CN211629036U - 一种等离子体刻蚀机用匀气盘 - Google Patents
一种等离子体刻蚀机用匀气盘 Download PDFInfo
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- CN211629036U CN211629036U CN202020069857.XU CN202020069857U CN211629036U CN 211629036 U CN211629036 U CN 211629036U CN 202020069857 U CN202020069857 U CN 202020069857U CN 211629036 U CN211629036 U CN 211629036U
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Effective date of registration: 20211008 Address after: 214000 Guanshan Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 333-1-801, Jincheng East Road, Xinwu District, Wuxi City, Jiangsu Province, 214000 Patentee before: Wuxi Yimian Microelectronics Co.,Ltd. |
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Address after: 214000 Guanshan Road, Xinwu District, Wuxi City, Jiangsu Province Patentee after: Wuxi Yiwen Microelectronics Technology Co.,Ltd. Address before: 214000 Guanshan Road, Xinwu District, Wuxi City, Jiangsu Province Patentee before: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder |