CN211595786U - Base member mounting fixture for magnetron sputtering coating machine - Google Patents
Base member mounting fixture for magnetron sputtering coating machine Download PDFInfo
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- CN211595786U CN211595786U CN201922426272.9U CN201922426272U CN211595786U CN 211595786 U CN211595786 U CN 211595786U CN 201922426272 U CN201922426272 U CN 201922426272U CN 211595786 U CN211595786 U CN 211595786U
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Abstract
The utility model discloses a base member mounting fixture for magnetron sputtering coating machine. The substrate fixing clamp comprises a square bottom plate and a fixing piece, wherein the fixing piece comprises a pressing sheet structure and a positioning rod structure, the pressing sheet structure comprises four pressing sheets, and the four pressing sheets are respectively arranged at the four corners of the surface side of the bottom plate; the positioning rod structure comprises four positioning rods which are respectively arranged at the four corners of the bottom surface side of the bottom plate; each positioning rod is provided with an inner rod, a spring rod and an outer rod, the inner rod is provided with an upper half part and a lower half part, and the spring rod is arranged between the two parts; the inner rod, the spring rod and the outer rod are coaxial in the length direction; the lower end of the inner rod is embedded into the upper end of the outer rod, and the position of the inner rod relative to the outer rod along the axial direction is adjustable; the upper end of the inner rod is fixedly connected with the bottom plate through a screw; and positioning nuts are respectively arranged on the upper half part of the inner rod and the lower part of the outer rod. The substrate fixing clamp can meet the fixation of substrates of different specifications, and ensures that the processing state of the substrates is stable in the film coating process.
Description
Technical Field
The utility model relates to a base member mounting fixture for magnetron sputtering coating machine belongs to magnetron sputtering device technical field.
Background
With the development of economy, the traditional structural materials are not enough to meet the requirements of industrial production, and the research on functional materials becomes a long-lasting hot topic. In order to improve the use value of the material and meet the functional requirements of different productions, on one hand, special chemical elements are added in the traditional structural material smelting process to increase the performance; on the other hand, the functional film is prepared on the structural material serving as the substrate, so that the functions of the material are diversified on the premise of not damaging the structural performance of the substrate. As a coating method, magnetron sputtering is adopted, and the preparation process is simple, so that the obtained film has the advantages of good binding force with a substrate, uniform and compact film layer, controllable film thickness and the like, so that the application of the film in production is more and more extensive, and the requirements on a clamp for fixing the substrate are higher and higher in order to meet the requirements of workpieces with different dimensions and specifications.
The prior base sample fixing clamp for the magnetron sputtering coating machine can only meet the coating operation of workpieces with one shape and specification, such as sheets, columns or pipes, and the like according to the difference of the structural design of the magnetron sputtering chamber, and has the advantages of single structure, small application range and larger production limitation, thereby leading to lower utilization rate of equipment.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a not enough to prior art, the utility model aims at providing a base member mounting fixture for magnetron sputtering coating machine, this base member mounting fixture easy operation, performance is good, and does not destroy the performance of base member self at the coating film in-process.
In order to achieve the purpose, the utility model adopts the following technical proposal:
a basal body fixing clamp for a magnetron sputtering coating machine comprises a square bottom plate and a fixing piece, wherein the fixing piece comprises a tabletting structure and a positioning rod structure,
the pressing sheet structure comprises four pressing sheets which are respectively arranged at the positions of four corners on the surface side of the bottom plate, and the sheet-shaped substrate is fixed through the four pressing sheets;
the positioning rod structure comprises four positioning rods which are respectively arranged at the four corners of the bottom surface side of the bottom plate; each positioning rod is provided with an inner rod, a spring rod and an outer rod, the inner rod is provided with an upper half part and a lower half part, and the spring rod is arranged between the two parts; the inner rod, the spring rod and the outer rod are coaxial in the length direction; the lower end of the inner rod is embedded into the upper end of the outer rod, and the position of the inner rod relative to the outer rod along the axial direction is adjustable; the upper end of the inner rod is fixedly connected with the bottom plate through a screw; positioning nuts are respectively arranged on the upper half part of the inner rod and the lower part of the outer rod, and the columnar matrix is fixed through eight positioning nuts arranged on the positioning rods.
Optionally, the outer rod is in a hollow column shape, and a plurality of round holes are formed in the side wall of the outer rod at intervals along the axial direction; the inner rod is provided with a spring buckle near the lower end thereof, and the relative position between the inner rod and the outer rod is adjusted through the matching of the spring buckle and the round hole, so that the overall length of the positioning rod is adjusted.
Optionally, the upper half part of the inner rod is a solid column, and a screw hole is formed in the center of the upper end of the solid column.
Optionally, the spring rod is cylindrical, and the upper end and the lower end of the spring rod are embedded into the upper half portion and the lower half portion of the inner rod respectively in a welding mode.
Optionally, the base plate is square in shape with rounded corners.
Optionally, the inner rod and the outer rod are polygonal, and the part of the inner rod connected with the outer rod is hollow column-shaped.
The beneficial effects of the utility model reside in that:
the utility model discloses only be used for slice base member sample mounting fixture to improve at present, make it satisfy not unidimensional or shape specification base member, like the coating film operation of column or strip base member, set up set nut through upper and lower end at four locating levers and fix the base member sample, avoid it to appear rocking, slope, inversion at the coating film process phenomenons. The length of the positioning rod is adjusted by arranging a spring fastener at the lower end of the inner rod and matching with different round holes at the upper end of the outer rod; the existence of the spring rod can adjust the radial size of the clamp according to the size or shape specification of the substrate sample, thereby meeting the coating operation of substrates with different specifications, and having simple operation, convenient use and easy cleaning and maintenance.
Drawings
Fig. 1 is a schematic structural view of the base fixing clamp of the present invention.
Fig. 2 is the schematic structural diagram of the positioning rod in the base body fixing clamp of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. But are not meant to limit the scope of the invention.
As shown in fig. 1, as a specific embodiment of the present invention, the substrate fixing clamp for a magnetron sputtering coating machine includes a bottom plate 1 and a fixing member, and the fixing member has two structures, which are a pressing sheet 21 and a positioning rod 22. The fixing piece can be selected according to different shapes, sizes and specifications of the base body. The bottom plate 1 is a round corner square shape, the width of the bottom plate 1 is 100mm, and a circle with the diameter of phi 95mm is embedded in the bottom plate 1. Four corners of the surface side of the bottom plate 1 are respectively provided with a screw hole 9 with the diameter of phi 3 and four sample pressing sheets 21 matched with the screw hole. The sample presser 21 is fixed to the base plate 1 by screws.
As shown in fig. 2, each positioning rod 22 is composed of an inner rod 3, a spring rod 4, and an outer rod 5, and the inner rod 3, the spring rod 4, and the outer rod 5 are made of cemented carbide. The spring rod 4 is arranged between the upper half part and the lower half part of the inner rod 3, and the inner rod, the spring rod and the outer rod are coaxial in the length direction. The inner rod 3 is square quadrangular, the width of the square on the bottom surface of the inner rod 3 is 4mm, the wall thickness is 0.5mm, the height is 40mm, the upper end 10mm is solid column, a screw hole with phi 3 is arranged in the middle of the upper end of the solid column, and the positioning rod 22 is connected with the bottom plate 1 through the screw hole and the screw on the bottom plate 1. A cylindrical spring buckle 7 is arranged at a position 5mm away from the lower end of the inner rod, and the outer diameter of the spring buckle 7 is phi 2. The spring rod 4 is cylindric, and the external diameter is 4mm, and 3 middle parts in pole are gone up through welded connected mode embedding to the upper and lower end of spring rod 4, and the height of spring rod 4 is 10 mm. The outer rod 5 is in a hollow quadrangular prism shape, the size of the prism on the inner surface of the outer rod is 0.1mm larger than the width of the inner rod, the width of the prism on the outer surface of the outer rod is 6mm, the gap between the inner surface and the outer surface is 1mm, and the wall thickness is the same as that of the inner rod and is 0.5 mm. The height of the outer rod 5 is 20mm, and from 1mm of the upper end of the outer side of the outer rod 5, a circular hole 6 of phi 2 is arranged downwards at intervals of 2mm, and 3 circular holes 6 are formed. Through the cooperation of the spring fastener 7 of interior pole lower extreme and different round holes 6, can adjust the relative position between interior pole and the outer pole, also be exactly the length in the embedding outer pole of pole in the regulation to can adjust the whole length of locating lever.
A screw hole with a diameter of phi 3 is respectively arranged on the solid column at the upper half part of each inner rod 3, and a positioning nut 8 is arranged in the screw hole. The range of the lower end of each outer rod 5 being 15-20 mm is a solid prism, a screw hole with a diameter of phi 3 is arranged at the position of 18mm, and a positioning nut 8 is arranged in the screw hole. The eight positioning nuts 8 respectively arranged on the inner rod and the outer rod support the columnar and strip-shaped base bodies to fix the base bodies.
The utility model discloses an among the base member mounting fixture, the radial dimension of anchor clamps can be adjusted according to size or the shape and specification of base member sample to the existence of spring beam 4. In addition, the fixing parts are positioned at four corners of the bottom plate, so that the base body is stressed uniformly, and the fixture is simple to operate, convenient to use and easy to clean and maintain under the condition that the utilization rate of the film coating machine is improved in the film coating operation of different specifications of base bodies in the same sputtering cavity.
The application method of the substrate fixing clamp comprises the following steps:
(1) judging the specification, sheet shape, column shape and strip shape of the matrix to be plated;
(2) for the sheet sample, if the base is circular and the diameter is between 85mm and 95mm, the base can be fixed by using the pressing sheet 21.
(3) If the specification of the substrate is circular and the diameter is smaller than 85mm, square, narrow or other irregular sheet substrates, and the maximum size of the substrate is smaller than 85mm in the radial direction, a high-temperature-resistant polyimide adhesive tape can be adopted to adhere the sample on the bottom plate.
(4) For the column or strip base member, choose locating lever 22 for use, fix the sample through adjusting positioning nut 8 and spring beam 4 on the locating lever 22, concrete step is as follows:
(a) the four positioning rods 22 are respectively fixed at corresponding positions of four corners of the bottom plate 1 through screws;
(b) the end surface of the adjusting positioning nut 8 is flush with the screw hole;
(c) adjusting the spring rod 4 according to the specification of the matrix sample to enable the spring rod to be larger than the maximum radial dimension of the matrix sample;
(d) and (3) loading a substrate sample, adjusting the spring buckle 7 and the spring rod 4 to the optimal position again, screwing the upper and lower end positioning nuts 8 by adopting a screwdriver, and fixing the substrate on the premise of not damaging the mechanical property of the substrate.
(e) And (5) inverting the bottom plate, and checking whether the base body shakes or moves.
Example 1
For a disc-shaped substrate with a diameter of 93mm, the procedure was as follows:
1. wiping the bottom plate 1 by alcohol, and cleaning the surface of the bottom plate 1;
2. fixing a disc-shaped substrate with the diameter of 93mm on the bottom plate 1 by using a pressing sheet 21;
3. the bottom plate 1 is inverted to ensure that the bottom plate is in close contact with the bottom plate, and the bottom plate does not fall off or shake in the film coating process;
4. fixing the bottom plate 1 on a sample table of a magnetic control chamber, and performing film coating operation by adopting an optimal film coating process;
5. and analyzing the microscopic morphology and the uniformity of the sample after film plating to obtain that the film is deposited compactly, and the film thickness is basically consistent at the edge and the center of the matrix, which shows that the uniformity is good.
Example 2
For a rectangular sheet-like substrate 40mm wide and 60mm long, the procedure was as follows:
1. wiping the bottom plate with alcohol, and cleaning the surface of the bottom plate 1;
2. fixing a rectangular sheet-shaped substrate with the width of 40mm and the length of 60mm on the bottom plate 1 by adopting a high-temperature-resistant adhesive tape polyimide adhesive tape;
3. the bottom plate 1 is inverted to ensure that the bottom plate is in close contact with the bottom plate, and the bottom plate does not fall off or shake in the film coating process;
4. fixing the bottom plate 1 on a sample table of a magnetic control chamber, and performing film coating operation by adopting an optimal film coating process;
5. and (3) performing characterization on the microscopic morphology and thickness of the four corners and the center of the sample after film plating, wherein the result shows that the film deposition is compact, the film thickness at the four corners and the center of the substrate is basically consistent, and the uniformity of the obtained film is good.
Example 3
The method is characterized in that the coating operation is carried out on a cylindrical substrate with the outer diameter of 50mm, and the specific operation steps are as follows:
1. selecting the positioning rods 22 as fixing pieces, and fixing the four positioning rods 22 on the bottom plate 1 by using screws 9 respectively;
2. the surfaces of the bottom plate 1 and the positioning rod 22 are wiped by alcohol, so that the coating is prevented from being polluted by impurities in the preparation process;
3. the lower section of the adjusting positioning nut 8 is flush with the screw hole;
4. the spring rod 4 is adjusted to ensure that the radial size of the clamp is about 60 mm;
5. a cylindrical base body with the outer diameter of 50mm is arranged, the spring buckle 7 and the spring rod 4 are adjusted to the optimal position, the positioning nut 8 is screwed, the situation that the base body cannot be screwed too tightly is noticed, and the damage to the physical performance of the base body is avoided;
6. inverting the bottom plate 1, wherein the specific schematic diagram is shown in fig. 1, ensuring that the matrix does not shake or shift, and then loading the matrix into a sample table of a magnetic control chamber for film coating operation;
7. and (4) performing microscopic morphology and thickness characterization on the sample after the sample is plated, wherein the result shows that the film deposition is compact and is uniformly distributed.
Claims (6)
1. A basal body fixing clamp for a magnetron sputtering coating machine is characterized by comprising a square bottom plate and a fixing piece, wherein the fixing piece comprises a tabletting structure and a positioning rod structure,
the pressing sheet structure comprises four pressing sheets which are respectively arranged at the positions of four corners on the surface side of the bottom plate, and the sheet-shaped substrate is fixed through the four pressing sheets;
the positioning rod structure comprises four positioning rods which are respectively arranged at the four corners of the bottom surface side of the bottom plate; each positioning rod is provided with an inner rod, a spring rod and an outer rod, the inner rod is provided with an upper half part and a lower half part, and the spring rod is arranged between the two parts; the inner rod, the spring rod and the outer rod are coaxial in the length direction; the lower end of the inner rod is embedded into the upper end of the outer rod, and the position of the inner rod relative to the outer rod along the axial direction is adjustable; the upper end of the inner rod is fixedly connected with the bottom plate through a screw; positioning nuts are respectively arranged on the upper half part of the inner rod and the lower part of the outer rod, and the columnar matrix is fixed through eight positioning nuts arranged on the positioning rods.
2. The substrate fixing clamp for the magnetron sputtering coating machine according to claim 1, wherein the outer rod is in a hollow column shape, and a plurality of round holes are axially arranged on the side wall of the outer rod at intervals; the inner rod is provided with a spring buckle near the lower end thereof, and the relative position between the inner rod and the outer rod is adjusted through the matching of the spring buckle and the round hole, so that the overall length of the positioning rod is adjusted.
3. The substrate fixing clamp for the magnetron sputtering coating machine as claimed in claim 1, wherein the upper half part of the inner rod is a solid column, and a screw hole is formed at the center of the upper end of the solid column.
4. The substrate fixing clamp for the magnetron sputtering coating machine according to claim 1, wherein the spring rod is cylindrical, and the upper end and the lower end of the spring rod are respectively embedded into the upper half part and the lower half part of the inner rod in a welding manner.
5. The substrate fixing clamp for the magnetron sputtering coating machine according to claim 1, wherein the bottom plate is in a shape of a square with round corners.
6. The substrate fixing clamp for the magnetron sputtering coating machine according to claim 1, wherein the inner rod and the outer rod are polygonal, and a portion where the inner rod and the outer rod are connected is hollow cylindrical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922426272.9U CN211595786U (en) | 2019-12-27 | 2019-12-27 | Base member mounting fixture for magnetron sputtering coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922426272.9U CN211595786U (en) | 2019-12-27 | 2019-12-27 | Base member mounting fixture for magnetron sputtering coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211595786U true CN211595786U (en) | 2020-09-29 |
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ID=72597369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922426272.9U Active CN211595786U (en) | 2019-12-27 | 2019-12-27 | Base member mounting fixture for magnetron sputtering coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211595786U (en) |
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2019
- 2019-12-27 CN CN201922426272.9U patent/CN211595786U/en active Active
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