CN212051727U

CN212051727U - Diffusion furnace process chamber furnace mouth structure

Info

Publication number: CN212051727U
Application number: CN202020414630.4U
Authority: CN
Inventors: 陈庆敏; 吴晓松; 刘永法; 李丙科
Original assignee: Wuxi Songyu Technology Co ltd
Current assignee: Wuxi Songyu Technology Co ltd
Priority date: 2020-03-27
Filing date: 2020-03-27
Publication date: 2020-12-01
Anticipated expiration: 2030-03-27

Abstract

The utility model discloses a diffusion furnace process cavity furnace mouth structure, wherein the inner wall of a process cavity is a quartz tube, the end part of the quartz tube of the process cavity furnace mouth protrudes out of an external heating furnace body, the periphery of the end part comprises a circle of annular bulge, a front flange is correspondingly sleeved on the periphery of a front tube part in front of the annular bulge, and a rear flange is correspondingly sleeved on the periphery of a rear tube part in back of the annular bulge; an intermediate flange is arranged between the front flange and the rear flange and is positioned on the outer side of the annular bulge, a section of gap is reserved between the inner periphery of the intermediate flange and the outer periphery of the annular bulge, and a high-temperature resistant elastic gasket and a radial sealing ring are filled in the gap. The utility model discloses a diffusion furnace decomposes a sealing washer among the prior art into radial seal and axial seal, makes the axial sealing circle farther from the quartz capsule center, reduces the heat radiation influence, reduces the loss rate, and increase of service life adopts the mounting means technical requirement who loads the space low, and it is more convenient, reliable to install.

Description

Diffusion furnace process chamber furnace mouth structure

Technical Field

The utility model belongs to the technical field of the diffusion furnace and specifically relates to a diffusion furnace technology cavity fire door structure.

Background

In the preparation process of the solar cell, the silicon wafer needs to be subjected to the processes of texturing, diffusion, etching, film coating, printing and the like in sequence. The diffusion process is a core process in the preparation process of the solar cell, namely, a silicon wafer is placed into a diffusion furnace by taking a quartz boat as a carrier, and nitrogen and a diffusion source are introduced into the diffusion furnace at a certain temperature so as to diffuse and deposit PN junctions on the surface of the silicon wafer. As shown in fig. 1, the furnace mouth structure of the existing diffusion furnace usually adopts an axial sealing mode, a circle of axial sealing ring 3 is arranged between the end surfaces of an outer end metal flange 1 and a quartz tube 2, because the axial sealing ring 3 is close to the center of the quartz tube 2 and is close to the outer wall of the quartz tube 2, the axial sealing ring is easily radiated by heat in the furnace cavity, thereby accelerating aging, leading to frequent maintenance and replacement, reducing production efficiency, in addition, because the installation and debugging of the quartz tube 2 are very troublesome, only axial end surface sealing is adopted, the distance between the end surface of the quartz tube 2 and the outer end metal flange 1 is strict, the distance cannot reach the sealing effect too far, the quartz tube 2 is easily stressed and cracked due to too close distance, increasing technical difficulty and installation requirements, and in addition, extrusion and cracking caused by expansion easily in the processing process.

SUMMERY OF THE UTILITY MODEL

The applicant aims at the defects that a sealing ring at the end part of a furnace chamber of the existing diffusion furnace is easy to age, strict in technical requirement, high in installation difficulty, easy to crush and crack due to expansion in the machining process and the like in the furnace mouth structure of the existing diffusion furnace, and provides the furnace mouth structure of the diffusion furnace process chamber with a reasonable structure.

The utility model discloses the technical scheme who adopts as follows:

a diffusion furnace process chamber furnace mouth structure, the inner wall of the process chamber is a quartz tube, the end part of the quartz tube of the process chamber furnace mouth protrudes out of a heating furnace body, the periphery of the end part contains a circle of annular bulge, the periphery of a front tube part in front of the annular bulge is correspondingly sleeved with a front flange, and the periphery of a rear tube part in back of the annular bulge is correspondingly sleeved with a rear flange; an intermediate flange is arranged between the front flange and the rear flange and is positioned on the outer side of the annular bulge, a section of gap is reserved between the inner periphery of the intermediate flange and the outer periphery of the annular bulge, and a high-temperature resistant elastic gasket and a radial sealing ring are filled in the gap.

As a further improvement of the above technical solution:

the radial sealing ring is tightly sleeved on the periphery of the annular bulge and is tightly contacted with the inner periphery of the intermediate flange.

The number of the radial sealing rings is more than two.

The high temperature resistant elastic gasket is in front of the gap, and the radial sealing ring is behind.

An annular sunken groove is formed in the front surface of the middle flange, an axial sealing ring is assembled in the annular sunken groove, and the axial sealing ring is in close contact with the rear surface of the front flange.

The inner wall of the process chamber is a quartz tube, a protective sleeve is sleeved on the periphery of the quartz tube, and a heating furnace body is arranged outside the protective sleeve.

The outer periphery of the annular projection is higher than the outer peripheries of the front tube portion and the rear tube portion.

The front flange and the rear flange are both metal flanges.

The utility model has the advantages as follows:

the utility model discloses a diffusion furnace improves process chamber's fire door seal structure, quartz tube tip at process chamber first end adopts radial seal circle and axial seal circle structure, a sealing washer among the prior art decomposes into radial seal and axial seal, it is farther from the quartz tube center to make the axial seal circle, reduce the heat radiation influence, reduce the loss rate, increase of service life, moreover, radial seal circle adopts the mounting means technical requirement who loads the space low, it is more convenient to install, reliability, reduce the cracked risk of extrusion because of inflation and leading flange produce in the process.

Drawings

FIG. 1 is a schematic view of a conventional diffusion furnace.

Fig. 2 is a schematic view of the diffusion furnace main room of the present invention.

Fig. 3 is a schematic view of the push-pull boat and the quartz boat of the present invention.

Fig. 4 is an enlarged view of a portion a in fig. 2.

In fig. 1: 1. an outer end metal flange; 2. a quartz tube; 3. a seal ring;

in fig. 2 to 4: 4. pushing and pulling the boat; 5. a quartz boat; 6. a process chamber; 7. an air inlet pipe; 8. a quartz tube; 9. protecting the sleeve; 10. heating the furnace body; 11. a rear frame; 12. a process chamber cover; 13. a dual-bar configuration; 14. an annular projection; 15. a front flange; 16. a rear flange; 17. a middle flange; 18. a high temperature resistant elastomeric gasket; 19. a radial seal ring; 20. and (4) an axial sealing ring.

Detailed Description

The following describes embodiments of the present invention with reference to the drawings. The terms "axial" and "radial" as used in this embodiment refer to both the axial and radial directions of the quartz tube of the process chamber.

As shown in fig. 2 to 3, the diffusion furnace of the present invention comprises a working chamber, a main machine chamber and an air source cabinet, wherein a set of mechanical driving mechanism is arranged in the working chamber, at least one push-pull boat 4 is installed on the mechanical driving mechanism, and the mechanical driving mechanism drives the push-pull boat 4 to move forward or backward. A quartz boat 5 is placed on the push-pull boat 4, a plurality of silicon wafers are loaded in the quartz boat 5, and the quartz boat 5 is driven by the push-pull boat 4 to enter the host room. The main machine chamber is internally provided with at least one process chamber 6, the first end of the process chamber 6 is a furnace opening for feeding the quartz boat 5, the furnace opening at the first end is tightly matched with a process chamber cover 12 arranged on the push-pull boat 4, the second end is communicated with the gas source cabinet and an external tail gas treatment device, a gas inlet pipe 7 of the gas source cabinet extends into the process chamber 6 from the second end and extends to the position near the first end, and gas is supplied into the process chamber 6 from the first end position. The inner wall of the process chamber 6 is a quartz tube 8, a protective sleeve 9 is sleeved on the periphery of the quartz tube 8, and a heating furnace body 10 is arranged outside the protective sleeve 9.

The push-pull boat 4 faces the process chamber 6 and comprises a rear base 11, a process chamber cover 12 and a double-rod structure 13 which are sequentially connected, the rear end of the push-pull boat 4 is the rear base 11 arranged on the mechanical driving mechanism, the front portion of the rear base 11 is provided with the process chamber cover 12, the front portion of the process chamber cover 12 is provided with the double-rod structure 13, and the double-rod structure 13 is used for placing the quartz boat 5. The rear machine base 11 is provided with a telescopic device, the push-pull boat 4 sends the quartz boat 5 into the process chamber 6, the process chamber cover 12 is tightly matched with the furnace mouth of the process chamber 6, and the telescopic device tightly presses the process chamber cover 12 to ensure the sealing property inside the process chamber 6.

As shown in fig. 4, the mouth structure of the process chamber of the diffusion furnace of the present invention specifically comprises: the end part of the quartz tube 8 at the first end of the process chamber 6 protrudes out of the heating furnace body 10, the periphery of the end part comprises a ring-shaped bulge 14, the front part of the ring-shaped bulge 14 is a front tube part, and the periphery of the front tube part is correspondingly sleeved with a front flange 15. The rear part of the annular bulge 14 is a rear pipe part, and a rear flange 16 is correspondingly sleeved on the periphery of the rear pipe part. The outer periphery of the annular projection 14 is higher than the outer peripheries of the front tube portion and the rear tube portion. An intermediate flange 17 is mounted between the front flange 15 and the rear flange 16, the intermediate flange 17 being located outside the annular projection 14, a gap being left between the inner periphery of the intermediate flange 17 and the outer periphery of the annular projection 14. And a high-temperature resistant elastic gasket 18 and a radial sealing ring 19 are filled in the gap, wherein the high-temperature resistant elastic gasket 18 is arranged in front of the radial sealing ring 19. The radial sealing ring 19 is tightly sleeved on the periphery of the annular bulge 14 and is tightly contacted with the inner periphery of the intermediate flange 17, the radial sealing ring 19 plays a radial sealing role, and the high-temperature-resistant elastic gasket 18 plays a role in extruding the radial sealing ring 19. The number of radial sealing rings 19 may be two. An annular sunken groove is formed in the front surface of the middle flange 17, an axial sealing ring 20 is assembled in the annular sunken groove, and the axial sealing ring 20 is in close contact with the rear surface of the front flange 15 to play an axial sealing role.

The above description is illustrative of the present invention and is not intended to limit the present invention, and the present invention may be modified in any manner without departing from the spirit of the present invention.

Claims

1. The utility model provides a diffusion furnace technology cavity fire door structure which characterized in that: the inner wall of the process chamber (6) is a quartz tube (8), the end part of the quartz tube (8) at the furnace mouth of the process chamber (6) protrudes out of the heating furnace body (10), the periphery of the end part contains a circle of annular bulge (14), the periphery of a front pipe part in front of the annular bulge (14) is correspondingly sleeved with a front flange (15), and the periphery of a rear pipe part behind the annular bulge (14) is correspondingly sleeved with a rear flange (16); an intermediate flange (17) is arranged between the front flange (15) and the rear flange (16), the intermediate flange (17) is positioned on the outer side of the annular bulge (14), a gap is reserved between the inner periphery of the intermediate flange (17) and the outer periphery of the annular bulge (14), and a high-temperature resistant elastic gasket (18) and a radial sealing ring (19) are filled in the gap.

2. The diffusion furnace process chamber fire door structure of claim 1, wherein: the radial sealing ring (19) is tightly sleeved on the outer periphery of the annular bulge (14) and is tightly contacted with the inner periphery of the middle flange (17).

3. The diffusion furnace process chamber fire door structure of claim 1, wherein: the number of the radial sealing rings (19) is more than two.

4. The diffusion furnace process chamber fire door structure of claim 1, wherein: the high temperature resistant elastic gasket (18) is in front of the gap, and the radial sealing ring (19) is behind.

5. The diffusion furnace process chamber fire door structure of claim 1, wherein: an annular sunken groove is formed in the front surface of the middle flange (17), an axial sealing ring (20) is assembled in the annular sunken groove, and the axial sealing ring (20) is in close contact with the rear surface of the front flange (15).

6. The diffusion furnace process chamber fire door structure of claim 1, wherein: a protective sleeve (9) is sleeved on the periphery of the quartz tube (8), and a heating furnace body (10) is arranged outside the protective sleeve (9).

7. The diffusion furnace process chamber fire door structure of claim 1, wherein: the outer periphery of the annular projection (14) is higher than the outer peripheries of the front tube portion and the rear tube portion.

8. The diffusion furnace process chamber fire door structure of claim 1, wherein: the front flange (15) and the rear flange (16) are both metal flanges.