CN212033021U - Tft基板及显示装置 - Google Patents

Tft基板及显示装置 Download PDF

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CN212033021U
CN212033021U CN202021233526.1U CN202021233526U CN212033021U CN 212033021 U CN212033021 U CN 212033021U CN 202021233526 U CN202021233526 U CN 202021233526U CN 212033021 U CN212033021 U CN 212033021U
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layer
substrate
tft substrate
tft
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李海旭
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BOE Technology Group Co Ltd
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    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136209Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
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Abstract

本申请提供一种TFT基板及显示装置,该TFT基板包括衬底基板及多个像素单元,每个像素单元包括设置在衬底基板上的薄膜晶体管;TFT基板还包括遮光层,遮光层设置在薄膜晶体管的源极漏极层远离衬底基板的一侧,且遮光层在衬底基板上的投影至少完全覆盖薄膜晶体管的有源层在衬底基板上的投影,及部分覆盖薄膜晶体管的栅极层在衬底基板上的投影。应用本申请,可以避免TFT受照射后,其电学特性发生变化,继而导致显示装置显示异常的现象发生,也可以防止线栅偏振器反射的光经过栅极层反射后形成的杂散光对显示装置的显示效果造成不良影响。

Description

TFT基板及显示装置
技术领域
本发明涉及显示装置技术领域,具体地,涉及一种TFT基板及显示装置。
背景技术
随着显示技术的不断发展,人们对大尺寸屏幕的需求也在不断提升,可应用于大尺寸屏幕的双液晶盒(DB cell)显示装置便应运而生。DB cell显示装置包括依次层叠设置的背光源、第一TFT(Thin Film Transistor,薄膜晶体管)基板、第一液晶层、第二TFT基板、第二液晶层及彩膜基板等。其中,第一TFT基板和第二TFT基板均用作光控开关,共同决定其所在像素是否进行发光,彩膜基板用于在第二TFT基板的激发作用下产生彩色的光,使显示装置呈现彩色。
但是,在对DB cell显示装置进行研究后发现,背光源的光线在经过第一TFT基板和第一液晶层到达第二TFT基板后,由于第一液晶层和第二TFT基板之间具有线栅偏振器(WGP)光线会发生反射,部分反射光线会被反射至第一TFT基板的TFT区域。TFT区域受照射后,第一TFT基板的电学特性发生变化,可能会导致显示装置显示异常。
实用新型内容
本实用新型旨在至少解决现有技术中存在的技术问题之一,提出了一种TFT基板及显示装置,可以对TFT基板的薄膜晶体管进行遮光,防止薄膜晶体管受照射后,电学特性发生变化,导致显示异常等。
为实现本实用新型的目的,第一方面提供一种TFT基板,包括衬底基板及多个像素单元,每个所述像素单元包括设置在所述衬底基板上的薄膜晶体管;其特征在于,所述TFT基板还包括遮光层,所述遮光层设置在所述薄膜晶体管的源极漏极层远离所述衬底基板的一侧,且所述遮光层在所述衬底基板上的投影至少完全覆盖所述薄膜晶体管的有源层在所述衬底基板上的投影,及部分覆盖所述薄膜晶体管的栅极层在所述衬底基板上的投影。
可选地,所述TFT基板还包括过孔,所述过孔设置在所述源极漏极层之上,且在所述衬底基板上的投影位于所述源极漏极层在所述衬底基板上的投影内;
所述遮光层还部分覆盖所述源极漏极层,且所述遮光层在所述衬底基板上的投影的边缘与所述过孔在所述衬底基板上的投影的边缘的最小距离大于或等于2微米。
可选地,所述遮光层在所述衬底基板上的投影的边缘相对于所述有源层在所述衬底基板上的投影的边缘向外侧凸出。
可选地,所述遮光层在所述衬底基板上的投影的边缘相对于所述有源层在所述衬底基板上的投影的边缘向外侧凸出的距离均大于或等于3微米。
可选地,所述遮光层为有机材料黑矩阵。
可选地,还包括第一保护层,所述第一保护层设置于所述薄膜晶体管与所述遮光层之间,用于对所述源极漏极层、所述有源层及所述栅极层进行保护。
可选地,还包括平坦层,所述平坦层为设置于所述薄膜晶体管之上的整层膜层,所述整层膜层与所述遮光层的侧面相接且二者上表面平齐,或者所述整层膜层完全覆盖所述薄膜晶体管和所述遮光层。
可选地,还包括电极层,所述电极层包括像素电极层、公共电极层及设置于所述像素电极层和所述公共电极层之间的第二保护层,所述像素电极层设置在所述平坦层之上,并通过所述过孔与所述源极漏极层连接。
为实现本实用新型的目的,另一方面提供一种显示装置,包括彩膜基板、第一TFT基板、第二TFT基板、设置于所述彩膜基板和所述第一TFT基板之间的第一液晶层、设置于所述第一TFT基板与所述第二TFT基板之间的第二液晶层和线栅偏振器及背光源,所述第二TFT基板为上述第一方面提供的TFT基板。
可选地,所述第二TFT基板的一个像素单元所在的区域,与所述第一TFT基板的一个或相邻多个像素单元所在的区域相对应。
本实用新型具有以下有益效果:
本实施例提供的TFT基板,在薄膜晶体管的源极漏极层之上设置有遮光层,以对薄膜晶体管进行遮光,防止光线(尤其是自上层TFT基板的线栅偏振器反射的光线)照射到金属材料的有源层及部分栅极层,从而可以有效避免TFT受照射后,其电学特性发生变化,继而导致显示装置显示异常的现象发生,也可以有效防止线栅偏振器反射的光经过栅极层反射后形成的杂散光对显示装置的显示效果造成不良影响。且设置遮光层覆盖薄膜晶体管的源极漏极层、有源层和栅极层,可以尽可能遮蔽反光金属,同时也不会降低光线的透过率。
附图说明
图1为本申请实施例提供的TFT基板的TFT处的平面结构放大示意图;
图2为图1中A-A处的截面结构放大示意图;
图3为本申请实施例提供的显示装置的TFT处的截面结构示意图。
具体实施方式
下面详细描述本申请,本申请的实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的部件或具有相同或类似功能的部件。此外,如果已知技术的详细描述对于示出的本申请的特征是不必要的,则将其省略。下面通过参考附图描述的实施例是示例性的,仅用于解释本申请,而不能解释为对本申请的限制。
本技术领域技术人员可以理解,除非另外定义,这里使用的所有术语(包括技术术语和科学术语),具有与本申请所属领域中的普通技术人员的一般理解相同的意义。还应该理解的是,诸如通用字典中定义的那些术语,应该被理解为具有与现有技术的上下文中的意义一致的意义,并且除非像这里一样被特定定义,否则不会用理想化或过于正式的含义来解释。
本技术领域技术人员可以理解,除非特意声明,这里使用的单数形式“一”、“一个”和“该”也可包括复数形式。应该理解,当我们称元件被“连接”或“耦接”到另一元件时,它可以直接连接或耦接到其他元件,或者也可以存在中间元件。此外,这里使用的“连接”或“耦接”可以包括无线连接或无线耦接。这里使用的措辞“和/或”包括一个或更多个相关联的列出项的全部或任一单元和全部组合。
下面结合附图以具体的实施例对本申请的技术方案以及本申请的技术方案如何解决上述技术问题进行详细说明。
如图1-2所示,为本申请实施例提供的一种TFT基板的TFT处的平面结构放大示意图(图中衬底基板未示出)和截面结构放大示意图,该TFT基板可以包括衬底基板10及多个像素单元,每个像素单元可以包括设置在衬底基板10上的薄膜晶体管;该TFT基板还可以包括遮光层70,遮光层70可以设置在薄膜晶体管的源极漏极层40远离衬底基板10的一侧,且遮光层70在衬底基板10上的投影可以至少完全覆盖薄膜晶体管的有源层50在衬底基板10上的投影,及部分覆盖薄膜晶体管的栅极层20在衬底基板10上的投影。
其中,衬底基板10可以是玻璃基板,在衬底基板10上还可以设有栅极绝缘层30,且该栅极绝缘层30可以完全覆盖栅极层20,以在源极漏极层40(及有源层50)与栅极层20之间进行绝缘隔离。需要说明的是,本实施例对源极漏极层40、有源层50和栅极层20在衬底基板10上的具体布局和尺寸不做具体限定,只要其符合上述层间关系,能够实现TFT基板的发光控制作用即可。
本实施例提供的TFT基板,在薄膜晶体管的源极漏极层40之上设置有遮光层70,以对薄膜晶体管进行遮光,防止光线(尤其是自上层TFT基板的WGP反射的光线)照射到金属材料的有源层50及栅极层20(大部分),从而可以有效避免TFT受照射后,其电学特性发生变化,继而导致显示装置显示异常的现象发生,也可以有效防止WGP反射的光经过栅极层20反射后形成的杂散光对显示装置的显示效果造成不良影响。且设置遮光层70覆盖薄膜晶体管的源极漏极层40、有源层50和栅极层20,可以尽可能遮蔽反光金属,同时也不会降低光线的透过率。
于本实施例一具体实施方式中,遮光层70可以采用黑色的有机材料,多个像素单元上的遮光层70形成黑矩阵。采用黑矩阵的形式设置遮光层70,黑矩阵位于TFT上的栅极层20及有源层50的上方,对由反光金属材料制作的栅极层20及有源层50的遮光效果较好。进一步地,遮光层70可以为有机材料的黑矩阵,即遮光层70可为有机材料层,可以采用现有的用作黑矩阵的有机材料,相较于用作黑矩阵的金属材料,其材料成本较低,且可以防止遮光层70本身发生反光,可进一步防止WGP反射的光经过TFT区域反射后形成的杂散光对显示装置的显示效果造成不良影响。
于本实施例另一具体实施方式中,如图1和2所示,该TFT基板还可以包括过孔81,过孔81可以设置在源极漏极层40之上,且过孔81在衬底基板10上的投影位于源极漏极层40在衬底基板10上的投影内;遮光层70还可以部分覆盖源极漏极层40,且遮光层70在衬底基板10上的投影的边缘与过孔81在衬底基板10上的投影的边缘的最小距离可以大于或等于2微米。如此,遮光层70的边缘距离过孔81具有一定距离,使得遮光层70可以有效避开源极漏极层40之上的过孔81,即使过孔81的位置产生偏差(可理解为偏差数值在正常工艺偏差范围内),遮光层70也与其具有一定距离,即遮光层70也不会对过孔工艺产生影响,从而避免具有一定厚度的遮光层70对后续的过孔工艺产生影响。其中,如图1和图2所示,过孔通常位于源极漏极层40的输入端之上,该输入端用于源极漏极层40与下述像素电极层91进行电连接。由于过孔81通常形成于源极漏极层40的输入端上方,可以令遮光层70的边缘与该输入端的边缘的距离大于等于2微米,以确保遮光层70与过孔81之间具有一定的距离。优选地,可以令遮光层70的边缘与该输入端的边缘的距离为5微米。
于本实施例另一具体实施方式中,遮光层70在衬底基板10上的投影的边缘可以相对于有源层50在衬底基板10上的投影的边缘向外侧凸出,使得即使在有源层50存在工艺偏差(可理解为偏差数值在正常工艺偏差范围内)时,遮光层70也能将其覆盖,从而确保遮光层70能够有效覆盖有源层50,进一步保证遮光层70的遮光效果。同理地,遮光层70在衬底基板10上的投影的边缘也可以相对于栅极层20在衬底基板10上的投影的边缘(图1中左右侧的边缘)向外侧凸出,使得即使在栅极层20存在工艺偏差(可理解为偏差数值在正常工艺偏差范围内)时,遮光层70也能将其覆盖,从而确保遮光层70能够有效覆盖栅极层20,进一步保证遮光层70的遮光效果。
进一步地,根据现有的栅极层20和有源层50的制备工艺,其二者的工艺偏差通常在3微米以内,则遮光层70在衬底基板10上的投影的边缘相对于有源层50在衬底基板10上的投影的边缘和栅极层20在衬底基板10上的投影的边缘(图1中左右侧的边缘)向外侧凸出的距离可以均大于或等于3微米,则即使栅极层20和有源层50的位置产生偏差(可理解为偏差数值在正常工艺偏差范围内),也可保证遮光层70仍能够将其覆盖,可进一步保证遮光层70的遮光效果。
具体地,对于遮光层70的具体布置和尺寸,可根据TFT的具体结构和尺寸(即栅极层20、有源层50及源极漏极层40的具体结构和尺寸)进行设置,例如,对于某实施方式的TFT基板,其栅极层20的宽度可以为6微米,则考虑遮光层70的边缘相对于有源层50的边缘和栅极层20的边缘向外侧凸出的距离均大于或等于3微米,遮光层70的宽度可设置为17微米。
于本实施例另一具体实施方式中,该TFT基板还可以包括第一保护层61,第一保护层61可以设置于薄膜晶体管与遮光层70之间,用于对源极漏极层40、有源层50及栅极层20进行保护,以防在进行制备遮光层70的工艺时对源极漏极层40、有源层50及栅极层20造成损坏。具体地,该第一保护层61可以为耐腐蚀的有机绝缘材料,可在栅极绝缘层30之上形成整层膜层的第一保护层61,且第一保护层61可以覆盖栅极层20、源极漏极层40及有源层50,以提高保护效果。
于本实施例另一具体实施方式中,该TFT基板还可以包括平坦层80,平坦层80为设置于薄膜晶体管之上的整层膜层,该整层膜层与遮光层70的侧面相接且二者上表面平齐,或者该整层膜层完全覆盖薄膜晶体管和遮光层70。
在本实施例中,由于遮光层70具有一定厚度,会在TFT上表面(源极漏极层40之上)形成台阶,可在遮光层70上形成一层平坦层80,该平坦层80可以与遮光层70的侧面相接且二者上表面平齐,或者完全覆盖薄膜晶体管和遮光层70,以能够将遮光层70引起的台阶补平。具体地,该平坦层80可以采用透明的树脂材料,以避免降低光线的透过率。
另外,该TFT基板还可以包括设置于平坦层80之上的电极层,该电极层可以包括像素电极层91、公共电极层92及设置于像素电极层91和公共电极层92之间的第二保护层62。其中,像素电极层91可以设置在平坦层80之上,并通过过孔81与源极漏极层40连接,以实现TFT的电性导通。第二保护层62可以对像素电极层91进行保护,防止像素电极层91中的杂质使像素电极层91发生电化学腐蚀等。在第二保护层62之上还可以设置公共电极层92,以实现电性输入,继而完成TFT基板的制作。其中,公共电极层92作为电性输入端,可与像素电极层91之间形成电容,以使像素电极层91上具有阈值电压。具体地,由于氧化铟锡(ITO)是现有导电性和透明性均较好的材料,像素电极层91和公共电极层92均可为ITO层。
需要说明的是,本实施例并不以上述描述的TFT基板的结构为限,只要在TFT的源极漏极层40之上形成遮光层70,用于对TFT进行遮光,均属于本申请的保护范围,例如,其还可以包括像素介电层等。
本实施例为验证设置遮光层70对TFT电学特性的影响,分别对具有遮光层70和不具有遮光层70的TFT基板进行顶光特性测试。该对比试验中设置三组样本,分别为(1)正常无光照;(2)有光照无遮光层70;(3)有光照有遮光层70,分别在相同环境下进行顶光特性测试,测试结果表明:在有光照而无遮光层70时TFT基板的特性曲线变形严重,具体表现为SS(亚阈值摆幅)明显变大(正常无光照情况下为0.2-1,有光照而无遮光层70时已超出可测范围)。而在有光照且有遮光层70时,TFT基板的特性曲线相较无光照的情况,差异不大。所以,根据试验结果可知,设置遮光层70可有效抑制TFT基板顶部反射光对TFT的影响,增强TFT基板的顶光特性。
基于上述TFT基板相同的构思,本实施例还提供一种显示装置,如图3所示,该显示装置包括彩膜基板500、第一TFT基板300、第二TFT基板100、设置于彩膜基板500和第一TFT基板300之间的第一液晶层400、设置于第一TFT基板300、第二TFT基板100之间的第二液晶层200和线栅偏振器301及背光源600,该第二TFT基板100为上述任一实施方式的TFT基板。
其中,第一TFT基板300和第二TFT基板100均作为光控开关,决定其所在像素是否进行发光。彩膜基板500可以在第一TFT基板300的激发作用下产生彩色的光,使显示装置呈现彩色。线栅偏振器301可以设置在第一TFT基板300与第二液晶层200之间,仅线栅偏振器301允许通过的方向的光可以进入第一TFT基板300。
于本实施例一具体实施方式中,第二TFT基板100的一个源极漏极层40对应第一TFT基板300的四个主源极漏极层310,即第二TFT基板100的一个像素单元所在的区域,可以与第一TFT基板300的相邻的四个像素单元所在的区域相对应。需要说明的是,本实施例提供的显示装置并不以此为限,第二TFT基板100的一个像素单元所在的区域,也可以与第一TFT基板300的一个像素单元所在的区域相对应,具体可根据实际需要进行设定。
本实施例提供的显示装置,在第二TFT基板100的TFT上设有遮光层70,且该遮光层70被设置为尽可能地遮盖栅极层20和有源层50(即TFT区域),可以防止上述第一TFT基板300上的线栅偏振器301反射的光对第二TFT基板100的TFT的影响,也可以防止线栅偏振器301反射的光经过栅极层20反射后形成的杂散光对显示装置的显示效果造成不良影响,从而可以提高显示装置的整体显示效果。
本技术领域技术人员可以理解,本申请中已经讨论过的各种操作、方法、流程中的步骤、措施、方案可以被交替、更改、组合或删除。
在本申请的描述中,需要理解的是,术语“中心”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本实用新型和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本实用新型的限制。
以上仅是本申请的部分实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。

Claims (10)

1.一种TFT基板,包括衬底基板及多个像素单元,每个所述像素单元包括设置在所述衬底基板上的薄膜晶体管;其特征在于,所述TFT基板还包括遮光层,所述遮光层设置在所述薄膜晶体管的源极漏极层远离所述衬底基板的一侧,且所述遮光层在所述衬底基板上的投影至少完全覆盖所述薄膜晶体管的有源层在所述衬底基板上的投影,及部分覆盖所述薄膜晶体管的栅极层在所述衬底基板上的投影。
2.根据权利要求1所述的TFT基板,其特征在于,所述TFT基板还包括过孔,所述过孔设置在所述源极漏极层之上,且在所述衬底基板上的投影位于所述源极漏极层在所述衬底基板上的投影内;
所述遮光层还部分覆盖所述源极漏极层,且所述遮光层在所述衬底基板上的投影的边缘与所述过孔在所述衬底基板上的投影的边缘的最小距离大于或等于2微米。
3.根据权利要求1所述的TFT基板,其特征在于,所述遮光层在所述衬底基板上的投影的边缘相对于所述有源层在所述衬底基板上的投影的边缘向外侧凸出。
4.根据权利要求3所述的TFT基板,其特征在于,所述遮光层在所述衬底基板上的投影的边缘相对于所述有源层在所述衬底基板上的投影的边缘向外侧凸出的距离均大于或等于3微米。
5.根据权利要求1-4任一项所述的TFT基板,其特征在于,所述遮光层为有机材料黑矩阵。
6.根据权利要求1-4任一项所述的TFT基板,其特征在于,还包括第一保护层,所述第一保护层设置于所述薄膜晶体管与所述遮光层之间,用于对所述源极漏极层、所述有源层及所述栅极层进行保护。
7.根据权利要求2所述的TFT基板,其特征在于,还包括平坦层,所述平坦层为设置于所述薄膜晶体管之上的整层膜层,所述整层膜层与所述遮光层的侧面相接且二者上表面平齐,或者所述整层膜层完全覆盖所述薄膜晶体管和所述遮光层。
8.根据权利要求7所述的TFT基板,其特征在于,还包括电极层,所述电极层包括像素电极层、公共电极层及设置于所述像素电极层和所述公共电极层之间的第二保护层,所述像素电极层设置在所述平坦层之上,并通过所述过孔与所述源极漏极层连接。
9.一种显示装置,包括彩膜基板、第一TFT基板、第二TFT基板、设置于所述彩膜基板和所述第一TFT基板之间的第一液晶层、设置于所述第一TFT基板与所述第二TFT基板之间的第二液晶层和线栅偏振器及背光源,其特征在于,所述第二TFT基板为所述权利要求1-8任一项所述的TFT基板。
10.根据权利要求9所述的显示装置,其特征在于,所述第二TFT基板的一个像素单元所在的区域,与所述第一TFT基板的一个或相邻多个像素单元所在的区域相对应。
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Publication number Priority date Publication date Assignee Title
CN108878537B (zh) * 2017-05-12 2021-02-12 京东方科技集团股份有限公司 薄膜晶体管及其制备方法、显示面板和显示装置
CN108461529A (zh) * 2018-03-29 2018-08-28 京东方科技集团股份有限公司 一种阵列基板及其制备方法、显示装置
CN108550582B (zh) * 2018-05-09 2022-11-08 京东方科技集团股份有限公司 显示基板及其制造方法、显示装置
CN208422918U (zh) * 2018-08-01 2019-01-22 北京京东方光电科技有限公司 光电转换阵列基板及光电转换装置
CN109166896A (zh) * 2018-09-03 2019-01-08 深圳市华星光电半导体显示技术有限公司 显示面板及其制作方法
CN110164914B (zh) * 2018-10-15 2022-02-08 京东方科技集团股份有限公司 半导体器件、显示面板、显示装置和制造方法
CN109698224B (zh) * 2019-02-21 2021-04-13 京东方科技集团股份有限公司 显示基板及其制造方法和显示面板
US10996781B2 (en) * 2019-08-13 2021-05-04 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel and display device
CN110993622A (zh) * 2019-12-13 2020-04-10 Tcl华星光电技术有限公司 阵列基板及其制备方法、显示面板
JP7234380B2 (ja) * 2020-06-23 2023-03-07 武漢華星光電半導体顕示技術有限公司 アレイ基板及びその製造方法
CN111864116B (zh) * 2020-07-28 2023-12-19 京东方科技集团股份有限公司 显示基板及其制备方法和显示装置

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