CN211628006U

CN211628006U - Tool for double-sided development

Info

Publication number: CN211628006U
Application number: CN202020618951.6U
Authority: CN
Inventors: 智云涛; 表军; 韩建栋
Original assignee: Shijiazhuang Haike Electronics Technology Co ltd
Current assignee: Shijiazhuang Haike Electronics Technology Co ltd
Priority date: 2020-04-22
Filing date: 2020-04-22
Publication date: 2020-10-02
Anticipated expiration: 2030-04-22

Abstract

The utility model relates to a frock for two-sided development, comprising a base plate, the bottom plate is the cuboid structure, wherein, four apex angles of bottom plate all set up the backup pad, the backup pad is the echelonment structure, the backup pad includes brace table and spacing platform, the brace table is located the lower floor, spacing platform is located the upper strata. The utility model provides a pair of a frock for two-sided development supports the substrate that needs were handled through the backup pad that sets up on four summits of bottom plate for the position that the middle part need carry out development is in unsettled state, keeps flat in beaker or flat dish, only with less developer, just can realize more ideal two-sided development, and can not rock and cause the back fish tail because of the sheet.

Description

Tool for double-sided development

Technical Field

The utility model belongs to the technical field of the substrate processing, concretely relates to frock for two-sided development.

Background

The aluminum nitride heat sink with gold and tin on both sides needs coating glue on both sides, exposing both sides and developing simultaneously; and (4) double-sided electroplating. The conventional developing method is to place the wafer in a beaker in a side manner and shake the beaker for developing, a large amount of developing solution needs to be poured into the beaker, the substrate needs to be immersed in the liquid surface, or the wafer is flatly placed and transferred through a roller, and the developing solution is sprayed up and down in the transferring process for developing, but the equipment is expensive, the developing solution is wasted, and the comprehensive cost is high.

SUMMERY OF THE UTILITY MODEL

In order to solve the problem, the utility model provides a frock for two-sided development, comprising a base plate, the bottom plate is the cuboid structure, wherein, four apex angles of bottom plate all set up the backup pad, the backup pad is the echelonment structure, the backup pad includes brace table and spacing platform, the brace table is located the lower floor, spacing platform is located the upper strata, the backup pad can support four apex angles of the substrate that need carry out the development processing.

Preferably, the support platform is a support plate with a rectangular cross section.

In any of the above aspects, preferably, the support table has a rectangular cross section.

In any of the above schemes, preferably, the cross section of the limiting table is L-shaped.

In any of the above schemes, preferably, the bottom plate and the support plate are both made of polytetrafluoroethylene, and the bottom plate and the support plate made of polytetrafluoroethylene are not easy to damage the substrate due to the soft texture of the polytetrafluoroethylene.

The utility model has the advantages that: the utility model provides a pair of a frock for two-sided development supports the substrate that needs were handled through the backup pad that sets up on four summits of bottom plate for the position that the middle part need carry out development is in unsettled state, keeps flat in beaker or flat dish, only with less developer, just can realize more ideal two-sided development, and can not rock and cause the back fish tail because of the sheet.

Drawings

FIG. 1 is a top view of a preferred embodiment of a tool for double-sided development according to the present invention;

FIG. 2 is a front view of the embodiment of FIG. 1 of a tool for double-sided development in accordance with the present invention;

fig. 3 is a use view of the embodiment of fig. 1 of a tool for double-sided development according to the present invention.

The figures are labeled as follows: 1-a bottom plate; 2-a support plate; 3-a limit table; 4-supporting the table; 5-the substrate.

Detailed Description

In order to further understand the present invention, the present invention will be described in detail with reference to the following embodiments.

As shown in fig. 1 to 3, the utility model provides a tool for double-sided development, which comprises a bottom plate 1, wherein the bottom plate 1 is of a cuboid structure, wherein, four vertex angles of the bottom plate 1 are all provided with supporting plates 2, the supporting plates 2 can be seen from a top view, the cross section is of a rectangular or square structure, the supporting plates 2 at the four vertex angles are used for supporting a substrate to be developed, the lower end of the substrate is in a suspended state, the upper end surface and the lower end surface of the substrate can be soaked in a developing solution for uniform development, the supporting plates 2 are of a ladder-shaped structure, the supporting plates 2 comprise a supporting table 4 and a limiting table 3, the supporting table 4 is positioned at the lower layer, the limiting table 3 is positioned at the upper layer, the cross section of the supporting table 4 is of a square or a rectangle, the cross section of the limiting table 3 is of an L shape, the supporting plates 2 can support the four vertex angles of, specifically, the substrate is rectangle or square structure, during the installation, is located respectively with the position of four apex angles of substrate 2 four apex angles of backup pad on the brace table 4, through spacing platform 3 can carry on spacingly to the substrate, makes the substrate keep fixed, because there is the difference in height between bottom plate 1 and the brace table 4, consequently, the substrate not with the functional position of brace table 4 contact is in unsettled state, then will the utility model discloses in arranging beaker or flat dish in, pour a small amount of developer into and can develop the upper and lower two-layer of substrate, bottom plate and backup pad are made by the polytetrafluoroethylene material, because the texture of polytetrafluoroethylene material is softer, consequently the bottom plate and the backup pad of polytetrafluoroethylene material are difficult for causing the damage to the substrate.

It will be understood by those skilled in the art that a double-sided developing apparatus of the present invention includes any combination of the above-mentioned embodiments and portions of the present invention and illustrated in the accompanying drawings, which is limited to space and has no description of the various aspects of the present invention for the sake of brevity. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a frock for two-sided development, includes the bottom plate, the bottom plate is the cuboid structure, its characterized in that, four apex angles of bottom plate all set up the backup pad, the backup pad is the echelonment structure, the backup pad includes brace table and spacing platform, the brace table is located the lower floor, spacing platform is located the upper strata.

2. The tool for double-sided development according to claim 1, wherein the support table is a support plate having a rectangular cross section.

3. The tooling for double-sided development according to claim 2, wherein the support table has a rectangular cross section.

4. The tooling for double-sided development according to claim 2, wherein the cross section of the limiting table is L-shaped.

5. The tooling for double-sided development according to claim 1, wherein the bottom plate and the supporting plate are made of polytetrafluoroethylene.