CN212031273U - Semiconductor testing device convenient to adjust - Google Patents
Semiconductor testing device convenient to adjust Download PDFInfo
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- CN212031273U CN212031273U CN202020023659.XU CN202020023659U CN212031273U CN 212031273 U CN212031273 U CN 212031273U CN 202020023659 U CN202020023659 U CN 202020023659U CN 212031273 U CN212031273 U CN 212031273U
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Abstract
The utility model discloses a semiconductor testing device convenient to adjust, which comprises a machine body, wherein a polarizer and an analyzer are symmetrically arranged at the left side and the right side above the machine body, a support column is arranged below the machine body, and a fixed base is arranged on the upper end surface of the machine body; the adjusting assembly comprises an air cylinder, a supporting plate and a plurality of connecting rods, the bottom of the air cylinder is embedded into the fixed base, the upper end of the air cylinder is connected with the supporting plate, and the connecting rods are symmetrically arranged on the upper end surface of the supporting plate; and the sample test board is arranged at the upper ends of the connecting rods and is arranged between the polarizer and the analyzer. The utility model discloses can carry out altitude mixture control to the sample testboard, can also carry out the regulation of each angle to the sample testboard according to the position or the angle that the examination of awaiting measuring semiconductor required, compare and adjust the position of polarizer and analyzer, the utility model discloses an operation is more convenient, and adjusts the accuracy height, and efficiency of software testing and test result all obtain guaranteeing.
Description
Technical Field
The utility model belongs to the technical field of semiconductor test, a semiconductor testing arrangement convenient to adjust is related to.
Background
A semiconductor testing device (ellipsometer) is an optical measuring instrument for detecting the thickness, optical constant and material microstructure of a semiconductor film, and can be applied to the fields of semiconductors, microelectronics, MEMS, communication, data storage, optical coating and the like, and the ellipsometer has become an attractive measuring instrument. In the testing process, to obtain an accurate testing result, the position of the polarizer and the position of the analyzer need to be adjusted when the ellipsometer is used, so as to ensure that the incident angle of the laser irradiated on the semiconductor thin film is within a specified range.
Therefore, a semiconductor testing apparatus with convenient adjustment is needed to solve the above technical problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a semiconductor testing device convenient to adjust to at least, the position that semiconductor testing device who solves among the prior art exists need be adjusted polarizer and analyzer when using, in order to guarantee to shine the angle of incidence of the laser on the semiconductor film at the regulation within range, and the position of adjusting polarizer and analyzer need consume more time, the operation of being not convenient for influences the technical problem of efficiency of software testing and test result.
In order to solve the above problem, the utility model provides a semiconductor testing device convenient to adjust, its technical scheme as follows:
a semiconductor testing device convenient to adjust is characterized by comprising a machine body, wherein a polarizer and an analyzer are symmetrically arranged on the left side and the right side above the machine body, a supporting column is arranged below the machine body, and a fixed base is arranged on the upper end face of the machine body; the adjusting assembly comprises an air cylinder, a supporting plate and a plurality of connecting rods, the bottom of the air cylinder is embedded into the fixed base, the upper end of the air cylinder is connected with the supporting plate, and the connecting rods are symmetrically arranged on the upper end surface of the supporting plate; and the sample test board is arranged at the upper ends of the connecting rods and is arranged between the polarizer and the analyzer.
The semiconductor test apparatus convenient for adjustment as described above is further preferably: the lower end side of the sample test board is provided with a plurality of ball joint universal joints, and the ball joint universal joints are correspondingly connected with the connecting rods in a matching mode.
The semiconductor test apparatus convenient for adjustment as described above is further preferably: the connecting rod includes dead lever and cylinder telescopic link, cylinder telescopic link bottom embedding in the dead lever, the dead lever lower extreme with backup pad up end is connected, cylinder telescopic link upper end with the terminal surface is connected under the sample test platform.
The semiconductor test apparatus convenient for adjustment as described above is further preferably: and a lifting button is arranged on the fixed rod and connected with the bottom of the cylinder telescopic rod for controlling the lifting of the cylinder telescopic rod.
The semiconductor test apparatus convenient for adjustment as described above is further preferably: the fixed base is provided with an ascending key and a descending key, and the ascending key and the descending key are connected with the air cylinder and used for driving the supporting plate to move up and down.
The analysis can know, compare with prior art, the utility model discloses an advantage and beneficial effect lie in:
the utility model provides a semiconductor testing device convenient to adjust, which comprises a machine body, an adjusting component and a sample test board, wherein a polarizer and an analyzer are symmetrically arranged at the left side and the right side above the machine body, a support column is arranged below the machine body, a fixed base is arranged on the upper end surface of the machine body, the adjusting component comprises a cylinder, a support plate and a plurality of connecting rods, the bottom of the cylinder is embedded into the fixed base, the upper end of the cylinder is connected with the support plate, the connecting rods are symmetrically arranged on the upper end surface of the support plate, and the sample test board is arranged on the upper ends of the connecting rods; wherein, last rising button and the decline button of being equipped with of unable adjustment base, the button that rises and the decline button all are connected with the cylinder, the utility model discloses a cylinder drives backup pad rectilinear rise or descends to drive sample testboard rectilinear rise or descend, guarantee that the semiconductor shines the angle of incidence of the laser on the film at the regulation within range, compare and adjust the polarizer and the position of analyzer, the utility model discloses an operation is more convenient, need not consume more time, and adjusts the accuracy height, and efficiency of software testing and test result all obtain the assurance.
Secondly, a plurality of ball joint universal joints are arranged on the side edge of the lower end of the sample test board, the ball joint universal joints are correspondingly connected with a plurality of connecting rods in a matching mode, each connecting rod comprises a fixed rod and an air cylinder telescopic rod, the bottom of the air cylinder telescopic rod is embedded into the fixed rod, the lower end of the fixed rod is connected with the upper end face of the supporting plate, the upper end of the air cylinder telescopic rod is connected with the lower end face of the sample test board, a lifting button is arranged on the fixed rod and connected with the bottom of the air cylinder telescopic rod and used; the utility model discloses a levelness and the test angle that sample test platform was adjusted to the cylinder telescopic link prevent that sample test platform's levelness or test angle are unsatisfied to require and influence the test result, moreover the utility model discloses with in cylinder telescopic link bottom embedding dead lever, guaranteed the steadiness of device to sample test platform lower extreme side is equipped with a plurality of bulb gimbals, can guarantee sample test platform at the stability of lift in-process. To sum up, the utility model discloses not only can carry out altitude mixture control to the sample testboard, can also carry out the regulation of each angle to the sample testboard according to the position or the angle that the examination semiconductor that awaits measuring needs, convenient operation, the device steadiness is good, has also guaranteed the stability of device in adjusting lift process.
Drawings
Fig. 1 is a schematic structural diagram of a semiconductor testing device convenient to adjust according to the present invention.
In the figure: 1-body; 2-a polarizer; 3-an analyzer; 4-a support column; 5-fixing the base; 6-a regulating component; 61-a cylinder; 62-a support plate; 63-connecting rods; 631-a fixation bar; 632-cylinder telescopic rod; 7-a sample test bench; 8-ball joint universal joint; 9-a lifting button; 10-up key; 11-down key.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1, the semiconductor testing device convenient to adjust according to the preferred embodiment of the present invention mainly includes a machine body 1, a polarizer 2 and an analyzer 3 are symmetrically disposed on the left and right sides above the machine body 1, a supporting column 4 is disposed below the machine body 1, and a fixing base 5 is disposed on the upper end surface of the machine body 1; the adjusting assembly 6 comprises an air cylinder 61, a supporting plate 62 and a plurality of connecting rods 63, the bottom of the air cylinder 61 is embedded into the fixed base 5, the upper end of the air cylinder 61 is connected with the supporting plate 62, and the connecting rods 63 are symmetrically arranged on the upper end surface of the supporting plate 62; and the sample test board 7 is arranged at the upper ends of the connecting rods 63, and is arranged between the polarizer 2 and the analyzer 3.
In summary, the utility model provides a semiconductor testing device convenient to adjust includes organism 1, adjusting part 6 and sample testboard 7, organism 1 top left and right sides symmetry is equipped with polarizer 2 and analyzer 3, organism 1 below is equipped with support column 4, organism 1 up end is equipped with unable adjustment base 5, adjusting part 6 includes cylinder 61, backup pad 62 and many connecting rods 63, the bottom embedding unable adjustment base 5 in cylinder 61, cylinder 61 upper end is connected with backup pad 62, many connecting rods 63 symmetry locate backup pad 62 up end, sample testboard 7 locates many connecting rods 63 upper ends, and locate between polarizer 2 and analyzer 3; wherein, be equipped with ascending button 10 and decline button 11 on unable adjustment base 5, ascending button 10 and decline button 11 all are connected with cylinder 61, the utility model discloses a cylinder 61 drives backup pad 62 rectilinear rise or descends to drive 7 rectilinear rises of sample testboard or descend, guarantee that the semiconductor shines the angle of incidence of the laser on the film in the specified range, compare and adjust polarizer 2 and analyzer 3's position, the utility model discloses an operation is more convenient, need not consume more time, and adjusts the accuracy height, and efficiency of software testing and test result all obtain the assurance.
In order to guarantee sample test platform 7 stability at the lift in-process the utility model discloses in, 7 lower extreme sides of sample test platform are equipped with a plurality of bulb cardan joints 8, a plurality of bulb cardan joints 8 correspond many connecting rods 63 of accordant connection, wherein, cylinder 61 drives backup pad 62 straight-line rising or descends, and backup pad 62 passes through connecting rod 63 and connects sample test platform 7, thereby drive 7 straight-line rises of sample test platform or descend, set up a plurality of bulb cardan joints 8 at 7 lower extreme sides of sample test platform, drive 7 straight-line rises of sample test platform or descend that can be steady.
In order to guarantee the steadiness of device, the utility model discloses in, connecting rod 63 includes dead lever 631 and cylinder telescopic link 632, and in cylinder telescopic link 632 bottom embedding dead lever 631, dead lever 631 lower extreme and backup pad 62 up end are connected, and cylinder telescopic link 632 upper end is connected with sample test platform 7 lower terminal surface, the utility model discloses a cylinder telescopic link 632 adjusts sample test platform 7's levelness and test angle, prevents that sample test platform 7's levelness or test angle are unsatisfied to require and influence the test result, and with cylinder telescopic link 632 bottom embedding dead lever 631, when cylinder telescopic link 632 goes up and down, dead lever 631 plays certain firm effect.
In order to facilitate the levelness and the test angle of adjusting sample test platform 7 the utility model discloses in, be equipped with lifting button 9 on the dead lever 631, lifting button 9 is connected bottom cylinder telescopic link 632 for control cylinder telescopic link 632's lift, cylinder telescopic link 632 sets up not only the operation of being convenient for, and the precision is strong.
In order to facilitate the height adjustment of the sample test platform 7, the utility model discloses in, be equipped with ascending button 10 and descending button 11 on the unable adjustment base 5, ascending button 10 and descending button 11 all are connected with cylinder 61 for drive the elevating movement of backup pad 62.
The analysis can know, compare with prior art, the utility model discloses an advantage and beneficial effect lie in:
the utility model provides a semiconductor testing device convenient to adjust, including organism 1, adjusting part 6 and sample testboard 7, the left and right sides symmetry is equipped with polarizer 2 and analyzer 3 above organism 1, organism 1 below is equipped with support column 4, organism 1 up end is equipped with unable adjustment base 5, adjusting part 6 includes cylinder 61, backup pad 62 and many connecting rods 63, the bottom of cylinder 61 imbeds in unable adjustment base 5, the upper end of cylinder 61 is connected with backup pad 62, many connecting rods 63 symmetry locate backup pad 62 up end, sample testboard 7 locates many connecting rods 63 upper ends, and locate between polarizer 2 and analyzer 3; wherein, be equipped with ascending button 10 and decline button 11 on unable adjustment base 5, ascending button 10 and decline button 11 all are connected with cylinder 61, the utility model discloses a cylinder 61 drives backup pad 62 rectilinear rise or descends to drive 7 rectilinear rises of sample testboard or descend, guarantee that the semiconductor shines the angle of incidence of the laser on the film in the specified range, compare and adjust polarizer 2 and analyzer 3's position, the utility model discloses an operation is more convenient, need not consume more time, and adjusts the accuracy height, and efficiency of software testing and test result all obtain the assurance.
Secondly, the side edge of the lower end of the sample test platform 7 of the utility model is provided with a plurality of ball joint universal joints 8, the plurality of ball joint universal joints 8 are correspondingly matched and connected with a plurality of connecting rods 63, each connecting rod 63 comprises a fixed rod 631 and a cylinder telescopic rod 632, the bottom of the cylinder telescopic rod 632 is embedded into the fixed rod 631, the lower end of the fixed rod 631 is connected with the upper end surface of the supporting plate 62, the upper end of the cylinder telescopic rod 632 is connected with the lower end surface of the sample test platform 7, the fixed rod 631 is provided with a lifting button 9, and the lifting button 9 is connected with the bottom of the cylinder telescopic; the utility model discloses a cylinder telescopic link 632 adjusts the levelness and the test angle of sample test platform 7, prevents that the levelness or the test angle of sample test platform 7 are unsatisfied to require and influence the test result, moreover the utility model discloses with cylinder telescopic link 632 bottom embedding dead lever 631 in, the steadiness of device has been guaranteed to 7 lower extreme sides of sample test platform are equipped with a plurality of bulb universal joints 8, can guarantee the stability of sample test platform 7 at the lift in-process. To sum up, the utility model discloses not only can carry out altitude mixture control to sample testboard 7, can also carry out the regulation of each angle to sample testboard 7 according to the position or the angle that the examination semiconductor that awaits measuring needs, convenient operation, the device steadiness is good, has also guaranteed the stability of device adjusting the lift in-process.
It will be appreciated by those skilled in the art that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The embodiments disclosed above are therefore to be considered in all respects as illustrative and not restrictive. All changes which come within the scope of the invention or which are equivalent to the scope of the invention are embraced by the invention.
Claims (5)
1. A semiconductor test apparatus that facilitates conditioning, comprising:
the polarizer and the analyzer are symmetrically arranged on the left side and the right side above the machine body, a support column is arranged below the machine body, and a fixed base is arranged on the upper end face of the machine body;
the adjusting assembly comprises an air cylinder, a supporting plate and a plurality of connecting rods, the bottom of the air cylinder is embedded into the fixed base, the upper end of the air cylinder is connected with the supporting plate, and the connecting rods are symmetrically arranged on the upper end surface of the supporting plate;
and the sample test board is arranged at the upper ends of the connecting rods and is arranged between the polarizer and the analyzer.
2. The semiconductor testing device convenient to adjust as claimed in claim 1, wherein a plurality of ball joint universal joints are arranged on the side of the lower end of the sample testing platform, and the plurality of ball joint universal joints are correspondingly matched and connected with the plurality of connecting rods.
3. The semiconductor testing device convenient to adjust as claimed in claim 1, wherein the connecting rod comprises a fixing rod and an air cylinder telescopic rod, the bottom of the air cylinder telescopic rod is embedded into the fixing rod, the lower end of the fixing rod is connected with the upper end face of the supporting plate, and the upper end of the air cylinder telescopic rod is connected with the lower end face of the sample testing table.
4. The semiconductor testing device convenient to adjust as claimed in claim 3, wherein a lifting button is provided on the fixing rod, and the lifting button is connected with the bottom of the telescopic rod of the cylinder for controlling the lifting of the telescopic rod of the cylinder.
5. The semiconductor testing device convenient to adjust as recited in claim 1, wherein the fixing base is provided with an ascending key and a descending key, and the ascending key and the descending key are both connected with the cylinder and used for driving the supporting plate to move up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020023659.XU CN212031273U (en) | 2020-01-07 | 2020-01-07 | Semiconductor testing device convenient to adjust |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020023659.XU CN212031273U (en) | 2020-01-07 | 2020-01-07 | Semiconductor testing device convenient to adjust |
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| Publication Number | Publication Date |
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| CN212031273U true CN212031273U (en) | 2020-11-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020023659.XU Active CN212031273U (en) | 2020-01-07 | 2020-01-07 | Semiconductor testing device convenient to adjust |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113465519A (en) * | 2021-07-02 | 2021-10-01 | 南通大学 | Thickness uniformity detection device for nanofiber membrane |
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2020
- 2020-01-07 CN CN202020023659.XU patent/CN212031273U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113465519A (en) * | 2021-07-02 | 2021-10-01 | 南通大学 | Thickness uniformity detection device for nanofiber membrane |
| CN113465519B (en) * | 2021-07-02 | 2023-03-07 | 南通大学 | Thickness uniformity detection device for nanofiber membrane |
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Address after: 518000 a1406, building 12, shenzhenwan science and technology ecological park, No. 18, South Keji Road, high tech community, Yuehai street, Nanshan District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Dawei Chuangxin Microelectronics Technology Co.,Ltd. Address before: 518026 Room 4003-4005, Block A, Union Square, No. 5022 Binhe Avenue, Fushan Community, Futian Street, Futian District, Shenzhen, Guangdong, China Patentee before: Shenzhen Xinhuiqun Microelectronic Technology Co.,Ltd. |
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