CN212103058U - Semiconductor crystal bar crystal pulling clamp - Google Patents
Semiconductor crystal bar crystal pulling clamp Download PDFInfo
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- CN212103058U CN212103058U CN202020290104.1U CN202020290104U CN212103058U CN 212103058 U CN212103058 U CN 212103058U CN 202020290104 U CN202020290104 U CN 202020290104U CN 212103058 U CN212103058 U CN 212103058U
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- crystal pulling
- furnace body
- seat
- bolted
- pulling furnace
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Abstract
The utility model provides a semiconductor crystal bar crystal pulling anchor clamps, the on-line screen storage device comprises a base, the top integrated processing of base has the crystal pulling furnace body, the positive left side of crystal pulling furnace body has set gradually the button region down from last, the back bolt of crystal pulling furnace body inner chamber has the heat insulating board, the positive both sides of crystal pulling furnace body all articulate through the hinge has two doors, the bolt of center department of two opposite one side of opening the door has the pull handle, the horizontal bolt in bottom of crystal pulling furnace body inner chamber has places the board, the top of crystal pulling furnace body inner chamber has first fixed strip and second fixed strip from last to horizontal bolt down in proper order. The utility model discloses a fixing clamp seat, fixed block, fixing base, spacing seat, articulated seat, grab handle, quick chuck and adjusting bolt's structure cooperation can carry out the centre gripping to the quartz capsule and fix, prevents that the quartz capsule from rocking or the displacement appearing at crystal pulling in-process, further improves the crystal pulling quality of quartz capsule, reduces the material loss of quartz capsule.
Description
Technical Field
The utility model relates to a semiconductor material field especially relates to a semiconductor crystal bar crystal pulling anchor clamps.
Background
The quartz glass has a series of excellent physical and chemical properties and is used in electric chafing dishes, electric heating furnaces and electric heaters to generate heat.
The crystal pulling furnace is used when a user pulls the quartz tube, but the quartz tube cannot be tightly clamped in the crystal pulling process of the existing crystal pulling furnace, the quartz tube is easy to shake or shift in the crystal pulling process, the crystal pulling quality of the quartz tube is greatly reduced, the crystal pulling defective rate of the quartz tube is improved, and the crystal pulling cost of the quartz tube is improved.
Therefore, it is necessary to provide a semiconductor ingot pulling jig to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The utility model provides a semiconductor crystal bar crystal pulling clamp, which solves the problem that the existing crystal pulling furnace can not fasten and clamp a quartz tube in the crystal pulling process of the quartz tube.
For solving the technical problem, the utility model provides a pair of semiconductor crystal bar crystal pulling anchor clamps, the on-line screen storage device comprises a base, the top integrated processing of base has the crystal pulling furnace body, the positive left side of crystal pulling furnace body has set gradually the button region down from last, the back bolt of crystal pulling furnace body inner chamber has the heat insulating board, the positive both sides of crystal pulling furnace body all articulate through the hinge has two divisions, the center department bolt of two divisions of opposite one side has the pull handle, the horizontal bolt in bottom of crystal pulling furnace body inner chamber has places the board, the top of crystal pulling furnace body inner chamber has transversely bolted first fixed strip and second fixed strip down in proper order from last, the top of placing the board vertically sets gradually quartz capsule from a left side to the right side, it is provided with fixture to place board, first fixed strip and the opposite one side of second fixed strip.
Preferably, fixture includes fixing clip seat, fixed block, fixing base, spacing seat, articulated seat, grab handle, quick chuck and adjusting bolt, the top of placing the board has been bolted in proper order from a left side to the right side and has been bolted with quartz capsule joint complex fixing clip seat, the front of second fixed strip has been bolted in proper order from a left side to the right side and has been used with the quartz capsule cooperation fixed block, the front of first fixed strip has been bolted in proper order from a left side to the right side and has been fixed base, the center department of the positive top of fixing base and bottom all has been bolted and has been connected with the spacing seat of quartz capsule joint complex, the left side of fixing base articulates there is articulated seat, the positive left side of articulated seat transversely is bolted and has the grab handle, the right side of articulated seat articulate have with the quick chuck of quartz capsule joint complex, the positive both sides equal threaded connection of quick chuck has.
Preferably, a warning lamp is vertically bolted to the left side of the front side of the top of the crystal pulling furnace body, and the warning color of the warning lamp is set to be red, yellow and green and respectively represents fault, warning and normal.
Preferably, the groove positions of the fixing block and the limiting seat are both bonded with silica gel skins through strong sealant, and the thickness of the silica gel skins is at least ten millimeters.
Preferably, the peripheries of two sides of the crystal pulling furnace body are communicated with heat dissipation fans, the outer sides of the heat dissipation fans are communicated with dust filtration nets, and the mesh areas of the dust filtration nets are smaller than five square millimeters.
Preferably, the two sides of the top of the crystal pulling furnace body are provided with air vents from left to right, the air vents are arranged in a transverse array structure, and the aperture of each air vent is smaller than two centimeters.
Preferably, the periphery of the bottom of the base is vertically bolted with four supporting legs, the periphery of the bottom of the base is bolted with universal wheels, and the number of the universal wheels is six.
Preferably, the observation windows are embedded in the two sides of the front face of the double-opening door and are made of double-layer toughened glass.
Compared with the prior art, the utility model provides a pair of semiconductor crystal bar crystal pulling anchor clamps has following beneficial effect:
the utility model provides a semiconductor crystal bar crystal pulling clamp,
1. the utility model discloses a fixed clamp seat, fixed block, fixing base, spacing seat, articulated seat, grab handle, quick chuck and adjusting bolt's structure cooperation can carry out the centre gripping to the quartz capsule and fix, prevents that the quartz capsule from rocking or the displacement appearing at crystal pulling in-process, further improves the crystal pulling quality of quartz capsule, reduces the material loss of quartz capsule to reduce the defective percentage of quartz capsule.
2. The utility model discloses a warning light, the person of being convenient for observes the work operational aspect of crystal pulling furnace body directly perceived, the maintenance personal of being convenient for in time maintains crystal pulling furnace body, through the silica gel skin, can effectively cushion the protection to quartz capsule surface, prevent that fixed block and spacing seat from causing the collision to quartz capsule surface, through the heat dissipation fan, can effectively dispel the heat and cool down to the heat of crystal pulling furnace body inside, prevent that high temperature from causing the damage to crystal pulling furnace body internal part, through the dust filter screen, prevent that external dust granule from getting into crystal pulling furnace body inside, strengthen the crystal pulling environment of quartz capsule, through the scavenge port, can take a breath to the moisture and the heat of crystal pulling furnace body inside, prevent that the moisture from condensing into the water pearl and attaching to crystal pulling furnace body inside surface wall, through the supporting legs, support the auxiliary stay when crystal pulling furnace body, strengthen the stability of crystal pulling furnace body, through the universal wheel, the crystal pulling furnace body can be stably moved, and a user can conveniently observe the crystal pulling condition of the quartz tube from the outer side through the observation window.
Drawings
FIG. 1 is a schematic structural view of a preferred embodiment of a semiconductor ingot pulling fixture according to the present invention;
FIG. 2 is a cross-sectional view of the crystal puller body of FIG. 1;
fig. 3 is an enlarged view of the structure of the region a shown in fig. 2.
Reference numbers in the figures: 1. a base; 2. a crystal pulling furnace body; 3. double doors are opened; 4. pulling a handle; 5. placing the plate; 6. a first fixing strip; 7. a second fixing strip; 8. a quartz tube; 9. a clamping mechanism; 91. fixing the clamp seat; 92. a fixed block; 93. a fixed seat; 94. a limiting seat; 95. a hinged seat; 96. a handle; 97. a quick chuck; 98. adjusting the bolt; 10. a warning light; 11. silica gel skin; 12. a heat dissipation fan; 13. a dust filter screen; 14. a ventilation hole; 15. supporting legs; 16. a universal wheel; 17. an observation window; 18. an insulating panel.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and embodiments.
Referring to fig. 1, 2 and 3 in combination, wherein fig. 1 is a schematic structural view of a preferred embodiment of a semiconductor crystal bar crystal pulling fixture provided by the present invention, fig. 2 is a sectional structural view of a crystal pulling furnace body shown in fig. 1, fig. 3 is an enlarged structural view of a region a shown in fig. 2, a semiconductor crystal bar crystal pulling fixture comprises a base 1, a crystal pulling furnace body 2 is integrally processed on the top of the base 1, a button region is sequentially arranged on the left side of the front surface of the crystal pulling furnace body 2 from top to bottom, a heat insulation plate 18 is bolted on the back surface of the inner cavity of the crystal pulling furnace body 2, two doors 3 are hinged on both sides of the front surface of the crystal pulling furnace body 2 through hinges, a pull handle 4 is bolted on the center of one side of the two doors 3, a placing plate 5 is transversely bolted on the bottom of the inner cavity of the crystal pulling furnace body 2, a first fixing strip 6 and a second fixing strip 7 are transversely bolted on the top of the inner cavity of the crystal pulling furnace body 2 from top, the quartz tube 8 is vertically arranged on the top of the placing plate 5 from left to right in sequence, and the clamping mechanism 9 is arranged on one side, opposite to the placing plate 5, of the first fixing strip 6 and the second fixing strip 7.
The clamping mechanism 9 comprises a fixed clamp seat 91, a fixed block 92, a fixed seat 93, a limiting seat 94, an articulated seat 95, a grab handle 96, a quick chuck 97 and an adjusting bolt 98, the top of the placing plate 5 is sequentially bolted with the fixed clamp seat 91 in a clamping fit with the quartz tube 8 from the left to the right, the front of the second fixed strip 7 is sequentially bolted with the fixed block 92 in a clamping fit with the quartz tube 8 from the left to the right, the front of the first fixed strip 6 is sequentially bolted with the fixed seat 93 from the left to the right, the centers of the front top and the bottom of the fixed seat 93 are all bolted with the limiting seat 94 in a clamping fit with the quartz tube 8, the left side of the fixed seat 93 is articulated with the articulated seat 95, the front left side of the articulated seat 95 is transversely bolted with the grab handle 96, the right side of the articulated seat 95 is articulated with the quick chuck 97 in a clamping fit with the quartz tube 8, the two front sides of the, the quartz tube 8 can be clamped and fixed, so that the quartz tube 8 is prevented from shaking or displacing in the crystal pulling process, and the crystal pulling quality of the quartz tube 8 is further improved.
The vertical bolt in the positive left side in crystal pulling furnace body 2 top has warning light 10, warning color of warning light 10 sets up to "red", "yellow" and "green" three kinds, and stands for "trouble", "warning" and "normal" respectively, and the person of facilitating the use directly perceivedly observes the work operational aspect of crystal pulling furnace body 2, and the maintenance personal of being convenient for in time maintains crystal pulling furnace body 2.
The groove positions of the fixing block 92 and the limiting seat 94 are all bonded with a silica gel sheet 11 through a strong sealant, the thickness of the silica gel sheet 11 is at least ten millimeters, effective buffering protection can be carried out on the surface of the quartz tube 8, and the fixing block 92 and the limiting seat 94 are prevented from colliding with the surface of the quartz tube 8.
All the peripheries of two sides of the crystal pulling furnace body 2 are communicated with heat dissipation fans 12, heat inside the crystal pulling furnace body 2 can be effectively dissipated and cooled, high temperature damage to internal parts of the crystal pulling furnace body 2 is prevented, the outer sides of the heat dissipation fans 12 are communicated with dust filtering nets 13, the mesh areas of the dust filtering nets 13 are smaller than five square millimeters, external dust particles are prevented from entering the interior of the crystal pulling furnace body 2, and the crystal pulling environment of the quartz tube 8 is enhanced.
Both sides at the top of the crystal pulling furnace body 2 are provided with ventilation holes 14 from left to right, the ventilation holes 14 are arranged in a transverse array structure, the aperture of each ventilation hole 14 is smaller than two centimeters, ventilation treatment can be carried out on moisture and heat inside the crystal pulling furnace body 2, and moisture is prevented from being condensed into water beads and attached to the inner surface wall of the crystal pulling furnace body 2.
Supporting legs 15 are bolted to the bottom of the base 1 in the all-around vertical direction, the number of the supporting legs 15 is four, and the supporting legs support the crystal pulling furnace body 2 in the standing process, so that the stability of the crystal pulling furnace body 2 is enhanced, universal wheels 16 are bolted to the bottom of the base 1 in the all-around direction, the number of the universal wheels 16 is six, and the crystal pulling furnace body 2 can be stably moved.
The observation window 17 is embedded in each of the two front sides of the double-door 3, and the observation window 17 is made of double-layer toughened glass, so that a user can observe the crystal pulling condition of the quartz tube 8 from the outer side conveniently.
The utility model provides a pair of semiconductor crystal bar crystal pulling anchor clamps's theory of operation as follows:
when using, the user puts many quartz capsule 8 in proper order earlier to the recess of fixed holder 91, then the user blocks quartz capsule 8 to fixed block 92 and spacing seat 94 surface, thereby the user uses the instrument to screw up fixed block 92, fixed block 92 carries out the chucking to the lower part of quartz capsule 8 and fixes, then through the articulated cooperation of articulated seat 95, the user grips grab handle 96 and forces to the outside, thereby grab handle 96 drives quick chuck 97 through articulated seat 95 and carries out the centre gripping chucking to quartz capsule 8, the user uses the instrument to carry out the tensioning adjustment to adjusting bolt 98, thereby can carry out the centre gripping to the upper portion of quartz capsule 8 and fix, thereby can fasten the centre gripping to quartz capsule 8.
Compared with the prior art, the utility model provides a pair of semiconductor crystal bar crystal pulling anchor clamps has following beneficial effect:
the utility model discloses a structure cooperation of fixing clamp seat 91, fixed block 92, fixing base 93, spacing seat 94, articulated seat 95, grab handle 96, quick chuck 97 and adjusting bolt 98 can carry out the centre gripping to quartz capsule 8 and fix, prevents that quartz capsule 8 from rocking or shifting appearing at the crystal pulling in-process, further improves the crystal pulling quality of quartz capsule 8, reduces quartz capsule 8's material loss to reduce quartz capsule 8's defective percentage.
The above only is the embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structures or equivalent processes of the present invention are used in the specification and the attached drawings, or directly or indirectly applied to other related technical fields, and the same principle is included in the protection scope of the present invention.
Claims (8)
1. A semiconductor crystal bar crystal pulling clamp comprises a base (1) and is characterized in that: a crystal pulling furnace body (2) is integrally processed at the top of the base (1), the left side of the front surface of the crystal pulling furnace body (2) is sequentially provided with a button area from top to bottom, the back of the inner cavity of the crystal pulling furnace body (2) is bolted with a heat insulation plate (18), the two sides of the front of the crystal pulling furnace body (2) are hinged with double doors (3) through hinges, a pull handle (4) is bolted at the center of one opposite side of the double-open door (3), a placing plate (5) is horizontally bolted at the bottom of the inner cavity of the crystal pulling furnace body (2), the top of the inner cavity of the crystal pulling furnace body (2) is transversely bolted with a first fixing strip (6) and a second fixing strip (7) from top to bottom in sequence, the top of the placing plate (5) is vertically provided with a quartz tube (8) from left to right in sequence, and a clamping mechanism (9) is arranged on one opposite side of the placing plate (5), the first fixing strip (6) and the second fixing strip (7).
2. The semiconductor crystal bar pulling clamp as claimed in claim 1, wherein the clamping mechanism (9) comprises a fixed clamp seat (91), a fixed block (92), a fixed seat (93), a limiting seat (94), a hinged seat (95), a grab handle (96), a quick chuck (97) and an adjusting bolt (98), the fixed clamp seat (91) in clamping fit with the quartz tube (8) is sequentially bolted at the top of the placing plate (5) from left to right, the fixed block (92) in matching use with the quartz tube (8) is sequentially bolted at the front of the second fixed bar (7) from left to right, the fixed seat (93) is sequentially bolted at the front of the first fixed bar (6) from left to right, the limiting seats (94) in clamping fit with the quartz tube (8) are respectively bolted at the centers of the top and the bottom of the front of the fixed seat (93), and the hinged seat (95) is hinged at the left side of the fixed seat (93), articulated seat (95) positive left side is horizontal bolted to have grab handle (96), the right side of articulated seat (95) is articulated have with quick chuck (97) of quartz tube (8) joint complex, the positive both sides equal threaded connection of quick chuck (97) has adjusting bolt (98).
3. A semiconductor crystal bar pulling clamp as claimed in claim 1, characterized in that a warning lamp (10) is vertically bolted to the left side of the front side of the top of the crystal pulling furnace body (2), and the warning color of the warning lamp (10) is set to three colors of "red", "yellow" and "green", and respectively represents "failure", "warning" and "normal".
4. The semiconductor crystal bar pulling clamp as set forth in claim 2, wherein the silicon rubber (11) is adhered to the groove positions of the fixed block (92) and the limiting seat (94) by a strong sealant, and the thickness of the silicon rubber (11) is at least ten millimeters.
5. The semiconductor crystal bar pulling clamp as claimed in claim 1, wherein the peripheries of both sides of the crystal pulling furnace body (2) are communicated with heat dissipation fans (12), the outer sides of the heat dissipation fans (12) are communicated with dust filtration nets (13), and the mesh area of the dust filtration nets (13) is less than five square millimeters.
6. The semiconductor crystal bar pulling clamp as set forth in claim 1, wherein the top of the pulling furnace body (2) is provided with ventilation holes (14) from left to right on both sides, the ventilation holes (14) are arranged in a transverse array structure, and the diameter of the ventilation holes (14) is less than two centimeters.
7. The semiconductor crystal bar pulling clamp as set forth in claim 1, wherein the base (1) is vertically bolted with four supporting feet (15) around the bottom, the base (1) is bolted with six universal wheels (16) around the bottom.
8. The semiconductor crystal bar pulling clamp as set forth in claim 1, wherein the observation windows (17) are embedded in both sides of the front surface of the double door (3), and the observation windows (17) are made of double-layer tempered glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020290104.1U CN212103058U (en) | 2020-03-10 | 2020-03-10 | Semiconductor crystal bar crystal pulling clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020290104.1U CN212103058U (en) | 2020-03-10 | 2020-03-10 | Semiconductor crystal bar crystal pulling clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212103058U true CN212103058U (en) | 2020-12-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020290104.1U Active CN212103058U (en) | 2020-03-10 | 2020-03-10 | Semiconductor crystal bar crystal pulling clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212103058U (en) |
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2020
- 2020-03-10 CN CN202020290104.1U patent/CN212103058U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 324200 Xindu Industrial Park, Changshan County, Quzhou City, Zhejiang Province Patentee after: Zhejiang Wangu Semiconductor Co.,Ltd. Address before: 324200 Xindu Industrial Park, Changshan County, Quzhou City, Zhejiang Province Patentee before: CHANGSHAN WANGU ELECTRONIC TECHNOLOGY CO.,LTD. |