CN211613612U - Automatic acid cleaning machine for quartz wafer - Google Patents

Automatic acid cleaning machine for quartz wafer Download PDF

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Publication number
CN211613612U
CN211613612U CN201922208751.3U CN201922208751U CN211613612U CN 211613612 U CN211613612 U CN 211613612U CN 201922208751 U CN201922208751 U CN 201922208751U CN 211613612 U CN211613612 U CN 211613612U
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China
Prior art keywords
pickling
basket
clean water
washing basket
board
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CN201922208751.3U
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Chinese (zh)
Inventor
刘兴波
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Zhuhai Dongjin Quartz Technology Co ltd
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Zhuhai Dongjin Quartz Technology Co ltd
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Abstract

The utility model discloses an automatic pickling machine for quartz wafers, which aims to provide an automatic pickling machine for quartz wafers with convenient use and high production efficiency. The utility model discloses a board, be provided with pickling bath, clean water basin and washing basket jacking module on the board, the pickling bath reaches all the cooperation is provided with the washing basket on the clean water basin, washing basket jacking module with it cooperatees to wash the basket. The utility model discloses be applied to the technical field of pickling machine.

Description

Automatic acid cleaning machine for quartz wafer
Technical Field
The utility model relates to a pickling machine, in particular to an automatic pickling machine for quartz wafers.
Background
The quartz wafer etching machine is used for etching wafers, when the quartz wafer etching machine is used, a wafer is placed in a wafer basket and then placed in an acid washing tank, the wafer basket is shaken to etch the wafers, the wafer basket is placed in a cleaning tank after etching is finished, and the wafer basket is shaken to be cleaned. The traditional technology is that the wafer basket is held by hands and is manually shaken for cleaning, and the labor intensity of workers is high and the production efficiency is low by using the method. Therefore, there is a need to develop an automatic acid cleaning machine for quartz wafers with convenient use and high production efficiency.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem of overcoming the defects of the prior art and providing an automatic quartz wafer pickling machine with convenient use and high production efficiency.
The utility model adopts the technical proposal that: the utility model discloses a board, be provided with pickling bath, clean water basin and washing basket jacking module on the board, the pickling bath reaches all the cooperation is provided with the washing basket on the clean water basin, washing basket jacking module with it cooperatees to wash the basket.
Furthermore, heating rods are arranged in the pickling tank and the clean water tank.
Further, it includes double-end output motor, two drive rod subassemblies, a plurality of lifting rod and a plurality of linear bearing to wash basket jacking module, a plurality of linear bearing evenly sets up on the side of board, a plurality of the upper end fixed fit of lifting rod is in on the washing basket, the lower extreme passes a plurality of respectively linear bearing after-fixing is two on the drive rod subassembly, all cooperate on two output of double-end output motor to be provided with the cam, two the drive rod subassembly respectively with two the cam cooperatees.
The utility model has the advantages that: because the utility model discloses a board, be provided with descaling bath, clean water basin and washing basket jacking module on the board, the descaling bath reaches all the cooperation is provided with the washing basket on the clean water basin, washing basket jacking module with the washing basket cooperatees, has the condition that production efficiency is low for traditional technique the utility model discloses in the implementation, during the use, place quartz wafer on the carrier, and place the carrier on the descaling bath on the washing basket, washing basket jacking module jacking the washing basket, and make washing basket up-and-down cyclic motion makes washing basket constantly sways and carry out the pickling to quartz wafer, and after the pickling is accomplished the washing basket is in the state by the jacking, further with the manual removal of carrier in the clean water basin, accomplish the washing to quartz wafer with the clearance, the washing basket the descaling bath, The clean water basin reaches the setting of wasing basket jacking module makes the utility model has the advantages of convenient to use and production efficiency are high, so, the utility model has the advantages of convenient to use and production efficiency are high.
Drawings
Fig. 1 is a schematic plan view of the present invention;
fig. 2 is a schematic plan view of another view angle of the present invention.
Detailed Description
As shown in fig. 1 to 2, in this embodiment, the utility model discloses a board 1, be provided with pickling bath 2, clean water basin 3 and washing basket jacking module 4 on the board 1, pickling bath 2 reaches all the cooperation is provided with washing basket 5 on the clean water basin 3, washing basket jacking module 4 with washing basket 5 cooperatees. The two cleaning baskets 5 are fixedly matched with each other. There is the condition that production efficiency is low for the conventional art the utility model discloses in the implementation, during the use, place quartz wafer on the carrier, and place the carrier pickle 2 on the washing basket 5, washing basket jacking module 4 jacking washing basket 5, and make washing basket 5 upper and lower cyclic motion makes washing basket 5 constantly shakes and drags and carries out the pickling to quartz wafer, and the pickling is accomplished the back washing basket 5 is in by the state of jacking, further arrives carrier manual movement in the clean water basin 3, accomplishes the washing to quartz wafer with the clearance, washing basket 5 the pickle 2 clean water basin 3 reaches washing basket jacking module 4's setting makes the utility model has the advantages of convenient to use and production efficiency are high.
In this embodiment, the heating rods 7 are provided in both the pickling tank 2 and the clean water tank 3. When the temperatures of the pickling tank 2 and the clean water tank 3 are low, the heating rod 7 can be used for heating.
In this embodiment, washing basket jacking module 4 includes double-end output motor 8, two transfer line subassemblies 9, a plurality of jacking rod 10 and a plurality of linear bearing 11, a plurality of linear bearing 11 evenly sets up on the side of board 1, a plurality of the upper end fixed fit of jacking rod 10 is in on the washing basket 5, the lower extreme passes a plurality of linear bearing 11 after-fixing is two on the transfer line subassembly 9, all cooperate on two output of double-end output motor 8 to be provided with cam 12, two transfer line subassembly 9 respectively with two cam 12 cooperatees.
While the embodiments of the present invention have been described in terms of practical embodiments, they are not intended to limit the scope of the invention, and modifications of the embodiments and combinations with other embodiments will be apparent to those skilled in the art in light of the present description.

Claims (3)

1. An automatic acid cleaning machine for quartz wafers is characterized in that: it includes board (1), be provided with pickling bath (2), clean water basin (3) and wash basket jacking module (4) on board (1), pickling bath (2) reach all the cooperation is provided with on clean water basin (3) and washes basket (5), wash basket jacking module (4) with it cooperatees to wash basket (5).
2. The automatic quartz wafer pickling machine of claim 1, wherein: heating rods (7) are arranged in the pickling tank (2) and the clean water tank (3).
3. The automatic quartz wafer pickling machine of claim 1, wherein: wash basket jacking module (4) and include double-end output motor (8), two drive rod subassembly (9), a plurality of lifting rod (10) and a plurality of linear bearing (11), a plurality of linear bearing (11) evenly set up on the side of board (1), a plurality of the upper end fixed coordination of lifting rod (10) is in on washing basket (5), the lower extreme passes a plurality of respectively linear bearing (11) after-fixing is two on drive rod subassembly (9), all cooperate on two output of double-end output motor (8) and be provided with cam (12), two drive rod subassembly (9) respectively with two cam (12) cooperate.
CN201922208751.3U 2019-12-11 2019-12-11 Automatic acid cleaning machine for quartz wafer Active CN211613612U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201922208751.3U CN211613612U (en) 2019-12-11 2019-12-11 Automatic acid cleaning machine for quartz wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922208751.3U CN211613612U (en) 2019-12-11 2019-12-11 Automatic acid cleaning machine for quartz wafer

Publications (1)

Publication Number Publication Date
CN211613612U true CN211613612U (en) 2020-10-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201922208751.3U Active CN211613612U (en) 2019-12-11 2019-12-11 Automatic acid cleaning machine for quartz wafer

Country Status (1)

Country Link
CN (1) CN211613612U (en)

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