CN212112127U

CN212112127U - Exposure machine is used in production of multilayer HDI board

Info

Publication number: CN212112127U
Application number: CN202021233283.1U
Authority: CN
Inventors: 方学东
Original assignee: Ji'an Xintonglian Circuit Board Co ltd
Current assignee: Ji'an Xintonglian Circuit Board Co ltd
Priority date: 2020-06-29
Filing date: 2020-06-29
Publication date: 2020-12-08
Anticipated expiration: 2030-06-29

Abstract

The utility model relates to an exposure machine technical field, concretely relates to exposure machine is used in production of multilayer HDI board, including exposure mechanism, exposure mechanism includes the exposure bottom of the case, exposure case lid, exposure lamp and heat dissipation fan, the upper surface of the exposure bottom of the case is provided with the exposure case lid, and the inner wall of exposure case lid is provided with the exposure lamp, the rear end fixed mounting of the exposure bottom of the case has the heat dissipation fan, the exposure bottom of the case inner wall is inserted and is equipped with transport mechanism. The utility model discloses a rotation output shaft of first motor drives first circular gear and rotates for circular transfer gear rotates, insert the inside of establishing at circular transfer gear through the supporting leg, the supporting leg plays the supporting role to circular transfer gear, make circular transfer gear slide in the supporting leg outside simultaneously, the circular gear of second plays the additional action to circular transfer gear, the inside that conveniently conveys the bottom of the case of the exposure box with the HDI board on circular transfer gear surface exposes, increase exposure speed, thereby work efficiency has been improved.

Description

Exposure machine is used in production of multilayer HDI board

Technical Field

The utility model relates to an exposure machine technical field specifically is an exposure machine is used in production of multilayer HDI board.

Background

The exposure machine is a complex semiconductor processing device integrating electron optical, electrical, mechanical, vacuum and computer technologies, is widely applied to the semiconductor integrated circuit manufacturing industry after seventies, utilizes focused electron beams to expose organic polymers (generally called electronic resists or photoresists) under the control of a computer, and is commonly used in the fields of semiconductor manufacturing, photoelectric electronics, flat panels, radio frequency microwaves, diffraction optics, micro-electro-mechanical systems, concave-convex or flip chip devices and other fields requiring fine printing.

In the production of HDI board production, need produce the HDI board with exposing, just need use the exposure machine this moment, because the exposure machine can only expose a plurality of HDI board once, carry out once exposure back, will take out the HDI board after the exposure, put into the HDI board of treating the exposure and expose, the operation is complicated, leads to the exposure speed slow, for this we propose a multilayer HDI board production with exposure machine and solve above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an exposure machine is used in production of multilayer HDI board to solve the slow problem of exposure speed who proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an exposure machine is used in production of multilayer HDI board, includes exposure mechanism, exposure mechanism includes the exposure bottom of the case, exposure case lid, exposure lamp and heat dissipation fan, the upper surface of the exposure bottom of the case is provided with the exposure case lid, and the inner wall of exposure case lid is provided with the exposure lamp, the rear end fixed mounting of the exposure bottom of the case has the heat dissipation fan, exposure bottom of the case inner wall is inserted and is equipped with transport mechanism, transport mechanism includes circular transfer gear, supporting leg, support column, first motor, first circular gear, stopper, first rotation post and second circular gear, the inner wall of circular transfer gear is inserted and is equipped with the supporting leg, the bottom fixed mounting of the exposure bottom of the case has the support column, and the right-hand member fixed mounting of support column has first motor, the rotation output shaft fixed mounting of first motor has first circular gear, one side near circular transfer gear of the exposure bottom of the case is, and the inner wall of the limiting block is inserted with a first rotating column, and a second circular gear is fixedly mounted on the outer side of the first rotating column.

Preferably, the bottom fixed mounting of exposure case lid has the mechanism that opens and shuts, the mechanism that opens and shuts includes fixed block, second rotation post, fixed cover, first bevel gear, second motor and second bevel gear, the inner wall of fixed block is inserted and is equipped with the second rotation post, and the second rotates the surface cover of post and is equipped with fixed cover, the second rotates the fixed surface of post and installs first bevel gear, one side fixed mounting of the exposure bottom of the case has the second motor, and the rotation output shaft fixed mounting of second motor has second bevel gear, one side of the exposure bottom of the case is provided with the switch.

Preferably, the inner wall of the circular conveying wheel is provided with an annular slide rail, the top end of the supporting leg is fixedly provided with an annular slide block, the inner diameter of the annular slide rail arranged on the inner wall of the circular conveying wheel is matched with the outer diameter of the annular slide block fixedly arranged on the top end of the supporting leg, and the supporting leg is inserted into the circular conveying wheel.

Preferably, the inner wall of the circular transmission wheel is uniformly provided with teeth, the teeth on the inner wall of the circular transmission wheel are matched with the teeth on the outer side of the first circular gear, and the circular transmission wheel is meshed with the first circular gear through the teeth.

Preferably, the inner wall of the circular conveying wheel is uniformly provided with teeth, the teeth on the inner wall of the circular conveying wheel are matched with the teeth on the outer side of the first rotating column, and the circular conveying wheel is meshed with the first rotating column through the teeth.

Preferably, the fixed block inner wall evenly is provided with tooth, the second rotates the post and evenly is provided with tooth with the surface that the fixed block corresponds the department, the tooth of fixed block inner wall and the tooth looks adaptation on second rotation post surface, the fixed block passes through tooth and the meshing of second rotation post mutually, the tooth of first conical gear and the tooth looks adaptation of second conical gear, first conical gear passes through tooth and the meshing of second conical gear mutually.

Compared with the prior art, the beneficial effects of the utility model are that:

(1) the first circular gear is driven to rotate through the rotating output shaft of the first motor, so that the circular transmission wheel rotates, the supporting legs are inserted into the circular transmission wheel, the supporting legs support the circular transmission wheel, meanwhile, the circular transmission wheel slides outside the supporting legs, the second circular gear assists the circular transmission wheel, an HDI plate on the surface of the circular transmission wheel is conveniently transmitted into the bottom of the exposure box to be exposed, the exposure speed is increased, and the working efficiency is improved;

(2) through setting up the fixed block, the rotation output shaft of second motor drives second bevel gear and rotates, and second bevel gear cooperation first bevel gear makes the second rotate the post and rotate, makes the exposure case lid open and shut automatically, need not to open the exposure case lid through the manual work, has reduced operation flow, makes its automation.

Description of the drawings:

in order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic sectional view of the front view of the structure of the present invention;

FIG. 2 is a schematic top view of the structure of the present invention;

FIG. 3 is a schematic sectional view of the structure of the present invention from the back;

FIG. 4 is a schematic side view of the structure of the present invention;

FIG. 5 is an enlarged view of A in FIG. 1;

fig. 6 is an enlarged schematic view of the structure B in fig. 4.

In the figure: 1. an exposure mechanism; 110. the bottom of the exposure box; 120. an exposure box cover; 130. an exposure lamp; 140. a heat dissipation fan; 2. a transport mechanism; 210. a circular transfer wheel; 220. supporting legs; 230. a support pillar; 240. a first motor; 250. a first circular gear; 260. a limiting block; 270. a first rotating column; 280. a second circular gear; 3. an opening and closing mechanism; 310. a fixed block; 320. a second rotating cylinder; 330. fixing a sleeve; 340. a first bevel gear; 35. a second motor; 360. a second bevel gear; 4. and (4) switching.

The specific implementation mode is as follows:

the technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-6, the present invention provides an embodiment: an exposure machine for producing a multilayer HDI plate comprises an exposure mechanism 1, wherein the exposure mechanism 1 comprises an exposure box bottom 110, an exposure box cover 120, an exposure lamp 130 and a heat dissipation fan 140, the exposure box cover 120 is arranged on the upper surface of the exposure box bottom 110, the exposure lamp 130 is arranged on the inner wall of the exposure box cover 120, the heat dissipation fan 140 is fixedly installed at the rear end of the exposure box bottom 110, a conveying mechanism 2 is inserted into the inner wall of the exposure box bottom 110, the conveying mechanism 2 comprises a circular conveying wheel 210, supporting legs 220, supporting columns 230, a first motor 240, a first circular gear 250, a limiting block 260, a first rotating column 270 and a second circular gear 280, the supporting legs 220 are inserted into the inner wall of the circular conveying wheel 210, the supporting columns 230 are fixedly installed at the bottom end of the exposure box bottom 110, the first motor 240 is fixedly installed at the right end of the supporting columns 230, a first circular gear 250 is fixedly installed at the rotating output shaft of the first motor 240, the rotary output shaft of the first motor 240 drives the first circular gear 250 to rotate, the circular transmission wheel 210 is provided with rotary power, the circular transmission wheel 210 is made to rotate, the three groups of supporting legs 220 are arranged, the three groups of supporting legs are respectively inserted into the inner wall of the circular transmission wheel 210, supporting force is provided for the circular transmission wheel 210, meanwhile, the circular transmission wheel 210 slides outside the three groups of supporting legs 220, the HDI board on the surface of the circular transmission wheel 210 is conveniently transmitted to the inside of the exposure box bottom 110 to be exposed, the side, close to the circular transmission wheel 210, of the exposure box bottom 110 is provided with the limiting block 260, the inner wall of the limiting block 260 is inserted with the first rotating column 270, the outer side of the first rotating column 270 is fixedly provided with the second circular gear 280, and through the arrangement of the second circular gear 280, the second circular gear 280 plays an auxiliary role on the circular.

The bottom fixed mounting of exposure case lid 120 has the mechanism 3 that opens and shuts, the mechanism 3 that opens and shuts includes fixed block 310, second rotation post 320, fixed cover 330, first conical gear 340, second motor 35 and second conical gear 360, the inner wall of fixed block 310 is inserted and is equipped with second rotation post 320, and the surface cover of second rotation post 320 is equipped with fixed cover 330, the fixed surface of second rotation post 320 installs first conical gear 340, one side fixed mounting of exposure bottom of the case 110 has second motor 35, and the rotation output shaft fixed mounting of second motor 35 has second conical gear 360, one side of exposure bottom of the case 110 is provided with switch 4, this structure is through setting up second conical gear 360, one side of fixed cover 330 is inconsistent with one side of exposure bottom of the case 110, play limiting displacement for the one end of second rotation post 320.

Annular slide rail has been seted up to circular transfer gear 210's inner wall, the top fixed mounting of supporting leg 220 has annular slider, the internal diameter size that annular slide rail was seted up to circular transfer gear 210 inner wall and the external diameter size looks adaptation of supporting leg 220 top fixed mounting annular slider, supporting leg 220 is inserted and is established the inside at circular transfer gear 210, this structure is through setting up supporting leg 220, make things convenient for circular transfer gear 210 to slide at supporting leg 220 outer wall.

The inner wall of circular transfer gear 210 evenly is provided with the tooth, the tooth looks adaptation in the tooth and the first circular gear 250 outside of circular transfer gear 210 inner wall, and circular transfer gear 210 meshes with first circular gear 250 mutually through the tooth, and this structure is through setting up first circular gear 250, and first motor 240 drives first circular gear 250 and rotates, makes circular transfer gear 210 rotate, conveniently brings the HDI board into the exposure bottom of the case 110 and exposes.

The inner wall of circular transfer gear 210 evenly is provided with the tooth, the tooth of circular transfer gear 210 inner wall and the tooth looks adaptation in the first post 270 outside of rotating, circular transfer gear 210 meshes with first post 270 mutually through the tooth, this structure is through setting up stopper 260, stopper 260 is bilateral symmetry form and is provided with two sets ofly altogether, two sets of stoppers 260 play limiting displacement to two sets of first posts 270 of rotating, two sets of first posts 270 of rotating cooperate the tooth of second circular gear 280 and the tooth of circular transfer gear 210 inner wall rotate, play the auxiliary action to circular transfer gear 210.

The inner wall of the fixed block 310 is uniformly provided with teeth, the surfaces of the positions, corresponding to the fixed block 310, of the second rotating columns 320 are uniformly provided with teeth, the teeth of the inner wall of the fixed block 310 are matched with the teeth of the surfaces of the second rotating columns 320, the fixed block 310 is meshed with the second rotating columns 320 through the teeth, the teeth of the first bevel gears 340 are matched with the teeth of the second bevel gears 360, the first bevel gears 340 are meshed with the second bevel gears 360 through the teeth, the fixed block 310 is arranged, the fixed blocks 310 are symmetrically arranged in left and right, the second bevel gears 360 are matched with the first bevel gears 340 to enable the second rotating columns 320 to rotate, the second rotating columns 320 drive the two groups of fixed blocks 310 to rotate through the teeth on the outer side, so that the two groups of fixed blocks 310 drive the exposure box cover 120 to rotate, the exposure box cover 120 is automatically opened and closed without manually, and the operation flow is reduced, thereby increasing the working efficiency.

The working principle is as follows: when a user needs an exposure machine for producing a multilayer HDI plate, a switch 4 is turned on, a first motor 240 and a second motor 35 are started, a rotating output shaft of the first motor 240 drives a first circular gear 250 to rotate, teeth of the first circular gear 250 are matched with teeth of the inner wall of a circular transmission wheel 210 to enable the circular transmission wheel 210 to rotate, a supporting leg 220 is inserted into the circular transmission wheel 210, the supporting leg 220 supports the circular transmission wheel 210, an annular sliding rail arranged on the inner wall of the circular transmission wheel 210 is matched with an annular sliding block fixedly arranged at the top end of the supporting leg 220 to enable the circular transmission wheel 210 to slide outside the supporting leg 220, teeth on the outer side of a second circular gear 280 are matched with teeth of the inner wall of the circular transmission wheel 210 to rotate to assist the circular transmission wheel 210, a rotating output shaft of the second motor 35 drives a second bevel gear 360 to rotate, the second bevel gear 360 is matched with the first bevel gear 340 to enable the second rotating column 320 to rotate, the screw thread of the screw-thread fit fixed block 310 inner wall in the second rotation post 320 outside makes fixed block 310 drive exposure case lid 120 and rotates, makes exposure case lid 120 open the back automatically, brings the HDI into the exposure case bottom 110 through circular transfer wheel 210 and exposes, need not to open exposure case lid 120 through the manual work, has reduced the operation flow, makes its automation, increases exposure speed to work efficiency has been improved, above does the utility model discloses a whole theory of operation.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a multilayer HDI board production is with exposure machine, includes exposure mechanism (1), its characterized in that: the exposure mechanism (1) comprises an exposure box bottom (110), an exposure box cover (120), an exposure lamp (130) and a heat dissipation fan (140), wherein the exposure box cover (120) is arranged on the upper surface of the exposure box bottom (110), the exposure lamp (130) is arranged on the inner wall of the exposure box cover (120), the heat dissipation fan (140) is fixedly installed at the rear end of the exposure box bottom (110), a conveying mechanism (2) is inserted into the inner wall of the exposure box bottom (110), the conveying mechanism (2) comprises a circular conveying wheel (210), supporting legs (220), supporting columns (230), a first motor (240), a first circular gear (250), a limiting block (260), a first rotating column (270) and a second circular gear (280), the supporting legs (220) are inserted into the inner wall of the circular conveying wheel (210), and the supporting columns (230) are fixedly installed at the bottom end of the exposure box bottom (110), and the right-hand member fixed mounting of support column (230) has first motor (240), the rotation output shaft fixed mounting of first motor (240) has first circular gear (250), the exposure bottom of the case (110) one side that is close to circular transfer gear (210) is provided with stopper (260), and the inner wall of stopper (260) inserts and is equipped with first rotation post (270), the outside fixed mounting of first rotation post (270) has second circular gear (280).

2. The exposure machine for producing the multilayer HDI board according to claim 1, characterized in that: the bottom fixed mounting of exposure case lid (120) has mechanism (3) that opens and shuts, mechanism (3) that opens and shuts includes fixed block (310), second rotation post (320), fixed cover (330), first conical gear (340), second motor (35) and second conical gear (360), the inner wall of fixed block (310) is inserted and is equipped with second rotation post (320), and the second rotates the surface cover of post (320) and be equipped with fixed cover (330), the second rotates the fixed surface of post (320) and installs first conical gear (340), one side fixed mounting of the exposure bottom of the case (110) has second motor (35), and the rotation output shaft fixed mounting of second motor (35) has first conical gear (360), one side of the exposure bottom of the case (110) is provided with switch (4).

3. The exposure machine for producing the multilayer HDI board according to claim 1, characterized in that: annular slide rails are arranged on the inner wall of the circular conveying wheel (210), annular sliding blocks are fixedly arranged at the top ends of the supporting legs (220), the inner diameter of each annular slide rail arranged on the inner wall of the circular conveying wheel (210) is matched with the outer diameter of each annular sliding block fixedly arranged at the top ends of the supporting legs (220), and the supporting legs (220) are inserted in the circular conveying wheel (210).

4. The exposure machine for producing the multilayer HDI board according to claim 1, characterized in that: the inner wall of circular transfer gear (210) evenly is provided with the tooth, the tooth looks adaptation in the tooth and the first circular gear (250) outside of circular transfer gear (210) inner wall, circular transfer gear (210) are through tooth and first circular gear (250) mesh mutually.

5. The exposure machine for producing the multilayer HDI board according to claim 1, characterized in that: the inner wall of circular transfer gear (210) evenly is provided with the tooth, the tooth of circular transfer gear (210) inner wall and the tooth looks adaptation in first rotation post (270) outside, circular transfer gear (210) are through tooth and first rotation post (270) mesh mutually.

6. The exposure machine for producing the multilayer HDI board according to claim 2, characterized in that: fixed block (310) inner wall evenly is provided with tooth, the second rotates post (320) and fixed block (310) and corresponds the surface of department and evenly is provided with tooth, the tooth and the second of fixed block (310) inner wall rotate the tooth looks adaptation on post (320) surface, fixed block (310) rotates post (320) through tooth and second and meshes mutually, the tooth of first conical tooth wheel (340) and the tooth looks adaptation of second conical tooth wheel (360), first conical tooth wheel (340) are through tooth and second conical tooth wheel (360) mesh mutually.