecting pipe (707) for cooling, opening the turnover type sealing door (705) after cooling is finished, and taking out the cooled material;
s06, a lifting head of a second push-pull mechanism (5) extends out to clamp the bearing shaft (2), the first push-pull mechanism (4) retracts, a new prefabricated body (A) is continuously added at the starting end until the starting end pushes the new prefabricated body (A) to a position corresponding to the first push-pull mechanism (4), the prefabricated body (A) after deposition is pushed forwards and is subjected to heating deposition reaction at the deposition position, and the prefabricated body (A) which is at the tail end and is firstly reacted and cooled is close to the position corresponding to the second push-pull mechanism (5);
s07, repeating the steps S06-S07 to enable the preform (A) on the bearing shaft (2) to continuously and progressively complete the preparation, deposition and cooling actions in the furnace, and continuously taking out the composite material prepared from the preform (A) by the taking-off cooling mechanism (7) at the tail end.
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