CN211999895U

CN211999895U - Polycrystalline silicon target material

Info

Publication number: CN211999895U
Application number: CN202020717506.5U
Authority: CN
Inventors: 杨小岗
Original assignee: Shaanxi Oukaili Target Co ltd
Current assignee: Shaanxi Oukaili Target Co ltd
Priority date: 2020-05-06
Filing date: 2020-05-06
Publication date: 2020-11-24
Anticipated expiration: 2030-05-06

Abstract

The utility model belongs to the technical field of targets, in particular to a polycrystalline silicon target, which comprises a frame body, a third copper substrate and a fourth copper substrate, wherein the inner wall of the frame body is provided with a groove, a clamping block is arranged on the inner side of the groove, a first copper base plate is arranged on the left side of the clamping block, a threaded plate is arranged on the outer wall of the first copper base plate, a fixing rod is arranged on the inner side of the threaded plate, the bottom end of the fixed rod is provided with a threaded sleeve, the outer side of the threaded sleeve is provided with a second copper substrate, the right side of the second copper substrate is provided with a fixed block, and the middle part of the fixed block is provided with a threaded rod, the third copper substrate is arranged at the bottom end of the second copper substrate, and the outer wall of the third copper base plate is provided with a connecting block, the top end of the connecting block is provided with a movable shaft, and the outer side of the movable shaft is provided with a connecting plate, and the fourth copper substrate is arranged at the bottom of the third copper substrate. The polycrystalline silicon target device is high in convenience degree of assembling, disassembling and replacing, low in cost consumption and strong in connection stability between plates.

Description

Polycrystalline silicon target material

Technical Field

The utility model relates to the technical field of targets, in particular to a polycrystalline silicon target.

Background

Polycrystalline silicon is an important sputtering target material, and thin film layers such as SiO2 and the like are prepared by using a magnetron sputtering method, so that the substrate material has better optical, dielectric and corrosion resistance properties, and is widely applied to industries such as touch screens, optics and the like. In the production of the target material, the purity of the polycrystalline silicon target material is higher than that of the monocrystalline silicon target material, but the polycrystalline silicon target material has almost no conductivity, and conductive indium or tin is required to be used as a bonding agent to be combined with the target material, so that the conductivity of the target material can be increased, the consumption of the target material can be reduced, and the fund of a user can be saved.

The target on the market at present has that the target area is big, and the loss material is many, and the shortcoming of being integrated welded connection between target and the base plate leads to the assembly and disassembly to change convenient degree low, and the cost consumes greatly, links up the not strong problem of stability between the plate, and it is high to need to have the assembly and disassembly and change convenient degree, and the cost consumes for a short time, links up the strong novel target device of stability between the plate.

In order to solve the problems, innovative design based on the original target material is urgently needed.

Disclosure of Invention

An object of the utility model is to provide a polycrystalline silicon target to solve the like product target area that proposes in the above-mentioned background art big, the loss material is many, and the shortcoming of welding connection for the integration between target and the base plate leads to the equipment dismantlement to change convenient degree low, and the cost consumption is big, links up the not strong problem of stability between the plate.

In order to achieve the above object, the utility model provides a following technical scheme: a polycrystalline silicon target comprises a frame body, a third copper substrate and a fourth copper substrate, wherein a groove is formed in the inner wall of the frame body, a clamping block is arranged on the inner side of the groove, a first copper base plate is arranged on the left side of the clamping block, a threaded plate is arranged on the outer wall of the first copper base plate, a fixing rod is arranged on the inner side of the threaded plate, the bottom end of the fixed rod is provided with a threaded sleeve, the outer side of the threaded sleeve is provided with a second copper substrate, the right side of the second copper substrate is provided with a fixed block, and the middle part of the fixed block is provided with a threaded rod, the third copper substrate is arranged at the bottom end of the second copper substrate, and the outer wall of the third copper base plate is provided with a connecting block, the top end of the connecting block is provided with a movable shaft, and the outer side of the movable shaft is provided with a connecting plate, the fourth copper substrate is arranged at the bottom of the third copper substrate, and the outer side of the fourth copper substrate is provided with a sleeve.

Preferably, the fixture block and the frame body form a clamping structure through the groove, and the fixture block and the first copper substrate are integrally arranged.

Preferably, the central axis of the threaded plate coincides with the central axis of the fixing rod, and the fixing rod is in threaded connection with the threaded sleeve.

Preferably, the second copper substrate and the third copper substrate form a detachable structure through a fixing block, and the fixing block is in threaded connection with the threaded rod.

Preferably, the connection plate is rotatably connected with the connection block through a movable shaft, and the connection block is connected with the third copper substrate in a welding mode.

Preferably, the sleeves are nested outside the fourth copper substrate, and the fourth copper substrate and the first copper substrate are symmetrically arranged about the central axis of the frame body.

Compared with the prior art, the beneficial effects of the utility model are that: the polycrystalline silicon target device is high in convenience degree in assembly, disassembly and replacement, low in cost consumption and strong in connection stability among plates;

1. the target with the heat dissipation function and capable of steering is arranged through the frame body, the groove, the fixture block and the first copper substrate, the fixture block on the side of the first copper substrate is clamped and fixed with the groove in the inner wall of the frame body, conductive indium or tin is adopted as an adhesive to bond the fixture block in a gap between the substrate and the frame body, and the conductive indium or tin is adopted as the adhesive to be combined with the target in the middle, so that the area can not be large due to the fact that polycrystalline silicon is fragile, the substrate can be used for increasing the area, and the cost is saved;

2. according to the target with the heat dissipation function and capable of steering, the bottom end of the third copper substrate is attached to the top of the fourth copper substrate by a user through the connecting block, the movable shaft and the connecting plate, the connecting plate is clamped into the inner side of the frame body, the connecting plate can be rotated to the outer side of the fourth copper substrate through the movable shaft on the connecting block, the fourth copper substrate is fixed, the limitation and fixation between the substrates can be conveniently strengthened by the user, the substrate stability is strong, and the purity of the target is high;

3. this degree can turn to target with heat dissipation function passes through fourth copper base plate and telescopic setting, and the user is through putting the framework neat to fix the framework through fixing device, then, the user alternates the fourth copper base plate and gets into telescopic inboard, makes to inlay the cover between fourth copper base plate and the sleeve mutually and fixes, accomplishes the installation to the fourth copper base plate, and the simple high efficiency of installation fixed mode, convenience of customers's operation, installation regularity is high.

Drawings

Fig. 1 is a schematic view of the front view cross-sectional structure of the present invention.

Fig. 2 is a schematic view of the connection structure between the thread plate and the thread bushing according to the present invention.

Fig. 3 is a schematic view of the connection structure between the third copper substrate and the connection plate of the present invention.

Fig. 4 is an enlarged schematic view of a portion a in fig. 1 according to the present invention.

In the figure: 1. a frame body; 2. a groove; 3. a clamping block; 4. a first copper substrate; 5. a thread plate; 6. fixing the rod; 7. a threaded sleeve; 8. a second copper substrate; 9. a fixed block; 10. a threaded rod; 11. a third copper substrate; 12. connecting blocks; 13. a movable shaft; 14. a connector tile; 15. a fourth copper substrate; 16. a sleeve.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a polycrystalline silicon target comprises a frame body 1, a groove 2, a clamping block 3, a first copper substrate 4, a threaded plate 5, a fixed rod 6, a threaded sleeve 7, a second copper substrate 8, a fixed block 9, a threaded rod 10, a third copper substrate 11, a connecting block 12, a movable shaft 13, a connecting plate 14, a fourth copper substrate 15 and a sleeve 16, wherein the groove 2 is formed in the inner wall of the frame body 1, the clamping block 3 is installed on the inner side of the groove 2, the first copper substrate 4 is installed on the left side of the clamping block 3, the threaded plate 5 is installed on the outer wall of the first copper substrate 4, the fixed rod 6 is arranged on the inner side of the threaded plate 5, the threaded sleeve 7 is arranged at the bottom end of the fixed rod 6, the second copper substrate 8 is arranged on the outer side of the threaded sleeve 7, the fixed block 9 is installed on the right side of the second copper substrate 8, the threaded rod 10 is arranged in the middle of, a connecting block 12 is mounted on the outer wall of the third copper substrate 11, a movable shaft 13 is mounted at the top end of the connecting block 12, a connecting plate 14 is mounted on the outer side of the movable shaft 13, a fourth copper substrate 15 is mounted at the bottom of the third copper substrate 11, and a sleeve 16 is arranged on the outer side of the fourth copper substrate 15;

furthermore, a clamping structure is formed by the fixture block 3 and the frame body 1 through the groove 2, the fixture block 3 and the first copper substrate 4 are integrally arranged, the fixture block 3 on the side of the first copper substrate 4 is clamped and fixed with the groove 2 on the inner wall of the frame body 1, conductive indium or tin is adopted as an adhesive to be bonded in a gap between the substrate and the frame body 1, and conductive indium or tin is adopted as an adhesive to be combined with a target material in the middle, so that the area cannot be large due to the fact that polycrystalline silicon is brittle, the area can be increased by using the substrate, and the cost is saved;

furthermore, the central axis of the threaded plate 5 coincides with the central axis of the fixing rod 6, the fixing rod 6 is in threaded connection with the threaded sleeve 7, the fixing rod 6 penetrating through the threaded plate 5 is rotated and is connected with the threaded sleeve 7, connection between the first copper substrate 4 and the second copper substrate 8 is achieved, further fixation between the substrates is facilitated, fixing operation is convenient and efficient, user experience is high, and safety factors are high;

furthermore, the second copper substrate 8 and the third copper substrate 11 form a detachable structure through a fixing block 9, the fixing block 9 is in threaded connection with a threaded rod 10, a user installs and attaches the second copper substrate 8 on the top end of the third copper substrate 11, the fixing block 9 is clamped on two sides of the second copper substrate 8 and the third copper substrate 11, the threaded rod 10 in the middle of the fixing block 9 is rotated to be fixed with the frame body 1, tight fixation between the second copper substrate 8 and the third copper substrate 11 is achieved, the fixing and dismounting mode is simple and efficient, the fixing strength is high, the structure is firm, and the fixing is not prone to scattering;

furthermore, the connecting plate 14 is rotatably connected with the connecting block 12 through the movable shaft 13, the connecting block 12 is connected with the third copper substrate 11 in a welding mode, a user can attach the bottom end of the third copper substrate 11 to the top of the fourth copper substrate 15 and clamp the bottom end of the third copper substrate into the inner side of the frame body 1, the connecting plate 14 can be rotated to the outer side of the fourth copper substrate 15 through the arrangement of the movable shaft 13 on the connecting block 12, the fourth copper substrate 15 can be fixed, the user can conveniently strengthen the limitation and fixation between the substrates, the substrate is strong in stability and stable in structure;

further, sleeve 16 nests and sets up in the outside of fourth copper base plate 15, and fourth copper base plate 15 is provided with two with first copper base plate 4 about the axis symmetry of framework 1, the user is through putting framework 1 neatly, and fix framework 1 through fixing device, then, the user alternates into sleeve 16's inboard with fourth copper base plate 15, make between fourth copper base plate 15 and the sleeve 16 nestedly fixed mutually, accomplish the installation to fourth copper base plate 15, the installation fixed mode is simple high-efficient, convenience of customers's operation, the installation regularity is high.

The working principle is as follows: firstly, a user puts the frame body 1 orderly, fixes the frame body 1 through a fixing device, then inserts the fourth copper substrate 15 into the inner side of the sleeve 16, so that the fourth copper substrate 15 and the sleeve 16 are nested and fixed, the installation of the fourth copper substrate 15 is completed, then, the user attaches the bottom end of the third copper substrate 11 to the top of the fourth copper substrate 15 and clamps the bottom end of the fourth copper substrate into the inner side of the frame body 1, and the connecting plate 14 can be rotated to the outer side of the fourth copper substrate 15 through the arrangement of the movable shaft 13 on the connecting block 12, so that the fourth copper substrate 15 is fixed;

next, the user mounts and attaches the second copper substrate 8 on the top of the third copper substrate 11, and engages the fixing block 9 on both sides of the second copper substrate 8 and the third copper substrate 11, rotates the threaded rod 10 in the middle of the fixing block 9, fixed with the frame body 1 to realize the tight fixation between the second copper substrate 8 and the third copper substrate 11, then, the user snaps the first copper substrate 4 on top of the second copper substrate 8 in the same manner, and attaches it to the frame 1, meanwhile, the fixture block 3 at the side of the first copper substrate 4 is clamped and fixed with the groove 2 at the inner wall of the frame body 1, the fixing rod 6 penetrating through the thread plate 5 is rotated, and is connected with the thread bush 7 to realize the connection between the first copper substrate 4 and the second copper substrate 8, the substrate is bonded to the frame 1 in the gap therebetween using conductive indium or tin as an adhesive to complete the mounting of the entire device.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A polycrystalline silicon target comprises a frame body (1), a third copper substrate (11) and a fourth copper substrate (15), and is characterized in that: the inner wall of the frame body (1) is provided with a groove (2), the inner side of the groove (2) is provided with a fixture block (3), the left side of the fixture block (3) is provided with a first copper substrate (4), the outer wall of the first copper substrate (4) is provided with a thread plate (5), the inner side of the thread plate (5) is provided with a fixing rod (6), the bottom end of the fixing rod (6) is provided with a thread sleeve (7), the outer side of the thread sleeve (7) is provided with a second copper substrate (8), the right side of the second copper substrate (8) is provided with a fixing block (9), the middle part of the fixing block (9) is provided with a threaded rod (10), the third copper substrate (11) is arranged at the bottom end of the second copper substrate (8), the outer wall of the third copper substrate (11) is provided with a connecting block (12), the top end of the connecting block (12) is provided with a movable shaft (13), and the outer, the fourth copper substrate (15) is arranged at the bottom of the third copper substrate (11), and a sleeve (16) is arranged on the outer side of the fourth copper substrate (15).

2. The polycrystalline silicon target according to claim 1, wherein: the clamping block (3) and the frame body (1) form a clamping structure through the groove (2), and the clamping block (3) and the first copper substrate (4) are integrally arranged.

3. The polycrystalline silicon target according to claim 1, wherein: the central axis of the thread plate (5) coincides with the central axis of the fixing rod (6), and the fixing rod (6) is in threaded connection with the thread sleeve (7).

4. The polycrystalline silicon target according to claim 1, wherein: the second copper substrate (8) and the third copper substrate (11) form a detachable structure through the fixing block (9), and the fixing block (9) is in threaded connection with the threaded rod (10).

5. The polycrystalline silicon target according to claim 1, wherein: the connecting plate (14) is in rotary connection with the connecting block (12) through the movable shaft (13), and the connecting block (12) is in welded connection with the third copper substrate (11).

6. The polycrystalline silicon target according to claim 1, wherein: the sleeve (16) is arranged outside the fourth copper substrate (15) in a nested mode, and the fourth copper substrate (15) and the first copper substrate (4) are symmetrically arranged in two modes relative to the central axis of the frame body (1).