CN211779392U

CN211779392U - Support frame for semiconductor processing procedure special gas conveying pipeline

Info

Publication number: CN211779392U
Application number: CN202020060104.2U
Authority: CN
Inventors: 刘志祥
Original assignee: Suzhou Ruize System Engineering Co ltd
Current assignee: Suzhou Ruize System Engineering Co ltd
Priority date: 2020-01-13
Filing date: 2020-01-13
Publication date: 2020-10-27
Anticipated expiration: 2030-01-13

Abstract

The utility model discloses a support frame for semiconductor processing procedure special gas conveying pipeline, the on-line screen storage device comprises a base, fixedly connected with support column on the base, be equipped with the cavity in the support column, sliding connection has vertical threaded rod in the cavity, threaded rod top fixedly connected with connecting piece, the connecting piece top is equipped with the fluting, the fluting internal rotation is connected with the direction piece, the direction piece is located the equal fixedly connected with pivot in both ends of fluting, two pivots all rotate with the fluting lateral wall to be connected, one of them pivot runs through the fluting lateral wall and extends to the external world and be connected with stop gear, the solid. The utility model discloses a set up the altitude mixture control that support column, threaded rod and carousel isotructure can realize the support frame, can realize the regulation to solid fixed ring direction simultaneously through setting up connecting piece, direction piece and pivot isotructure to can support fixedly to the pipeline of co-altitude not, different angles.

Description

Support frame for semiconductor processing procedure special gas conveying pipeline

Technical Field

The utility model relates to a semiconductor manufacturing technical field especially relates to a support frame for semiconductor processing procedure special type gas transmission pipeline.

Background

Various special gases are often needed in the semiconductor manufacturing process, and are generally transported through pipelines in industrial production, and particularly, a support frame is often needed to support and fix the pipelines at the positions of pipeline overhead positions.

But present pipeline support frame suitability is relatively poor, and the position height that transport pipe way needs to support and pipeline angle all probably are different, often hardly to the fixed of pipeline parallel and level when present function comparatively single support frame faces this kind of condition, cause the damage and support fixed effect relatively poor to the pipeline easily.

Disclosure of Invention

The utility model aims at solving the problem that the support frame function is comparatively single among the prior art, and the pipeline support ability is relatively poor in the face of various height and angle, and the support frame for semiconductor processing procedure special gas conveying pipeline that provides.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a support frame for semiconductor processing procedure special gas conveying pipeline, includes the base, fixedly connected with support column on the base, be equipped with the cavity in the support column, sliding connection has vertical threaded rod in the cavity, threaded rod top fixedly connected with connecting piece, the connecting piece top is equipped with the fluting, the fluting internal rotation is connected with direction piece, the equal fixedly connected with pivot in both ends that direction piece is located the fluting, two the pivot all rotates with the fluting lateral wall to be connected, one of them the pivot runs through the fluting lateral wall and extends to the external world and be connected with stop gear, the solid fixed ring of direction piece top fixedly connected with.

Preferably, the top end of the support column is rotatably connected with a rotary table, and the rotary table is in threaded connection with a threaded rod.

Preferably, one of the rotating shafts penetrates through the side wall of the open groove and extends to the outside, a sliding groove is formed in the part, the sliding groove is connected with a sliding rod with the size being just matched with the sliding groove in a sliding mode, and annular limiting discs are fixedly connected to the end portions of the two ends of the sliding rod.

Preferably, the limiting disc inner ring is connected with the rotating shaft in a sliding mode, a plurality of protrusions are arranged on one side, close to the connecting piece, of the limiting disc, and a plurality of protrusions are also arranged at the position, opposite to the limiting disc, of the connecting piece.

Preferably, one of them pivot runs through the fluting lateral wall and extends to external tip fixedly connected with fixed block, threaded connection has two at least axis direction and the same bolt of pivot axis direction on the fixed block.

Preferably, at least two bolts are symmetrically arranged about the axis of the rotating shaft, and the length of each bolt is greater than the shortest distance between the fixing block and the connecting piece.

Compared with the prior art, the utility model discloses possess following advantage:

1. the utility model can realize the height adjustment of the support frame by arranging the support column, the threaded rod, the turntable and other structures, thereby being capable of supporting and fixing the gas transmission pipelines with different heights and having greater applicability;

2. the utility model can realize the adjustment of the direction of the fixing ring by arranging the connecting piece, the direction piece, the rotating shaft and other structures, and the fixing ring can still be well matched with the pipeline when facing to the inclined pipeline so as to fix the pipeline;

3. the utility model discloses a set up spacing dish fixed block and bolt isotructure and can relax quick fix the direction piece, and then realize the fixed to solid fixed ring, and then realize the stability to the pipeline support.

Drawings

Fig. 1 is a schematic front structural view of a support frame for a special gas conveying pipeline in a semiconductor manufacturing process according to the present invention;

fig. 2 is a side view of the support frame for the special gas conveying pipeline in the semiconductor manufacturing process according to the present invention;

fig. 3 is an enlarged schematic view of a structure in fig. 2.

In the figure: the device comprises a base 1, support columns 2, a cavity 3, a threaded rod 4, a connecting piece 5, a directional piece 6, a rotating shaft 7, a limiting mechanism 8, a fixing ring 9, a rotating disc 10, a sliding groove 11, a limiting disc 12 and a fixing block 13.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, a support frame for semiconductor processing procedure special gas conveying pipeline, including base 1, fixedly connected with support column 2 on the base 1, be equipped with cavity 3 in the support column 2, sliding connection has vertical threaded rod 4 in the cavity 3, 4 top fixedly connected with connecting piece 5 of threaded rod, 5 tops of connecting piece are equipped with the fluting, the fluting internal rotation is connected with direction piece 6, direction piece 6 is located equal fixedly connected with pivot 7 in both ends of fluting, two pivot 7 all rotate with the fluting lateral wall and be connected, one of them pivot 7 runs through the fluting lateral wall and extend to the external world and be connected with stop gear 8, 6 top fixedly connected with solid fixed ring 9 of direction piece, gu fixed ring 9 includes upper fixed ring and lower fixed ring, upper fixed ring passes through screw fixed connection with lower fixed ring both.

Specifically, 2 tops of support column are rotated and are connected with carousel 10, are equipped with on carousel 10 with threaded rod threaded connection's stop nut, can improve carousel 10's self-locking ability, carousel 10 and 4 threaded rod threaded connection, through reciprocating of threaded rod 4 that the rotation of carousel 10 can realize, and then realize the regulation of solid fixed ring 9 height through threaded rod 4.

It should be noted that, a sliding groove 11 is provided in a portion of one of the rotating shafts 7 that penetrates through the side wall of the open groove and extends to the outside, the sliding groove 11 is slidably connected with a sliding rod with a size that is just matched with the sliding groove 11, and two end portions of the sliding rod are fixedly connected with an annular limiting disc 12.

It is worth mentioning that, spacing dish 12 inner ring and pivot 7 sliding connection, one side that spacing dish 12 is close to connecting piece 5 is equipped with a plurality of archs, connecting piece 5 is equipped with a plurality of archs equally with spacing dish 12 relative position, when spacing dish 12 slides along pivot 7 and closely laminate with connecting piece 5, because bellied setting can have enough big frictional force to make spacing dish 12 unable rotation between connecting piece 5 and spacing dish 12, and then make pivot 7 unable rotation through spacing dish 12 and slide bar, and then make direction piece 6 and solid fixed ring 9 unable rotation.

It is worth mentioning that one of them pivot 7 runs through the fluting lateral wall and extends to external tip fixedly connected with fixed block 13, and threaded connection has two at least axis direction and the same bolt of pivot 7 axis direction on the fixed block 13, can slide spacing dish 12 towards connecting piece 5 direction through rotating the bolt, and then can make spacing dish 12 and connecting piece 5 inseparable laminating together.

Specifically, at least two bolts are symmetrically arranged about the axis of the rotating shaft 7, and the length of each bolt is larger than the shortest distance between the fixing block 13 and the connecting piece 5, so that the bolts can enable the limiting disc 12 and the connecting piece 5 to be tightly attached, and different positions of the limiting disc can be well attached together.

The working principle is as follows:

when the utility model is used, firstly, the rotary disc 10 is rotated, the rotary disc 10 rotates to enable the threaded rod 4 in threaded connection with the rotary disc to move up and down, the rotary disc 10 stops rotating until the fixing ring 9 moves to a height suitable for fixing the pipeline, the limiting nut on the rotary disc 10 rotates to be attached to the rotary disc 10 above the rotary disc 10, then the fixing ring 9 is moved according to the inclination direction of the pipeline, the fixing ring 9 drives the direction piece 6 to rotate, the angle of the fixing ring 9 is kept after the fixing ring is rotated to a proper position, the bolt on the fixing block 13 is rotated, the bolt rotates to continuously push the limiting disc 12 towards the direction of the connecting piece 5 until the limiting disc 12 is closely attached to the connecting piece 5, because the mutually contacted position of the limiting disc 12 and the connecting piece 5 is provided with the bulge, the limiting disc 12 can be ensured to be incapable of rotating, the sliding rod fixedly connected with the, this further fixes the angle of the direction element 6 and the fixing ring 9.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a support frame for semiconductor processing procedure special type gas transmission pipeline, includes base (1), its characterized in that, fixedly connected with support column (2) is gone up in base (1), be equipped with cavity (3) in support column (2), sliding connection has vertical threaded rod (4) in cavity (3), threaded rod (4) top fixedly connected with connecting piece (5), connecting piece (5) top is equipped with the fluting, the fluting internal rotation is connected with direction piece (6), the equal fixedly connected with pivot (7) in both ends that direction piece (6) are located the fluting, two pivot (7) all are connected with the fluting lateral wall rotation, one of them pivot (7) run through the fluting lateral wall and extend to the external world and be connected with stop gear (8), solid fixed ring (9) of direction piece (6) top fixedly connected with.

2. The support frame for the special gas conveying pipeline in the semiconductor process as claimed in claim 1, wherein a rotary table (10) is rotatably connected to the top end of the supporting column (2), and the rotary table (10) is in threaded connection with the threaded rod (4).

3. The support frame for the special gas conveying pipeline in the semiconductor process according to claim 1, wherein a sliding groove (11) is formed in a part of one of the rotating shafts (7) which penetrates through the side wall of the groove and extends to the outside, the sliding groove (11) is slidably connected with a sliding rod which has a size matched with that of the sliding groove (11), and two end parts of the sliding rod are fixedly connected with annular limiting discs (12).

4. The support frame for the special gas conveying pipeline in the semiconductor process according to claim 3, wherein an inner ring of the limiting disc (12) is slidably connected with the rotating shaft (7), a plurality of protrusions are arranged on one side, close to the connecting piece (5), of the limiting disc (12), and a plurality of protrusions are also arranged at positions, opposite to the limiting disc (12), of the connecting piece (5).

5. The support frame for the special gas conveying pipeline in the semiconductor process according to claim 1, wherein one end of the rotating shaft (7) penetrating through the side wall of the slot and extending to the outside is fixedly connected with a fixing block (13), and at least two bolts with the same axial direction as that of the rotating shaft (7) are in threaded connection with the fixing block (13).

6. The support frame for the special gas conveying pipeline in the semiconductor process as claimed in claim 5, wherein at least two bolts are symmetrically arranged about the axis of the rotating shaft (7), and the length of each bolt is greater than the shortest distance between the fixed block (13) and the connecting piece (5).