CN211595780U - Device for magnetron sputtering continuous deposition of wire surface coating - Google Patents
Device for magnetron sputtering continuous deposition of wire surface coating Download PDFInfo
- Publication number
- CN211595780U CN211595780U CN201922388200.XU CN201922388200U CN211595780U CN 211595780 U CN211595780 U CN 211595780U CN 201922388200 U CN201922388200 U CN 201922388200U CN 211595780 U CN211595780 U CN 211595780U
- Authority
- CN
- China
- Prior art keywords
- bearing
- rotating shaft
- wire roller
- wire
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a silk material surface coating magnetron sputtering is device for continuous deposition, including base and main pivot, the fixed bearing frame that is provided with in the main pivot, but bear one end and be provided with pivot and first silk roller pivot in the middle of radial pivoted first, it is provided with pivot and second silk roller pivot in the middle of the second of radial pivoted to bear the other end, be provided with first gear drive subassembly between pivot outer end in the middle of the first and the base, be provided with second gear drive subassembly between pivot outer end in the middle of the second and the base, be provided with third gear drive subassembly between pivot and the first silk roller pivot in the middle of the first, be provided with fourth gear drive subassembly between pivot and the second silk roller pivot in the middle of the second, be provided with first silk roller in the first silk roller pivot, be provided with the second silk roller in the second silk roller pivot. The device for magnetron sputtering continuous deposition of the surface coating of the wire has the advantages of simple structure, stable and reliable performance, high processing efficiency, good processing quality, high consistency of the surface coating of the wire and the like.
Description
Technical Field
The utility model relates to an auxiliary assembly, especially a device for continuous deposit of silk material surface coating magnetron sputtering are used in surface modification field.
Background
The surface modification technology is a technology for covering a specific coating material on the surface of a part by means of physical deposition, chemical deposition, mechanical spraying and the like, so that the surface of the part obtains the performance of the coating material, and further the corrosion resistance, wear resistance, high temperature resistance, oxidation resistance and the like of the part are improved. Physical vapor deposition is a technique of gasifying the surface of a material source into gaseous atoms, molecules or partially ionizing the gaseous atoms into ions under a vacuum condition by a physical method, and depositing a film with a certain special function on the surface of a substrate through a low-pressure gas (or plasma) process, wherein the main methods comprise vacuum evaporation, sputtering coating, arc plasma coating, ion coating, molecular beam epitaxy and the like. The magnetron sputtering coating technology is a surface coating preparation technology which is mature and widely applied in the physical vapor deposition technology, has the advantages of high deposition speed, low substrate temperature rise, various sputtering target materials and the like, and the deposited film has the series advantages of high purity, small damage, good compactness, good uniformity, strong adhesive force, good process repeatability and the like. However, in the prior art, the problems of complex equipment structure and high equipment cost exist in the processing process of the magnetron sputtering deposition coating on the surface of the superfine wire, the long-time continuous coating deposition processing of the wire is difficult to realize, the coating consistency on the surface of the wire is poor, and the processing efficiency is low. The problems seriously affect the further development and popularization and application of the field.
In view of the above, the present invention provides a new technical solution to solve the existing technical problems.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides a wire material surface coating magnetron sputtering is device for continuous deposition, has solved the technical defects such as the structure is complicated, the implementation cost is high, the machining efficiency is low, wire material surface coating uniformity is poor, the processingquality is low that prior art exists.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a silk material surface coating magnetron sputtering is device for continuous deposition, includes base and main pivot, the fixed bearing frame that is provided with in the main pivot, but bear one end and be provided with first middle pivot and the first wire roller pivot of radial pivoted, bear the other end and be provided with pivot and second wire roller pivot in the middle of the second of radial pivoted, be provided with first gear drive subassembly between pivot outer end in the middle of the first and the base, be provided with second gear drive subassembly between pivot outer end in the middle of the second and the base, be provided with third gear drive subassembly between pivot and the first wire roller pivot in the middle of the first, be provided with fourth gear drive subassembly between pivot and the second wire roller pivot in the middle of the second, be provided with first wire roller in the first wire roller pivot, be provided with the second wire roller in the second wire roller pivot.
As an improvement of the above technical solution, the first intermediate rotating shaft is mounted on a bearing frame through a first rotating shaft bearing, the bearing frame is provided with a first bearing step mounting position for mounting the first rotating shaft bearing, after the first rotating shaft bearing is mounted at the first bearing step mounting position, an outer ring of the first rotating shaft bearing is fixed in the first bearing step mounting position, an inner ring of the first rotating shaft bearing is fixedly connected with a side wall of the first intermediate rotating shaft, a first bearing plate for fixing the first rotating shaft bearing is arranged at a side part of the bearing frame, the first bearing plate is fixed at the side part of the bearing frame through a first bearing plate bolt, and an inner edge of the first bearing plate is pressed against the outer ring of the first rotating shaft bearing and limits the first rotating shaft bearing in the first bearing step mounting position;
as a further improvement of the above technical solution, the second intermediate rotating shaft is mounted on the bearing frame through a second rotating shaft bearing, the bearing frame is provided with a second bearing step mounting position for mounting the second rotating shaft bearing, the second rotating shaft bearing is mounted behind the second bearing step mounting position, the outer ring of the second rotating shaft bearing is fixed in the second bearing step mounting position, the inner ring of the second rotating shaft bearing is fixedly connected with the second intermediate rotating shaft side wall, the side portion of the bearing frame is provided with a second bearing plate for fixing the second rotating shaft bearing, the second bearing plate is fixed on the side portion of the bearing frame through a second bearing plate bolt, and the inner edge of the second bearing plate is pressed on the outer ring of the second rotating shaft bearing and limits the second rotating shaft bearing in the second bearing step mounting position.
As a further improvement of the above technical solution, a first upper bearing plate and a first lower bearing plate of the bearing frame extend inwards from the upper part of the bearing frame, a first wire roller shaft upper mounting hole is formed in the first upper bearing plate of the bearing frame, a first wire roller shaft upper bearing is arranged in the first wire roller shaft upper mounting hole, the upper end of the first wire roller shaft is fixedly mounted on an inner ring of the first wire roller shaft upper bearing, a first upper cover plate is arranged on the upper wall of the first upper bearing plate of the bearing frame, and the first upper cover plate is fixed on the upper wall of the first upper bearing plate of the bearing frame through a first upper cover plate fixing bolt; a first wire roller shaft lower mounting hole is formed in the first bearing frame lower folded plate, a first wire roller shaft lower bearing is arranged in the first wire roller shaft lower mounting hole, the lower end of the first wire roller rotating shaft is fixedly mounted on an inner ring of the first wire roller shaft lower bearing, a first lower cover plate is arranged on the lower wall of the first bearing frame lower folded plate, and the first lower cover plate is fixed on the lower wall of the first bearing frame lower folded plate through a first lower cover plate fixing bolt;
as a further improvement of the above technical solution, a second upper bearing plate and a second lower bearing plate of the bearing frame extend inwards from the upper part of the bearing frame, a second wire roller shaft upper mounting hole is formed in the second upper bearing plate of the bearing frame, a second wire roller shaft upper bearing is arranged in the second wire roller shaft upper mounting hole, the upper end of the second wire roller shaft is fixedly mounted on an inner ring of the second wire roller shaft upper bearing, a second upper cover plate is arranged on the upper wall of the second upper bearing plate of the bearing frame, and the second upper cover plate is fixed on the upper wall of the second upper bearing plate of the bearing frame through a second upper cover plate fixing bolt; bear and seted up second silk roller axle mounting hole down on the second lower folded plate, be provided with second silk roller axle lower bearing in the second silk roller axle lower mounting hole, the lower extreme fixed mounting of second silk roller pivot is at the inner circle of second silk roller axle lower bearing, bear second lower folded plate lower wall and be provided with second lower apron, the second lower apron passes through second lower apron fixing bolt to be fixed and bears second lower folded plate lower wall.
As a further improvement of the above technical solution, the first gear transmission assembly includes a first intermediate gear fixedly mounted at an outer end of the first intermediate rotating shaft, and a first bottom toothed disc fixed on the base and engaged with the first intermediate gear; the second gear transmission assembly comprises a second intermediate gear fixedly mounted at the outer end of the second intermediate rotating shaft and a second bottom fluted disc fixed on the base and meshed with the second intermediate gear.
As a further improvement of the above technical solution, the first intermediate gear is mounted at the outer end of the first intermediate rotating shaft through a first intermediate gear locking piece, and a first intermediate gear gasket and a first intermediate gear fixing nut are sequentially arranged at the outer side of the first intermediate gear; the second intermediate gear is arranged at the outer end of the second intermediate rotating shaft through a second intermediate gear locking piece, and a second intermediate gear gasket and a second intermediate gear fixing nut are sequentially arranged on the outer side of the second intermediate gear; the first bottom fluted disc and the second bottom fluted disc are bottom fluted discs which are meshed with the first intermediate gear and the second intermediate gear respectively, the first intermediate gear, the second intermediate gear and the bottom fluted disc are all bevel gears, the bottom fluted disc is provided with a fluted disc inner extending part, and the fluted disc inner extending part is fixedly arranged on the upper surface of the base through a fluted disc fixing bolt.
As a further improvement of the above technical solution, the third gear transmission assembly includes a first driving transmission gear fixedly mounted at an inner end of the first intermediate rotating shaft and a first driven transmission gear fixed on the first wire roll rotating shaft, and the first driving transmission gear and the first driven transmission gear are engaged with each other; the fourth gear transmission assembly comprises a second driving transmission gear fixedly arranged at the inner end of the second middle rotating shaft and a second driven transmission gear fixed on the second wire roller rotating shaft, and the second driving transmission gear is meshed with the second driven transmission gear.
As a further improvement of the above technical solution, the first driving transmission gear is fixed at the inner end of the first intermediate rotating shaft through a first driving transmission gear key, the first driven transmission gear is fixed at the rotating shaft of the first wire roller through a first driven transmission gear key, the second driving transmission gear is fixed at the inner end of the second intermediate rotating shaft through a second driving transmission gear key, the second driven transmission gear is fixed at the rotating shaft of the second wire roller through a second driven transmission gear key, the first driving transmission gear and the first driven transmission gear are mutually engaged bevel gears, and the second driving transmission gear and the second driven transmission gear are mutually engaged bevel gears.
As a further improvement of the above technical solution, the first and second wire roll rotating shafts are both provided with a plurality of wire roll position adjusting screw holes, the first wire roll can adjust its position on the first wire roll rotating shaft by the wire roll positioning screws and the wire roll position adjusting screw holes, and the second wire roll can adjust its position on the second wire roll rotating shaft by the wire roll positioning screws and the wire roll position adjusting screw holes.
As a further improvement of the above technical solution, the first wire roll and the second wire roll each have one or more than one.
As a further improvement of the technical scheme, the rotating speed range of the first wire roller and the second wire roller is 0.1-100 r/min when in work.
As a further improvement of the technical scheme, the diameters of the first wire roller and the second wire roller are 15-45 mm.
As a further improvement of the technical scheme, the speed range of the wire winding and unwinding of the first wire roller and the second wire roller is 4.7-4700 mm/min.
As a further improvement of the above technical solution, the base middle position has a base middle through hole, the main rotating shaft passes through the base middle through hole of the base, the upper end of the main rotating shaft has a main rotating shaft connecting portion, the bearing frame bottom middle position has a bearing frame fixing recess, the main rotating shaft connecting portion is inserted into the bearing frame fixing recess, and the bearing frame is fixed in the main rotating shaft connecting portion by a bearing frame fixing bolt.
The utility model has the advantages that: the utility model provides a device for magnetron sputtering continuous deposition of a wire surface coating, which drives a first wire roller and a second wire roller to rotate through a main rotating shaft, a first gear transmission component, a second gear transmission component, a third gear transmission component and a fourth gear transmission component, the first wire roller and the second wire roller can realize the unreeling and the reeling of wires in the rotating process and simultaneously drive the revolution of the wires, the wires can be continuously processed, the continuity is high, the processing efficiency and the processing quality can be effectively improved, and the consistency of the wire surface coating is high; in addition, the whole device has simple structure and stable and reliable performance, and can effectively reduce the implementation cost.
In conclusion, the magnetron sputtering continuous deposition device for the surface coating of the wire material solves the technical defects of complex structure, high implementation cost, low processing efficiency, poor consistency of the surface coating of the wire material, low processing quality and the like in the prior art.
Drawings
The present invention will be further explained with reference to the drawings and examples.
FIG. 1 is a schematic assembly view of the present invention;
FIG. 2 is a schematic view of the assembly of the middle base and the bottom toothed disc of the present invention;
FIG. 3 is a sectional view of the middle base and the bottom fluted disc of the present invention;
FIG. 4 is a schematic view of the assembly of the first wire roll rotating shaft and the first wire roll of the present invention;
fig. 5 is an assembly view of a plurality of first wire rolls mounted on a first wire roll rotating shaft according to another embodiment of the present invention.
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The technical features of the present invention can be combined interactively without conflicting with each other, as shown in fig. 1 to 5.
A device for magnetron sputtering continuous deposition of a wire surface coating comprises a base 1 and a main rotating shaft 11, the main rotating shaft 11 is fixedly provided with a bearing frame 2, one end of the bearing frame 2 is provided with a first middle rotating shaft 31 and a first wire roller rotating shaft 41 which can rotate radially, the other end of the bearing frame 2 is provided with a second middle rotating shaft 32 and a second wire roller rotating shaft 42 which can rotate radially, a first gear transmission component is arranged between the outer end of the first intermediate rotating shaft 31 and the base 1, a second gear transmission component is arranged between the outer end of the second intermediate rotating shaft 32 and the base 1, a third gear transmission component is arranged between the first intermediate rotating shaft 31 and the first wire roller rotating shaft 41, a fourth gear transmission component is arranged between the second intermediate rotating shaft 32 and the second wire roller rotating shaft 42, the first wire roller rotating shaft 41 is provided with a first wire roller 51, and the second wire roller rotating shaft 42 is provided with a second wire roller 52.
Preferably, the first intermediate rotating shaft 31 is mounted on the carrier 2 through a first rotating shaft bearing 311, a first bearing step mounting position 312 for mounting the first rotating shaft bearing 311 is formed on the carrier 2, after the first rotating shaft bearing 311 is mounted on the first bearing step mounting position 312, an outer ring of the first rotating shaft bearing 311 is fixed in the first bearing step mounting position 312, an inner ring of the first rotating shaft bearing 311 is fixedly connected with a side wall of the first intermediate rotating shaft 31, a first bearing plate 313 for fixing the first rotating shaft bearing 311 is arranged at a side of the carrier 2, the first bearing plate 313 is fixed at a side of the carrier 2 through a first bearing plate bolt 314, an inner edge of the first bearing plate 313 is pressed against the outer ring of the first rotating shaft bearing 311 and limits the first rotating shaft bearing 311 in the first bearing step mounting position 312;
preferably, the second intermediate rotating shaft 32 is mounted on the bearing frame 2 through a second rotating shaft bearing 321, a second bearing step mounting position 322 for mounting the second rotating shaft bearing 321 is provided on the bearing frame 2, the second rotating shaft bearing 321 is mounted behind the second bearing step mounting position 322, the outer ring of the second rotating shaft bearing 321 is fixed in the second bearing step mounting position 322, the inner ring of the second rotating shaft bearing 321 is fixedly connected with the side wall of the second intermediate rotating shaft 32, a second bearing plate 323 for fixing the second rotating shaft bearing 321 is provided at the side of the bearing frame 2, the second bearing plate 323 is fixed at the side of the bearing frame 2 through a second bearing plate bolt 324, and the inner edge of the second bearing plate 323 is pressed against the outer ring of the second rotating shaft bearing 321 and limits the second rotating shaft bearing 321 in the second bearing step mounting position 322.
Preferably, a first upper bearing plate 21 and a first lower bearing plate 23 of the bearing frame extend inwards from the upper portion of the bearing frame 2, a first wire roller shaft upper mounting hole is formed in the first upper bearing plate 21 of the bearing frame, a first wire roller shaft upper bearing 411 is arranged in the first wire roller shaft upper mounting hole, the upper end of the first wire roller rotating shaft 41 is fixedly mounted on the inner ring of the first wire roller shaft upper bearing 411, a first upper cover plate 412 is arranged on the upper wall of the first upper bearing plate 21 of the bearing frame, and the first upper cover plate 412 is fixed on the upper wall of the first upper bearing plate 21 of the bearing frame through a first upper cover plate fixing bolt 413; a first wire roller shaft lower mounting hole is formed in the first bearing frame lower folding plate 23, a first wire roller shaft lower bearing 414 is arranged in the first wire roller shaft lower mounting hole, the lower end of the first wire roller rotating shaft 41 is fixedly mounted at the inner ring of the first wire roller shaft lower bearing 414, a first lower cover plate 415 is arranged on the lower wall of the first bearing frame lower folding plate 23, and the first lower cover plate 415 is fixed on the lower wall of the first bearing frame lower folding plate 23 through a first lower cover plate fixing bolt 416;
preferably, a second upper bearing plate 22 and a second lower bearing plate 24 of the bearing frame extend inwards from the upper part of the bearing frame 2, a second wire roller shaft upper mounting hole is formed in the second upper bearing plate 22 of the bearing frame, a second wire roller shaft upper bearing 421 is arranged in the second wire roller shaft upper mounting hole, the upper end of the second wire roller rotating shaft 42 is fixedly mounted on the inner ring of the second wire roller shaft upper bearing 421, a second upper cover plate 422 is arranged on the upper wall of the second upper bearing plate 22 of the bearing frame, and the second upper cover plate 422 is fixed on the upper wall of the second upper bearing plate 22 of the bearing frame through a second upper cover plate fixing bolt 423; the bearing frame second lower folding plate 24 is provided with a second wire roller shaft lower mounting hole, a second wire roller shaft lower bearing 424 is arranged in the second wire roller shaft lower mounting hole, the lower end of the second wire roller rotating shaft 42 is fixedly mounted at the inner ring of the second wire roller shaft lower bearing 424, a second lower cover plate 425 is arranged on the lower wall of the bearing frame second lower folding plate 24, and the second lower cover plate 425 is fixed on the lower wall of the bearing frame second lower folding plate 24 through a second lower cover plate fixing bolt 426.
Preferably, the first gear transmission assembly comprises a first intermediate gear 61 fixedly mounted at the outer end of the first intermediate rotating shaft 31 and a first bottom toothed disc fixed on the base 1 and meshed with the first intermediate gear 61; the second gear transmission assembly comprises a second intermediate gear 62 fixedly mounted at the outer end of the second intermediate rotating shaft 32 and a second bottom fluted disc fixed on the base 1 and meshed with the second intermediate gear 62.
Preferably, the first intermediate gear 61 is mounted at the outer end of the first intermediate rotating shaft 31 through a first intermediate gear locking member 611, and a first intermediate gear washer 612 and a first intermediate gear fixing nut 613 are sequentially disposed at the outer side of the first intermediate gear 61; the second intermediate gear 62 is mounted at the outer end of the second intermediate rotating shaft 32 through a second intermediate gear locking piece 621, and a second intermediate gear washer 622 and a second intermediate gear fixing nut 623 are sequentially arranged at the outer side of the second intermediate gear 62; first bottom fluted disc and second bottom fluted disc are the bottom fluted disc 63 with first intermediate gear 61, the equal meshing of second intermediate gear 62, first intermediate gear 61, second intermediate gear 62 and bottom fluted disc 63 are bevel gear, bottom fluted disc 63 has extension 631 in the fluted disc, extension 631 passes through fluted disc fixing bolt 632 fixed mounting at base 1 upper surface in the fluted disc, the matching has been seted up on base 1 fluted disc fixing bolt 632's bolt mounting groove, the bolt mounting groove has the clearance space that can carry out the position fine setting to bottom fluted disc 63.
Preferably, the third gear transmission assembly comprises a first driving transmission gear 71 fixedly installed at the inner end of the first middle rotating shaft 31 and a first driven transmission gear 72 fixed on the first wire roller rotating shaft 41, and the first driving transmission gear 71 and the first driven transmission gear 72 are meshed with each other; the fourth gear transmission component comprises a second driving transmission gear 81 fixedly arranged at the inner end of the second middle rotating shaft 32 and a second driven transmission gear 82 fixed on the second wire roller rotating shaft 42, and the second driving transmission gear 81 is meshed with the second driven transmission gear 82.
Preferably, the first driving transmission gear 71 is fixed at the inner end of the first intermediate rotating shaft 31 through a first driving transmission gear key 711, the first driven transmission gear 72 is fixed at the first wire roller rotating shaft 41 through a first driven transmission gear key 721, the second driving transmission gear 81 is fixed at the inner end of the second intermediate rotating shaft 32 through a second driving transmission gear key 811, the second driven transmission gear 82 is fixed at the second wire roller rotating shaft 42 through a second driven transmission gear key 821, the first driving transmission gear 71 and the first driven transmission gear 72 are mutually meshed bevel gears, and the second driving transmission gear 81 and the second driven transmission gear 82 are mutually meshed bevel gears.
Preferably, a plurality of screw roll position adjusting screw holes 40 are formed in the first screw roll rotating shaft 41 and the second screw roll rotating shaft 42, the first screw roll 51 can be adjusted in position on the first screw roll rotating shaft 41 through the screw roll positioning screws 50 and the screw roll position adjusting screw holes 40, and the second screw roll 52 can be adjusted in position on the second screw roll rotating shaft 42 through the screw roll positioning screws 50 and the screw roll position adjusting screw holes 40.
Preferably, the first and second wire rolls 51 and 52 each have one or more.
Preferably, the rotation speed of the first and second wire rollers 51 and 52 is 0.1-100 r/min.
Preferably, the diameter of the first and second wire rolls 51 and 52 is 15 to 45 mm.
Preferably, the speed of the take-up and pay-off of the first and second wire rolls 51 and 52 is in the range of 4.7 to 4700 mm/min.
Preferably, the base 1 has a base middle through hole at a middle position, the main spindle 11 passes through the base middle through hole of the base 1, the main spindle 11 has a main spindle connecting portion 12 at an upper end portion thereof, the carrier 2 has a carrier fixing recess at a bottom middle position thereof, the main spindle connecting portion 12 is inserted into the carrier fixing recess, and the carrier 2 is fixedly connected to the main spindle connecting portion 12 by a carrier fixing bolt 20.
In the specific implementation of the present invention, the main shaft 11 rotates to drive the bearing frame 1 to rotate, the bearing frame 1 respectively drives the first intermediate shaft 31 and the second intermediate shaft 32 to rotate through the first gear transmission assembly and the second gear transmission assembly in the rotation process, the first intermediate shaft 31 and the second intermediate shaft 32 respectively drive the first wire roller shaft 41 and the fourth wire roller shaft 42 to rotate through the third gear transmission assembly and the fourth gear transmission assembly, the first wire roller shaft 41 and the fourth wire roller shaft 42 respectively drive the first wire roller 51 and the second wire roller 52 to rotate, one of the first wire roller 51 and the second wire roller 52 is used for unwinding a wire, the other of the first wire roller 51 and the second wire roller 52 is used for winding a wire, and the wire can be wound by the winding function of the first wire roller 51 and the second wire roller 52 for the magnetron sputtering continuous processing of the winding surface coating, the continuity is good, and the processing efficiency can be greatly improved.
In a specific embodiment, the first and second wire rolls 51 and 52 rotate at substantially the same speed.
The installation positions of the first wire roller 51 and the second wire roller 52 can be adjusted through the wire roller position adjusting screw holes 40 formed in the first wire roller rotating shaft 41 and the second wire roller rotating shaft 42, the heights of the wire rollers are set according to actual processing requirements, in addition, the number of the wire rollers on the first wire roller rotating shaft 41 and the second wire roller rotating shaft 42 can also be adjusted to be multiple according to the actual processing requirements, the processing efficiency is improved, and the application flexibility is high.
The rotation speeds of the first wire roller 51 and the second wire roller 52 can be adjusted by the gear ratios and the installation positions of the gears in the first gear transmission assembly, the second gear transmission assembly, the third gear transmission assembly and the fourth gear transmission assembly in cooperation with the rotation speed of the main rotating shaft.
Example 1:
ultrathin alloy wire 9 surface magnetron sputtering deposition for medical apparatusFirstly, installing a basically assembled device for magnetron sputtering continuous deposition of a wire surface coating into a vacuum cavity of a magnetron sputtering device, orderly winding alloy wires 9 subjected to cleaning treatment on a wire roller fixed on a rotating shaft of the wire roller, fixing the wire roller wound with the wires on one side of the device for magnetron sputtering continuous deposition of the wire surface coating, fixing the tail ends of the wires on the wire roller on the other side of the deposition device and clockwise winding, starting a main shaft power supply to enable the whole bearing frame 2 to rotate anticlockwise, regulating and controlling the speed to enable the wire winding and unwinding speed of the wire roller to be within a reasonable range, closing the main shaft power supply, then closing a door of the vacuum cavity, vacuumizing to enable the background vacuum degree to be higher than 3 × 10–4After Pa, high-purity nitrogen is introduced to keep the gas pressure of the cavity at 3 × 10- 2And Pa, starting a power supply of a spindle motor to enable the wire to start moving, and starting a deposition power supply to start deposition of the TiN coating. And after the deposition is finished, disconnecting the motor power supply, the deposition power supply and the vacuum power supply, introducing gas, opening the cavity, and taking out the wire roller from the device.
While the preferred embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.
Claims (10)
1. A device for magnetron sputtering continuous deposition of a wire surface coating is characterized in that: comprises a base (1) and a main rotating shaft (11), a bearing frame (2) is fixedly arranged on the main rotating shaft (11), a first middle rotating shaft (31) and a first wire roller rotating shaft (41) which can rotate radially are arranged at one end of the bearing frame (2), a second middle rotating shaft (32) and a second wire roller rotating shaft (42) which can rotate radially are arranged at the other end of the bearing frame (2), a first gear transmission component is arranged between the outer end of the first middle rotating shaft (31) and the base (1), a second gear transmission component is arranged between the outer end of the second middle rotating shaft (32) and the base (1), a third gear transmission component is arranged between the first middle rotating shaft (31) and the first wire roller rotating shaft (41), a fourth gear transmission component is arranged between the second middle rotating shaft (32) and the second wire roller rotating shaft (42), a first wire roller (51) is arranged on the first wire roller rotating shaft (41), and a second wire roller (52) is arranged on the second wire roller rotating shaft (42).
2. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 1, wherein: the first intermediate rotating shaft (31) is mounted on a bearing frame (2) through a first rotating shaft bearing (311), a first bearing step mounting position (312) used for mounting the first rotating shaft bearing (311) is formed in the bearing frame (2), the first rotating shaft bearing (311) is mounted behind the first bearing step mounting position (312), the outer ring of the first rotating shaft bearing (311) is fixed in the first bearing step mounting position (312), the inner ring of the first rotating shaft bearing (311) is fixedly connected with the side wall of the first intermediate rotating shaft (31), a first bearing plate (313) used for fixing the first rotating shaft bearing (311) is arranged on the side portion of the bearing frame (2), the first bearing plate (313) is fixed on the side portion of the bearing frame (2) through a first bearing plate bolt (314), the inner edge of the first bearing plate (313) is tightly pressed on the outer ring of the first rotating shaft bearing (311) and limits the first rotating shaft bearing (311) in the first bearing step mounting position (312);
the utility model provides a bearing structure, including bearing frame (2), bearing frame (2) are installed on bearing frame (32) through second pivot bearing (321), offer on bearing frame (2) and be used for the installation the second bearing ladder installation position (322) of second pivot bearing (321), second pivot bearing (321) are installed behind second bearing ladder installation position (322), and the outer lane of second pivot bearing (321) is fixed in second bearing ladder installation position (322), and pivot (32) lateral wall fixed connection in the middle of second pivot bearing (321) inner circle and the second, bearing frame (2) lateral part is provided with second bearing plate (323) that is used for fixed second pivot bearing (321), second bearing plate (323) are fixed at bearing frame (2) lateral part through second bearing plate bolt (324), and the interior edge of second bearing plate (323) compresses tightly at the outer lane of second pivot bearing (321) and spacing second pivot bearing (321) in second bearing ladder installation position (322).
3. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 1, wherein: a first upper bearing plate (21) and a first lower bearing plate (23) of the bearing frame extend inwards from the upper part of the bearing frame (2), a first wire roller shaft upper mounting hole is formed in the first upper bearing plate (21), a first wire roller shaft upper bearing (411) is arranged in the first wire roller shaft upper mounting hole, the upper end of the first wire roller rotating shaft (41) is fixedly mounted on the inner ring of the first wire roller shaft upper bearing (411), a first upper cover plate (412) is arranged on the upper wall of the first upper bearing plate (21), and the first upper cover plate (412) is fixed on the upper wall of the first upper bearing plate (21) of the bearing frame through a first upper cover plate fixing bolt (413); a first wire roller shaft lower mounting hole is formed in the first bearing frame lower folding plate (23), a first wire roller shaft lower bearing (414) is arranged in the first wire roller shaft lower mounting hole, the lower end of the first wire roller rotating shaft (41) is fixedly mounted at the inner ring of the first wire roller shaft lower bearing (414), a first lower cover plate (415) is arranged on the lower wall of the first bearing frame lower folding plate (23), and the first lower cover plate (415) is fixed on the lower wall of the first bearing frame lower folding plate (23) through a first lower cover plate fixing bolt (416);
a second bearing frame upper folded plate (22) and a second bearing frame lower folded plate (24) extend inwards from the upper portion of the bearing frame (2), a second wire roller shaft upper mounting hole is formed in the second bearing frame upper folded plate (22), a second wire roller shaft upper bearing (421) is arranged in the second wire roller shaft upper mounting hole, the upper end of the second wire roller rotating shaft (42) is fixedly mounted on the inner ring of the second wire roller shaft upper bearing (421), a second upper cover plate (422) is arranged on the upper wall of the second bearing frame upper folded plate (22), and the second upper cover plate (422) is fixed on the upper wall of the second bearing frame upper folded plate (22) through a second upper cover plate fixing bolt (423); bear and seted up second silk roller axle mounting hole down on second down folded plate (24) of frame, be provided with second silk roller axle down bearing (424) in the second silk roller axle down mounting hole, the lower extreme fixed mounting of second silk roller pivot (42) is at the inner circle of second silk roller axle down bearing (424), bear and bear second down folded plate (24) lower wall and be provided with apron (425) under the second, apron (425) are fixed under the second and are born second down folded plate (24) lower wall through apron fixing bolt (426) under the second.
4. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 1, wherein: the first gear transmission assembly comprises a first intermediate gear (61) fixedly mounted at the outer end of the first intermediate rotating shaft (31) and a first bottom fluted disc which is fixed on the base (1) and is meshed with the first intermediate gear (61); the second gear transmission assembly comprises a second intermediate gear (62) fixedly mounted at the outer end of the second intermediate rotating shaft (32) and a second bottom fluted disc which is fixed on the base (1) and is meshed with the second intermediate gear (62).
5. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 4, wherein: the first intermediate gear (61) is arranged at the outer end of the first intermediate rotating shaft (31) through a first intermediate gear locking piece (611), and a first intermediate gear gasket (612) and a first intermediate gear fixing nut (613) are sequentially arranged at the outer side of the first intermediate gear (61); the second intermediate gear (62) is arranged at the outer end of the second intermediate rotating shaft (32) through a second intermediate gear locking piece (621), and a second intermediate gear gasket (622) and a second intermediate gear fixing nut (623) are sequentially arranged at the outer side of the second intermediate gear (62); first bottom fluted disc and second bottom fluted disc are bottom fluted disc (63) with first intermediate gear (61), the equal meshing of second intermediate gear (62), first intermediate gear (61), second intermediate gear (62) and bottom fluted disc (63) are bevel gear, bottom fluted disc (63) have extension (631) in the fluted disc, extension (631) pass through fluted disc fixing bolt (632) fixed mounting at base (1) upper surface in the fluted disc.
6. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 1, wherein: the third gear transmission assembly comprises a first driving transmission gear (71) fixedly mounted at the inner end of the first middle rotating shaft (31) and a first driven transmission gear (72) fixed on the first wire roller rotating shaft (41), and the first driving transmission gear (71) is meshed with the first driven transmission gear (72); the fourth gear transmission assembly comprises a second driving transmission gear (81) fixedly installed at the inner end of the second middle rotating shaft (32) and a second driven transmission gear (82) fixed on the second wire roller rotating shaft (42), and the second driving transmission gear (81) is meshed with the second driven transmission gear (82).
7. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 6, wherein: the first driving transmission gear (71) is fixed at the inner end of the first middle rotating shaft (31) through a first driving transmission gear key (711), the first driven transmission gear (72) is fixed on the first wire roller rotating shaft (41) through a first driven transmission gear key (721), the second driving transmission gear (81) is fixed at the inner end of the second middle rotating shaft (32) through a second driving transmission gear key (811), the second driven transmission gear (82) is fixed on the second wire roller rotating shaft (42) through a second driven transmission gear key (821), the first driving transmission gear (71) and the first driven transmission gear (72) are mutually meshed bevel gears, and the second driving transmission gear (81) and the second driven transmission gear (82) are mutually meshed bevel gears.
8. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 1, wherein: all seted up a plurality of silk roller position adjustment screw holes (40) on first silk roller pivot (41) and second silk roller pivot (42), its position on first silk roller pivot (41) is adjusted in first silk roller (51) accessible silk roller set screw (50) and silk roller position adjustment screw hole (40), its position on second silk roller pivot (42) is adjusted in second silk roller (52) accessible silk roller set screw (50) and silk roller position adjustment screw hole (40).
9. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 1, wherein: the first wire roller (51) and the second wire roller (52) are provided with one or more than one, the rotating speed range of the first wire roller (51) and the second wire roller (52) is 0.1-100 r/min or/and the diameters of the first wire roller (51) and the second wire roller (52) are 15-45 mm or/and the speed range of the wire winding and unwinding of the first wire roller (51) and the second wire roller (52) is 4.7-4700 mm/min.
10. The apparatus for magnetron sputtering continuous deposition of wire surface coating according to claim 1, wherein: base (1) intermediate position has through-hole in the middle of the base, main pivot (11) pass from the base of base (1) intermediate position, and main pivot (11) upper end has main pivot connecting portion (12), bear frame (2) bottom intermediate position and have and bear a fixed concave position, main pivot connecting portion (12) are inserted bear in the fixed concave position of frame, bear frame (2) through bearing a fixing bolt (20) fix be connected to main pivot connecting portion (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922388200.XU CN211595780U (en) | 2019-12-26 | 2019-12-26 | Device for magnetron sputtering continuous deposition of wire surface coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922388200.XU CN211595780U (en) | 2019-12-26 | 2019-12-26 | Device for magnetron sputtering continuous deposition of wire surface coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211595780U true CN211595780U (en) | 2020-09-29 |
Family
ID=72596180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922388200.XU Active CN211595780U (en) | 2019-12-26 | 2019-12-26 | Device for magnetron sputtering continuous deposition of wire surface coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211595780U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923652A (en) * | 2019-12-26 | 2020-03-27 | 北京大学深圳研究院 | Device for magnetron sputtering continuous deposition of wire surface coating |
-
2019
- 2019-12-26 CN CN201922388200.XU patent/CN211595780U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923652A (en) * | 2019-12-26 | 2020-03-27 | 北京大学深圳研究院 | Device for magnetron sputtering continuous deposition of wire surface coating |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211595780U (en) | Device for magnetron sputtering continuous deposition of wire surface coating | |
| US5108574A (en) | Cylindrical magnetron shield structure | |
| CN110923652A (en) | Device for magnetron sputtering continuous deposition of wire surface coating | |
| CN109898067B (en) | Automatic production line for double-sided winding coating of flexible base material | |
| CN110004427A (en) | Flexible continuity magnetron sputtering deposition plating work chamber partition method | |
| CN210682693U (en) | Taping machine | |
| CN111235544B (en) | Film coating machine | |
| CN211595779U (en) | Winding type fiber coating magnetron sputtering device | |
| CN211595783U (en) | Clamping and rotating device for physical deposition coating on surface of thin bar | |
| JP3245999B2 (en) | Continuous wire coating equipment | |
| CN110965038A (en) | Clamping and rotating device for physical deposition coating on surface of thin bar | |
| CN215560631U (en) | Rotation mechanism suitable for vacuum coating stability is good | |
| CN211522307U (en) | Vacuum evaporation equipment | |
| CN211496223U (en) | Winding device for vacuum film production | |
| CN114561627A (en) | Roll-to-roll vacuum coating production line | |
| CN210127269U (en) | Ultra-thin baseband draw gear among flexible roll-to-roll magnetron sputtering coating film | |
| CN114289782B (en) | Twist needle cutting method and device for manufacturing glass sealing connector | |
| CN220619091U (en) | Quick assembly disassembly formula coating film roller mechanism | |
| CN218089774U (en) | Double-sided vacuum magnetron sputtering winding coating machine | |
| CN220265818U (en) | Oxidized cavity structure is beaten to magnetron sputtering machine | |
| DE102016112867B4 (en) | Transport arrangement and processing arrangement and method for operating them | |
| CN114525469A (en) | Control system and control method of roll-to-roll vacuum coating machine | |
| CN218274104U (en) | Insulated wire's receipts line guide pulley and enamelling machine | |
| CN1814677A (en) | Method and apparatus for making light colour-changing pigment | |
| CN111501008A (en) | Horizontal vacuum evaporation rainbow film production device and film coating process thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |