CN211696267U - Laser ultrasonic detection device based on synthetic aperture focusing imaging - Google Patents
Laser ultrasonic detection device based on synthetic aperture focusing imaging Download PDFInfo
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- CN211696267U CN211696267U CN202020498011.8U CN202020498011U CN211696267U CN 211696267 U CN211696267 U CN 211696267U CN 202020498011 U CN202020498011 U CN 202020498011U CN 211696267 U CN211696267 U CN 211696267U
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Abstract
The embodiment of the utility model discloses a laser ultrasonic detection device based on synthetic aperture focusing imaging, which comprises a pulse laser, a three-dimensional galvanometer, a scanning lens, an interferometer, a laser displacement sensor, a three-dimensional translation table and an industrial personal computer; the three-dimensional translation platform is used for placing a sample, the three-dimensional galvanometer, the interferometer and the laser displacement sensor are arranged right above the three-dimensional translation platform, the scanning lens is arranged at one end, right opposite to the three-dimensional galvanometer, of the three-dimensional translation platform, the industrial personal computer is connected with the pulse laser and the three-dimensional translation platform, and the pulse laser is connected with the three-dimensional galvanometer. The embodiment of the utility model provides a device and method can carry out the SAFT formation of image of internal defect to the sample of arbitrary surface shape.
Description
Technical Field
The embodiment of the utility model provides a laser ultrasonic testing technical field, concretely relates to laser ultrasonic testing device based on synthetic aperture focus formation of image.
Background
Sealing treatment by means of manual melting of lead bars and hand laying is a key link in the installation process of high-voltage cable accessories, and water enters the accessories and the inside of the cable due to sealing failure, so that safe operation of a line is directly threatened. The water inflow of the cable caused by the failure of the lead seal can cause the electric tree or the water tree to grow on rubber and plastic materials such as a shielding layer, an insulating layer and the like in the cable, and the serious risk of the cable or accessories to be punctured by partial discharge exists; meanwhile, the corrosion of the internal metal material can be caused, and the service life is reduced, so that the 30-year life cycle of the circuit is shortened. Therefore, it is important to improve the quality of the lead seal layer. The detection of the internal defects of the lead sealing layer is the key for improving the quality of the lead sealing layer, and because no effective method for nondestructive detection of the defects in the lead material exists at present, the development of a method for detecting the internal defects of the lead sealing layer is urgently needed.
Laser ultrasound is a non-contact, high-precision, non-destructive novel ultrasonic detection technology, combines the advantages of high precision of ultrasonic detection and non-contact of optical detection, and has the advantages of high sensitivity (sub-nanometer level) and high detection bandwidth (GHz). It uses laser pulse to excite ultrasonic wave in the detected workpiece, and uses laser beam to detect propagation of ultrasonic wave so as to obtain defect of workpiece. The technology combines the advantages of high precision of ultrasonic detection and non-contact of optical detection, and has the advantages of high sensitivity (sub-nanometer level) and high detection bandwidth (GHz). Therefore, the laser ultrasonic is very suitable for detecting the internal defects of the lead sealing layer.
However, the lead sealing layer of the cable adopts the manual melting lead strip and the hand laying process, so that the surface of the lead sealing layer is uneven and has different shapes, and the difficulty is brought to the excitation and detection of laser ultrasound. Particularly, in order to improve the lead sealing layer process, the internal defects of the lead sealing layer are required to be imaged, so that an SAFT algorithm is required, and the SAFT algorithm requires the three-dimensional appearance of the lead sealing layer of the cable, and position information of an excitation point and a detection point is required to be obtained. In the prior disclosed laser ultrasonic detection device: there is no apparatus that can perform SAFT detection for an arbitrary curved surface.
SUMMERY OF THE UTILITY MODEL
Therefore, the embodiment of the utility model provides a laser ultrasonic testing device based on synthetic aperture focus formation of image to solve the problem among the prior art.
In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:
in an aspect of an embodiment of the present invention, a laser ultrasonic detection apparatus based on synthetic aperture focused imaging is provided, including a pulse laser, a three-dimensional galvanometer, a scanning lens, an interferometer, a laser displacement sensor, a three-dimensional translation stage, and an industrial personal computer;
the three-dimensional translation platform is used for placing a sample, the three-dimensional galvanometer, the interferometer and the laser displacement sensor are arranged right above the three-dimensional translation platform, the scanning lens is arranged at one end, right opposite to the three-dimensional galvanometer, of the three-dimensional translation platform, the industrial personal computer is connected with the pulse laser and the three-dimensional translation platform, and the pulse laser is connected with the three-dimensional galvanometer.
As a preferable aspect of the present invention, the scanning lens is an F-Theta scanning lens.
As a preferred scheme of the utility model, laser displacement sensor is high accuracy 2D laser displacement sensor.
As a preferred scheme of the utility model, the interferometer include with the controller that the industrial computer is connected and set up in the interferometer probe directly over three-dimensional translation platform.
As a preferred embodiment of the present invention, the pulse laser is a Q-switched pulse laser.
The utility model discloses an embodiment has following advantage:
the embodiment of the utility model provides a device and method can carry out the SAFT formation of image of internal defect to the sample of arbitrary surface shape.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
The structure, ratio, size and the like shown in the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by people familiar with the technology, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention has no technical essential significance, and any structure modification, ratio relationship change or size adjustment should still fall within the scope which can be covered by the technical content disclosed by the present invention without affecting the efficacy and the achievable purpose of the present invention.
Fig. 1 is a schematic structural diagram of a laser ultrasonic detection device provided by an embodiment of the present invention.
In the figure:
1-a pulsed laser; 2-a three-dimensional galvanometer; 3-a scanning lens; 4-a controller; 5-an interferometer probe; 6-laser displacement sensor; 7-sample; 8-a three-dimensional translation stage; 9-industrial personal computer.
Detailed Description
The present invention is described in terms of specific embodiments, and other advantages and benefits of the present invention will become apparent to those skilled in the art from the following disclosure. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1, the utility model provides a laser ultrasonic detection device based on synthetic aperture focusing imaging, which comprises a pulse laser 1, a three-dimensional galvanometer 2, a scanning lens 3, an interferometer, a laser displacement sensor 6, a three-dimensional translation stage 8 and an industrial personal computer 9; the three-dimensional translation stage 8 is used for placing a sample 7, the three-dimensional galvanometer 2, the interferometer and the laser displacement sensor 6 are arranged right above the three-dimensional translation stage 8, the scanning lens 3 is arranged at one end, right opposite to the three-dimensional galvanometer 2, of the three-dimensional translation stage 8, the industrial personal computer 9 is connected with the pulse laser 1 and the three-dimensional translation stage 8, and the pulse laser 1 is connected with the three-dimensional galvanometer 2.
The scanning lens 3 is an F-Theta scanning lens; the laser displacement sensor 6 is a high-precision 2D laser displacement sensor; the interferometer comprises a controller 4 connected with the industrial personal computer 9 and an interferometer probe 5 arranged right above the three-dimensional translation stage 8; the pulse laser is a Q-switched pulse laser.
The maximum energy of the Q-switched pulse laser is 600mJ, and the repetition frequency is 20 Hz.
The working wavelength of the three-dimensional galvanometer 2 is 1064nm, and the scanning angle is +/-20 degrees.
The focal length of the F-Theta scanning lens 3 is 20cm, and the working wavelength is 1064nm.
The measuring range of the high-precision 2D laser displacement sensor 6 is +/-48 mm, and the repetition precision is superior to 5 um.
The sample is a lead-sealed cable, the surface of the lead-sealed cable is irregular, and the lead-sealed cable is treated. The industrial personal computer realizes the functions of control and data acquisition and images the defects of the sample through an SAFT algorithm.
Example 2:
based on the device of embodiment 1, a laser ultrasonic detection method based on synthetic aperture focusing imaging is provided, which comprises the following steps:
step 100, calibrating coordinates of a three-dimensional galvanometer, an interferometer probe and a three-dimensional translation table to obtain a conversion relation of coordinate systems of the three;
200, controlling a three-dimensional translation table to perform one-dimensional scanning on a sample through an industrial personal computer, and obtaining a three-dimensional profile of the surface of the sample by using a high-precision 2D laser displacement sensor;
step 300, converting the three-dimensional profile of the surface of the sample into a coordinate system of a three-dimensional translation table;
step 400, converting a coordinate system where the interferometer probe is located into a coordinate system of a three-dimensional translation table;
500, controlling a three-dimensional translation table to adjust the height of the sample by using the three-dimensional profile of the surface of the sample obtained by measurement, so that the probe of the interferometer can obtain the optimal focus on the surface of the sample;
step 600, controlling a three-dimensional galvanometer to carry out three-dimensional scanning through an industrial personal computer by utilizing a three-dimensional profile of the surface of a sample obtained through measurement, arranging an F-Theta scanning lens below the three-dimensional galvanometer, and acquiring a laser ultrasonic signal to store position information into a hard disk of the industrial personal computer;
700, changing the position of a detection point of the interferometer probe by using the three-dimensional translation stage, and repeating the steps 500 and 600 until the surface of the sample is scanned;
and 800, carrying out SAFT reconstruction on the acquired laser ultrasonic data and the three-dimensional profile of the surface of the sample, and carrying out imaging display on the internal defects of the sample.
Adopt the utility model discloses a device and method can carry out the SAFT formation of image of internal defect to the sample of arbitrary surface shape.
Although the invention has been described in detail with respect to the general description and the specific embodiments, it will be apparent to those skilled in the art that modifications and improvements can be made based on the invention. Therefore, such modifications and improvements are intended to be within the scope of the invention as claimed.
Claims (5)
1. A laser ultrasonic detection device based on synthetic aperture focusing imaging is characterized by comprising a pulse laser (1), a three-dimensional galvanometer (2), a scanning lens (3), an interferometer, a laser displacement sensor (6), a three-dimensional translation table (8) and an industrial personal computer (9);
the three-dimensional translation platform (8) is used for placing a sample (7), the three-dimensional mirror (2) that shakes the interferometer laser displacement sensor (6) set up in directly over three-dimensional translation platform (8), scanning lens (3) set up in three-dimensional mirror (2) that shakes is just right the one end of three-dimensional translation platform (8), industrial computer (9) with pulse laser (1) three-dimensional translation platform (8) all connect, pulse laser (1) with three-dimensional mirror (2) that shakes is connected.
2. The laser ultrasonic detection device based on the synthetic aperture focused imaging according to claim 1, characterized in that the scanning lens (3) is an F-Theta scanning lens.
3. The laser ultrasonic detection device based on the synthetic aperture focused imaging according to claim 1, characterized in that the laser displacement sensor (6) is a high-precision 2D laser displacement sensor.
4. The laser ultrasonic detection device based on the synthetic aperture focused imaging is characterized in that the interferometer comprises a controller (4) connected with the industrial personal computer (9) and an interferometer probe (5) arranged right above the three-dimensional translation stage (8).
5. The laser ultrasonic detection device based on the synthetic aperture focused imaging according to claim 1, wherein the pulse laser is a Q-switched pulse laser.
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| CN202020498011.8U CN211696267U (en) | 2020-04-07 | 2020-04-07 | Laser ultrasonic detection device based on synthetic aperture focusing imaging |
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| CN202020498011.8U CN211696267U (en) | 2020-04-07 | 2020-04-07 | Laser ultrasonic detection device based on synthetic aperture focusing imaging |
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