CN211728701U - Processing device - Google Patents
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- CN211728701U CN211728701U CN201921533015.9U CN201921533015U CN211728701U CN 211728701 U CN211728701 U CN 211728701U CN 201921533015 U CN201921533015 U CN 201921533015U CN 211728701 U CN211728701 U CN 211728701U
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Abstract
The utility model provides a can avoid the main shaft to contact with main shaft housing reliably and lead to producing bad processingequipment. Comprising: a plurality of chucks that hold a substrate; and at least 1 processing shaft; the processing axle includes: a processing unit for processing the substrate; a spindle that rotates the processing unit; a spindle motor for driving the spindle, a spindle housing for accommodating the spindle and the spindle motor; and a lifting mechanism for lifting the main shaft shell. The processing device further includes: a cooling fluid passage comprising: a cooling fluid working passage provided in the spindle housing, a cooling fluid supply passage that supplies a cooling fluid to the cooling fluid working passage, and a cooling fluid discharge passage that discharges the cooling fluid from the cooling fluid working passage; and a flow rate detector provided in the cooling fluid passage and detecting a flow rate of the cooling fluid; when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, the rotation of the spindle motor is stopped, and the rotation of the spindle is stopped.
Description
Technical Field
The present invention relates to a processing apparatus for grinding a workpiece such as a substrate (e.g., a wafer).
Background
In a process of manufacturing a semiconductor device, when a wafer having a substantially disk shape as a workpiece is polished by a processing apparatus, a spindle rotates at a high speed, and a spindle housing expands due to heat generation, so that there is a possibility that a defect occurs due to contact between the spindle and the spindle housing.
In reference 1, there is disclosed a structure in which a spindle housing is cooled by cooling water when a spindle is operated, whereby the spindle housing can be cooled while saving the cooling water, and contact between the spindle and the spindle housing can be suppressed.
Documents of the prior art
Patent document
Japanese patent application laid-open No. 2001 + 259961 in patent document 1
SUMMERY OF THE UTILITY MODEL
Problem to be solved by utility model
However, the inventors of the present invention have found that, in reference 1, although the cooling water is supplied to the spindle housing according to the operation condition of the spindle, there is still a problem that the cooling water supplied to the spindle housing is abnormal in supply due to some cause (for example, the flow path is blocked, the cooling water supply source is failed, or the like). In this case, if the spindle continues to rotate, the temperature of the spindle housing increases, and the spindle may contact the spindle housing, resulting in a failure. Such a defect may cause a reduction in machining accuracy and damage to the machining device.
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a machining device capable of reliably avoiding the occurrence of a failure due to contact between a spindle and a spindle case.
Means for solving the problems
The machining device according to claim 1 includes: a plurality of chucks for holding a substrate; and at least 1 processing shaft; the processing shaft includes: a processing unit that processes the substrate; a spindle that rotates the processing unit; a spindle motor that drives the spindle, and a spindle housing that accommodates the spindle and the spindle motor; a lifting mechanism for lifting the main shaft housing; the processing apparatus is characterized by further comprising: a cooling fluid passage comprising: a cooling fluid working passage provided in the spindle housing, a cooling fluid supply passage that supplies cooling fluid to the cooling fluid working passage, and a cooling fluid discharge passage that discharges cooling fluid from the cooling fluid working passage; and a flow rate detector provided in the cooling fluid passage, for detecting a flow rate of the cooling fluid; when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, the rotation of the spindle motor is stopped, and the rotation of the spindle is stopped.
In the processing apparatus according to claim 2, when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, the elevating mechanism is raised to separate the processing unit from the substrate.
In the machining apparatus according to claim 3, a plurality of the machining shafts are formed, and the flow rate detector is provided in the cooling fluid supply passage or the cooling fluid discharge passage of each of the machining shafts.
The machining apparatus according to claim 4 further includes a plurality of machining shafts, a cooler for cooling the cooling fluid, and a supply header pipe communicating with the cooler, wherein the cooling fluid cooled by the cooler is branched at a supply branch portion of the supply header pipe and flows to the cooling fluid supply passage of each of the machining shafts.
The machining device according to claim 5 further includes a recovery header pipe, and the cooling fluid discharged from the cooling fluid discharge passage of each of the machining shafts is collected at a recovery branch portion of the recovery header pipe and returned to the cooler via the recovery header pipe.
With the processing apparatus according to claim 6, the flow rate detector is provided in the supply header pipe or the recovery header pipe.
In the machining device according to claim 7, when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, the rotation of all the spindle motors is stopped, and the rotation of all the spindles is stopped.
In the processing apparatus according to claim 8, when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, all of the elevating mechanisms are raised, and all of the processing units are separated from the substrate.
With the processing apparatus according to claim 9, the processing apparatus further includes a cooling fluid replenishing portion that replenishes the cooling fluid to the cooler.
Effect of the utility model
With the processing apparatus of the present invention, when the supply of the cooling fluid to the spindle housing is abnormal for some reason, the rotation of the spindle motor can be stopped, thereby stopping the rotation of the spindle. This can reliably avoid a temperature rise in the spindle case, and avoid a failure due to contact between the spindle and the spindle case.
Drawings
Fig. 1 is a perspective view showing the structure of the processing apparatus of the present invention.
Fig. 2 is a sectional view showing a processing spindle of the processing apparatus of the present invention.
Fig. 3 is a schematic view showing the flow of the cooling fluid of the processing apparatus of the present invention.
Description of the reference numerals
1. A processing device; 11. a chuck; 12(12A, 12B, 12C) machining a shaft; 13. a processing table; 20. a polishing pad; 21. a spindle housing; 22. a main shaft; 23. a spindle motor; 231. a rotating shaft; 25. a cover portion; 26. a ring portion; 28. a lifting mechanism; 31. a cooling fluid working channel; 32. a cooling fluid supply passage; 33. a cooling fluid discharge passage; 311. an inflow port; 312. an outflow port; 40. a cooler; 41. a supply header pipe; 42. a recovery header pipe; 411. a supply branch part; 421. a recovery branch section; 50. a cooling fluid supplement section; r. a controller; v, a valve; FM. flow detector.
Detailed Description
The drawings are schematic drawings in which emphasis, omission, and adjustment of the ratio are appropriately performed in order to show the present invention, and may be different from the actual shape, positional relationship, and ratio. In fig. 2, the vertical direction is the vertical direction, and the horizontal direction is the horizontal direction.
Example 1
Next, embodiment 1 of the processing apparatus 1 of the present invention will be described with reference to fig. 1 to 3.
The processing apparatus 1 of the present embodiment performs polishing processing on the surface to be polished of the wafer so as to planarize the surface to be polished with high accuracy.
The wafer is a processing target of the processing apparatus 1. In this embodiment, the wafer may be a semiconductor wafer having silicon, sapphire, gallium, or the like as a base material.
Fig. 1 is a perspective view showing the structure of a processing apparatus 1 according to the present invention, and fig. 2 is a sectional view showing a processing spindle 12 of the processing apparatus 1 according to the present invention.
As shown in fig. 1 and 2, the processing apparatus 1 includes a chuck 11 for holding a wafer (not shown); and 3 machining axes 12; each of the machining shafts 12 includes: a polishing pad 20 for polishing a wafer; a spindle 22 that rotates the polishing pad 20; a spindle motor 23 that drives the spindle 22, and a spindle case 21 that houses the spindle 22 and the spindle motor 23; and an elevating mechanism 28 for elevating the spindle housing 21. A cover 25 is formed on the outer periphery of the spindle housing 21, surrounds the spindle housing 21, and is attached to the elevating mechanism 28. An annular ring portion 26 is attached to the lower portion of the cover portion 25, and the ring portion 26 is attached to the elevating mechanism 28 and receives a load from the spindle housing 21.
As shown in fig. 2, the spindle housing 21 is supported by the ring portion 26, and the spindle motor 23 is disposed in the spindle housing 21 with the rotation shaft 231 extending in the vertical direction and fixed to the spindle housing 21. A spindle 22 is fixed to a lower end of the rotary shaft 231, and the spindle 22 is rotated by the rotational driving of a spindle motor 23. The spindle housing 21 has an opening formed at a lower end thereof, a lower end of the spindle 22 protrudes below the spindle housing 21 through the opening, and the polishing pad 20 is attached to a lower end surface of the spindle 22. A gap is formed between the spindle 22 and the spindle housing 21 without contact.
Further, the cooling fluid working passage 31 is formed in the spindle housing 21, and the cooling fluid working passage 31 extends along the wall portion forming the spindle housing 21, specifically, the cooling fluid working passage 31 is formed with an inflow port 311 communicating with the cooling fluid supply passage 32 and an outflow port 312 communicating with the cooling fluid discharge passage 33 on the upper end side of the wall portion (fig. 1 shows only the cooling fluid working passage 31, the cooling fluid supply passage 32, and the inflow port 311 and the outflow port 312 of 1 machining spindle 12, but the other 2 machining spindles 12 have the same configuration), and the cooling fluid working passage 31 extends downward from the inflow port 311 to the vicinity of the main shaft 22, and then, an annular portion is formed around the main shaft 22 on the outer peripheral side of the main shaft 22, and further extends upward from the annular portion to the upper end side and horizontally extends to the outlet port 312. Thus, the cooling fluid (cooling water in the present embodiment) supplied from the cooling fluid supply passage 32 flows through the cooling fluid working passage 31 and is discharged to the cooling fluid discharge passage 33, thereby cooling the spindle housing 21. The cooling fluid working passage 31 forms a cooling fluid passage together with the cooling fluid supply passage 32 and the cooling fluid discharge passage 33. As will be described later, a flow rate detector FM for detecting the flow rate of the cooling fluid is formed in the cooling fluid discharge passage 33.
Fig. 3 is a schematic diagram showing the flow of the cooling fluid of the processing apparatus 1 of the present invention.
In the present embodiment, the cooling fluid passages are formed in all of the 3 machining shafts 12, and for convenience of explanation, fig. 3 shows only a specific structure of the machining shaft 12A, and the machining shafts 12B and 12C have the same structure, and the explanation thereof is omitted.
A cooler 40 for cooling the cooling fluid and a supply header 41 communicating with the cooler 40 are formed outside each of the machining shafts 12, a controller R and a valve V for controlling the flow rate of the cooling fluid are formed in the middle of the supply header 41, the supply header 41 communicates with the cooling fluid supply passages 32 of the machining shafts 12A, 12B, and 12C at a supply branch portion 411, and the cooling fluid cooled by the cooler 40 branches at the supply branch portion 411 of the supply header 41 and flows to the cooling fluid supply passages 32 of the machining shafts 12A, 12B, and 12C.
On the other hand, the cooler 40 is also communicated with a recovery header pipe 42, the recovery header pipe 42 is communicated with the cooling fluid discharge passages 33 of the respective processing shafts 12A, 12B, 12C at the recovery branch portion 421, and the cooling fluid discharged from the cooling fluid discharge passages 33 of the respective processing shafts 12A, 12B, 12C is returned to the cooler 40 via the recovery header pipe 42. The machining apparatus 1 further includes a cooling fluid supply unit 50, and the cooling fluid supply unit 50 communicates with the cooler 40 to supply the cooling fluid to the cooler 40.
The machining device 1 further includes a control unit (not shown) that controls the rotation operation of the spindle motor 23 based on a flow rate signal input from the flow rate detector FM, and stops the rotation of the spindle motor 23 and the rotation of the spindle 22 when the flow rate of the cooling fluid detected by the flow rate detector FM is equal to or less than a predetermined value. Specifically, the flow rate data input from the flow rate detector FM is input to the control unit, and the control unit compares the flow rate data with a predetermined value (2L/min in the present embodiment) stored in advance, and determines whether or not the flow rate data detected from the flow rate detector FM is equal to or less than the predetermined value. When the flow rate data is equal to or less than the predetermined value, a signal for stopping the rotation of the spindle motor 23 is transmitted to a spindle motor control unit (not shown) for controlling the spindle motor 23, and the spindle motor control unit stops the rotation of the spindle motor 23 and stops the rotation of the spindle 22.
In the machining device 1 according to embodiment 1, when the supply of the cooling fluid to the spindle housing 21 is abnormal for some reason, the rotation of the spindle 22 can be stopped by stopping the rotation of the spindle motor 23. This can reliably avoid a temperature rise in the spindle housing 21, avoid contact between the spindle 22 and the spindle housing 21 and the occurrence of defects, and ensure machining accuracy.
Example 2
The processing apparatus of example 2 is different from that of example 1 only in the control unit, and other components are not described.
In embodiment 1, the control unit controls the rotation operation of the spindle motor 23 based on the flow rate signal input from the flow rate detector FM. However, in embodiment 2, the control unit controls the up-and-down operation of the up-and-down mechanism 28 based on the flow rate signal input from the flow rate detector FM, in addition to the rotation operation of the spindle motor 23. When the flow rate of the cooling fluid detected by the flow rate detector FM is equal to or less than a predetermined value (2L/min in the present embodiment), the control unit further sends a signal for raising the lift mechanism 28 to a lift drive control unit (not shown) for controlling the lift mechanism 28, and the lift drive control unit raises the lift mechanism 28 to separate the polishing pad 20 from the substrate.
In the processing apparatus according to embodiment 2, when the supply of the cooling fluid to the spindle housing 21 is abnormal for some reason, the rotation of the spindle 22 can be stopped by stopping the rotation of the spindle motor 23, and the polishing pad 20 can be moved away from the substrate by raising the lifting mechanism 28. This can more reliably avoid a temperature rise in the spindle housing 21, avoid contact between the spindle 22 and the spindle housing 21 and the occurrence of defects, and ensure machining accuracy.
Example 3
The processing apparatus of example 3 is different from that of example 1 only in the position of the flow rate detector FM, and the description of other members is omitted.
In embodiment 3, the flow rate detector FM is provided in the supply header 41, that is, the flow rate detector FM is located between the supply branch 411 and the cooler 40. When the flow rate of the cooling fluid detected by the flow rate detector FM is equal to or less than a predetermined value, the rotation of all the spindle motors 23 is stopped, and the rotation of all the spindles 22 is stopped.
With the processing apparatus of example 3, since the flow rate can be detected by 1 flow rate detector FM, the cost can be reduced.
Other examples
In the above embodiments, the polishing pad 20 is used as the processing portion, but other members such as a grinding wheel may be used as necessary.
In each of the above embodiments, the machining device has 3 machining axes 12, but if necessary, has 1 or more machining axes 12.
In addition, the setting position and the number of the flow detectors FM can be changed according to the needs. For example, the flow rate detector FM may be provided in the cooling fluid supply passage 32 for each of the processing shafts 12, or the flow rate detector FM may be provided in the recovery header pipe 42 for a plurality of processing shafts 12.
In each of the above embodiments, when the flow rate of the cooling fluid detected by the flow rate detector FM is equal to or less than a predetermined value, the polishing pad 20 may be directly separated from the substrate without stopping the rotation of the spindle motor 23.
In each of the above embodiments, after the rotation of the spindle 22 is stopped and the polishing pad 20 is separated from the wafer, the rotation of the chuck 11 may be stopped by stopping the rotation of a chuck rotation driving unit (not shown) that rotates the chuck 11.
In each of the above embodiments, the cooling fluid discharged from the cooling fluid discharge passage 33 is returned to the cooler 40, but may be returned to a collection unit such as a tank or discharged to the outside of the processing apparatus 1.
The above embodiments are merely for illustrating the present invention, and various embodiments are possible in addition to the above embodiments, and those skilled in the art can understand the technical idea of the present invention, and therefore, they are not listed here.
Claims (9)
1. A processing apparatus, comprising: a plurality of chucks for holding a substrate; and at least 1 processing shaft; the processing shaft includes: a processing unit that processes the substrate; a spindle that rotates the processing unit; a spindle motor that drives the spindle, a spindle housing that houses the spindle and the spindle motor; and a lifting mechanism for lifting the spindle housing; the processing apparatus is characterized by further comprising:
a cooling fluid passage comprising: a cooling fluid working passage provided in the spindle housing, a cooling fluid supply passage that supplies cooling fluid to the cooling fluid working passage, and a cooling fluid discharge passage that discharges cooling fluid from the cooling fluid working passage; and
a flow rate detector provided in the cooling fluid passage for detecting a flow rate of the cooling fluid; when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, the rotation of the spindle motor is stopped, and the rotation of the spindle is stopped.
2. The processing apparatus according to claim 1, wherein:
when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, the lifting mechanism is lifted, and the processing unit is moved away from the substrate.
3. The processing apparatus according to claim 1 or 2, wherein:
the plurality of machining shafts are formed, and the flow rate detector is provided in the cooling fluid supply passage or the cooling fluid discharge passage of each machining shaft.
4. The processing apparatus according to claim 1 or 2, wherein:
the machining apparatus further includes a plurality of machining shafts, a cooler for cooling the cooling fluid, and a supply header pipe communicating with the cooler, and the cooling fluid cooled by the cooler is branched at a supply branch portion of the supply header pipe and flows to a cooling fluid supply passage of each of the machining shafts.
5. The processing apparatus according to claim 4, wherein:
the machining apparatus further includes a recovery header pipe, and the cooling fluid discharged from the cooling fluid discharge passage of each of the machining shafts is collected at a recovery branch portion of the recovery header pipe and returned to the cooler via the recovery header pipe.
6. The processing apparatus according to claim 5, wherein:
the flow rate detector is provided in the supply header pipe or the recovery header pipe.
7. The processing apparatus as set forth in claim 6, wherein:
when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, the rotation of all the spindle motors is stopped, and the rotation of all the spindles is stopped.
8. The processing apparatus as set forth in claim 7, wherein:
when the flow rate of the cooling fluid detected by the flow rate detector is equal to or less than a predetermined value, all the elevating mechanisms are raised so that all the processing units are separated from the substrate.
9. The processing apparatus according to claim 4, wherein:
the processing apparatus further has a cooling fluid replenishing portion that replenishes the cooling fluid to the cooler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921533015.9U CN211728701U (en) | 2019-09-16 | 2019-09-16 | Processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921533015.9U CN211728701U (en) | 2019-09-16 | 2019-09-16 | Processing device |
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| CN211728701U true CN211728701U (en) | 2020-10-23 |
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| CN201921533015.9U Active CN211728701U (en) | 2019-09-16 | 2019-09-16 | Processing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112496997A (en) * | 2019-09-16 | 2021-03-16 | 东京毅力科创株式会社 | Processing device |
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2019
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112496997A (en) * | 2019-09-16 | 2021-03-16 | 东京毅力科创株式会社 | Processing device |
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