CN211871386U - Device for pre-purifying nitrogen trifluoride crude product prepared by electrolysis - Google Patents
Device for pre-purifying nitrogen trifluoride crude product prepared by electrolysis Download PDFInfo
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Abstract
The utility model relates to a device for pre-purifying nitrogen trifluoride crude products prepared by electrolysis, which belongs to the technical field of fine chemical engineering, and comprises an HF (hydrogen fluoride) removing tower, a balance pressure tank, a negative pressure tank, a precooler, a cold trap, a vacuum pumping system, a liquid nitrogen source, a cooling medium source and a sewage discharge system; the lower part of the HF removing tower is provided with a raw material gas inlet and a sewage draining outlet, the upper part of the HF removing tower is provided with an air outlet, and the HF removing tower is also provided with a cold nitrogen inlet and a cold nitrogen outlet. Device simple structure, convenient operation carries out the process safety of preliminary treatment, stability to the nitrogen trifluoride crude that direct electrolysis hydrogen fluoride and ammonium bifluoride electrolyte were prepared based on the device, and the running cost is low, can effectively detach light component and heavy ends impurity in the nitrogen trifluoride crude, has the effect of lifting the weight to improving refined purification nitrogen trifluoride production efficiency and reduction in production cost.
Description
Technical Field
The utility model relates to a pre-purification electrolysis preparation nitrogen trifluoride crude device, which belongs to the technical field of fine chemical engineering.
Background
Nitrogen trifluoride is a colorless and tasteless gas synthesized by man, is mainly applied to the microelectronic industry, is an excellent plasma etching agent and cleaning agent, has excellent etching speed and selectivity for silicon semiconductor materials, and has high cleaning efficiency and no trace when being used as a gas cleaning agent. In addition, nitrogen trifluoride can also be used as a fluorine source in high-energy laser, as an electrochemical fluorinating agent, for producing perfluorinated organic and inorganic compounds, as a reagent for preparing tetrafluorohydrazine and producing fluorozirconate glass, and can also be used as some special welding gases by utilizing the characteristic of large reaction heat with hydrogen, and is industrially used for separating and purifying uranium and plutonium.
The purity of nitrogen trifluoride is crucial to the quality of produced semiconductor elements, however, the crude nitrogen trifluoride electrolytic gas prepared by the traditional electrolytic process method contains more impurities of light components and heavy components. The majority of light component impurities are N2、O2And most heavy component impurities are hydrofluoric acid and multi-fluorine nitrogen. Therefore, purification of nitrogen trifluoride is critical to component production.
Chinese patent CN1450202A provides a process for preparing nitrogen trifluoride gas, which refers to NF3The electrolytic gas is purified by a low-temperature cooling tower, an ultra-low temperature cold trap and the like, but the specific process parameter process is not described.
Chinese patent CN1450203A provides a method for refining nitrogen trifluoride gas, which comprises purifying by an HF removal tower, a pyrolysis tower, an oxidation tower, an alkaline washing tower, a dehydration tower and a rectification tower, and removing most of the impurities by rectification.
Chinese patent CN1672776A provides a method for purifying F from a nitrogen trifluoride reactor2HF and nitrogen oxide, wherein F2And HF is first removed and then nitrogen oxides are removed by adsorption. The improvement of the process resides in the removal of said NF from said NF3Selective removal of F from a gas2Without generating oxygen difluoride, the nitrogen oxide is removed by adsorption after HF removal, and further purification can be performed as desired.
However, the existing processes for preparing and purifying nitrogen trifluoride electrolytic gas mainly relate to the refining and purifying process of nitrogen trifluoride gas, and the crude nitrogen trifluoride product prepared by directly electrolyzing hydrogen fluoride and ammonium bifluoride electrolyte by an electrolytic cell contains more light component and heavy component impurities, including oxygen, nitrogen, laughing gas, hydrogen fluoride, multi-nitrogen fluoride and the like, and if the refining and purifying are directly carried out without pre-purification, the operation of the refining and purifying process is seriously influenced, so that the quality of the nitrogen trifluoride product is influenced. Therefore, the effective system process and method are adopted to pre-purify the nitrogen trifluoride crude product prepared by electrolysis, and the method has the important effects of improving the production efficiency of refining and purifying nitrogen trifluoride and reducing the production cost.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a device of nitrogen trifluoride crude of prepurification electrolysis preparation, the device simple structure, convenient operation, it is with low costs, can effectively detach light components and heavy ends impurity in the nitrogen trifluoride crude that the electrolysis trough direct electrolysis hydrogen fluoride and ammonium bifluoride electrolyte prepared based on the device, have the effect of lifting the weight to improving refined purification nitrogen trifluoride production efficiency and reduction in production cost.
The purpose of the utility model is realized through the following technical scheme.
A device for pre-purifying nitrogen trifluoride crude products prepared by electrolysis comprises an HF removing tower, a balance pressure tank, a negative pressure tank, a precooler, a cold trap, a vacuum pumping system, a liquid nitrogen source, a cooling medium source and a sewage disposal system;
the lower part of the HF removing tower is provided with a raw material gas inlet and a sewage outlet, the upper part of the HF removing tower is provided with an air outlet, and the HF removing tower is also provided with a cold nitrogen inlet and a cold nitrogen outlet;
the pressure of the negative pressure tank is less than that of the balance pressure tank;
the upper part of the precooler is provided with an air inlet, the lower part of the precooler is provided with a discharge hole, and the precooler is also provided with a cold nitrogen inlet and a cold nitrogen outlet;
the upper part of the cold trap is provided with a feed inlet, a vacuum port and NF3The bottom of the air outlet is provided with a sewage discharge outlet, and the cold trap is also provided with a liquid nitrogen inlet, a liquid nitrogen outlet, a cooling medium inlet and a cooling medium outlet;
the temperature of the cooling medium in the cooling medium source is higher than the temperature of the liquid nitrogen in the liquid nitrogen source;
the gas outlet of the HF-removing tower is connected with the gas inlet of the balance pressure tank, the sewage discharge outlet of the HF-removing tower is connected with a sewage discharge system, a regulating valve I is arranged on a pipeline connecting the gas outlet of the balance pressure tank and the gas inlet of the negative pressure tank, the gas outlet of the negative pressure tank is connected with the gas inlet of the precooler, the discharge port of the precooler is connected with the feed inlet of the cold trap, the vacuum port of the cold trap is connected with a vacuum pumping system, and the NF after pre-purification is carried out3NF of gas from cold trap3The air outlet is used for discharging, and the sewage discharge outlet of the cold trap is connected with a sewage discharge system; the cooling medium source is connected with the cooling medium inlet of the cold trap and used for regulating and controlling NF (nitrogen-nitrogen) in the cold trap3The temperature of the gas outlet is adjusted to the NF at the bottom of the cold trap3Liquid vaporization without heavy impurity liquid at the bottom of cold trapRaw vaporization to realize NF3Separating from heavy impurities; and the liquid nitrogen source realizes the regulation and control of the temperature of a vacuum port of the cold trap, the temperature of a discharge port of the precooler and the temperature of an air outlet of the HF-removing tower under the matching action of the regulating valve II, the regulating valve IV and the regulating valve V.
Furthermore, pipelines for flowing cold nitrogen in the HF removal tower and the precooler are arranged to be of a U-shaped pipe structure, and the heat exchange area of the U-shaped pipe in the HF removal tower is 0.5-0.8 times that of the U-shaped pipe in the precooler.
Further, the volume of the negative pressure tank is equal to the volume of the equilibrium pressure tank.
Adopt the device to carry out the operation of prepurification to the nitrogen trifluoride crude of electrolysis preparation as follows:
the temperature of a vacuum port in the cold trap is controlled to be-190 ℃ to-170 ℃ by regulating a regulating valve II, a regulating valve IV and a regulating valve V, the temperature of a discharge port of a precooler is controlled to be-110 ℃ to-80 ℃, and the temperature of an air outlet of an HF removal tower is controlled to be-80 ℃ to-50 ℃;
a nitrogen trifluoride crude product prepared by electrolyzing hydrogen fluoride and ammonium bifluoride electrolyte enters an HF removing tower through a raw material gas inlet, and part of high-boiling-point impurities (hydrogen fluoride and ammonium bifluoride) in the nitrogen trifluoride crude product are condensed into liquid under the cooling action of cold nitrogen and enter a sewage discharge system through a sewage discharge outlet;
the nitrogen trifluoride crude product from the gas outlet of the HF eliminating tower is fed into a precooler through a balance pressure tank and a negative pressure tank, and part of high boiling point impurities (carbon dioxide and laughing gas) in the nitrogen trifluoride crude product are further cooled into liquid under the action of cold nitrogen gas and then enter a cold trap under the action of gravity;
the nitrogen trifluoride crude product discharged from the discharge hole of the precooler enters a cold trap, and NF in the nitrogen trifluoride crude product3Most of high boiling point impurities are condensed into liquid in the cold trap and flow into the bottom of the cold trap, and low boiling point impurities (nitrogen and oxygen) in the crude nitrogen trifluoride pass through the cold trapThe air interface is pumped out of the cold trap by a vacuum pumping system;
after low boiling point impurities are pumped out of the cold trap, the regulating and controlling regulating valve II is closed, the liquid nitrogen supply into the cold trap is stopped, and at the moment, cooling medium is supplied into the cold trap through a cooling medium source, so that NF in the cold trap3The temperature of the air outlet is-160 to-100 ℃, and the NF at the bottom of the cold trap3Vaporizing liquid into gas through NF3The gas outlet is used for extracting, and the high boiling point impurity liquid at the bottom of the cold trap does not vaporize and enters a sewage discharge system through a sewage discharge outlet.
Has the advantages that:
device simple structure, convenient operation carries out the process safety of preliminary treatment, stability to the nitrogen trifluoride crude that direct electrolysis hydrogen fluoride and ammonium bifluoride electrolyte were prepared based on the device, and the running cost is low, can effectively detach light component and heavy ends impurity in the nitrogen trifluoride crude, has the effect of lifting the weight to improving refined purification nitrogen trifluoride production efficiency and reduction in production cost.
Drawings
FIG. 1 is a schematic diagram of the apparatus involved in the preliminary purification of the electrolytically prepared crude nitrogen trifluoride in the example.
The method comprises the following steps of 1-removing an HF tower, 2-balancing a pressure tank, 3-a negative pressure tank, 4-a precooler, 5-a cold trap, 6-a regulating valve I, 7-a regulating valve II, 8-a regulating valve III, 9-a regulating valve IV, 10-a regulating valve V, 11-a vacuum pumping system, 12-a purification system, 13-a liquid nitrogen source, 14-a cooling medium source, 15-a sewage discharging system, 16-an electrolytic nitrogen trifluoride system, 17-a nitrogen treatment system and 18-a cooling medium treatment system.
Detailed Description
The invention is further described with reference to the accompanying drawings and detailed description, wherein the process is conventional, unless otherwise specified, and the starting materials are commercially available from a public perspective.
In the following examples, the apparatus involved in the preliminary purification of the electrolytically prepared crude nitrogen trifluoride includes an HF removal column 1, a balance pressure tank 2, a negative pressure tank 3, a precooler 4, a cold trap 5, a vacuum pumping system 11, a liquid nitrogen source 13, a purification system 12, a nitrogen treatment system 17, a cooling medium source 14, a cooling medium treatment system 18 and a blowdown system 15, as shown in fig. 1;
a U-shaped tube heat exchange structure is arranged in the HF removing tower 1, a raw material gas inlet and a sewage outlet are arranged at the lower part of the HF removing tower, and an air outlet, a cold nitrogen inlet and a cold nitrogen outlet are arranged at the upper part of the HF removing tower;
the volumes of the balance pressure tank 2 and the negative pressure tank 3 are equal, and the pressure of the negative pressure tank 3 is 0.03MPa to 0.04MPa lower than that of the balance pressure tank 2 and is used for regulating and controlling the process pressure of the whole device to be stable;
the precooler 4 is internally provided with a U-shaped tube heat exchange structure, the upper part of the precooler is provided with an air inlet, a cold nitrogen inlet and a cold nitrogen outlet, and the lower part of the precooler is provided with a discharge hole;
the upper part of the cold trap 5 is provided with a feed inlet, a vacuum port and NF3The bottom of the gas outlet, the liquid nitrogen inlet and the cooling medium inlet is provided with a sewage draining outlet, a liquid nitrogen outlet and a cooling medium outlet;
the temperature of the cooling medium in the cooling medium source 14 is higher than the temperature of the liquid nitrogen in the liquid nitrogen source, and the cooling medium used in the following examples is freon;
the feed gas inlet of the HF-removing tower 1 is connected with an electrolytic nitrogen trifluoride system 16, the gas outlet of the HF-removing tower 1 is connected with the gas inlet of the lower part of the balance pressure tank 2, the sewage discharge outlet of the HF-removing tower 1 is connected with a sewage discharge system 15, a pipeline connecting the gas outlet of the upper part of the balance pressure tank 2 and the gas inlet of the lower part of the negative pressure tank 3 is provided with an adjusting valve I6, the gas outlet of the upper part of the negative pressure tank 3 is connected with the gas inlet of the precooler 4, the discharge outlet of the precooler 4 is connected with the feed inlet of the cold trap 5, the vacuum port of the cold trap 53The air outlet is connected with the purification system 12, and the sewage outlet of the cold trap 5 is connected with the sewage discharge system 15; the cooling medium source 14 is connected with a cooling medium inlet of the cold trap 5, and a cooling medium outlet of the cold trap 5 is connected with a cooling medium processing system 18; a regulating valve II 7 is arranged on a pipeline connecting the liquid nitrogen source 13 with a liquid nitrogen inlet of the cold trap 5, a liquid nitrogen outlet of the cold trap 5 is connected with a cold nitrogen inlet of the precooler 4 and the nitrogen treatment system 17 through a regulating valve IV 9, a cold nitrogen outlet of the precooler 4 is connected with a cold nitrogen inlet of the HF removal tower 1 and the nitrogen treatment system 17 through a regulating valve V10, and the HF removal towerThe cold nitrogen outlet of the 1 is connected with a nitrogen treatment system.
The crude product of nitrogen trifluoride prepared by electrolyzing the electrolyte of hydrogen fluoride and ammonium bifluoride contains light component N2、O2NF of heavy component laughing gas, multi-fluorine nitrogen and other impurities3Electrolytic gas having a volume fraction of the components NF355-75 percent, 10-30 percent of light component impurity and 5-15 percent of heavy component impurity.
Example 1
NF in the crude product of nitrogen trifluoride prepared by the nitrogen trifluoride electrolysis system 163Is 66%, the volume fraction of light component impurities is 19%, and the volume fraction of heavy component impurities is about 15%; the pre-purification treatment of the crude nitrogen trifluoride product by using the device comprises the following steps:
(1) opening an adjusting valve II 7, enabling liquid nitrogen in a liquid nitrogen source 13 to enter a cold trap 5, then sequentially entering a heat exchange structure of a precooler 4, a heat exchange structure of an HF removal tower 1, and finally entering a nitrogen treatment system 17, wherein the temperature of a vacuum port of the cold trap 5 is (-175 +/-2) DEG C, the temperature of a discharge port of the precooler 4 is (-90 +/-2) DEG C, and the temperature of an air outlet of the HF removal tower is (-55 +/-2) DEG C by adjusting and controlling the adjusting valve II 7, an adjusting valve IV 9 and an adjusting valve V10;
(2) the nitrogen trifluoride crude product enters an HF (hydrogen fluoride) removal tower 1 through a raw material gas inlet, and part of high-boiling-point impurities (hydrogen fluoride and ammonium bifluoride) in the nitrogen trifluoride crude product are condensed into liquid under the cooling action of cold nitrogen and enter a sewage discharge system 15 through a sewage discharge outlet; the nitrogen trifluoride crude product from the gas outlet of the HF removal tower 1 passes through a balance pressure tank 2 and a negative pressure tank 3 and then enters a precooler 4, and part of high boiling point impurities (carbon dioxide and laughing gas) in the nitrogen trifluoride crude product are further cooled into liquid under the action of cold nitrogen and enter a cold trap 5 under the action of gravity; the crude nitrogen trifluoride in the precooler 4 enters the cold trap 5 by pressure difference, and most of high-boiling-point impurities and NF in the crude nitrogen trifluoride3Condensing into liquid in the cold trap 5, enabling the liquid to flow into the bottom of the cold trap 5, and pumping impurities (nitrogen and oxygen) with low boiling point in the crude nitrogen trifluoride out of the cold trap 5 by a vacuum pumping system 11 through a vacuum port;
(3) after the low-boiling impurities are drawn out of the cold trap 5, the regulation is closedA valve II 7 for stopping supplying nitrogen into the cold trap 5, and supplying cooling medium into the cold trap 5 through a cooling medium source 14 to enable NF in the cold trap 53The temperature of the air outlet is (-150 +/-2) DEG C, NF3Vaporizing liquid into gas through NF3The gas outlet enters a purification system 12 for further refining and purification, and the high boiling point impurity liquid is not vaporized and enters a sewage discharge system 15 through a sewage discharge outlet, namely the pretreatment of the crude nitrogen trifluoride product is completed.
Example prepurified NF3The gas purity reaches 96%.
Example 2
NF Synthesis Using the procedure of example 13The crude nitrogen trifluoride product having a volume fraction of 59%, a volume fraction of light component impurities of 25% and a volume fraction of heavy component impurities of about 16% is subjected to a preliminary purification treatment by NF of the cold trap 53Pretreated NF gas outlet3The gas purity was 93%.
Example 3
NF Synthesis Using the procedure of example 13Is 56%, the volume fraction of light component impurities is 30%, and the volume fraction of heavy component impurities is about 14%, is subjected to a preliminary purification treatment by NF of a cold trap 53Pretreated NF gas outlet3The gas purity was 92%.
Example 4
NF in the crude product of nitrogen trifluoride prepared by the nitrogen trifluoride electrolysis system 163Is 57%, the volume fraction of the light component impurities is 27%, and the volume fraction of the heavy component impurities is about 16%; the pre-purification treatment of the crude nitrogen trifluoride product by using the device comprises the following steps:
(1) opening an adjusting valve II 7, enabling liquid nitrogen in a liquid nitrogen source 13 to enter a cold trap 5, then sequentially entering a heat exchange structure of a precooler 4, a heat exchange structure of an HF removal tower 1, and finally entering a nitrogen treatment system 17, wherein the temperature of a vacuum port of the cold trap 5 is (-185 +/-2) DEG C, the temperature of a discharge port of the precooler 4 is (-100 +/-2) DEG C, and the temperature of an air outlet of the HF removal tower is (-75 +/-2) DEG C by adjusting and controlling the adjusting valve II 7, an adjusting valve IV 9 and an adjusting valve V10;
(2) the nitrogen trifluoride crude product enters an HF (hydrogen fluoride) removal tower 1 through a raw material gas inlet, and part of high-boiling-point impurities (hydrogen fluoride and ammonium bifluoride) in the nitrogen trifluoride crude product are condensed into liquid under the cooling action of cold nitrogen and enter a sewage discharge system 15 through a sewage discharge outlet; the nitrogen trifluoride crude product from the gas outlet of the HF removal tower 1 passes through a balance pressure tank 2 and a negative pressure tank 3 and then enters a precooler 4, and part of high boiling point impurities (carbon dioxide and laughing gas) in the nitrogen trifluoride crude product are further cooled into liquid under the action of cold nitrogen and enter a cold trap 5 under the action of gravity; the crude nitrogen trifluoride in the precooler 4 enters the cold trap 5 by pressure difference, and most of high-boiling-point impurities and NF in the crude nitrogen trifluoride3Condensing into liquid in the cold trap 5, enabling the liquid to flow into the bottom of the cold trap 5, and pumping impurities (nitrogen and oxygen) with low boiling point in the crude nitrogen trifluoride out of the cold trap 5 by a vacuum pumping system 11 through a vacuum port;
(3) after low boiling point impurities are pumped out of the cold trap 5, the regulating valve II 7 is closed, the liquid nitrogen supply into the cold trap 5 is stopped, and at the moment, the cooling medium is supplied into the cold trap 5 through the cooling medium source 14, so that NF in the cold trap 53The temperature of the air outlet is (-135 +/-2) DEG C, NF3Vaporizing liquid into gas through NF3The gas outlet enters a purification system 12 for further refining and purification, and the high boiling point impurity liquid is not vaporized and enters a sewage discharge system 15 through a sewage discharge outlet, namely the pretreatment of the crude nitrogen trifluoride product is completed.
Example prepurified NF3The gas purity reaches 94%.
In summary, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. An apparatus for prepurifying electrolytically prepared crude nitrogen trifluoride, characterized in that: the device comprises an HF removing tower, a balance pressure tank, a negative pressure tank, a precooler, a cold trap, a vacuum pumping system, a liquid nitrogen source, a cooling medium source and a sewage system;
the lower part of the HF removing tower is provided with a raw material gas inlet and a sewage outlet, the upper part of the HF removing tower is provided with an air outlet, and the HF removing tower is also provided with a cold nitrogen inlet and a cold nitrogen outlet;
the pressure of the negative pressure tank is less than that of the balance pressure tank;
the upper part of the precooler is provided with an air inlet, the lower part of the precooler is provided with a discharge hole, and the precooler is also provided with a cold nitrogen inlet and a cold nitrogen outlet;
the upper part of the cold trap is provided with a feed inlet, a vacuum port and NF3The bottom of the air outlet is provided with a sewage discharge outlet, and the cold trap is also provided with a liquid nitrogen inlet, a liquid nitrogen outlet, a cooling medium inlet and a cooling medium outlet;
the temperature of the cooling medium in the cooling medium source is higher than the temperature of the liquid nitrogen in the liquid nitrogen source;
the gas outlet of the HF-removing tower is connected with the gas inlet of the balance pressure tank, the sewage discharge outlet of the HF-removing tower is connected with a sewage discharge system, a regulating valve I is arranged on a pipeline connecting the gas outlet of the balance pressure tank and the gas inlet of the negative pressure tank, the gas outlet of the negative pressure tank is connected with the gas inlet of the precooler, the discharge port of the precooler is connected with the feed inlet of the cold trap, the vacuum port of the cold trap is connected with a vacuum pumping system, and the NF after pre-purification is carried out3NF of gas from cold trap3The air outlet is used for discharging, and the sewage discharge outlet of the cold trap is connected with a sewage discharge system; the cooling medium source is connected with the cooling medium inlet of the cold trap and used for regulating and controlling NF (nitrogen-nitrogen) in the cold trap3The temperature of the air outlet; and the liquid nitrogen source realizes the regulation and control of the temperature of a vacuum port of the cold trap, the temperature of a discharge port of the precooler and the temperature of an air outlet of the HF-removing tower under the matching action of the regulating valve II, the regulating valve IV and the regulating valve V.
2. The apparatus for prepurifying a crude product of nitrogen trifluoride electrolytically produced according to claim 1, wherein: and pipelines for flowing cold nitrogen in the HF removal tower and the precooler are respectively arranged into a U-shaped pipe structure.
3. The apparatus for prepurifying a crude product of nitrogen trifluoride electrolytically produced according to claim 2, wherein: the heat exchange area of the U-shaped pipe in the HF removing tower is 0.5-0.8 times that of the U-shaped pipe in the precooler.
4. The apparatus for prepurifying a crude product of nitrogen trifluoride electrolytically produced according to claim 1, wherein: the volume of the negative pressure tank is equal to that of the balance pressure tank.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111039267A (en) * | 2019-12-29 | 2020-04-21 | 中船重工（邯郸）派瑞特种气体有限公司 | Device and method for pre-purifying electrolytically prepared nitrogen trifluoride crude product |
| CN112742158A (en) * | 2020-12-30 | 2021-05-04 | 中船重工（邯郸）派瑞特种气体有限公司 | Hydrogen fluoride waste gas treatment system and method in nitrogen trifluoride electrolysis preparation process |
| CN114538391A (en) * | 2022-03-01 | 2022-05-27 | 中船(邯郸)派瑞特种气体股份有限公司 | Slave NF3Recovery of high purity N from waste gas2O apparatus and method for recovering same |
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2019
- 2019-12-29 CN CN201922424900.XU patent/CN211871386U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111039267A (en) * | 2019-12-29 | 2020-04-21 | 中船重工（邯郸）派瑞特种气体有限公司 | Device and method for pre-purifying electrolytically prepared nitrogen trifluoride crude product |
| CN111039267B (en) * | 2019-12-29 | 2023-09-08 | 中船(邯郸)派瑞特种气体股份有限公司 | Device and method for prepurifying electrolytic prepared nitrogen trifluoride crude product |
| CN112742158A (en) * | 2020-12-30 | 2021-05-04 | 中船重工（邯郸）派瑞特种气体有限公司 | Hydrogen fluoride waste gas treatment system and method in nitrogen trifluoride electrolysis preparation process |
| CN114538391A (en) * | 2022-03-01 | 2022-05-27 | 中船(邯郸)派瑞特种气体股份有限公司 | Slave NF3Recovery of high purity N from waste gas2O apparatus and method for recovering same |
| CN114538391B (en) * | 2022-03-01 | 2023-11-03 | 中船(邯郸)派瑞特种气体股份有限公司 | From NF 3 Recovery of high purity N from exhaust gas 2 O device and recovery method thereof |
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