CN211756584U - Semi-automatic spin coater - Google Patents

Abstract

The utility model discloses a semi-automatic spin coater belongs to even mucilage binding and puts technical field, including even gluey machine main part, fix the lower margin of even gluey machine main part bottom four corners position, install at the staving that even gluey machine main part central point put and set up the control panel in even gluey machine main part one side, the top symmetry of staving is fixed with two handles, the concave even gluey groove that is equipped with in top of staving, the tray is installed to the position of even gluey inslot bottom, install in the even gluey machine main part and be used for driving tray pivoted motor, just the motor is controlled by control panel, the position integrated into one piece that even gluey groove lateral wall is close to the bottom has the carrier ring, just receive gluey mechanism has been placed at the top of carrier ring, receive gluey mechanism's mounting height and the mounting height phase-match of tray, receive gluey mechanism. The utility model provides a current silicon chip can cause the extravagant problem of photoresist when the even glue of centrifugation, have simple structure and environmental protection economic characteristics.

Description

Semi-automatic spin coater

Technical Field

The utility model relates to an even mucilage binding technical field especially relates to a semi-automatic even machine of gluing.

Background

Semi-automatic is partly operated manually and by a machine device.

The development and application of the silicon wafer are very wide, the silicon wafer is generally coated with glue, glue homogenizing equipment is adopted to carry out centrifugal glue homogenizing in the glue coating process, the glue homogenizing effect is mainly to flatten the photoresist, and the centrifugal force of high-speed rotation is utilized. And after the glue is homogenized, the glue is treated at high temperature, the water in the glue is evaporated, and then the glue is shaped.

The existing silicon wafer is in the centrifugal glue homogenizing process, photoresist is thrown to a glue homogenizing machine due to centrifugal force, cleaning is difficult, meanwhile, the photoresist is difficult to recover, resource waste is caused, and production cost is increased, so that a semi-automatic glue homogenizing machine needs to be designed urgently.

SUMMERY OF THE UTILITY MODEL

The purpose of the utility model is to solve the shortcoming that exists among the prior art, if: in the process of centrifugal photoresist uniformizing of the existing silicon wafer, photoresist is thrown to a photoresist uniformizing machine due to centrifugal force, so that the photoresist is difficult to clean and difficult to recover, resource waste is caused, and the production cost is increased.

In order to achieve the above purpose, the utility model adopts the following technical scheme: a semi-automatic spin coater comprises a spin coater main body, feet fixed at four corners of the bottom of the spin coater main body, a barrel body arranged at the central position of the spin coater main body and a control panel arranged on one side of the spin coater main body, wherein two handles are symmetrically fixed at the top of the barrel body, a spin coater groove is concavely arranged at the top of the barrel body, a tray is arranged at the bottom in the spin coater main body, a motor used for driving the tray to rotate is arranged in the spin coater main body and is controlled by the control panel, a bearing ring is integrally formed at the position, close to the bottom, of the side wall of the spin coater groove, a glue collecting mechanism is arranged at the top of the bearing ring, the mounting height of the glue collecting mechanism is matched with the mounting height of the tray, and the glue collecting mechanism is annular;

the glue collecting mechanism comprises a bottom block and a collecting tank fixed to the top of the bottom block, the collecting tank is of a C-shaped structure, a slope surface is arranged at the bottom of the collecting tank, a convex ring is installed at the lowest position of the slope surface, an electric heating piece is installed at the top of the bottom block, and the electric heating piece is abutted to the bottom of the collecting tank.

Preferably, the concave power groove that is equipped with in one side that the bottom block is close to even gluey groove, the socket is installed to the power inslot, be equipped with the wiring hole in the bottom block, install the power cord in the wiring hole, the tip of power cord one end links to each other with the electric heat piece, the tip of the power cord other end links to each other with the socket.

Preferably, the bottom of the convex ring is concavely provided with an annular bonding groove A, a magnetic block A is fixedly installed in the bonding groove A, an annular bonding groove B is concavely arranged at the lowest position of the slope, and a magnetic block B for adsorbing the magnetic block A is fixedly installed in the bonding groove B.

Preferably, two hanging rods are symmetrically and fixedly installed at the top of the collecting groove, and a pull ring is fixedly installed at the end part of the top end of each hanging rod.

Preferably, the thickness of the collecting tank is between mm and mm, and the collecting tank is made of aluminum alloy.

Preferably, each hanger rod and each pull ring are integrally formed with the collection tank.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses in, the tray produces centrifugal force when rotating and can throws away the photoresist to between collecting vat and the bulge loop, avoid the photoresist to flow through the bulge loop, realize the collection to the photoresist, made things convenient for whole receipts to take out from the staving through pull ring and jib, after taking out, only need to insert the socket through the power cord, can energize the electric heat piece, heat the collecting vat after the electric heat piece is energized, make the photoresist melt the back, take out the bulge loop from domatic, can scrape down the photoresist on domatic, can use sheetmetal etc. to strike off, be favorable to resources are saved, reduce manufacturing cost, and it is practical convenient;

2. the utility model discloses in, realize the installation of bulge loop at domatic top through opposite magnetism between magnetic path A and the magnetic path B, have simple to operate and dismantle simple characteristics.

Drawings

FIG. 1 is a schematic structural view of a semi-automatic spin coater of the present invention;

fig. 2 is a schematic structural view of a spacing cylinder in a semi-automatic spin coater in a top view, according to the present invention;

fig. 3 is a partial cross-sectional view of the glue collecting mechanism in the semi-automatic glue homogenizing machine provided by the utility model.

In the figure: the glue homogenizing machine comprises a glue homogenizing machine main body 1, 2 feet, 3 barrel bodies, 4 handles, 5 trays, 6 collecting tanks, 7 bearing rings, 8 pull rings, 9 slope surfaces, 10 suspension rods, 11 convex rings, 12 magnetic blocks A, 13 magnetic blocks B, 14 electric heating pieces, 15 bottom blocks, 16 sockets and 17 control panels.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Referring to fig. 1-3, a semi-automatic spin coater comprises a spin coater main body 1, feet 2 fixed at four corners of the bottom of the spin coater main body 1, a barrel body 3 installed at the center of the spin coater main body 1, and a control panel 17 arranged at one side of the spin coater main body 1, wherein two handles 4 are symmetrically fixed at the top of the barrel body 3, a spin coater is concavely arranged at the top of the barrel body 3, a tray 5 is installed at the bottom in the spin coater main body 1, a motor for driving the tray 5 to rotate is installed in the spin coater main body 1 and controlled by the control panel 17, a bearing ring 7 is integrally formed at the position of the side wall of the spin coater close to the bottom, a glue collecting mechanism is placed at the top of the bearing ring 7, the installation height of the glue collecting mechanism is matched with the installation height of the tray 5, and the glue collecting mechanism is;

receive gluey mechanism and include end block 15 and fix the collecting vat 6 at end block 15 top, collecting vat 6 is "C" font structure, and the bottom of collecting vat 6 is provided with domatic 9, and bulge loop 11 is installed to domatic 9 lowest position department, and electric heat piece 14 is installed at end block 15's top, and electric heat piece 14 offsets with the bottom of collecting vat 6.

It should be noted that the height of the top of the collecting tank 6 is higher than that of the tray 5, the height of the bottom of the collecting tank 6 is lower than that of the tray 5, and the centrifugal force changes along with the rotating speed, so that when the centrifugal force is small, the photoresist is thrown to the collecting tank 6 in a parabola shape, the height of the bottom of the collecting tank 6 needs to be lower than that of the tray 5, after the silicon wafer is placed above the tray 5, vacuum adsorption is realized through a vacuum pump in the spin coater main body 1, the motor is controlled to be started through the control panel 17 to drive the tray 5 and the silicon wafer to rotate for centrifugal spin coating, the centrifugal force generated when the tray 5 rotates can throw the photoresist out between the collecting tank 6 and the convex ring 11, and the photoresist is prevented from flowing out through;

wherein, a power supply groove is concavely arranged on one side of the bottom block 15 close to the glue homogenizing groove, a socket 16 is arranged in the power supply groove, a wiring hole is arranged in the bottom block 15, a power cord is arranged in the wiring hole, the end part of one end of the power cord is connected with the electric heating piece 14, and the end part of the other end of the power cord is connected with the socket 16;

after the photoresist homogenizing mechanism is taken out of the photoresist homogenizing groove, the electric heating piece 14 can be electrified only by inserting the power line into the socket 16, and the collecting groove 6 is heated after the electric heating piece 14 is electrified, so that the photoresist can be melted, and the melted photoresist can be collected;

an annular bonding groove A is concavely arranged at the bottom of the convex ring 11, a magnetic block A12 is fixedly arranged in the bonding groove A, an annular bonding groove B is concavely arranged at the lowest position of the slope 9, and a magnetic block B13 for adsorbing a magnetic block A12 is fixedly arranged in the bonding groove B;

it should be noted that the installation of the convex ring 11 on the top of the slope 9 is realized through the opposite magnetism between the magnetic block a12 and the magnetic block B13, and the magnetic suspension device has the characteristics of convenience in installation and simplicity in disassembly;

wherein, two hanging rods 10 are symmetrically and fixedly arranged at the top of the collecting groove 6, and a pull ring 8 is fixedly arranged at the end part of the top end of each hanging rod 10;

it should be noted that the worker can use fingers to buckle the two pull rings 8 to take the collecting tank 6 out of the glue homogenizing tank, so that force application is facilitated;

wherein the thickness of the collecting tank 6 is 2mm-3mm, and the collecting tank 6 is made of aluminum alloy;

it should be noted that the aluminum alloy material not only has strong hardness, but also has good heat conductivity, which is beneficial to rapidly heating the collecting tank 6 and realizing the recovery of the photoresist from the collecting tank 6;

wherein each hanger rod 10 and each pull ring 8 are integrally formed with the collecting tank 6;

it should be noted that, the structural design of integrated into one piece is favorable to guaranteeing to connect stable simultaneously, has also made things convenient for manufacturing process.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (6)

1. A semi-automatic spin coater comprises a spin coater main body (1), feet (2) fixed at the four corners of the bottom of the spin coater main body (1), a barrel body (3) arranged at the central position of the spin coater main body (1) and a control panel (17) arranged on one side of the spin coater main body (1), wherein two handles (4) are symmetrically fixed at the top of the barrel body (3), a spin coating groove is concavely arranged at the top of the barrel body (3), a tray (5) is arranged at the position of the bottom in the spin coating groove, a motor for driving the tray (5) to rotate is arranged in the spin coater main body (1), the motor is controlled by the control panel (17), and the semi-automatic spin coater is characterized in that a bearing ring (7) is integrally formed at the position of the side wall of the spin coating groove close to the bottom, a glue collecting mechanism is placed at the top of the bearing ring (7), the mounting height of the glue collecting mechanism is matched with the mounting height of the tray (5, the glue collecting mechanism is annular;

receive gluey mechanism and include end piece (15) and fix collecting vat (6) at end piece (15) top, collecting vat (6) are "C" font structure, just the bottom of collecting vat (6) is provided with domatic (9), bulge loop (11) are installed to the lowest position department of domatic (9), electric heat piece (14) are installed at the top of end piece (15), electric heat piece (14) offset with the bottom of collecting vat (6).

2. A semi-automatic glue spreader according to claim 1, wherein a power supply groove is concavely arranged on one side of the bottom block (15) close to the glue spreading groove, a socket (16) is arranged in the power supply groove, a wiring hole is arranged in the bottom block (15), a power line is arranged in the wiring hole, the end part of one end of the power line is connected with the electric heating sheet (14), and the end part of the other end of the power line is connected with the socket (16).

3. The semi-automatic glue spreader as claimed in claim 1, wherein the bottom of the convex ring (11) is concavely provided with an annular bonding groove A, a magnetic block A (12) is fixedly installed in the bonding groove A, an annular bonding groove B is concavely provided at the lowest position of the slope surface (9), and a magnetic block B (13) for adsorbing the magnetic block A (12) is fixedly installed in the bonding groove B.

4. A semi-automatic glue spreader according to claim 1, wherein two suspenders (10) are symmetrically and fixedly mounted on the top of the collecting tank (6), and a pull ring (8) is fixedly mounted on the end of the top end of the suspenders (10).

5. A semi-automatic glue spreader according to claim 1, wherein the thickness of the collecting tank (6) is between 2mm and 3mm, and the material of the collecting tank (6) is aluminum alloy.

6. A semi-automatic spin coater according to claim 4, wherein each boom (10), each tab (8) is formed integrally with the collection trough (6).

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