CN211913379U - Gas-liquid two-phase mixing dynamic gas distribution system - Google Patents
Gas-liquid two-phase mixing dynamic gas distribution system Download PDFInfo
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- CN211913379U CN211913379U CN202020356193.5U CN202020356193U CN211913379U CN 211913379 U CN211913379 U CN 211913379U CN 202020356193 U CN202020356193 U CN 202020356193U CN 211913379 U CN211913379 U CN 211913379U
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Abstract
The application relates to a gas-liquid two-phase mixing dynamic gas distribution system, including: the device comprises a gas control device, a liquid control device, a gas preheating device, a vaporizer and a heat preservation heating pipeline; the vaporizer is connected with the liquid control device, is also connected with the gas control device through a gas preheating device, and is also connected with the experiment cavity through a heat preservation heating pipeline. In the application, because the gas preheating device is arranged to heat the gas conveyed by the gas control device, the gas conveyed by the gas preheating device into the vaporizer is heated, the temperature in the vaporizer cannot be reduced, the vaporization efficiency of the liquid is not influenced, and when the vaporized liquid vapor is mixed with the heated gas conveyed by the gas preheating device, the unstable furnace temperature caused by the overlarge temperature difference of the two gases cannot occur. The vaporizer conveys the mixed gas to the experimental cavity through the heat-preservation heating pipeline, and the heat-preservation heating pipeline plays a role in maintaining the temperature of the mixed gas.
Description
Technical Field
The application relates to the technical field of scientific research equipment, in particular to a gas-liquid two-phase mixing dynamic gas distribution system.
Background
In the research and experiment process in the scientific research fields of new materials, new energy sources, sensors and the like, chemical substances with certain mass are required to be accurately introduced into a reaction chamber, some chemical substances exist in a gas form at normal temperature, such as H2, O2, CH4, SO2 and the like, and in the prior art, a dynamic gas distribution system is mainly used for precisely controlling gas flow to distribute gas; there are also many chemical substances existing in liquid state at normal temperature, but studies require these substances to participate in the reaction as well, such as H2O, HCL, ethanol, etc., and devices for controlling liquid are commonly known as peristaltic pump, plunger pump, liquid flow controller, etc.
In some experiments requiring reactions at high temperatures, it is necessary to mix two substances, gaseous and liquid, into the reaction chamber at the same time at normal temperature, and to precisely control the amounts of the several chemicals to be mixed. In the prior art, one mode is to heat a liquid tank body, and introduce gas into a liquid substance as carrier gas to introduce evaporated liquid vapor into a reaction cavity together, and although the mode is low in cost, the introduction amount of liquid cannot be accurately controlled in real time, and the precision is poor. Another gas-liquid two-phase dynamic gas distribution and mixing mode is to directly feed liquid into the high-temperature reactor in a liquid flow control mode such as a peristaltic pump and the like to vaporize the liquid in the reactor, and feed precisely controlled gas into the other inlet of the reactor. Although the mode can ensure the real-time liquid inlet amount, the liquid cannot be completely vaporized in a short time, so that experimental result deviation is caused, and the gas and the liquid directly collide in the reaction cavity, so that the furnace temperature in the reaction cavity is easy to be unstable, and the possibility of 'explosion' is easily caused.
SUMMERY OF THE UTILITY MODEL
In order to overcome the problems in the related art at least to a certain extent, the application provides a gas-liquid two-phase mixing dynamic gas distribution system.
The scheme of the application is as follows:
a gas-liquid two-phase mixing dynamic gas distribution system comprises:
the device comprises a gas control device, a liquid control device, a gas preheating device, a vaporizer and a heat preservation heating pipeline;
the vaporizer is connected with the liquid control device, is also connected with the gas control device through the gas preheating device, and is also connected with the experiment cavity through the heat-preservation heating pipeline;
the gas control device is used for conveying gas with preset flow to the gas preheating device;
the gas preheating device is used for heating the gas conveyed by the gas control device and conveying the heated gas to the vaporizer;
the liquid control device is used for conveying liquid with a preset flow rate to the vaporizer;
the vaporizer is used for vaporizing the liquid conveyed by the liquid control device, mixing vaporized liquid vapor with heated gas conveyed by the gas preheating device, and conveying the mixed gas to the experiment cavity through the heat preservation heating pipeline.
Preferably, in an implementable manner of the present application, the gas preheating device comprises: disc-shaped gas path pipe and heating device.
Preferably, in an implementable manner of the present application, the disk type airway tube includes: a first disk-shaped gas circuit pipe and a second disk-shaped gas circuit pipe;
the radius of the first disc-shaped gas circuit pipe is larger than that of the second disc-shaped gas circuit pipe;
the first disc-shaped air passage pipe is sleeved on the outer ring of the second disc-shaped air passage pipe, and the first disc-shaped air passage pipe and the second disc-shaped air passage pipe are separated by 5-15 mm;
the first disc-shaped air passage pipe is connected with the bottom of the second disc-shaped air passage pipe through an air passage pipe.
Preferably, in an achievable mode of the present application, a first air inlet and an air outlet are vertically arranged at the top of the first disc-shaped air path pipe;
and a second air inlet and outlet is vertically arranged at the top of the second disc-shaped air path pipe.
Preferably, in an implementable manner of the present application, the second air inlet/outlet is provided at a center of the top of the second disk type air channel pipe.
Preferably, in an implementable manner of the present application, the heating device comprises: a water bath heater or an oil bath heater.
Preferably, in one implementation form of the present application, the vaporizer includes: an inner cavity, a heating layer and a heat insulation layer;
the heating layer is arranged on the outer side of the inner cavity, and the heat insulation layer is arranged on the outer side of the heating layer;
the inner cavity includes: a first temperature sensor and a gas inlet disposed at the top;
a liquid inlet and an air outlet arranged at the bottom;
the gas inlet is connected with the gas preheating device;
the liquid inlet is connected with the liquid control device;
the gas outlet is conveyed to the experiment cavity through the heat preservation heating pipeline.
Preferably, in an implementation manner of the present application, the method further includes:
a second temperature sensor disposed inside the gas preheating device;
and the third temperature sensor is arranged inside the heat-preservation heating pipeline.
Preferably, in an implementable manner of the present application, the gas control device comprises: the gas flow controller, the electromagnetic stop valve and the first check valve;
the electromagnetic stop valve is arranged at the inlet end of the gas flow controller, and the one-way valve is arranged at the outlet end of the gas flow controller;
the liquid control device includes: a liquid flow controller, a filter and a second one-way valve;
the filter is disposed at the inlet end of the liquid flow controller and the second one-way valve is disposed at the outlet end of the liquid flow controller.
Preferably, in an implementation manner of the present application, the method further includes: a control terminal;
the control terminal is connected with the gas control device through a central control circuit, and the liquid control device and the vaporizer are used for outputting a gas flow control signal to the gas control device, outputting a liquid flow control signal to the liquid control device and outputting a temperature control signal to the vaporizer;
the control terminal is further connected with the electromagnetic stop valve, the first temperature sensor, the second temperature sensor and the third temperature sensor through an integrated acquisition circuit, and is used for acquiring the switching signals of the electromagnetic stop valve and the temperature signals of the first temperature sensor, the second temperature sensor and the third temperature sensor.
The technical scheme provided by the application can comprise the following beneficial effects: the gas-liquid two-phase mixing dynamic gas distribution system in the application comprises: the device comprises a gas control device, a liquid control device, a gas preheating device, a vaporizer and a heat preservation heating pipeline; the vaporizer is connected with the liquid control device, is also connected with the gas control device through a gas preheating device, and is also connected with the experiment cavity through a heat preservation heating pipeline. In the application, the gas control device conveys gas with a preset flow rate to the gas preheating device, the gas preheating device heats the gas conveyed by the gas control device and conveys the heated gas to the vaporizer, and the liquid control device conveys liquid with a preset flow rate to the vaporizer. The vaporizer vaporizes the liquid conveyed by the liquid control device, the gas conveyed by the gas preheating device is the gas which is already heated, the temperature in the vaporizer cannot be reduced, the vaporization efficiency of the liquid is not influenced, and when the vaporizer mixes the vaporized liquid vapor gas and the heated gas conveyed by the gas preheating device, the condition that the temperature of the furnace is unstable due to the overlarge temperature difference of the two gases is avoided. The vaporizer conveys the mixed gas to the experimental cavity through the heat-preservation heating pipeline, and the heat-preservation heating pipeline plays a role in maintaining the temperature of the mixed gas and preventing the mixed gas from being liquefied. In this application, adopt the vaporizer to carry out the vaporization to the liquid of the preset flow that liquid control device carried, adopt the volume of letting in of control liquid that liquid control device can be accurate.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and together with the description, serve to explain the principles of the application.
Fig. 1 is a schematic structural diagram of a gas-liquid two-phase hybrid dynamic gas distribution system according to an embodiment of the present application;
fig. 2 is a schematic structural diagram of a disk-shaped gas path pipe in a gas-liquid two-phase hybrid dynamic gas distribution system according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a vaporizer in a gas-liquid two-phase hybrid dynamic gas distribution system according to an embodiment of the present application.
Description of the drawings: a gas control device-1; a liquid control device-2; a gas preheating device-3; a disc-shaped gas line pipe-31; a first disk type gas circuit tube-311; a second disk-shaped airway tube-312; a first access port-313; a second inlet/outlet port-314; -a vaporizer-4; lumen-41; heating layer-42; a thermally insulating layer-43; a first temperature sensor-44; gas inlet-45; -46 liquid inlet; an air outlet-47; a heat preservation heating pipeline-5; an experiment cavity-6; .
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present application, as detailed in the appended claims.
Fig. 1 is a schematic structural diagram of a gas-liquid two-phase hybrid dynamic gas distribution system according to an embodiment of the present application, and referring to fig. 1, a gas-liquid two-phase hybrid dynamic gas distribution system includes:
the system comprises a gas control device 1, a liquid control device 2, a gas preheating device 3, a vaporizer 4 and a heat preservation heating pipeline 5;
the vaporizer 4 is connected with the liquid control device 2, is also connected with the gas control device 1 through the gas preheating device 3, and is also connected with the experiment cavity 6 through the heat preservation heating pipeline 5;
the gas control device 1 is used for conveying gas with preset flow to the gas preheating device 3;
the gas preheating device 3 is used for heating the gas delivered by the gas control device 1 and delivering the heated gas to the vaporizer 4;
a liquid control device 2 for delivering a preset flow of liquid to the vaporizer 4;
and the vaporizer 4 is used for vaporizing the liquid conveyed by the liquid control device 2, mixing vaporized liquid vapor with heated gas conveyed by the gas preheating device 3, and conveying the mixed gas to the experiment cavity 6 through the heat preservation heating pipeline 5.
The gas control apparatus 1 includes: the gas flow controller, the electromagnetic stop valve and the first check valve;
the electromagnetic stop valve is arranged at the inlet end of the gas flow controller, and the one-way valve is arranged at the outlet end of the gas flow controller;
the gas flow controller is a device which can accurately control the gas flow in the prior art.
The electromagnetic stop valve is used for solving the problem of micro leakage that the gas flow controller cannot be completely closed, and avoiding the inaccurate control caused by the fact that redundant gas is mixed into the final total gas.
The one-way valve is used for counteracting the instantaneous pressure generated when the outlet end of the gas flow controller is vaporized and evaporated instantly, and preventing the liquid from flowing back to a low-temperature area after being vaporized to cause liquefaction so as to damage control equipment.
The liquid control device 2 includes: a liquid flow controller, a filter and a second one-way valve;
the filter is arranged at the inlet end of the liquid flow controller, and the second one-way valve is arranged at the outlet end of the liquid flow controller.
The liquid control device 2 can be selected from the following devices: peristaltic pump, syringe pump, liquid flow controller.
The peristaltic pump is relatively low in cost and poor in sealing performance, and is suitable for flow control of conventional non-corrosive and non-toxic liquid, but the peristaltic pump does not belong to a closed-loop control system, only can adjust liquid inlet amount by adjusting the speed of a motor, cannot measure the current liquid flow, and therefore is relatively low in precision.
The plunger pump is suitable for liquid injection in a high-pressure environment, the flow rate can reach a trace level, and the precision is relatively high.
The liquid flow controller has the highest precision and can realize measurement and control of a closed loop. A liquid flow controller is selected in this embodiment. In order to fully vaporize the liquid, a filter is added to the inlet end of the liquid flow controller to filter out particulate impurities, which otherwise would affect the service life of the vaporizer 4, and a check valve is also added to the outlet end of the liquid flow controller to prevent backflow or gas entering the liquid flow controller due to pressure fluctuations.
The mixed gas is prevented from liquefying by using the heat-preserving heating pipeline 5 from the gas outlet 47 of the vaporizer 4, and the temperature of the heat-preserving heating pipeline 5 is controlled to be consistent with the temperature of the vaporizer 4 as much as possible and is not lower than 3/4 of the temperature of the vaporizer 4 at the lowest. The temperature of the mixed gas introduced into the experimental cavity 6 is ensured to be higher than the liquid vaporization temperature through the heat preservation heating pipeline 5, and the reaction effect is not influenced or the temperature of the reaction cavity cannot be controlled due to too low temperature.
The gas-liquid two-phase mixing dynamic gas distribution system in this embodiment includes: the system comprises a gas control device 1, a liquid control device 2, a gas preheating device 3, a vaporizer 4 and a heat preservation heating pipeline 5; the vaporizer 4 is connected with the liquid control device 2, is also connected with the gas control device 1 through the gas preheating device 3, and is also connected with the experiment cavity 6 through the heat preservation heating pipeline 5. In the present application, the gas control device 1 delivers a preset flow of gas to the gas preheating device 3, the gas preheating device 3 heats the gas delivered by the gas control device 1 and delivers the heated gas to the vaporizer 4, and the liquid control device 2 delivers a preset flow of liquid to the vaporizer 4. The vaporizer 4 vaporizes the liquid delivered by the liquid control device 2, the gas delivered by the gas preheating device 3 is gas which is already heated, the temperature in the vaporizer 4 cannot be reduced, the vaporization efficiency of the liquid is not influenced, and when the vaporizer 4 mixes the vaporized liquid vapor gas with the heated gas delivered by the gas preheating device 3, the situation that the temperature of the furnace is unstable due to the overlarge temperature difference of the two gases is avoided. The vaporizer 4 conveys the mixed gas to the experimental cavity 6 through the heat-preservation heating pipeline 5, and the heat-preservation heating pipeline 5 plays a role in maintaining the temperature of the mixed gas. In the application, the vaporizer 4 is adopted to vaporize the liquid with preset flow rate conveyed by the liquid control device 2, and the liquid inlet amount can be accurately controlled by the liquid control device 2
In some embodiments of the gas-liquid two-phase mixing dynamic gas distribution system, the gas preheating device 3 includes: a disc-shaped gas path pipe 31 and a heating device.
Further, referring to fig. 2, the disc type air passage pipe 31 includes: a first disc-type air passage tube 31131 and a second disc-type air passage tube 31231;
the radius of the first disc-shaped air passage pipe 31131 is larger than that of the second disc-shaped air passage pipe 31231;
the first disc-shaped air passage pipe 31131 is sleeved on the outer ring of the second disc-shaped air passage pipe 31231, and the first disc-shaped air passage pipe 31131 and the second disc-shaped air passage pipe 31231 are separated by 5mm-15 mm;
the bottoms of the first disc-shaped air passage pipe 31131 and the second disc-shaped air passage pipe 31231 are connected by an air passage pipe.
A first air inlet 313 is vertically arranged at the top of the first disc-shaped air passage tube 31131;
the top of the second disk type air passage pipe 31231 is vertically provided with a second air inlet 314.
The second air inlet/outlet 314 is arranged at the center of the top of the second disk type air path pipe 31231.
Preferably, the radius of the outer ring of the first disc type gas path pipe 31131 is 90mm, and the radius of the outer ring of the second disc type gas path pipe 31231 is 70 mm.
The first and second air inlets 313 and 314 are spaced 24mm apart.
The height of the disk-shaped air passage pipe 31 is 100 mm.
The interval between the middle of each layer of the disk-shaped air passage pipes 31 is 5 mm.
The disc-shaped air passage pipe 31 is made of stainless steel.
In this embodiment, the temperature of the gas needs to reach at least about 3/4 degrees of the liquid vapor gas, so that the gas can be mixed without influence, and if the gas temperature is lower than this temperature, the temperature fluctuation in the vaporizer 4 is large, even temperature imbalance is caused, and the vaporization effect is influenced. Since the test gas may contain a gas such as hydrogen or oxygen, it is necessary to heat the gas indirectly, and a direct gas heating method such as electric heating cannot be used.
In some embodiments, the gas-liquid two-phase mixing dynamic gas distribution system includes: a water bath heater or an oil bath heater.
The heating device is realized by adopting a water bath heating device or an oil bath heating device, the total length of the disk-shaped gas path pipe 31 in the stainless steel disk-shaped gas path pipe 31 arranged in the temperature-controllable water bath heating device or the oil bath heating device is different according to different lengths of gas flow, the larger the gas flow is, the longer the total length of the coil pipe is, and the total length of the coil pipe for general experiment purpose of 10 liters/minute can reach 1 meter. The gas preheating part does not need precise temperature control, and only needs to increase the temperature of the gas to a certain degree (3/4 of the liquid vaporized gas).
In some embodiments of the gas-liquid two-phase mixing dynamic gas distribution system, referring to fig. 3, the vaporizer 4 includes: an inner cavity 41, a heating layer 42 and a heat insulation layer 43;
the heating layer 42 is arranged outside the inner cavity 41, and the heat insulation layer 43 is arranged outside the heating layer 42;
the lumen 41 includes: a first temperature sensor 44 and a gas inlet 45 provided at the top;
a liquid inlet 46 and an air outlet 47 provided at the bottom;
the gas inlet 45 is connected with the gas preheating device 3;
the liquid inlet 46 is connected with the liquid control device 2;
the air outlet 47 is conveyed to the experiment cavity 6 through the heat-preservation heating pipeline 5.
The liquid vaporizer 4 firstly ensures the full vaporization of the liquid, the temperature of the vaporizer 4 is divided into 3 temperatures, 180 ℃, 260 ℃ and 350 ℃ according to different liquid types and flow rates, the temperatures respectively correspond to liquid intervals with different vaporization temperatures, the vaporization temperature of the liquid can be obtained by looking up a table, but the liquid at the moment flows, therefore, the temperatures of the three different vaporizers 4 are basically more than 3 times of the vaporization temperature of the corresponding liquid, so that the liquid can be instantly vaporized fully, the required liquid amount is smaller because the total amount of gas used for experiments generally cannot exceed 10 liters per minute, and the full vaporization of the liquid in the vaporizer 4 is facilitated. For example, at 1 atm, the water vapor density is 0.83333 Kg/cubic meter. The density of the water is 1000 Kg/cubic meter. By comparison, the ratio of water vapor to water of the same mass was 1200: 1.
the gas-liquid two-phase hybrid dynamic air distribution system of the gas-liquid two-phase hybrid dynamic air distribution system in some embodiments further includes:
a second temperature sensor provided inside the gas preheating device 3;
and a third temperature sensor disposed inside the heat-retaining heating pipe 5.
Further, the gas-liquid two-phase mixes dynamic gas distribution system still includes: a control terminal;
the control terminal is connected with the gas control device 1, the liquid control device 2 and the vaporizer 4 through a central control circuit and is used for outputting a gas flow control signal to the gas control device 1, outputting a liquid flow control signal to the liquid control device 2 and outputting a temperature control signal to the vaporizer 4;
the control terminal is also connected with the electromagnetic stop valve, the first temperature sensor 44, the second temperature sensor and the third temperature sensor through an integrated acquisition circuit and is used for acquiring the switching signals of the electromagnetic stop valve and the temperature signals of the first temperature sensor 44, the second temperature sensor and the third temperature sensor.
The control terminal is connected with the gas control device 1, the liquid control device 2 and the vaporizer 4 through a central control circuit and is used for outputting a gas flow control signal to the gas control device 1, outputting a liquid flow control signal to the liquid control device 2 and outputting a temperature control signal to the vaporizer 4.
The user can directly set the type and mass value or volume value of the required gas and liquid through the control terminal, the control terminal can set different temperature values of the vaporizer 4 according to the type of the input liquid so as to ensure the full vaporization of the liquid, and the control input quantity of the gas and the liquid is adjusted through the mass or volume required by the user in real time, so that the dynamic gas-liquid two-phase mixing and gas distribution are realized.
The control terminal is connected with the electromagnetic stop valve, the first temperature sensor 44, the second temperature sensor and the third temperature sensor through the integrated acquisition circuit and is used for acquiring the switching signal of the electromagnetic stop valve and the temperature signals of the first temperature sensor 44, the second temperature sensor and the third temperature sensor.
In this embodiment, the vaporizer 4, the gas preheating device 3, and the heat-insulating heating pipe 5 are powered by 220 VAC. The gas flow controller, the liquid flow controller, the electromagnetic stop valve and the temperature sensor are powered by 24 VDC.
It is understood that the same or similar parts in the above embodiments may be mutually referred to, and the same or similar parts in other embodiments may be referred to for the content which is not described in detail in some embodiments.
It should be noted that, in the description of the present application, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Further, in the description of the present application, the meaning of "a plurality" means at least two unless otherwise specified.
In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations may be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.
Claims (10)
1. A gas-liquid two-phase mixing dynamic gas distribution system is characterized by comprising:
the device comprises a gas control device, a liquid control device, a gas preheating device, a vaporizer and a heat preservation heating pipeline;
the vaporizer is connected with the liquid control device, is also connected with the gas control device through the gas preheating device, and is also connected with the experiment cavity through the heat-preservation heating pipeline;
the gas control device is used for conveying gas with preset flow to the gas preheating device;
the gas preheating device is used for heating the gas conveyed by the gas control device and conveying the heated gas to the vaporizer;
the liquid control device is used for conveying liquid with a preset flow rate to the vaporizer;
the vaporizer is used for vaporizing the liquid conveyed by the liquid control device, mixing vaporized liquid vapor with heated gas conveyed by the gas preheating device, and conveying the mixed gas to the experiment cavity through the heat preservation heating pipeline.
2. The gas-liquid two-phase mixing dynamic gas distribution system of claim 1, wherein the gas preheating device comprises: disc-shaped gas path pipe and heating device.
3. The gas-liquid two-phase mixing dynamic gas distribution system of claim 2, wherein the disk-shaped gas circuit pipe comprises: a first disk-shaped gas circuit pipe and a second disk-shaped gas circuit pipe;
the radius of the first disc-shaped gas circuit pipe is larger than that of the second disc-shaped gas circuit pipe;
the first disc-shaped air passage pipe is sleeved on the outer ring of the second disc-shaped air passage pipe, and the first disc-shaped air passage pipe and the second disc-shaped air passage pipe are separated by 5-15 mm;
the first disc-shaped air passage pipe is connected with the bottom of the second disc-shaped air passage pipe through an air passage pipe.
4. The gas-liquid two-phase mixing dynamic gas distribution system according to claim 3, wherein a first gas inlet and outlet is vertically arranged at the top of the first disc-shaped gas circuit pipe;
and a second air inlet and outlet is vertically arranged at the top of the second disc-shaped air path pipe.
5. The gas-liquid two-phase mixing dynamic gas distribution system according to claim 4, wherein the second gas inlet and outlet is arranged at the center of the top of the second disk-shaped gas circuit pipe.
6. The gas-liquid two-phase mixing dynamic gas distribution system of claim 2, wherein the heating device comprises: a water bath heater or an oil bath heater.
7. The gas-liquid two-phase mixing dynamic gas distribution system of claim 1, wherein the vaporizer comprises: an inner cavity, a heating layer and a heat insulation layer;
the heating layer is arranged on the outer side of the inner cavity, and the heat insulation layer is arranged on the outer side of the heating layer;
the inner cavity includes: a first temperature sensor and a gas inlet disposed at the top;
a liquid inlet and an air outlet arranged at the bottom;
the gas inlet is connected with the gas preheating device;
the liquid inlet is connected with the liquid control device;
the gas outlet is conveyed to the experiment cavity through the heat preservation heating pipeline.
8. The gas-liquid two-phase mixing dynamic gas distribution system of claim 7, further comprising:
a second temperature sensor disposed inside the gas preheating device;
and the third temperature sensor is arranged inside the heat-preservation heating pipeline.
9. The gas-liquid two-phase mixing dynamic gas distribution system of claim 8, wherein the gas control device comprises: the gas flow controller, the electromagnetic stop valve and the first check valve;
the electromagnetic stop valve is arranged at the inlet end of the gas flow controller, and the one-way valve is arranged at the outlet end of the gas flow controller;
the liquid control device includes: a liquid flow controller, a filter and a second one-way valve;
the filter is disposed at the inlet end of the liquid flow controller and the second one-way valve is disposed at the outlet end of the liquid flow controller.
10. The gas-liquid two-phase mixing dynamic gas distribution system of claim 9, further comprising: a control terminal;
the control terminal is connected with the gas control device through a central control circuit, and the liquid control device and the vaporizer are used for outputting a gas flow control signal to the gas control device, outputting a liquid flow control signal to the liquid control device and outputting a temperature control signal to the vaporizer;
the control terminal is further connected with the electromagnetic stop valve, the first temperature sensor, the second temperature sensor and the third temperature sensor through an integrated acquisition circuit, and is used for acquiring the switching signals of the electromagnetic stop valve and the temperature signals of the first temperature sensor, the second temperature sensor and the third temperature sensor.
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| CN202020356193.5U CN211913379U (en) | 2020-03-19 | 2020-03-19 | Gas-liquid two-phase mixing dynamic gas distribution system |
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| CN202020356193.5U CN211913379U (en) | 2020-03-19 | 2020-03-19 | Gas-liquid two-phase mixing dynamic gas distribution system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114743900A (en) * | 2022-04-25 | 2022-07-12 | 北京北方华创微电子装备有限公司 | Vaporization system and semiconductor processing equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114743900A (en) * | 2022-04-25 | 2022-07-12 | 北京北方华创微电子装备有限公司 | Vaporization system and semiconductor processing equipment |
| WO2023207877A1 (en) * | 2022-04-25 | 2023-11-02 | 北京北方华创微电子装备有限公司 | Vaporization system and semiconductor process device |
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