CN211921676U - Evaporation plating device - Google Patents
Evaporation plating device Download PDFInfo
- Publication number
- CN211921676U CN211921676U CN202020396905.6U CN202020396905U CN211921676U CN 211921676 U CN211921676 U CN 211921676U CN 202020396905 U CN202020396905 U CN 202020396905U CN 211921676 U CN211921676 U CN 211921676U
- Authority
- CN
- China
- Prior art keywords
- storage
- evaporation
- cavity
- heating
- feeding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model relates to a film forming technology field especially relates to an evaporation device. The evaporation device comprises a storage mechanism, a feeding mechanism and an evaporation mechanism, wherein the storage mechanism comprises a storage cavity and a storage heating unit, the upper end and the lower end of the storage cavity are respectively provided with a storage feeding hole and a storage discharging hole, and the storage heating unit is used for heating solid materials to a molten state. The feeding mechanism comprises a communicating vessel and a feeding heating unit, one end of the communicating vessel is communicated with the material storage and discharge port, and the feeding heating unit heats the molten state material in the communicating vessel. The evaporation mechanism comprises an evaporation cavity, an evaporation feed inlet communicated with the other end of the communicating vessel is formed in the lower end of the evaporation cavity, an evaporation discharge outlet is formed in the upper end of the evaporation cavity, molten materials are converted into gaseous materials and are discharged from the evaporation discharge outlet, the communicating vessel is always in a dynamic balance state in the process, the materials are prevented from being subjected to long-time high-temperature cracking, and continuous batch production without opening cavities can be guaranteed.
Description
Technical Field
The utility model relates to a film forming technology field especially relates to an evaporation device.
Background
At present, Organic Light-Emitting diodes (OLEDs) are also called Organic electroluminescent displays, and evaporation equipment is usually used to prepare OLED panels. The evaporation apparatus realizes the formation of a coating film on a glass substrate by heating an organic material and a metal material and vaporizing and evaporating them. There are two types of situations after the OLED material is heated, the first is direct sublimation, and the second is melting before evaporation.
For the second type of material that melts before evaporates, the entire crucible is typically heated. However, the long-term high-temperature environment has a high requirement on the stability of the material, and the material is heated at high temperature for a long time under the high-temperature environment, so that cracking, deterioration and the like of the material are easily caused, and the yield and reliability of the product are further reduced. In addition, in the evaporation process, the traditional material supplementing method is fixed-time interval timing material supplementing, but because the generation and consumption of steam are greatly influenced by the heating temperature, the existing material supplementing method cannot meet the requirements of actual working conditions, the material shortage shutdown is easily caused, and the working efficiency is seriously influenced.
Therefore, there is a need for an evaporation apparatus for processing the second type of organic evaporation material to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an evaporation device to solve among the prior art easy schizolysis of material in the evaporation process and deteriorate and can not feed supplement in real time, and the material brings the heating element power that the heat absorption changes and leads to and evaporation rate control complicated scheduling problem because of the surplus changes in crucible or line source.
In order to realize the purpose, the following technical scheme is provided:
an evaporation apparatus comprising:
the storage mechanism comprises a storage cavity and a storage heating unit, wherein a storage feeding hole is formed in the upper end of the storage cavity, a storage discharging hole is formed in the lower end of the storage cavity, the storage cavity is used for containing solid materials to be added, and the storage heating unit is used for heating the solid materials to a molten state;
the feeding mechanism comprises a communicating vessel and a feeding heating unit, one end of the communicating vessel is communicated with the material storage and discharge port so that the molten state material can flow into the communicating vessel, and the feeding heating unit is used for heating the molten state material in the communicating vessel and keeping the temperature uniform;
the evaporation mechanism comprises an evaporation cavity, an evaporation feed inlet communicated with the other end of the communicating vessel is formed in the lower end of the evaporation cavity, an evaporation discharge hole is formed in the upper end of the evaporation cavity, materials conveyed by the feeding mechanism can enter the evaporation cavity and are converted into gaseous materials, and the gaseous materials are discharged from the evaporation discharge hole.
As the preferred scheme of the evaporation device, the discharge port of the storage cavity is in the shape of a cylinder with a wide upper part and a narrow lower part, and the storage discharge port is arranged at the necking end of the storage cavity.
As the preferred scheme of coating by vaporization device, storage heating unit includes the heating member, the heating member sets up storage discharge gate department is used for with the solid material heating of storage discharge gate department is to the melten state to the feeding ability of control discharge gate.
As the preferred scheme of coating by vaporization device, the heating member is the heating screen, the heating screen sets up storage discharge gate department and its outer wall with the inner wall fixed connection of storage discharge gate, molten state material can pass through mesh on the heating screen flows in the linker.
As the preferred scheme of coating by vaporization device, the heating member is the hot plate, be provided with the hourglass material hole on the hot plate, the hot plate sets up storage discharge gate department and its outer wall with the inner wall fixed connection of storage discharge gate, molten state material can pass through hourglass material hole on the hot plate flows in the linker.
As the preferred scheme of the evaporation device, the material leaking hole is provided with a blocking piece and a driving mechanism, and the driving mechanism can control the blocking piece to shield the material leaking hole so as to control the size of the material leaking hole.
As the preferred scheme of coating by vaporization device, storage mechanism still includes the vibrations piece, the vibrations piece is installed on the storage cavity, be used for the vibration the storage cavity is so that solid material in the storage cavity flows to storage discharge gate department.
As the preferred scheme of the evaporation device, the vibration piece is arranged at the material storage discharge port.
As a preferable scheme of the evaporation device, the feeding and heating unit comprises a heating cover, and the heating cover is wrapped on the outer wall of the communicating vessel.
As a preferable scheme of the evaporation device, the evaporation mechanism further comprises an evaporation heating unit, and the evaporation heating unit is wrapped on the outer wall of the evaporation cavity. When the evaporation cavity is a point source evaporation cavity, the height of the feed port of the communicating vessel is greater than that of the discharge port of the communicating vessel, the height of the storage discharge port is greater than that of the evaporation feed port, and the height of the storage discharge port is less than that of the evaporation discharge port;
when the evaporation cavity is a line source evaporation cavity, the evaporation mechanism further comprises a heating cavity, the line source evaporation cavity is communicated with the discharge hole of the communicating vessel through the heating cavity, the height of the storage discharge hole is larger than that of the feed hole of the heating cavity, and the height of the storage discharge hole is smaller than that of the discharge hole of the heating cavity.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model provides an evaporation plating device, including storage mechanism, evaporation mechanism and feeding mechanism, the evaporation cavity in with the storage cavity in the storage mechanism and the evaporation mechanism of communicating ware among the feeding mechanism is linked together, can realize the automatic continuous feed in of system, makes the communicating ware be in dynamic balance state always, ensures that the material can not long-time pyrolysis, and can guarantee not to open the chamber and last batch production, can improve work efficiency.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
Fig. 1 is a schematic structural view of a first evaporation device according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a second evaporation device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first storage mechanism according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a second storage mechanism provided by an embodiment of the present invention.
Reference numerals:
11-a storage cavity; 111-a storage feed port; 112-material storage and discharge port; 12-a heating element; 121-heating a net; 122-a heating plate; 13-a helical vibrating member; 14-a vibrating member;
211-evaporation feed inlet; 212-evaporation discharge port; 213-point source evaporation cavity; a 214-line source evaporation chamber; 215-heating the cavity; 221-point source evaporation heating unit; a 222-line source evaporation heating unit;
31-a communicator; 32-feed heating unit.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution of the present invention is further described below by referring to the drawings and the detailed description.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the directions or positional relationships based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that are usually placed when the product is used, and are only for convenience of description of the present invention, and do not indicate or imply that the device or element indicated must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", and the like are used for descriptive purposes only or to distinguish between different structures or components and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1-2, this embodiment provides an evaporation plating device, which includes a storage mechanism, an evaporation mechanism, and a feeding mechanism, wherein the storage mechanism includes a storage cavity 11 and a storage heating unit, a storage feeding hole 111 is provided at an upper end of the storage cavity 11, a storage discharging hole 112 is provided at a lower end of the storage cavity 11, the storage cavity 11 is used for containing a solid material to be added, and the storage heating unit 12 is used for heating the solid material to a molten state. The feeding mechanism comprises a communicating vessel 31 and a feeding and heating unit 32, one end of the communicating vessel 31 is communicated with the material storage and discharge port 112 so as to enable the molten material to flow into the communicating vessel 31, and the feeding and heating unit 32 is used for heating the molten material in the communicating vessel 31 and keeping the temperature uniform. The evaporation mechanism comprises an evaporation cavity, an evaporation feed inlet 211 communicated with the other end of the communicating vessel 31 is formed in the lower end of the evaporation cavity, an evaporation discharge outlet 212 is formed in the upper end of the evaporation cavity, the material conveyed by the feeding mechanism can enter the evaporation cavity and be converted into a gaseous state, and the gaseous material is discharged from the evaporation discharge outlet 212.
In short, a solid material is added into the storage cavity 11, the solid material in the storage cavity 11 is melted under the action of the storage heating unit and flows into the communicating vessel 31 in the feeding mechanism, the feeding heating unit 32 heats the molten material in the communicating vessel 31 to keep the temperature uniform, the molten material can enter the evaporation cavity and be transferred into a gas in the evaporation cavity, and finally the gas is discharged from the evaporation discharge port 212 to perform a film coating operation. This coating by vaporization device through utilizing linker 31 to connect storage mechanism and evaporation mechanism, consequently, can realize the continuous pay-off, and linker 31 is in dynamic balance state always, ensures that the material can not long-time pyrolysis, and can guarantee not to open the chamber and last batch production.
In the present embodiment, the solid material is a solid powder material.
Exemplarily, fig. 1 is a point-source crucible evaporation apparatus, as shown in fig. 1, the evaporation cavity is a point-source evaporation cavity 213, and an inlet and an outlet of the point-source evaporation cavity 213 are an evaporation feed inlet 211 and an evaporation discharge outlet 212, respectively. Further, the height of the feed port of the communicating vessel 31 is greater than that of the discharge port of the communicating vessel 31, the height of the storage discharge port 112 is greater than that of the evaporation feed port 211, and the height of the storage discharge port 112 is less than that of the evaporation discharge port 212, so that the molten state material in the communicating vessel 31 can be ensured to be in dynamic balance, automatic continuous feeding is realized, and the evaporation efficiency is improved.
Exemplarily, fig. 2 is a line source crucible type evaporation device, as shown in fig. 2, the evaporation cavity is a line source evaporation cavity 214, the evaporation mechanism further includes a heating cavity 215, and the line source evaporation cavity 214 is communicated with the discharge port of the communicating vessel 31 through the heating cavity 215. Further, the height of the storage material outlet 112 is greater than the height of the material inlet of the heating cavity 215, and the height of the storage material outlet 112 is less than the height of the material outlet of the heating cavity 215, so that the molten state material in the communicating vessel 31 can be ensured to be in dynamic balance, automatic continuous feeding is realized, and the evaporation efficiency is improved.
Further, as shown in fig. 1-2, the evaporation mechanism further includes an evaporation heating unit, and the evaporation heating unit is wrapped on the outer wall of the evaporation cavity to heat the molten material in the evaporation cavity to the gaseous material.
Specifically, for the point source crucible type evaporation device in fig. 1, the evaporation heating unit is a point source evaporation heating unit 221, the point source evaporation heating unit 221 is wrapped on the point source evaporation cavity 213, and a heating wire is arranged at the outlet of the point source evaporation cavity 213 to prevent blockage.
Further, for the line source crucible type evaporation device in fig. 2, the evaporation heating unit is a line source evaporation heating unit 222, the line source evaporation heating unit 222 wraps the line source evaporation cavity 214, and a heating wire is arranged at an outlet of the line source evaporation cavity 214 to prevent blockage. Preferably, fig. 3 is a schematic structural diagram of the first storage mechanism provided in this embodiment, as shown in fig. 3, the discharge hole of the storage cavity 11 is a cylinder with a wide top and a narrow bottom, and the storage discharge hole 112 is disposed at the throat end of the storage cavity 11, so that the material in the storage cavity 11 can smoothly enter the communicating vessel 31 under the action of gravity, and continuous automatic feeding is realized under the action of the communicating vessel 31, and dynamic balance of the molten material in the communicating vessel 31 is maintained.
Further, the stock heating unit comprises a heating element 12, and the heating element 12 is arranged at the stock discharge port 112 and is used for heating the solid material at the stock discharge port 112 to a molten state so as to control the feeding capacity of the discharge port.
Illustratively, the storage cavity 11 is in a horn shape, and the main purpose of the horn-shaped opening is to increase the storage amount as much as possible, share a part of gravity of the storage, and ensure that the material smoothly falls into the heating element 12, change the solid powder material into a molten material under the heating condition, and flow the molten material into the evaporation mechanism along the communicating vessel 31, and in the evaporation process, the communicating vessel 31 is always in a dynamic balance state, so as to ensure that the material is not cracked for a long time at high temperature, and ensure that the continuous batch production without opening the cavity is ensured.
Alternatively, the heating element 12 is a heating net 121, the heating net 121 is arranged at the material storage and discharge port 112, and the outer wall of the heating net 121 is fixedly connected with the inner wall of the material storage and discharge port 112, and the molten material can flow into the communicating vessel 31 through the mesh holes on the heating net 121. The heating net 121 can better heat the solid material to melt the solid material to achieve feeding.
Preferably, the heating element 12 is a heating plate 122, a material leaking hole is formed in the heating plate 122, the heating plate 122 is disposed at the material storage and discharge port 112, and the outer wall of the heating plate 122 is fixedly connected to the inner wall of the material storage and discharge port 112, so that the molten material can flow into the communicating vessel 31 through the material leaking hole in the heating plate 122.
Furthermore, the material leakage hole is provided with a baffle sheet (not shown in the figure) and a driving mechanism (not shown in the figure), and the driving mechanism can control the baffle sheet to shield the material leakage hole so as to control the size of the material leakage hole and facilitate the adjustment of the feeding speed. Specifically, when the evaporation speed needs to be reduced, the blocking piece can be controlled by the driving mechanism to shield the material leaking hole, so that the feeding speed is reduced, and the evaporation speed is reduced; on the contrary, when the evaporation speed needs to be increased, on the one hand, the heating power of the heating plate 122 can be increased, and on the other hand, the material leakage hole can be avoided by controlling the baffle plate through the driving mechanism, so that the feeding speed is increased, and the evaporation speed is increased.
Preferably, as shown in fig. 3, the magazine mechanism further includes a vibrating member 14, and the vibrating member 14 is mounted on the magazine body 11 and is used for vibrating the magazine body 11 to make the solid material in the magazine body 11 flow to the magazine outlet 112. The vibrating member 14 can control the feeding efficiency to avoid forming a blanking cavity, and can prevent the molten material from accumulating on the heating net 121 or the heating plate 122 to block the discharge hole or the material leakage hole.
Further, a vibrating member 14 is provided at the stock discharge port 112 to better vibrate the material in the stock cavity 11 to ensure continuous feeding.
Optionally, fig. 4 is a schematic structural diagram of a second storage mechanism provided in this embodiment, as shown in fig. 4, the storage cavity 11 is a cylindrical structure with a wide top and a narrow bottom, the outlet end of the storage cavity 11 is provided with a heating net 121, a spiral vibrating member 13 is disposed inside the storage cavity 11, the spiral vibrating member 13 is used for enabling solid materials in the storage cavity 11 to smoothly flow to the outlet end of the storage cavity 11, on one hand, the feeding efficiency can be controlled, the spiral vibrating member 13 vibrates in a telescopic manner along the material moving direction of the feed opening, and can be matched with an external vibrating member 14 to avoid material agglomeration or formation of material cavities to cause feed interruption, and on the other hand, the molten material can be prevented from being accumulated on the heating net 121 to block the discharge opening of the heating net 121.
Preferably, the feeding heating unit 32 comprises a heating jacket wrapped on the outer wall of the communicating vessel 31 to better heat the communicating vessel 31.
This embodiment provides an evaporation coating method, based on above-mentioned evaporation coating device, the evaporation coating method includes the following steps:
putting a solid material into the material storage cavity 11, then starting the material storage heating unit, and heating the solid material in the material storage cavity 11 to a molten state;
the molten material flows into the communicating vessel 31, and then the feeding heating unit 32 is started to heat the material in the communicating vessel 31;
the molten material in the communicating vessel 31 enters the evaporation chamber and is converted into gaseous state, and the gaseous material is discharged from the evaporation outlet 212 of the evaporation chamber.
According to the evaporation method, the storage cavity 11 and the evaporation cavity are communicated by the communicating vessel 31, and the dynamic balance of the molten state material in the communicating vessel 31 is realized by utilizing the communicating vessel principle of the communicating vessel 31, so that automatic and continuous feeding can be realized, the material is prevented from being subjected to long-time high-temperature cracking, and continuous batch production without opening cavities can be ensured.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (10)
1. An evaporation apparatus, comprising:
the storage mechanism comprises a storage cavity (11) and a storage heating unit, wherein a storage feeding hole (111) is formed in the upper end of the storage cavity (11), a storage discharging hole (112) is formed in the lower end of the storage cavity (11), the storage cavity (11) is used for containing solid materials to be added, and the storage heating unit is used for heating the solid materials to a molten state;
the feeding mechanism comprises a communicating device (31) and a feeding and heating unit (32), one end of the communicating device (31) is communicated with the material storage and discharge hole (112) so that the molten material can flow into the communicating device (31), and the feeding and heating unit (32) is used for heating the molten material in the communicating device (31) and keeping the temperature uniform;
the evaporation mechanism comprises an evaporation cavity, an evaporation feed inlet (211) communicated with the other end of the communicating vessel (31) is formed in the lower end of the evaporation cavity, an evaporation discharge outlet (212) is formed in the upper end of the evaporation cavity, materials conveyed by the feeding mechanism can enter the evaporation cavity and be converted into gaseous materials, and the gaseous materials are discharged from the evaporation discharge outlet (212).
2. The vapor deposition device according to claim 1, wherein the discharge port of the storage cavity (11) is in the shape of a cylinder with a wide top and a narrow bottom, and the storage discharge port (112) is arranged at the throat end of the storage cavity (11).
3. The vapor deposition device according to claim 1, wherein the storage heating unit comprises a heating element (12), and the heating element (12) is arranged at the storage discharge port (112) and used for heating the solid material at the storage discharge port (112) to a molten state so as to control the feeding capacity of the discharge port.
4. The vapor deposition device according to claim 3, wherein the heating element (12) is a heating net (121), the heating net (121) is disposed at the storage and discharge port (112) and an outer wall of the heating net is fixedly connected with an inner wall of the storage and discharge port (112), and the molten material can flow into the communicating vessel (31) through a mesh hole on the heating net (121).
5. The vapor deposition device according to claim 3, wherein the heating element (12) is a heating plate (122), a material leaking hole is formed in the heating plate (122), the heating plate (122) is disposed at the material storage and discharge port (112) and an outer wall of the heating plate is fixedly connected to an inner wall of the material storage and discharge port (112), and the molten material can flow into the communicating vessel (31) through the material leaking hole in the heating plate (122).
6. The vapor deposition device according to claim 5, wherein the material leaking hole is provided with a blocking piece and a driving mechanism, and the driving mechanism can control the blocking piece to block the material leaking hole so as to control the size of the material leaking hole.
7. The vapor deposition device according to claim 1, wherein the material storage mechanism further comprises a vibration member (14), and the vibration member (14) is mounted on the material storage cavity (11) and is configured to vibrate the material storage cavity (11) so as to enable the solid material in the material storage cavity (11) to flow to the material storage outlet (112).
8. The vapor deposition device according to claim 7, wherein the vibration member (14) is disposed at the stock discharge port (112).
9. The vapor deposition device according to claim 8, wherein the feeding heating unit (32) comprises a heating hood wrapped on an outer wall of the communicating vessel (31).
10. The evaporation apparatus according to claim 1, wherein when the evaporation chamber is a point source evaporation chamber (213), the height of the feed inlet of the communicating vessel (31) is greater than the height of the discharge outlet of the communicating vessel (31), the height of the storage discharge outlet (112) is greater than the height of the evaporation feed inlet (211), and the height of the storage discharge outlet (112) is less than the height of the evaporation discharge outlet (212);
when the evaporation cavity is a line source evaporation cavity (214), the evaporation mechanism further comprises a heating cavity (215), the line source evaporation cavity (214) is communicated with a discharge hole of the communicating device (31) through the heating cavity (215), the height of the material storage discharge hole (112) is larger than that of a feed hole of the heating cavity (215), and the height of the material storage discharge hole (112) is smaller than that of a discharge hole of the heating cavity (215).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020396905.6U CN211921676U (en) | 2020-03-25 | 2020-03-25 | Evaporation plating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020396905.6U CN211921676U (en) | 2020-03-25 | 2020-03-25 | Evaporation plating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211921676U true CN211921676U (en) | 2020-11-13 |
Family
ID=73348466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020396905.6U Active CN211921676U (en) | 2020-03-25 | 2020-03-25 | Evaporation plating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211921676U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111270204A (en) * | 2020-03-25 | 2020-06-12 | 江苏集萃有机光电技术研究所有限公司 | Evaporation device and evaporation method |
-
2020
- 2020-03-25 CN CN202020396905.6U patent/CN211921676U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111270204A (en) * | 2020-03-25 | 2020-06-12 | 江苏集萃有机光电技术研究所有限公司 | Evaporation device and evaporation method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111270204A (en) | Evaporation device and evaporation method | |
| CN211921676U (en) | Evaporation plating device | |
| JP2009084674A (en) | Vapor deposition source and vapor deposition apparatus | |
| CN106947941B (en) | Evaporation system | |
| CN105057688A (en) | Method for producing superfine lead-free solder powder | |
| CN110964546A (en) | Molten salt cracking equipment and cracking method | |
| CN212152057U (en) | Feeding port structure of glass kiln | |
| CN102692129A (en) | Magnesium metal continuous production equipment and process method | |
| CN105177506B (en) | Crucible, and vacuum evaporation device and system | |
| CN101235444B (en) | Fusing evaporation device for metal | |
| CN202968137U (en) | Equipment for smelting and purifying polycrystalline silicon by utilizing solidification crucible and rotary type electron beam | |
| CN218232191U (en) | Be used for advanced generation base plate glass kiln | |
| US20100247416A1 (en) | Silicon manufacturing apparatus and related method | |
| CN206289286U (en) | A kind of automatic feeding type vacuum single armed electroslag furnace | |
| CN215366059U (en) | Single crystal furnace with argon gas direction function | |
| CN101265572A (en) | Continuously produced heating reaction furnace | |
| CN201495105U (en) | Ingot furnace heater capable of gradient temperature control | |
| CN111958090A (en) | Plasma arc material increase device and material increase method | |
| CN220724408U (en) | Feeding device | |
| CN101323019A (en) | Method for manufacturing tin powder for organotin production | |
| CN102312289A (en) | Device for secondary charging of polycrystalline ingot furnace | |
| CN210848329U (en) | Liquid flow control device for cold bed smelting type gas atomization powder making device and gas atomization powder making device | |
| CN218539820U (en) | Automatic feeding device for metal melt in CVD reaction | |
| CN202482490U (en) | Secondary feeding device for polycrystalline ingot furnace | |
| CN208776823U (en) | Vacuum evaporation equipment and evaporation source |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |