CN211788951U - Automatic ejector pin adjusting device - Google Patents
Automatic ejector pin adjusting device Download PDFInfo
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- CN211788951U CN211788951U CN202020338037.6U CN202020338037U CN211788951U CN 211788951 U CN211788951 U CN 211788951U CN 202020338037 U CN202020338037 U CN 202020338037U CN 211788951 U CN211788951 U CN 211788951U
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Abstract
The utility model relates to semiconductor production equipment technical field provides an thimble automatic regulating apparatus, including displacement mechanism, actuating mechanism, thimble mechanism all connect in displacement mechanism, the actuating mechanism drive displacement mechanism produces the displacement, thimble mechanism follows displacement mechanism carries out the displacement. Rely on motor and displacement mechanism to be connected and realize X, Y, Z to the adjustment removal, through the linkage of motor, realize X, Y, Z triaxial action and reach automated production's purpose, improve degree of automation, promote production efficiency, solve the precision and hang down, easily cause the problem of bad quality.
Description
Technical Field
The utility model belongs to the technical field of semiconductor production equipment, a thimble automatic regulating apparatus is provided.
Background
The existing thimble mechanism has the following common problems no matter whether the driving force is a stepping motor or other power sources: firstly, the degree of automation is low, and manual adjustment is needed. Secondly, the production efficiency is low, and a lot of debugging time is wasted. And thirdly, the precision is low, and the quality problem is easily caused. Therefore, a new thimble mechanism is urgently needed to improve the production efficiency, precision and automation degree, so as to promote the improvement of the production quality of the semiconductor.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model aims to solve the technical problems that the automation degree in the prior art is low, and manual adjustment is needed; the production efficiency is low, and much debugging time is wasted; the precision is low, and the quality problem is easy to cause. In order to solve the technical problem, the utility model adopts the technical scheme that:
the utility model provides a thimble automatic regulating apparatus, including displacement mechanism, actuating mechanism, thimble mechanism all connect in displacement mechanism, the actuating mechanism drive displacement mechanism produces the displacement, thimble mechanism follows displacement mechanism carries out the displacement.
Further, the displacement mechanism comprises a first tension spring, a first clamping strip and a first base block, and one end of the first clamping strip is connected with the first base block through the first tension spring.
Furthermore, the displacement mechanism further comprises a second tension spring, a second clamping strip and a second base block, and one end of the second clamping strip is connected with the second base block through the second tension spring.
Further, the displacement mechanism further comprises a first base block connecting seat, the first base block is connected to the first base block connecting seat, the second base block is connected to the ejector pin mechanism, a connecting seat guide rail and a connecting seat through groove are arranged in the first base block connecting seat, the ejector pin mechanism is provided with a base, support legs are arranged at the bottom of the base, and the support legs and the guide rail are arranged in the connecting seat through groove.
Further, the displacement mechanism further comprises a base, a first base block connecting seat supporting leg is arranged at the bottom of the first base block connecting seat, the base is provided with a base guide rail and a base through groove, the first base block connecting seat supporting leg and the base guide rail are arranged in the base through groove, and the base through groove is perpendicular to the opening direction of the through groove.
Further, the driving mechanism comprises a first motor base, a first bearing, a first eccentric displacement mechanism and a first motor, wherein the first motor is mounted on the first motor base, the first bearing is connected with the first motor through the first eccentric displacement mechanism, and the first bearing is clamped in the first clamping strip;
the driving mechanism further comprises a second motor base, a second bearing, a second eccentric displacement mechanism and a second motor, the second motor is installed on the second motor base, the second bearing is connected with the second motor through the second eccentric displacement mechanism, and the second bearing is clamped in a second clamping strip.
Further, the thimble mechanism comprises a third motor, an eccentric mechanism, a thimble base and a thimble, wherein the third motor, the eccentric mechanism and the thimble are all installed on the thimble base, the third motor drives the eccentric mechanism, and the thimble is driven to lift by the connection of the eccentric mechanism.
The light blocking piece is respectively arranged on the first eccentric displacement mechanism and the second eccentric displacement mechanism, and the light blocking piece sensor is matched with the light blocking piece and is arranged at a corresponding position on the eccentric mechanisms.
Further, the thimble includes thimble helmet, thimble spare connecting piece, the thimble helmet is equipped with the confession the hole is ejected to the thimble spare, the thimble spare is arranged in the thimble helmet, the thimble spare pass through the thimble spare connecting piece with eccentric mechanism is connected.
Furthermore, the ejector pin automatic adjusting device further comprises a control mechanism, and the control mechanism is used for controlling the automatic adjusting drive of the ejector pin automatic adjusting device.
The utility model provides a thimble automatic regulating apparatus, including displacement mechanism, actuating mechanism, thimble mechanism all connect in displacement mechanism, the actuating mechanism drive displacement mechanism produces the displacement, thimble mechanism follows displacement mechanism carries out the displacement. Through full automatic drive displacement mechanism and thimble mechanism, realize that the high accuracy carries out the operation to the semiconductor on the thimble, full automatization thimble displacement high accuracy operation promotes production efficiency, precision, degree of automation to promote semiconductor production quality to promote.
Drawings
Fig. 1 is a first schematic view of an automatic adjusting device for a thimble according to an embodiment of the present invention;
fig. 2 is a schematic view of a second automatic adjusting device for ejector pins according to an embodiment of the present invention;
fig. 3 is a third schematic view of an automatic thimble adjusting device provided in the embodiment of the present invention;
fig. 4 is a fourth schematic view of an automatic adjusting device for ejector pins according to an embodiment of the present invention.
Fig. 5 is a step diagram of an automatic adjusting method for a thimble according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Examples
As shown in fig. 1 and 3, the utility model provides an ejector pin automatic regulating apparatus, including displacement mechanism, actuating mechanism, ejector pin mechanism 30 all connect in displacement mechanism, the actuating mechanism drive displacement mechanism produces the displacement, ejector pin mechanism follows displacement mechanism carries out the displacement.
The driving mechanism drives the thimble mechanism 30 to realize displacement in the plane or in the X direction and the Y direction forming a certain angle with the plane.
Further, as shown in fig. 1 and 3, the displacement mechanism includes a first tension spring 8, a first clamping bar 9, and a first base block 11, and one end of the first clamping bar 9 is connected to the first base block 11 through the first tension spring 8.
The first tension spring 8 and the first clamping strip 9 can adjustably clamp the first displacement eccentric mechanism 4, and the first base block 11 is driven to make corresponding displacement under the action of the eccentric mechanism.
Further, as shown in fig. 2 and 3, the displacement mechanism further includes a second tension spring 8, a second clamping bar 9, and a second base block 12, and one end of the second clamping bar 9 is connected to the second base block 12 through the second tension spring 8.
Similarly, the second tension spring 8 and the second clamping strip 9 can adjustably clamp the second eccentric moving mechanism 41, and the second base block 12 is driven to make corresponding displacement under the action of the eccentric mechanism.
Further, as shown in fig. 3 and 4, the displacement mechanism further includes a first base block connecting seat 15, the first base block 11 is connected to the first base block connecting seat 15, the second base block 12 is connected to the ejector pin mechanism 30, a connecting seat guide rail 18 and a connecting seat through groove 19 are arranged in the first base block connecting seat 15, the ejector pin mechanism has a base 17, a support leg 20 is arranged at the bottom of the base, and the support leg 20 and the connecting seat guide rail 18 are arranged in the connecting seat through groove 19.
First base block 11 connect in first base block connecting seat 15, first base block 11 can drive first base block connecting seat 15 and make corresponding displacement, second base block 12 can drive thimble mechanism 30 makes corresponding displacement, and connecting seat guide rail 18 arranges between connecting seat logical groove 19 and stabilizer blade 20, and certain displacement clearance space is restricted to stabilizer blade 20 for thimble mechanism 30 can be moderate degree when connecting seat guide rail 18 makes corresponding sliding displacement, promotes the displacement precision.
The ejector pin mechanism 30 is a device for separating an object stuck on a film, including but not limited to a blue film, a white film, a UV film, a plastic film, etc., from the film, and the object includes but not limited to various chips for semiconductors, various electronic components such as resistors, capacitors, I C, etc., and a glass plate, a ceramic plate, a plastic plate, a metal plate, etc.
Further, as shown in fig. 3 and 4, the device further includes a base 1, a first base block connecting seat support leg 14 is disposed at the bottom of the first base block connecting seat 15, the base 1 is provided with a base guide rail 13 and a base through groove 16, the first base block connecting seat support leg 14 is disposed on the base through groove 16, and the opening direction of the base through groove 16 is perpendicular to the opening direction of the connecting seat through groove 19.
The base is provided with a base guide rail 13 and a base through groove 16, the first base block connecting seat support legs 14 and the base guide rail 13 have the same functions as the above, but the base guide rail 13 drives the first base block connecting seat 15 to make corresponding displacement, and because the opening directions of the base through groove 16 and the through groove 19 are mutually vertical, the displacement directions are mutually vertical, so that the adjustment displacement can be made in all directions accurately, and the ejector pin can be adjusted.
Further, as shown in fig. 1, the driving mechanism includes a first motor base 2, a first bearing 3, a first eccentric displacement mechanism 4, and a first motor 7, the first motor 7 is mounted on the first motor base 2, the first bearing 3 is connected to the first motor 7 through the first eccentric displacement mechanism 4, and the first bearing 3 is clamped in a first clamping strip 9;
the first eccentric displacement mechanism 4 is driven by the first motor 7 to drive the first bearing 3 to make an eccentric displacement stroke, and correspondingly pushes the first clamping strip 9 to make a small-amplitude displacement.
As shown in fig. 2, the driving mechanism further includes a second motor base 2, a second bearing 3, a second eccentric displacement mechanism 41, and a second motor 7, wherein the second motor 7 is mounted on the second motor base 2, the second bearing 3 is connected to the second motor 7 through the second eccentric displacement mechanism 4, and the second bearing 3 is clamped in a second clamping strip 9.
The driving mechanism includes, but is not limited to, various motors such as stepping motor, servo motor, voice coil motor, linear motor, etc., and other various power sources such as air cylinder, electric cylinder, electromagnet, piezoelectric braking products, and power device driven by various power sources.
In principle, the second clamping rail 9 is displaced by a small amount in the other directions.
Further, as shown in fig. 4, the thimble mechanism includes a third motor 21, an eccentric mechanism 22, a thimble base 23, and a thimble 24, where the third motor 21, the eccentric mechanism 22, and the thimble 24 are all installed on the thimble base 23, the third motor 21 drives the eccentric mechanism 22, and the thimble 24 is connected and driven by the eccentric mechanism 22 to lift.
The third motor 21 drives the eccentric mechanism 22 to drive the thimble 24 to lift, and the third motor 21, the eccentric mechanism 22 and the thimble 24 are all mounted on the thimble base 23.
Further, the device also comprises a plurality of light blocking sheets 5 and a light blocking sheet sensor 6, wherein the plurality of light blocking sheets 5 are respectively arranged on the first eccentric displacement mechanism 4 and the second eccentric displacement mechanism 41, and the light blocking sheet sensor is matched with the light blocking sheets 5 and is arranged at a corresponding position.
As shown in fig. 1, the light barrier 5 and the light barrier sensor 6 are adapted to sense the motion amplitude parameter of the first eccentric displacement mechanism 4 and perform motion analysis.
As shown in fig. 2, the light barrier 5 and the light barrier sensor 6 are adapted to sense the motion amplitude parameter of the second eccentric displacement mechanism 41 and perform motion analysis.
As shown in fig. 4, the light barrier and light barrier sensor 25 is adapted to sense the motion amplitude parameter of the eccentric displacement mechanism 22 and perform motion analysis.
The first eccentric displacement mechanism 4, the second eccentric displacement mechanism 41, and the eccentric mechanism 22 may be a cam, an eccentric.
Further, as shown in fig. 4, the thimble 24 includes a thimble protection cap 26, a thimble connector 27, and a thimble 28, the thimble protection cap 26 is provided with a hole for ejecting the thimble 28, the thimble 28 is disposed in the thimble protection cap 26, and the thimble 28 is connected to the eccentric mechanism 22 through the thimble connector 27.
The spike cap 26 serves to protect a spike 28. the spike 28 is driven out of the hole by a spike connector 27. the spike connector 27 is in driving connection with the eccentric mechanism 22.
Further, as shown in fig. 4, the device further comprises a control mechanism 29, wherein the control mechanism 29 is used for controlling the automatic adjustment driving of the thimble automatic adjusting device, and the control mechanism 29 analyzes the movement and timely adjusts the displacement or pause.
Further, as shown in fig. 5, an automatic adjusting method for a thimble by using the automatic adjusting device for a thimble is characterized by comprising the following steps:
s11, controlling the driving mechanism to start working by the control mechanism;
s12, driving the displacement mechanism to generate displacement by the driving mechanism;
s13, the displacement mechanism drives the thimble mechanism to realize displacement;
s14, repeating the steps S11-S13, the thimble mechanism can realize the continuous displacement from one position to the next position.
The utility model provides a thimble automatic regulating apparatus, including displacement mechanism, actuating mechanism, thimble mechanism all connect in displacement mechanism, the actuating mechanism drive displacement mechanism produces the displacement, thimble mechanism follows displacement mechanism carries out the displacement. Through full automatic drive displacement mechanism and thimble mechanism, realize that the high accuracy carries out the operation to the semiconductor on the thimble, full automatization thimble displacement high accuracy operation promotes production efficiency, precision, degree of automation to promote semiconductor production quality to promote.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (9)
1. The utility model provides an ejector pin automatic regulating apparatus, its characterized in that includes displacement mechanism, actuating mechanism, ejector pin mechanism all connect in displacement mechanism, the actuating mechanism drive displacement mechanism produces the displacement, ejector pin mechanism follows displacement mechanism carries out the displacement.
2. The device for automatically adjusting the ejector pins according to claim 1, wherein the displacement mechanism comprises a first tension spring, a first clamping bar, a first base block, a second tension spring, a second clamping bar and a second base block, one end of the first clamping bar is connected with the first base block through the first tension spring, and one end of the second clamping bar is connected with the second base block through the second tension spring.
3. The apparatus according to claim 2, wherein the displacement mechanism further comprises a first base block connecting seat, the first base block is connected to the first base block connecting seat, the second base block is connected to the ejector mechanism, a connecting seat guide rail and a connecting seat through groove are arranged in the first base block connecting seat, the ejector mechanism has a base, a support leg is arranged at the bottom of the base, and the support leg and the guide rail are arranged in the connecting seat through groove.
4. The apparatus according to claim 3, wherein said displacement mechanism further comprises a base, said first base block connecting seat has a first base block connecting seat leg at a bottom thereof, said base has a base guide rail and a base through groove, said first base block connecting seat leg and said base guide rail are disposed in said base through groove, and said base through groove and said connecting seat through groove have an opening direction perpendicular to each other.
5. The apparatus according to claim 2, wherein said driving mechanism comprises a first motor base, a first bearing, a first eccentric displacement mechanism, and a first motor, said first motor is mounted on said first motor base, said first bearing is connected to said first motor through said first eccentric displacement mechanism, and said first bearing is clamped in said first clamping strip;
the driving mechanism further comprises a second motor base, a second bearing, a second eccentric displacement mechanism and a second motor, the second motor is installed on the second motor base, the second bearing is connected with the second motor through the second eccentric displacement mechanism, and the second bearing is clamped in the second clamping strip.
6. The device for automatically adjusting ejector pins according to claim 1, wherein the ejector pin mechanism comprises a third motor, an eccentric mechanism, an ejector pin base and an ejector pin, the third motor, the eccentric mechanism and the ejector pin are all mounted on the ejector pin base, the third motor drives the eccentric mechanism, and the ejector pin is connected and driven by the eccentric mechanism to lift.
7. The apparatus for automatically adjusting ejector pins according to claim 5, further comprising a light barrier and a light barrier sensor, wherein the light barrier is disposed on the first eccentric displacement mechanism, the second eccentric displacement mechanism, and the eccentric mechanism, respectively, and the light barrier sensor is adapted to be installed at a corresponding position.
8. The apparatus according to claim 6, wherein said thimble comprises a thimble protection cap, a thimble element, and a thimble element connecting element, said thimble protection cap is provided with an ejection hole for said thimble element, said thimble element is disposed in said thimble protection cap, and said thimble element is connected to said eccentric mechanism through said thimble element connecting element.
9. The apparatus according to claim 1, further comprising a control mechanism for controlling the automatic adjustment drive of the automatic ejector pin adjustment apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020338037.6U CN211788951U (en) | 2020-03-17 | 2020-03-17 | Automatic ejector pin adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020338037.6U CN211788951U (en) | 2020-03-17 | 2020-03-17 | Automatic ejector pin adjusting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211788951U true CN211788951U (en) | 2020-10-27 |
Family
ID=72930816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020338037.6U Active CN211788951U (en) | 2020-03-17 | 2020-03-17 | Automatic ejector pin adjusting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211788951U (en) |
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2020
- 2020-03-17 CN CN202020338037.6U patent/CN211788951U/en active Active
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