CN211617080U

CN211617080U - Ink jet marking gun

Info

Publication number: CN211617080U
Application number: CN201922397412.4U
Authority: CN
Inventors: 孙军; 潘亮良
Original assignee: Wuxi Xinweiyang Technology Co ltd
Current assignee: Wuxi Xinweiyang Technology Co ltd
Priority date: 2019-12-27
Filing date: 2019-12-27
Publication date: 2020-10-02
Anticipated expiration: 2029-12-27

Abstract

The utility model relates to an inkjet mark rifle uses in wafer detection area, and its technical scheme's main points are: the wafer detection device comprises a detection table, wherein a controller and a gun body are respectively arranged on the detection table, an ink box is arranged on the gun body and is positioned above a wafer, a driving groove is also formed in the gun body, an electromagnet controlled by the controller is arranged at the bottom of the driving groove, a piston rod partially extending out of the driving groove is inserted in the driving groove, a connecting rod is arranged at the end part of the piston rod extending out of the driving groove, a reset spring is further sleeved on the piston rod, and two ends of the reset spring are respectively abutted against the connecting rod and the gun body; when the reset spring is in an initial state, the piston rod and the electromagnet are separated from each other, one end of the connecting rod, which is far away from the piston rod, is provided with an extrusion rod, and the extrusion rod is connected with the ink box. The utility model discloses the technical effect who has is: ink droplets may be sprayed on the surface of defective dies in the wafer based on the test results.

Description

Ink jet marking gun

Technical Field

The utility model belongs to the technical field of wafer detection device's technique and specifically relates to an inkjet mark rifle is related to.

Background

In a semiconductor process, as the size of a wafer increases and the size of a device decreases, a wafer can be divided into thousands of identical or different dies as required. Due to the nature of the process design, fabrication, and materials themselves, the final finished wafer typically contains some defective grains. Therefore, in the back-end process of the semiconductor manufacturing process, a testing machine is usually used to test each die on the wafer to ensure that the electrical characteristics and performance of each die shipped from the factory meet the design specifications. During testing, marking is required if defective grains are found.

Notice number CN102637616A discloses a wafer detecting device, which includes: the wafer detection unit is used for detecting defective crystal grains in the wafer; the ink jet unit is used for spraying ink drops on the surfaces of the defective crystal grains in the wafer according to the test result; the ink drop detection device comprises an ink drop adjusting unit for adjusting the size of the ink drop sprayed by the ink jet unit and an ink drop detection unit for detecting whether the size of the ink drop on the surface of the ink drop adjusting unit meets the specification or not.

The utility model provides an ink jet unit of another kind of structure is arranged in the surface spraying of defect crystalline grain according to the test result and goes up the ink droplet.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing an inkjet mark rifle, its advantage is: ink droplets may be sprayed on the surface of defective dies in the wafer based on the test results.

The above technical purpose of the present invention can be achieved by the following technical solutions: an ink-jet marking gun comprises a detection table, wherein a controller and a gun body are respectively arranged on the detection table, an ink box is arranged on the gun body and is positioned above a wafer, a driving groove is also formed in the gun body, an electromagnet controlled by the controller is arranged at the bottom of the driving groove, a piston rod partially extending out of the driving groove is inserted in the driving groove, a connecting rod is arranged at the end part of the piston rod extending out of the driving groove, a return spring is further sleeved on the piston rod, and two ends of the return spring are respectively abutted against the connecting rod and the gun body; when the reset spring is in an initial state, the piston rod and the electromagnet are separated from each other, and one end of the connecting rod, which is far away from the piston rod, is provided with an extrusion rod which is connected with the ink box.

Through the technical scheme, when the condition that there is the defect crystalline grain in the wafer is detected, the controller can send control signal and make the electromagnet circular telegram electromagnetic for the electro-magnet, at this moment, the piston rod can drive the connecting rod and move to the electromagnet direction under the effect of electromagnet magnetic attraction, reset spring can contract under the pressure of connecting rod, the squeeze bar can move the extrusion ink box to the ink box direction under the drive of connecting rod, the ink box can spout the ink droplet and mark defect department when receiving the extrusion from the squeeze bar, later the electro-magnet can be under the control of controller outage lose magnetism, under the effect of reset spring elastic restoring force, the connecting rod can drive piston rod and squeeze bar and resume to initial position, thereby reached and sprayed the effect of ink droplet according to the test result on the surface of defect crystalline grain in the wafer.

The utility model discloses further set up to: the gun body is further provided with a linkage groove, the connecting rod is provided with a fixing rod matched with the linkage groove, the fixing rod is partially inserted into the linkage groove, the fixing rod is sleeved with a damping spring, and two ends of the damping spring are respectively abutted against the connecting rod and the gun body.

Through the technical scheme, when the connecting rod moves towards the electromagnet direction under the drive of the piston rod, the fixed rod can move along the linkage groove under the drive of the connecting rod, the damping spring can be extruded and contracted by the connecting rod, the damping spring has the effect of damping energy absorption, the shaking amplitude of the connecting rod in the moving process is reduced, so that the extrusion rod can stably extrude the ink box under the drive of the connecting rod, and the overall stability of the ink jet marking gun is improved.

The utility model discloses further set up to: the limiting groove is formed in the inner wall of the driving groove, a limiting block matched with the limiting groove is arranged on the periphery of the piston rod, and the limiting block is connected in the limiting groove in a sliding mode.

Through above-mentioned technical scheme, when the piston rod removed along the drive groove, the stopper can slide along the spacing groove under the drive of piston rod, and the setting of spacing groove and stopper has the effect of carrying on spacingly to the piston rod for the piston rod is difficult to break away from the drive inslot, thereby has strengthened the stability of being connected between piston rod and the rifle body.

The utility model discloses further set up to: an L-shaped protection plate is arranged on the end face, facing the connecting rod, of the gun body, and the connecting rod is located between the protection plate and the gun body; when the return spring is in an initial state, a gap is formed between the connecting rod and the protection plate.

Through above-mentioned technical scheme, the setting of protection shield has the effect of keeping apart the connecting rod with the external world, has reduced the staff carelessly mistake before examining test table and has touched the connecting rod, leads to the possibility that extrusion stem and ink horn were triggered by the mistake.

The utility model discloses further set up to: the utility model discloses a detection table, including the rifle body, the rifle body is equipped with and detects a platform assorted draw-in groove on the rifle body, the rifle body passes through the draw-in groove joint and is detecting the bench, still wear to establish and threaded connection has the part to extend to in the draw-in groove and the tip supports tightly the tight axle that supports on detecting the bench on the rifle body, the fixed cover that is equipped with the fixed block of one end that keeps away from detecting the platform is kept away from to the.

Through above-mentioned technical scheme, the staff accessible rotates the fixed block and drives the tight axle that supports and rotate and make it and examine test table separation, later with the rifle body from examining the mode that the test table was pulled out lift the rifle body off to the staff can be according to different needs with the rifle body fixed to the different positions that examine on the test table, thereby has promoted the flexibility of the rifle body.

The utility model discloses further set up to: the side wall of the clamping groove close to the abutting shaft is provided with an abutting groove, an abutting plate matched with the abutting groove is arranged in the abutting groove, one end, far away from the fixed block, of the abutting shaft is rotatably connected to the abutting plate, and the abutting plate is abutted between the detection table and the abutting shaft.

Through above-mentioned technical scheme, support setting up of tight board and increased the area of contact between the tight axle and the test table to increased the tight axle and examined the frictional force between the test table, reduced in the course of the work the rifle body and resulted in the possibility of the position deviation appearing of spraying ink droplet for examining the test table skew under the effect of external force, promoted the rifle body and examined the fastness of being connected between the test table.

The utility model discloses further set up to: the end face of the abutting plate, which is back to the abutting shaft, is provided with a plurality of anti-skidding grooves, and rubber pads, the parts of which extend out of the anti-skidding grooves, are respectively arranged in the anti-skidding grooves.

Through above-mentioned technical scheme, the setting up of rubber pad has increased to support tight board and has examined the frictional resistance between the test table to the fastness of being connected between the rifle body and the test table has further been strengthened.

The utility model discloses further set up to: the fixed block is evenly equipped with a plurality of anti-skidding beads along the periphery.

Through the technical scheme, the anti-skidding convex edges are arranged, so that the worker is not easy to slip when the fixing block is rotated, and the worker can install or detach the gun body quickly through the mode of rotating the fixing block.

To sum up, the utility model discloses a beneficial technological effect does:

1. the ink-jet marking gun can spray ink drops on the surfaces of defective crystal grains in the wafer according to the test result;

2. the damping spring has the effects of damping and absorbing energy, and reduces the shaking amplitude of the connecting rod in the moving process, so that the overall stability of the ink-jet marking gun is improved;

3. the rifle body can be dismantled and make the staff can be according to different needs with the rifle body fixed to the different positions on examining test table, has promoted the flexibility of the rifle body.

Drawings

Fig. 1 is a schematic view of the overall structure of the present embodiment.

Fig. 2 is a schematic sectional view of the present embodiment for embodying the driving groove.

FIG. 3 is a schematic view of the structure of the ink cartridge in this embodiment

Fig. 4 is an exploded view of the present embodiment for embodying a card slot.

Fig. 5 is a schematic cross-sectional view of the present embodiment for embodying the caulking groove.

Fig. 6 is a schematic structural view of the anti-slip groove embodied in the embodiment.

Reference numerals: 1. a detection table; 2. a controller; 3. a gun body; 4. an ink cartridge; 5. a wafer; 6. a drive slot; 7. an electromagnet; 8. a piston rod; 9. a connecting rod; 10. a return spring; 11. an extrusion stem; 12. a linking groove; 13. fixing the rod; 14. a damping spring; 15. a limiting groove; 16. a limiting block; 17. a protection plate; 18. a card slot; 19. the shaft is abutted; 20. a fixed block; 21. abutting against the groove; 22. a propping plate; 23. an anti-slip groove; 24. a rubber pad; 25. anti-slip ribs; 26. a box body; 27. a needle tube; 28. a rubber block; 29. extruding the block; 30. a one-way valve.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Example (b): an ink-jet marking gun comprises a detection table 1, a controller 2 and a gun body 3 are respectively arranged on the detection table 1, the detection result of a wafer 5 is sent to the controller 2, an ink box 4 is connected on the gun body 3, an ink outlet of the ink box 4 is positioned right above the wafer 5, a driving groove 6 is arranged on the gun body 3, an electromagnet 7 is embedded at the bottom of the driving groove 6, the electromagnet 7 is controlled by the controller 2, when the controller 2 receives a result signal of a defective crystal grain in the wafer 5, a control signal is synchronously sent to the electromagnet 7 to enable the electromagnet 7 to be electrified and magnetized for a certain time and then to be powered off and demagnetized, a piston rod 8 partially extending out of the driving groove 6 is inserted in the driving groove 6, a connecting rod 9 is vertically connected on the end surface of the piston rod 8 positioned outside the driving groove 6, a return spring 10 is fixedly sleeved on the piston rod 8, and the return spring 10 is pressed between the connecting rod 9 and the gun body 3, the length of the piston rod 8 is set to: when the return spring 10 is in an initial state, the piston rod 8 and the electromagnet 7 are separated from each other, and when the piston rod 8 and the electromagnet 7 are in contact with each other, the return spring 10 is in a contracted state. Therefore, when the electromagnet 7 is electrified and magnetized, the piston rod 8 is adsorbed on the electromagnet 7, the connecting rod 9 is driven by the piston rod 8 to move towards the electromagnet 7 so that the return spring 10 is stressed and contracted, and after the electromagnet 7 is powered off and demagnetized, the piston rod 8 and the connecting rod 9 can return to the initial position under the action of the elastic restoring force of the return spring 10.

As shown in fig. 2, the inner wall of the driving groove 6 is provided with two limiting grooves 15, the two limiting grooves 15 are parallel to the piston rod 8, two limiting blocks 16 matched with the limiting grooves 15 are fixedly arranged on the piston rod 8 along the periphery, the limiting blocks 16 are connected in the limiting grooves 15 in a sliding manner, and when the reset spring 10 is in an initial state, the distance between the limiting blocks 16 and the bottom surfaces of the limiting grooves 15 is larger than the distance between the piston rod 8 and the electromagnet 7. Therefore, when the piston rod 8 moves up and down along the driving groove 6 under the action of the electromagnet 7 and the return spring 10, the limiting block 16 can slide up and down along the limiting groove 15 under the driving of the piston rod 8; simultaneously, stopper 16 is difficult to break away from in the spacing groove 15 for piston rod 8 is difficult to break away from in the drive groove 6, thereby has reached and has carried out spacing effect to piston rod 8, has reduced piston rod 8 and has broken away from the possibility that drops from in the drive groove 6, has strengthened the fastness of connection between piston rod 8 and the rifle body 3.

As shown in fig. 1 and 2, a pressing lever 11 for pressing the ink cartridge 4 is fixedly connected to an end surface of the link 9 facing the ink cartridge 4, and an end of the pressing lever 11 remote from the link 9 is connected to the ink cartridge 4. Therefore, when the connecting rod 9 moves towards the electromagnet 7 under the driving of the piston rod 8, the extrusion rod 11 moves towards the ink box 4 under the driving of the connecting rod 9 to extrude the ink box 4, and when the ink box 4 is extruded by the extrusion rod 11, ink drops are ejected to mark the defect position of the wafer 5, so that the effect of spraying the ink drops on the surface of the defect crystal grain in the wafer 5 according to the detection result is achieved.

As shown in fig. 2 and 3, the ink cartridge 4 is configured to: contain cylindrical box body 26, the one end intercommunication of box body 26 has needle tubing 27, it has the rubber block 28 that is used for sealing box body 26 to bond along the periphery on the inner wall of the one end that box body 26 kept away from needle tubing 27, the one end that rubber block 28 kept away from needle tubing 27 has set firmly extrusion block 29, extrusion rod 11 keeps away from the fixed grafting of one end of connecting rod 9 in extrusion block 29, the china ink is located the box body 26 between rubber block 28 and the needle tubing 27, still the intercommunication has check valve 30 on the box body 26, outside air accessible check valve 30 enters into in the box body 26, check valve 30 is located between 24 blocks of rubber pads and the needle tubing 27. Therefore, when the extrusion rod 11 is driven by the connecting rod 9 to move towards the ink box 4, the extrusion block 29 can move the extrusion rubber block 28 under the pressure of the extrusion rod 11, and the rubber block 28 can be recessed into the box body 26 under the pressure of the extrusion block 29, so that part of ink in the box body 26 can be extruded out of the ink box 4 along the needle tube 27, and the effect of marking the defect part by ejecting ink drops is achieved; after the marking of the extrusion rod 11 drives the extrusion block 29 and the rubber block 28 to return to the original positions, the inside of the box body 26 is in a negative pressure state, and outside air enters the box body 26 through the one-way valve 30, so that the pressure inside the box body 26 is restored to be balanced, and when the extrusion rod 11 is extruded next time, ink in the ink box 4 can be extruded again to mark the defect.

As shown in fig. 1 and 2, the gun body 3 is further provided with a linking groove 12, the linking groove 12 is located between the driving groove 6 and the ink cartridge 4, a fixing rod 13 parallel to the piston rod 8 is fixedly arranged on the end surface of the connecting rod 9 facing the gun body 3, and the fixing rod 13 is set as: piston rod 8 reciprocates along drive groove 6 under the effect of electro-magnet 7 and reset spring 10 when, dead lever 13 can reciprocate along interlock groove 12 under the drive of connecting rod 9, the cover is equipped with damping spring 14 on dead lever 13, damping spring 14's both ends are supported tightly respectively on connecting rod 9 and rifle body 3, damping spring 14's setting has the effect that the shock attenuation was inhaled the ability, make connecting rod 9 difficult violent shake when removing under the drive of piston rod 8, so that squeeze bar 11 can carry out stable extrusion to ink horn 4, the stability of rifle body 3 has been promoted, connecting rod 9 has been reduced and has moved the possibility that violent shake influence ink horn 4 to wafer 5 mark effect in-process.

As shown in fig. 1 and 2, an L-shaped protection plate 17 is fixedly arranged on the end surface of the gun body 3 facing the connecting rod 9, one end of the protection plate 17 far away from the gun body 3 is parallel to the connecting rod 9, and the protection plate 17 is configured as follows: when the return spring 10 is in the initial state, the connecting rod 9 is located entirely between the protection plate 17 and the gun body 3 with a gap from the protection plate 17. Therefore, protection shield 17 has the effect of protection connecting rod 9 for the staff is difficult for direct touch to connecting rod 9, has reduced the staff and has touched connecting rod 9 carelessly and make connecting rod 9 move down and drive extrusion rod 11 extrusion ink horn 4, leads to ink horn 4 to be triggered the possibility that influences ink horn 4 marking effect by the mistake.

As shown in fig. 4 and 5, a clamping groove 18 with a width matched with the detection platform 1 is formed in the end face of the gun body 3 facing the detection platform 1, the gun body 3 extends from two ends of the clamping groove 18 respectively, the gun body 3 is clamped on the detection platform 1 through the clamping groove 18, a circular tightening groove 21 is formed in the side wall of the clamping groove 18 above the detection platform 1 along the vertical direction, a circular tightening plate 22 matched with the tightening groove 21 is placed in the tightening groove 21, the depth of the tightening groove 21 is larger than the thickness of the tightening plate 22, a tightening shaft 19 communicated with the tightening groove 21 penetrates through and is in threaded connection with the gun body 3 above the tightening groove 21, and the end of the tightening shaft 19 is rotatably connected to the tightening plate 22.

As shown in fig. 5 and 6, a cylindrical fixing block 20 is fixedly sleeved at one end of the tightening shaft 19 far away from the tightening shaft 19, a plurality of anti-slip ribs 25 are uniformly arranged on the fixing block 20 along the periphery, the anti-slip ribs 25 are arranged so that a worker can rotate the fixing block 20 to drive the tightening shaft 19 to rotate, and the gun body 3 is fixed on the detection table 1 in a manner that the tightening plate 22 is tightened on the detection table 1. Therefore, the worker can rotate the fixing block 20 to drive the abutting shaft 19 and the abutting plate 22 to move upwards, so that the abutting plate 22 is separated from the detection table 1, and then the gun body 3 is pulled out of the detection table 1, so that the worker can fix the gun body 3 to different positions on the detection table 1 as required, and the ink box 4 on the gun body 3 can be aligned with different positions on the wafer 5 (refer to fig. 1), so that the flexibility of the gun body 3 is improved.

As shown in fig. 5 and 6, a plurality of arc-shaped anti-slip grooves 23 with different lengths are uniformly formed in the end surface of the abutting plate 22 away from the abutting shaft 19, the abutting plate 22 extends from both ends of the anti-slip groove 23, cylindrical rubber pads 24 which have the same length as the anti-slip groove 23 and partially extend out of the anti-slip groove 23 are respectively bonded in the plurality of anti-slip grooves 23, and the plurality of rubber pads 24 are abutted between the abutting plate 22 and the detection platform 1. The arrangement of the rubber pads 24 enables the gun body 3 to be difficult to move relative to the detection platform 1, the firmness of connection between the gun body 3 and the detection platform 1 is enhanced, and therefore the ink box 4 on the gun body 3 can accurately mark the defects on the wafer 5.

The implementation principle of the embodiment is as follows: when receiving a result signal that a defective crystal grain exists in the wafer 5, the controller 2 synchronously sends a control signal to the electromagnet 7 to enable the electromagnet 7 to be powered on and magnetized for a certain time and then to be powered off and demagnetized, when the electromagnet 7 is magnetized, the piston rod 8 is adsorbed to the electromagnet 7, the return spring 10 is squeezed and contracted by the connecting rod 9, the squeezing rod 11 is driven by the connecting rod 9 to move towards the ink box 4, the squeezing block 29 is driven by the squeezing rod 11 to squeeze the rubber block 28, ink in the ink box 4 is squeezed out from the needle tube 27, and the defective part of the wafer 5 is marked; after the electromagnet 7 is powered off, the piston rod 8, the connecting rod 9 and the extrusion rod 11 are restored to the initial positions under the action of the elastic restoring force of the return spring 10, so that the defect positions of the wafer 5 can be marked again.

The embodiment of this specific implementation mode is the preferred embodiment of the present invention, not limit according to this the utility model discloses a protection scope, so: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.

Claims

1. An ink jet marking gun, characterized by: the wafer detection device comprises a detection table (1), wherein a controller (2) and a gun body (3) are arranged on the detection table (1) respectively, an ink box (4) is arranged on the gun body (3), the ink box (4) is positioned above a wafer (5), a driving groove (6) is further formed in the gun body (3), an electromagnet (7) controlled by the controller (2) is arranged at the bottom of the driving groove (6), a piston rod (8) partially extending out of the driving groove (6) is inserted in the driving groove (6), a connecting rod (9) is arranged at the end part of the piston rod (8) extending out of the driving groove (6), a reset spring (10) is further sleeved on the piston rod (8), and two ends of the reset spring (10) are abutted against the connecting rod (9) and the gun body (3) respectively; when the reset spring (10) is in an initial state, the piston rod (8) and the electromagnet (7) are separated from each other, an extrusion rod (11) is arranged at one end, far away from the piston rod (8), of the connecting rod (9), and the extrusion rod (11) is connected with the ink box (4).

2. The inkjet marking gun of claim 1, wherein: the gun body (3) is further provided with a linkage groove (12), a fixing rod (13) matched with the linkage groove (12) is arranged on the connecting rod (9), the fixing rod (13) is partially inserted into the linkage groove (12), a damping spring (14) is sleeved on the fixing rod (13), and two ends of the damping spring (14) are respectively abutted against the connecting rod (9) and the gun body (3).

3. The inkjet marking gun of claim 1, wherein: the limiting groove (15) is formed in the inner wall of the driving groove (6), a limiting block (16) matched with the limiting groove (15) is arranged on the periphery of the piston rod (8), and the limiting block (16) is connected in the limiting groove (15) in a sliding mode.

4. The inkjet marking gun of claim 1, wherein: an L-shaped protection plate (17) is arranged on the end face, facing the connecting rod (9), of the gun body (3), and the connecting rod (9) is located between the protection plate (17) and the gun body (3); when the return spring (10) is in an initial state, a gap is formed between the connecting rod (9) and the protection plate (17).

5. The inkjet marking gun of claim 1, wherein: offer on the rifle body (3) with examine test table (1) assorted draw-in groove (18), the rifle body (3) is passed through draw-in groove (18) joint and is examining test table (1), still wear to establish and threaded connection has partly to extend to in draw-in groove (18) and the tip supports tight supporting shaft (19) on examining test table (1) on the rifle body (3), the fixed cover of one end of keeping away from test table (1) of supporting shaft (19) is equipped with fixed block (20).

6. The inkjet marking gun of claim 5, wherein: the side wall of the clamping groove (18) close to the abutting shaft (19) is provided with an abutting groove (21), an abutting plate (22) matched with the abutting groove (21) is arranged in the abutting groove (21), one end, far away from the fixed block (20), of the abutting shaft (19) is rotatably connected to the abutting plate (22), and the abutting plate (22) is abutted between the detection platform (1) and the abutting shaft (19).

7. The inkjet marking gun of claim 6, wherein: the end face, deviating from the abutting shaft (19), of the abutting plate (22) is provided with a plurality of anti-skidding grooves (23), and rubber pads (24) partially extending out of the anti-skidding grooves (23) are arranged in the anti-skidding grooves (23) respectively.

8. The inkjet marking gun of claim 5, wherein: the fixed block (20) is uniformly provided with a plurality of anti-skidding convex edges (25) along the periphery.