CN211852792U

CN211852792U - Rotary sealing device

Info

Publication number: CN211852792U
Application number: CN202020393052.0U
Authority: CN
Inventors: 丁云鑫
Original assignee: Hangzhou Xinyan Technology Co ltd
Current assignee: Hangzhou Xinyan Technology Co ltd
Priority date: 2020-03-25
Filing date: 2020-03-25
Publication date: 2020-11-03
Anticipated expiration: 2030-03-25

Abstract

The utility model discloses a rotary sealing device relates to wafer processing technology field. Including pedestal and rotation axis, the rotation axis runs through to set up in the pedestal, the rotation axis is located inside one section of pedestal left end and is equipped with first oil blanket, shaft collar, second oil blanket and first bearing from a left side to the right side cover in proper order. This rotary sealing device, when using, hold the wafer through vacuum chuck, utilize outside motor to drive the rotation axis rotation, the wafer that makes the vacuum hold rotates along with it, at rotation axis pivoted in-process, first oil blanket, the second oil blanket is used for vacuum seal, the third oil blanket is used for keeping apart external water and steam, play the purpose of protecting first bearing and second bearing, can improve the leakproofness greatly, reach good sealing performance's effect, when having avoided the wafer washing, the rotation axis intakes with the connecting portion of pedestal easily, thereby lead to the rotation axis not good with the pedestal cooperation, influence the rotation speed and then lead to the short problem of life.

Description

Rotary sealing device

Technical Field

The utility model relates to a wafer processing technology field specifically is a rotary sealing device.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, is called a wafer because the shape of the wafer is circular, various circuit element structures can be manufactured on the silicon wafer to form an integrated circuit product with a specific electric function, the original material of the wafer is silicon, the inexhaustible silicon dioxide is on the surface of the earth crust, and the silicon dioxide ore is refined by an electric arc furnace, chlorinated by hydrochloric acid and distilled to prepare high-purity polysilicon.

In the two-fluid cleaning process of the wafer, the wafer is sucked in vacuum and rotated, and a magnetic fluid rotating device is usually used for cleaning the wafer, although the magnetic fluid has better sealing performance and rotation speed, once water enters the magnetic fluid, the service life is greatly shortened, and therefore, the rotary sealing device is provided for solving the problems.

SUMMERY OF THE UTILITY MODEL

The utility model provides a rotary sealing device possesses the advantage of good leakproofness to solve traditional rotary sealing device for wafer processing and have the leakproofness general, problem of intaking easily.

For the purpose that realizes good leakproofness, the utility model provides a following technical scheme: a rotary sealing device comprises a seat body and a rotating shaft, wherein the rotating shaft is arranged in the seat body in a penetrating mode, a section, located inside the left end of the seat body, of the rotating shaft is sequentially sleeved with a first oil seal, a shaft collar, a second oil seal and a first bearing from left to right, and a section, located inside the right end of the seat body, of the rotating shaft is sequentially sleeved with a third oil seal, a bearing spacer ring and a second bearing from right to left;

the left end of the base body is fixedly connected with a mounting bracket through a screw, an inductive sensor is fixedly mounted on the mounting bracket, a sensor sensing block is inserted into the left end of the rotating shaft and corresponds to the inductive sensor in position, and a vacuum chuck is sleeved on the right end of the rotating shaft.

As a preferred technical scheme of the utility model, there is first end cover the left side opening part of pedestal through screw fixed mounting, there is second end cover the right side opening part of pedestal through screw fixed mounting, and the second end cover extends to one in the pedestal and serves the cover and be equipped with first sealing washer.

As a preferred technical scheme of the utility model, the left end of pedestal has been seted up the vacuum and has been inhaled the export, the rotation axis is located one section of pedestal right-hand member inside and is equipped with radial vacuum passageway and vertical vacuum passageway in proper order, and radial vacuum passageway and vertical vacuum passageway link up each other, radial vacuum passageway is corresponding with the position that the export was inhaled in the vacuum.

As a preferred technical scheme of the utility model, lubricated liquid supply port has been seted up to the right-hand member of pedestal, radial through hole has been seted up on the axle collar, and radial through hole is corresponding with radial vacuum channel's position.

As a preferred technical scheme of the utility model, the cover is equipped with first for the axle retaining ring on one section of the first bearing of rotation axis suit, and first for the axle retaining ring is located the left and right sides of first bearing, the cover is equipped with for the second axle retaining ring on one section of rotation axis suit second bearing, and the second for the axle retaining ring is located the left and right sides of second bearing

As an optimal technical scheme of the utility model, the cover is equipped with the second sealing washer on one section of rotatory axle suit in vacuum chuck, the vacuum suction inlet has been seted up in the vacuum chuck, the vacuum suction inlet link up each other with vertical vacuum passage.

Compared with the prior art, the utility model provides a rotary sealing device possesses following beneficial effect:

1. this rotary sealing device, when using, hold the wafer through vacuum chuck, utilize outside motor to drive the rotation axis rotation, the wafer that makes the vacuum hold rotates along with it, at rotation axis pivoted in-process, first oil blanket, the second oil blanket is used for vacuum seal, the third oil blanket is used for keeping apart external water and steam, play the purpose of protecting first bearing and second bearing, can improve the leakproofness greatly, reach good sealing performance's effect, when having avoided the wafer washing, the rotation axis intakes with the connecting portion of pedestal easily, thereby lead to the rotation axis not good with the pedestal cooperation, influence the rotation speed and then lead to the short problem of life.

2. According to the rotary sealing device, in the rotating process of the rotating shaft, the inductive sensor and the sensor sensing block are used for angle positioning measurement of the rotating shaft, if the detection end of the inductive sensor touches the sensor sensing block, the displacement of the rotating shaft can be collected and information can be acquired, and the displacement parameters of the rotating shaft can be acquired by using the inductive sensor.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a cross-sectional view of the present invention;

fig. 3 is an exploded view of the present invention.

In the figure: 1. a base body; 2. a rotating shaft; 3. a first oil seal; 4. a collar; 5. a second oil seal; 6. a first bearing; 7. a third oil seal; 8. a bearing spacer ring; 9. a second bearing; 10. mounting a bracket; 11. an inductive sensor; 12. a sensor sensing block; 13. a vacuum chuck; 14. a first end seal cap; 15. a second end seal cap; 16. a first seal ring; 17. a vacuum suction port; 18. a radial vacuum channel; 19. a longitudinal vacuum channel; 20. a lubricating liquid supply port; 21. a radial through hole; 22. a first shaft retainer ring; 23. a second shaft retainer ring; 24. a second seal ring; 25. a vacuum suction inlet.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention discloses a rotary sealing device, which comprises a base 1 and a rotary shaft 2, wherein the rotary shaft 2 is disposed in the base 1, a section of the rotary shaft 2 located inside the left end of the base 1 is sequentially sleeved with a first oil seal 3, a shaft collar 4, a second oil seal 5 and a first bearing 6 from left to right, a section of the rotary shaft 2 located inside the right end of the base 1 is sequentially sleeved with a third oil seal 7, a bearing spacer 8 and a second bearing 9 from right to left, when in use, a vacuum chuck 13 is used to suck a wafer, an external motor is used to drive the rotary shaft 2 to rotate, so that the vacuum sucked wafer rotates together, during the rotation of the rotary shaft 2, the first oil seal 3 and the second oil seal 5 are used for vacuum sealing, the third oil seal 7 is used for isolating external water and water vapor, and the purpose of protecting the first bearing 6 and the second bearing 9 is achieved, the sealing performance can be greatly improved, the effect of good sealing performance is achieved, and the problem that when the wafer is cleaned, water easily enters the connecting part of the rotating shaft 2 and the base body 1, so that the rotating shaft 2 and the base body 1 are not well matched, the rotating speed is influenced, and the service life is short is solved;

the left end of the seat body 1 is fixedly connected with a mounting bracket 10 through a screw, an inductive sensor 11 is fixedly mounted on the mounting bracket 10, a sensor induction block 12 is inserted at the left end of the rotating shaft 2, the position of the sensor induction block 12 corresponds to that of the inductive sensor 11, the right end part of the rotating shaft 2 is sleeved with a vacuum chuck 13, in the process of rotating the rotating shaft 2, the inductive sensor 11 and the sensor sensing block 12 are used for angle positioning measurement of the rotating shaft 2, if a detection end of the inductive sensor 11 touches the sensor sensing block 12, displacement of the rotating shaft 2 can be collected and information can be obtained, displacement parameters of the rotating shaft 2 can be obtained by using the inductive sensor 11, the working principle of the inductive sensor 11 is electromagnetic induction, the device converts measured values such as displacement and the like into inductance change, and the model of the inductive sensor 11 is Beijiafu NBB2-8GM 25-E2-V3.

Specifically, there is first end cover 14 at the left side opening part of pedestal 1 through screw fixed mounting, there is second end cover 15 at the right side opening part of pedestal 1 through screw fixed mounting, and second end cover 15 extends to one of pedestal 1 in and serves the cover and be equipped with first sealing washer 16, and first end cover 14 and second end cover 15 play the effect of encapsulation pedestal 1, and first sealing washer 16 plays preliminary waterproof effect.

Specifically, a vacuum suction port 17 is formed in the left end of the base body 1, a radial vacuum channel 18 and a longitudinal vacuum channel 19 are sequentially arranged on a section of the rotating shaft 2 located inside the right end of the base body 1, the radial vacuum channel 18 and the longitudinal vacuum channel 19 are communicated with each other, the radial vacuum channel 18 corresponds to the vacuum suction port 17 in position, a negative pressure machine is connected to the vacuum suction port 17 to introduce negative pressure, and the radial vacuum channel 18 and the longitudinal vacuum channel 19 are used for an air supply channel for generating suction force for the vacuum chuck 13.

Specifically, the right end of the seat body 1 is provided with a lubricating liquid supply port 20, the shaft collar 4 is provided with a radial through hole 21, the radial through hole 21 corresponds to the radial vacuum channel 18, and the lubricating liquid supply port 20 can be used for introducing a certain amount of lubricating liquid into the seat body 1 through external lubricating liquid equipment at irregular intervals according to the use condition so as to ensure the smooth movement of the first bearing 6 and the second bearing 9.

Specifically, the section of the rotating shaft 2 sleeved with the first bearing 6 is sleeved with a first shaft check ring 22, the first shaft check ring 22 is located on the left side and the right side of the first bearing 6, the section of the rotating shaft 2 sleeved with the second shaft check ring 23 is sleeved with the second shaft check ring 9, the second shaft check ring 23 is located on the left side and the right side of the second bearing 9, and the first shaft check ring 22 and the second shaft check ring 23 mainly play a role in limiting the positions of the first bearing 6 and the second bearing 9 respectively.

Specifically, the section of the rotating shaft 2 sleeved in the vacuum chuck 13 is sleeved with a second sealing ring 24, a vacuum suction port 25 is formed in the vacuum chuck 13, the vacuum suction port 25 is communicated with the longitudinal vacuum channel 19, the second sealing ring 24 is used for guaranteeing the sealing performance of the joint of the rotating shaft 2 and the vacuum chuck 13, and when negative pressure is introduced into the vacuum chuck 13 through the vacuum suction port 17, the radial through hole 21, the radial vacuum channel 18 and the longitudinal vacuum channel 19 in sequence, the negative pressure is led out from the vacuum suction port 25 to suck the wafer.

The utility model discloses a theory of operation and use flow: when the device is used, the device is connected with a negative pressure machine through a vacuum suction outlet 17 so as to introduce negative pressure, when the negative pressure is introduced into a vacuum sucker 13 through the vacuum suction outlet 17, a radial through hole 21, a radial vacuum channel 18 and a longitudinal vacuum channel 19 in sequence, the negative pressure is led out from a vacuum suction inlet 25 so as to suck a wafer, the vacuum sucker 13 is used for sucking the wafer, an external motor is used for driving a rotating shaft 2 to rotate, so that the wafer sucked in vacuum rotates along with the rotating shaft, in the rotating process of the rotating shaft 2, a first oil seal 3, a second oil seal 5 are used for vacuum sealing, a third oil seal 7 is used for isolating external water and water vapor, the purpose of protecting a first bearing 6 and a second bearing 9 is achieved, the sealing performance can be greatly improved, in the rotating process of the rotating shaft 2, an inductive sensor 11 and a sensor induction block 12 are used for angle positioning measurement of the rotating shaft 2, if a detection end of the inductive sensor 11 touches the sensor induction block, the inductive sensor 11 can acquire a displacement parameter of the rotating shaft 2.

In conclusion, when the rotary sealing device is used, the wafer is sucked by the vacuum chuck 13, the rotary shaft 2 is driven to rotate by the external motor, so that the wafer sucked in vacuum rotates along with the wafer, the first oil seal 3 and the second oil seal 5 are used for vacuum sealing in the rotating process of the rotary shaft 2, the third oil seal 7 is used for isolating external water and water vapor, the purpose of protecting the first bearing 6 and the second bearing 9 is achieved, the sealing performance can be greatly improved, the effect of good sealing performance is achieved, and the problem that the rotary shaft 2 is not matched with the base body 1 well, the rotary speed is influenced and the service life is short due to the fact that water easily enters the connecting part of the rotary shaft 2 and the base body 1 when the wafer is cleaned is solved; in the process of rotating the rotating shaft 2, the inductive sensor 11 and the sensor sensing block 12 are used for angular positioning measurement of the rotating shaft 2, if a detection end of the inductive sensor 11 touches the sensor sensing block 12, displacement of the rotating shaft 2 is collected and information is acquired, and displacement parameters of the rotating shaft 2 can be acquired by using the inductive sensor 11.

It should be noted that, in this document, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a rotary sealing device, includes pedestal (1) and rotation axis (2), its characterized in that: the rotary shaft (2) is arranged in the base body (1) in a penetrating mode, a section, located inside the left end of the base body (1), of the rotary shaft (2) is sequentially sleeved with the first oil seal (3), the shaft collar (4), the second oil seal (5) and the first bearing (6) from left to right, and a section, located inside the right end of the base body (1), of the rotary shaft (2) is sequentially sleeved with the third oil seal (7), the bearing spacer ring (8) and the second bearing (9) from right to left;

the left end of the base body (1) is fixedly connected with a mounting support (10) through a screw, an inductive sensor (11) is fixedly mounted on the mounting support (10), a sensor sensing block (12) is inserted into the left end of the rotating shaft (2), the position of the sensor sensing block (12) corresponds to that of the inductive sensor (11), and a vacuum chuck (13) is sleeved at the right end of the rotating shaft (2).

2. A rotary seal assembly according to claim 1 wherein: the opening part of the left side of the seat body (1) is fixedly provided with a first sealing end cover (14) through a screw, the opening part of the right side of the seat body (1) is fixedly provided with a second sealing end cover (15) through a screw, and one end of the second sealing end cover (15) extending into the seat body (1) is sleeved with a first sealing ring (16).

3. A rotary seal assembly according to claim 1 wherein: the vacuum suction port (17) is formed in the left end of the seat body (1), a radial vacuum channel (18) and a longitudinal vacuum channel (19) are sequentially arranged on one section, located inside the right end of the seat body (1), of the rotating shaft (2), the radial vacuum channel (18) is communicated with the longitudinal vacuum channel (19), and the radial vacuum channel (18) corresponds to the vacuum suction port (17).

4. A rotary seal assembly according to claim 3 wherein: the right end of the seat body (1) is provided with a lubricating liquid supply port (20), the shaft collar (4) is provided with a radial through hole (21), and the radial through hole (21) corresponds to the radial vacuum channel (18).

5. A rotary seal assembly according to claim 1 wherein: the bearing is characterized in that a first shaft check ring (22) is sleeved on one section of the rotating shaft (2) sleeved first bearing (6), the first shaft check ring (22) is located on the left side and the right side of the first bearing (6), a second shaft check ring (23) is sleeved on one section of the rotating shaft (2) sleeved second bearing (9), and the second shaft check ring (23) is located on the left side and the right side of the second bearing (9).

6. A rotary seal assembly according to claim 3 wherein: the vacuum sealing device is characterized in that a second sealing ring (24) is sleeved on one section of the rotating shaft (2) sleeved in the vacuum sucker (13), a vacuum suction inlet (25) is formed in the vacuum sucker (13), and the vacuum suction inlet (25) is communicated with the longitudinal vacuum channel (19).