CN212083803U - Protective device for scribing machine microscope - Google Patents
Protective device for scribing machine microscope Download PDFInfo
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- CN212083803U CN212083803U CN202021029291.4U CN202021029291U CN212083803U CN 212083803 U CN212083803 U CN 212083803U CN 202021029291 U CN202021029291 U CN 202021029291U CN 212083803 U CN212083803 U CN 212083803U
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Abstract
The utility model discloses a protective device for a scribing machine microscope, wherein a blowing switching block provided with a blowing channel is arranged at the lower end part of a lens group, a gas inlet of the blowing channel is used for injecting gas, and a gas outlet of the blowing channel is positioned above a processed object and is used for blowing gas to the processed object; meanwhile, a microscope protection plate positioned below the lens group is arranged on the mounting shell, and the microscope protection plate can realize selective left-right direction displacement relative to the mounting shell through a driver; the utility model discloses can selectively open or close the scribing machine microscope, when the scribing machine microscope is in the open mode, can get rid of ponding on the processing thing fast, ensure that microscope head can effectively accurately discern the tool mark on the processing thing, when the scribing machine microscope is in the closed mode, can be so that the scribing machine microscope is in the enclosed state to realize the waterproof nature of scribing machine microscope.
Description
Technical Field
The utility model relates to a semiconductor package cutting process technical field, concretely relates to a protector for scribing machine microscope.
Background
In the field of semiconductor package cutting process, a dicing saw is a main tool for cutting a wafer semiconductor material. And for a dicing saw, a microscope is a key component of the dicing saw for realizing automatic alignment.
Due to the self-cutting working principle of the dicing saw, a large amount of water mist can be generated in the actual working process of the dicing saw, and the water mist can be sputtered onto the microscope lens, so that the influence on microscope imaging is influenced, and negative influence is caused. In addition, when the tool mark on the workpiece is observed using a microscope, water is inevitably accumulated on the workpiece, and the microscope lens cannot accurately recognize the tool mark on the workpiece.
Based on the above, the applicant hopes to seek a technical solution to solve the above technical problems based on the experience level of years of research and development in the dicing saw.
Disclosure of Invention
In view of this, the utility model aims at providing a protector for scribing machine microscope can selectively open or close the scribing machine microscope, when the scribing machine microscope is in the open mode, can get rid of ponding on the processing thing fast, ensures that microscope head can effectively accurately discern the tool mark on the processing thing, when the scribing machine microscope is in the closed mode, can make the scribing machine microscope be in the enclosed state to realize the waterproof nature of scribing machine microscope.
The utility model adopts the technical scheme as follows:
a protection device for a scribing machine microscope comprises a main shaft fixing part arranged on an installation shell, wherein a microscopic imaging system is arranged on the main shaft fixing part, and a lens group is arranged below the microscopic imaging system; the lower end part of the lens group is provided with a blowing switching block provided with a blowing channel, the gas inlet of the blowing channel is used for injecting gas, and the gas outlet of the blowing channel is positioned above the processed object and is used for blowing gas to the processed object; simultaneously the installation is equipped with on the installation casing and is located the microscope guard plate of lens group below, the microscope guard plate pass through the driver for the installation casing realizes selectivity left right direction displacement, is used for realizing right the selectivity of lens group is opened and is closed, just the microscope guard plate with be equipped with respectively on the installation casing and correspond the complex through hole and be used for the lens group is right under operating condition the processing thing carries out image recognition, under non-operating condition, through hole quilt on the installation casing the microscope guard plate covers and seals.
Preferably, a first microscopic imaging system and a second microscopic imaging system are installed on the main shaft fixing member, a first lens group and a second lens group are respectively and correspondingly installed below the first microscopic imaging system and the second microscopic imaging system, first annular light and second annular light used for increasing the light intensity of a processed object are respectively installed at the lower ends of the first lens group and the second lens group, the first annular light and the second annular light are respectively installed on the main shaft fixing member through the light source fixing member, and meanwhile, air blowing adapter blocks are respectively installed between the first annular light and the second annular light and the corresponding light source fixing member.
Preferably, the first lens group and the second lens group are further provided with a first straight light and a second straight light for increasing light intensity, respectively.
Preferably, the driver adopts a cylinder mounted on the mounting housing, an injection gas pipe of the cylinder is provided with a branch gas pipe, the branch gas pipe is used as a gas injection source of the gas inlet, and when the cylinder is in a closed state, the gas blowing channel is simultaneously injected with gas for blowing the processed object.
Preferably, one side of the microscope protection plate is fixedly connected with the driving rod of the air cylinder.
Preferably, an air outlet of the air blowing channel is connected with an air blowing rod in an installing mode, and the air blowing rod blows air to the processed object through the through hole.
Preferably, the lens group is mounted on the spindle mount through a lens mount.
Preferably, the installation shell is provided with a first through hole and a second through hole which are correspondingly matched with the first annular light and the second annular light, the microscope protection plate is provided with a third through hole which is correspondingly matched with the second through hole, the first lens group and the second lens group perform image recognition on the processed object through the through holes in a working state, and the first through hole and the second through hole in the installation shell are covered and sealed by the microscope protection plate in a non-working state.
On one hand, the utility model is provided with the air blowing switching block which has the function of blowing air to the processed object positioned below the air blowing switching block through directly installing the lower end part of the scribing machine microscope, when the scribing machine microscope is in the working state (namely, the scribing machine microscope is in the opening state), the air blowing switching block blows air to the processed object to quickly remove the accumulated water on the processed object, thereby ensuring that the microscope lens can effectively and accurately identify the tool marks on the processed object, on the other hand, the microscope protection plate is further installed on the mounting shell of the scribing machine microscope, the microscope protection plate realizes the selective closing of the lens group of the scribing machine microscope through the displacement of the driver in the left and right directions, namely, when the scribing machine microscope is in the non-working state (namely, the scribing machine microscope is in the closing state), the scribing machine microscope can be in the, thereby realizing the waterproofness of the scribing machine microscope.
Drawings
Fig. 1 is a schematic structural diagram of a protection device for a dicing saw microscope according to an embodiment of the present invention (the dicing saw microscope is in an operating state).
Detailed Description
The embodiment of the utility model discloses a protective device for a scribing machine microscope, wherein the scribing machine microscope comprises a main shaft fixing piece arranged on an installation shell, a microscopic imaging system is arranged on the main shaft fixing piece, and a lens group is arranged below the microscopic imaging system; the lower end part of the lens group is provided with a blowing switching block provided with a blowing channel, the gas inlet of the blowing channel is used for injecting gas, and the gas outlet of the blowing channel is positioned above the processed object and is used for blowing gas to the processed object; the installation is equipped with the microscope guard plate that is located the battery of lens below on the installation casing simultaneously, and the microscope guard plate passes through the driver and realizes the selectivity left and right direction displacement for the installation casing for realize opening and closing the selectivity of battery of lens, and be equipped with respectively on microscope guard plate and the installation casing and correspond the complex through hole and be used for the battery of lens to carry out image recognition to the processing thing under operating condition, under non-operating condition, the through hole on the installation casing is covered by the microscope guard plate and is sealed.
In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.
Referring to fig. 1, a protection device 1 for a dicing saw microscope, the dicing saw microscope 1 includes a spindle fixing member 20 mounted on a mounting housing 10, a microscopic imaging system is mounted on the spindle fixing member 20, and a lens group is mounted below the microscopic imaging system and mounted on the spindle fixing member 20 through a lens fixing member 5; the lower end part of the lens group is provided with a blowing adapter block provided with a blowing channel (not shown), the air inlet of the blowing channel (not shown) is used for injecting air, and the air outlet of the blowing channel is positioned above the processed object (not shown) and is used for blowing air to the processed object; meanwhile, a microscope protection plate 2 positioned below the lens group is arranged on the mounting shell 10, the microscope protection plate 2 can selectively move in the left and right directions relative to the mounting shell 10 through a driver and is used for selectively opening and closing the lens group, correspondingly matched through holes are respectively formed in the microscope protection plate 2 and the mounting shell 10 and are used for image recognition of the lens group on a processed object in a working state, and the through holes in the mounting shell 10 are covered and sealed by the microscope protection plate 2 in a non-working state;
preferably, in the present embodiment, the first microscopic imaging system 31 and the second microscopic imaging system 32 are mounted on the spindle fixing member 20, and the first lens group 41 and the second lens group 42 are respectively mounted below the first microscopic imaging system 31 and the second microscopic imaging system 32, specifically, the first lens group 41 and the second lens group 42 can be a high power lens group and a low power lens group, respectively, which are well known in the art, but the present embodiment is not particularly expanded; the lower ends of the first lens group 41 and the second lens group 42 are respectively provided with a first annular light 51 and a second annular light 52 for increasing the light intensity of the processed object, the first annular light 51 and the second annular light 52 are respectively arranged on the main shaft fixing member 20 through a light source fixing member 53, and meanwhile, an air blowing transfer block 3 is respectively arranged between the first annular light 51 and the second annular light 52 and the corresponding light source fixing member 53; the first lens group 41 and the second lens group 42 are further provided with a first straight light 61 and a second straight light 62 for increasing the light intensity, respectively;
preferably, in order to ensure an effective and rapid air blowing effect, in the present embodiment, an air outlet of an air blowing channel on the air blowing adapter block 3 is connected with an air blowing rod 3a, and the air blowing rod 3a blows air to the processed object through the through hole;
preferably, in the embodiment, the driver adopts the air cylinder 4 installed on the installation shell 10, and one side of the microscope protection plate 2 is fixedly installed and connected with the driving rod 4a of the air cylinder 4; an injection air pipe (not shown) of the air cylinder 4 is provided with a first branch air pipe and a second branch air pipe, each branch air pipe is respectively used as an injection air source of an air inlet of each air blowing switching block 3, when the air cylinder 4 is in a closed state in actual work, namely the scribing machine microscope 1 enters a working state at the moment, an air blowing channel of each air blowing switching block 3 is simultaneously injected with air, and air is respectively blown to a machined object through corresponding air blowing rods 3a, accumulated water on the machined object is quickly removed, the air injection and air blowing of the machined object can be skillfully realized while the air cylinder 4 is closed by air closing through the air path structural design, the structure is simple, and the whole operation process is efficient and convenient;
preferably, in the present embodiment, the mounting housing 10 is provided with a first through hole 11 and a second through hole 12 respectively corresponding to the first ring light 51 and the second ring light 52, the microscope protection plate 2 is provided with a third through hole 21 corresponding to the second through hole 12, when the dicing saw microscope 1 is in the working state, the air cylinder 4 is in the air-off closed state, the first lens group 41 and the second lens group 42 respectively perform image recognition on the processed object through the first through hole 11 and the second through hole 12 and the third through hole 21 corresponding to the through holes, when the dicing saw microscope 1 is in the non-working state, the air cylinder 4 is in the air-injection open state, the microscope protection plate 2 is driven to displace leftwards relative to the mounting housing 10, and the air injection channel stops, the first through hole 11 and the second through hole 12 on the mounting housing 10 are covered and closed by the microscope protection plate 2, ensure that the scriber microscope 1 enters a closed state and realize an effective waterproof effect.
In the embodiment, on one hand, the lower end part of the dicing saw microscope 1 is directly provided with the air blowing adapter block 3 with the function of blowing air to the processed object positioned below the dicing saw microscope 1, when the dicing saw microscope 1 is in a working state (namely, the dicing saw microscope 1 is in an open state), the air blowing adapter block 3 blows air to the processed object to quickly remove accumulated water on the processed object, so that the micro lens can effectively and accurately identify the tool marks on the processed object, on the other hand, the microscope protection plate 2 is further arranged on the dicing saw microscope installation shell 10, the microscope protection plate 2 realizes selective left-right displacement through the air cylinder 4 to realize selective closing of the dicing saw microscope lens group 1, namely, when the dicing saw microscope 1 is in a non-working state (namely, the dicing saw microscope 1 is in a closed state), the dicing saw microscope 1 can be in a closed state, thereby achieving the waterproof property of the dicing saw microscope 1.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. A protection device for a scribing machine microscope comprises a main shaft fixing part arranged on an installation shell, wherein a microscopic imaging system is arranged on the main shaft fixing part, and a lens group is arranged below the microscopic imaging system; the lens group is characterized in that a blowing switching block provided with a blowing channel is mounted at the lower end part of the lens group, a gas inlet of the blowing channel is used for injecting gas, and a gas outlet of the blowing channel is positioned above a processed object and is used for blowing gas to the processed object; simultaneously the installation is equipped with on the installation casing and is located the microscope guard plate of lens group below, the microscope guard plate pass through the driver for the installation casing realizes selectivity left right direction displacement, is used for realizing right the selectivity of lens group is opened and is closed, just the microscope guard plate with be equipped with respectively on the installation casing and correspond the complex through hole and be used for the lens group is right under operating condition the processing thing carries out image recognition, under non-operating condition, through hole quilt on the installation casing the microscope guard plate covers and seals.
2. The protection device for a scribing machine microscope according to claim 1, wherein a first microscopic imaging system and a second microscopic imaging system are installed on the main shaft fixing member, a first lens group and a second lens group are respectively installed below the first microscopic imaging system and the second microscopic imaging system, respectively, a first annular light and a second annular light for increasing the light intensity of the processed object are respectively installed at the lower ends of the first lens group and the second lens group, the first annular light and the second annular light are respectively installed on the main shaft fixing member through a light source fixing member, and meanwhile, an air blowing adapter block is respectively installed between the first annular light and the second annular light and the corresponding light source fixing member.
3. The guard for a dicing saw microscope according to claim 2, wherein the first lens group and the second lens group are further provided with a first straight light and a second straight light, respectively, for increasing light intensity.
4. The shielding apparatus of claim 1, wherein the driver employs a cylinder mounted on the mounting housing, the injection gas pipe of the cylinder is provided with a branch gas pipe as a gas injection source of the gas inlet, and when the cylinder is in a closed state, the gas injection channel is simultaneously injected with gas for injecting gas to the workpiece.
5. The guard for a dicing saw microscope according to claim 4, wherein one side of the microscope protection plate is fixedly installed and connected with the driving rod of the air cylinder.
6. The protection device for the dicing saw microscope of claim 1, wherein a blow rod is mounted and connected to an air outlet of the blow channel, and the blow rod blows air to the processed object through the through hole.
7. The guard for a dicing saw microscope according to claim 1, wherein the lens group is mounted on the spindle mount by a lens mount.
8. The protection device for a dicing saw microscope according to claim 2, wherein the mounting housing is provided with a first through hole and a second through hole respectively corresponding to the first ring light and the second ring light, the microscope protection plate is provided with a third through hole corresponding to the second through hole, the first lens group and the second lens group perform image recognition on the processed object through the through holes in an operating state, and the first through hole and the second through hole in the mounting housing are covered and sealed by the microscope protection plate in a non-operating state.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2020205177136 | 2020-04-10 | ||
| CN202020517713 | 2020-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212083803U true CN212083803U (en) | 2020-12-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021029291.4U Active CN212083803U (en) | 2020-04-10 | 2020-06-08 | Protective device for scribing machine microscope |
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| CN (1) | CN212083803U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114700807A (en) * | 2022-06-06 | 2022-07-05 | 苏州和研精密科技有限公司 | Image acquisition device and scribing machine |
-
2020
- 2020-06-08 CN CN202021029291.4U patent/CN212083803U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114700807A (en) * | 2022-06-06 | 2022-07-05 | 苏州和研精密科技有限公司 | Image acquisition device and scribing machine |
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