CN211546662U - Quartz boat - Google Patents
Quartz boat Download PDFInfo
- Publication number
- CN211546662U CN211546662U CN201922254289.0U CN201922254289U CN211546662U CN 211546662 U CN211546662 U CN 211546662U CN 201922254289 U CN201922254289 U CN 201922254289U CN 211546662 U CN211546662 U CN 211546662U
- Authority
- CN
- China
- Prior art keywords
- boat
- clamping groove
- groove
- quartz
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000010453 quartz Substances 0.000 title claims abstract description 39
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 39
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 69
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 65
- 239000010703 silicon Substances 0.000 claims abstract description 65
- 235000012431 wafers Nutrition 0.000 claims description 52
- 238000000576 coating method Methods 0.000 abstract description 17
- 238000000034 method Methods 0.000 abstract description 13
- 239000011248 coating agent Substances 0.000 abstract description 11
- 239000012495 reaction gas Substances 0.000 abstract description 10
- 239000007888 film coating Substances 0.000 abstract description 9
- 238000009501 film coating Methods 0.000 abstract description 9
- 239000011111 cardboard Substances 0.000 abstract description 8
- 238000007747 plating Methods 0.000 abstract description 6
- 238000004804 winding Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a solar cell produces technical field, specifically discloses a quartz boat. This quartz boat includes the boat body and boat lid, the equal interval of the internal bottom surface of boat and two relative sides just is provided with a plurality of first cardboards in pairs, form first draw-in groove between two mated first cardboards, the position department of the boat body at two adjacent first draw-in grooves sets up to open structure, two other sides of the boat body are open structure, the boat lid can be covered and locate on the boat body, the top surface interval of boat lid just is provided with a plurality of second cardboards in pairs, form the second draw-in groove between two mated second cardboards, the boat lid is located back on the boat body, form square draw-in groove between first draw-in groove and the second draw-in groove that corresponds, can hold two silicon chips in the square draw-in groove, the edge interference fit of square draw-in groove and silicon chip. When the silicon chip coating device is used, only the outward surfaces of the two silicon chips in each square clamping groove can be contacted with reaction gas, so that the phenomenon of plating winding of the silicon chips in the film coating process is avoided.
Description
Technical Field
The utility model relates to a solar cell produces technical field, especially relates to a quartz boat.
Background
In the manufacturing process of solar cells, when a silicon wafer is subjected to a surface coating process, the silicon wafer which is not coated needs to be placed in LPCVD vacuum coating equipment to complete the coating process, quartz boats are usually adopted in PECVD vacuum coating equipment to carry out the bearing and the process of the cell, and for tubular LPCVD coating, single-sided deposition has the advantages of saving silane cost and improving productivity compared with double-sided deposition.
In the prior art, because a gap exists between a silicon wafer placed on a quartz boat and a clamping groove, when a film coating process is carried out on the silicon wafer, reaction gas easily enters from the gap, and a film coating layer is formed on the surface of the silicon wafer which does not need to be coated, namely, the phenomenon of around-coating occurs. After the silicon wafer coating process is finished, the silicon wafer is cleaned, but the silicon wafer cleaning step with the plating winding phenomenon is complex, and the process cost is high. In addition, if the phenomenon of plating around occurs on the side surface of the silicon wafer, the perfect plating film on the surface of the silicon wafer is easily damaged.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a quartz boat, simple structure can avoid the silicon chip to take place around the phenomenon of plating in the coating film process, guarantees the coating film effect of silicon chip.
As the conception, the utility model adopts the technical proposal that:
a quartz boat, comprising:
the novel boat comprises a boat body, a plurality of first card plates, a plurality of second card plates and a plurality of clamping grooves, wherein the inner bottom surface and two opposite side surfaces of the boat body are arranged at intervals in pairs, a first clamping groove is formed between every two first card plates in pairs, the boat body is provided with an opening structure at the position of every two adjacent first clamping grooves, and the other two side surfaces of the boat body are provided with opening structures;
the boat cover can be covered on the boat body, a plurality of second card plates are arranged on the top surface of the boat cover at intervals in pairs, and a second clamping groove is formed between the two second card plates in pairs;
after the boat cover is arranged on the boat body, a square clamping groove is formed between the first clamping groove and the second clamping groove corresponding to the first clamping groove, two silicon wafers can be contained in the square clamping groove, and the square clamping groove is in interference fit with the edges of the silicon wafers.
As a preferable scheme of the quartz boat, the groove width of the first clamping groove and the groove width of the second clamping groove are the sum of the thicknesses of the two silicon wafers.
As a preferred scheme of the quartz boat, elastic layers are arranged on the groove wall of the first clamping groove and the groove wall of the second clamping groove.
As a preferred scheme of the quartz boat, an opening at one end of the first clamping groove, which is close to the second clamping groove, is trumpet-shaped.
In a preferred embodiment of the quartz boat, the boat cover is rotatably disposed on the boat body.
As a preferred scheme of the quartz boat, the quartz boat further comprises a rotating shaft, the rotating shaft penetrates through the boat cover, two ends of the rotating shaft are fixed on the boat body, and the boat cover can rotate around the rotating shaft.
As a preferred scheme of the quartz boat, the rotating shaft is a screw rod, and two ends of the screw rod are fixed on the boat body through nuts.
As a preferable aspect of the quartz boat, the quartz boat further comprises a locking assembly configured to lock the boat body and the boat cover.
As a preferable scheme of the quartz boat, the lock catch assembly comprises a protrusion and a locking piece, when the protrusion is arranged on the boat body, the locking piece is arranged on the boat cover, and when the locking piece is arranged on the boat body, the protrusion is arranged on the boat cover;
the locking piece is provided with a groove, and the protrusion can be clamped in the groove.
As a preferred scheme of the quartz boat, a buckle is arranged on the boat cover.
The utility model has the advantages that:
the utility model provides a quartz boat, this quartz boat include the boat body and boat lid, and on the boat body can be located to the boat lid, back on the boat body was located to the boat lid, first draw-in groove and rather than forming square groove between the second draw-in groove that corresponds, this square groove is used for holding two silicon chips, and the edge tight fit of square groove and silicon chip. The square clamping grooves are tightly matched with the edges of the silicon wafers, so that the positions of the silicon wafers can be effectively fixed, the silicon wafers are prevented from being displaced due to abnormal airflow in the process, and the yield of the process steps is improved; when the silicon wafer coating device is used, one sides, which do not need to be coated, of the two silicon wafers are attached to each other and placed in the square clamping grooves, four edges of the two silicon wafers attached to each other are tightly attached to the square clamping grooves, only the outward surfaces of the two silicon wafers in each square clamping groove can be contacted with reaction gas, and the four edges and the inward surfaces cannot be contacted with the reaction gas due to the protection of the square clamping grooves, so that the phenomenon of winding coating of the silicon wafers in a coating process is avoided, and the coating effect of the silicon wafers is ensured; the boat body is provided with the opening structures at the positions of the two adjacent first clamping grooves, and the other two side surfaces of the boat body are also provided with the opening structures, so that the reaction gas can be ensured to be fully contacted with the surface of the silicon wafer, and the film coating effect is improved.
Drawings
FIG. 1 is a schematic structural view of a quartz boat according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a quartz boat in which silicon wafers are placed according to an embodiment of the present invention.
In the figure:
100-a silicon wafer;
1-boat body; 11-a first card sheet;
2-boat cover; 21-a second card sheet; 22-a handle;
3-a rotating shaft; 4-a nut;
5-a latch assembly; 51-a bump; 52-a locking element; 521-groove.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
As shown in fig. 1 to 2, the present embodiment provides a quartz boat, which includes a boat body 1 and a boat cover 2, wherein, the bottom surface and two opposite side surfaces in the boat body 1 are both provided with a plurality of first card boards 11 at intervals and are arranged in pairs, a first clamping groove is formed between the two paired first card boards 11, the boat body 1 is provided with an opening structure at the position of the two adjacent first clamping grooves, the other two side surfaces of the boat body 1 are provided with an opening structure, the boat cover 2 can be covered on the boat body 1, the top surface of the boat cover 2 is provided with a plurality of second card boards 21 at intervals and in pairs, a second clamping groove is formed between the two paired second card boards 21, the boat cover 2 is covered on the boat body 1, a square clamping groove is formed between the first clamping groove and the second clamping groove corresponding to the first clamping groove, two silicon wafers 100 can be accommodated in the square clamping groove, and the square clamping groove is in interference fit with the edges of the silicon wafers 100.
According to the quartz boat provided by the embodiment, the square clamping grooves are in interference fit with the edges of the silicon wafers 100, so that the positions of the silicon wafers 100 can be effectively fixed, the silicon wafers 100 are prevented from being displaced due to abnormal airflow in the process, and the yield of the process steps is improved; when the silicon wafer 100 is used, the sides, which do not need to be coated, of the two silicon wafers 100 are attached to each other and placed in the square clamping grooves, the edges of the two silicon wafers 100 attached to each other are tightly attached to the square clamping grooves, only the outward surfaces of the two silicon wafers 100 in each square clamping groove can be contacted with reaction gas, and the edges and the inward surfaces of the silicon wafers 100 cannot be contacted with the reaction gas due to the protection of the square clamping grooves, so that the phenomenon of winding coating of the silicon wafers 100 in a coating process is avoided, and the coating effect of the silicon wafers 100 is ensured; the boat body 1 is provided with the opening structures at the positions of the two adjacent first clamping grooves, and the other two side surfaces of the boat body 1 are also provided with the opening structures, so that the reaction gas can be ensured to be fully contacted with the surface of the silicon wafer 100, and the film coating effect is improved.
It can be understood that, because the edges of the two silicon wafers 100 are clamped into the square clamping grooves, after the coating process is completed, a ring of annular region, corresponding to the width of the first card plate 11 or the second card plate 21, of undeposited polysilicon is left on the outward surface of the silicon wafer 100, in order not to affect the battery efficiency, in this embodiment, the width L of the first card plate 11 and the second card plate 21 can be controlled to satisfy: l is less than or equal to 0.5mm so as to ensure the film coating effect of the silicon wafer 100.
Preferably, the slot width of the first slot and the slot width of the second slot are both the sum of the thicknesses of the two silicon dies 100. By adopting the arrangement mode, the edges of the two silicon wafers 100 can be tightly attached to the square clamping grooves, and a coating layer is prevented from being formed on the edges of the silicon wafers 100 after reaction gas enters from the gaps between the square clamping grooves and the silicon wafers 100.
In order to facilitate the smooth insertion of the silicon wafer 100 into the square slot, elastic layers are disposed on the slot walls of the first slot and the second slot. When the silicon chip 100 is inserted into the first clamping groove, the elastic layer can deform to increase the groove width of the first clamping groove, so that the silicon chip 100 is smoothly inserted into the first clamping groove, after the silicon chip 100 is inserted into the first clamping groove, the elastic layer can tightly abut against the edge of the silicon chip 100 under the action of elastic restoring force, so that reaction gas is prevented from entering from the gap between the silicon chip 100 and the square clamping groove, and a film coating layer is formed on the inward surface of the silicon chip 100.
Furthermore, an opening at one end of the first clamping groove, which is close to the second clamping groove, is trumpet-shaped, and the trumpet-shaped first clamping groove plays a guiding role in placing the silicon wafer 100, so that the silicon wafer 100 can be conveniently placed.
Further, the boat cover 2 is rotatably provided on the boat body 1. Particularly, the quartz boat further comprises a rotating shaft 3, the rotating shaft 3 penetrates through the boat cover 2, two ends of the rotating shaft 3 are fixed on the boat body 1, and the boat cover 2 can rotate around the rotating shaft 3.
In this embodiment, the rotating shaft 3 is specifically a screw, a through hole is formed in the boat cover 2, a threaded hole is correspondingly formed in the boat body 1, after the screw is inserted into the through hole in the boat cover 2, two ends of the screw are in threaded connection with the threaded hole in the boat body 1, and two ends of the screw are fixed by the nut 4, so that the fixed connection between the screw and the boat body 1 and the rotation setting between the screw and the boat cover 2 are realized.
Further, the quartz boat further comprises a latch assembly 5, and the latch assembly 5 is configured to lock the boat body 1 and the boat cover 2. Through the arrangement of the locking component 5, the boat cover 2 and the boat body 1 can be tightly covered, and the phenomenon that the silicon wafer 100 is plated around due to the fact that the boat body 1 and the boat cover 2 are not tightly covered is prevented.
Specifically, the locking assembly 5 includes a protrusion 51 and a locking piece 52, the protrusion 51 is disposed on one of the boat body 1 and the boat cover 2, the locking piece 52 is rotatably disposed on the other of the boat body 1 and the boat cover 2, a groove 521 is disposed on the locking piece 52, and the protrusion 51 can be clamped in the groove 521. Simple structure and convenient operation.
In this embodiment, two sets of locking assemblies 5 are provided, and the two sets of locking assemblies 5 are disposed at intervals on the sides of the boat body 1 and the boat cover 2 far away from the rotating shaft 3, so as to further realize tight covering of the boat body 1 and the boat cover 2. Of course, in other embodiments, the number of the locking assemblies 5 can be adjusted according to actual conditions to meet the coating requirements of the silicon chip 100.
Preferably, the boat cover 2 is provided with a button 22, and an operator can insert fingers into the button 22 and then rotate the board moving boat cover 2 relative to the boat body 1 to open or close the boat body 1 and the boat cover 2.
The quartz boat provided by the embodiment has the advantages of simple structure and lower manufacturing cost, can effectively avoid the phenomenon of plating winding of the silicon wafer 100 in the film coating process, can also facilitate the cleaning process after film coating, simplifies the process steps and reduces the overall process cost.
The above embodiments have been described only the basic principles and features of the present invention, and the present invention is not limited by the above embodiments, and is not departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A quartz boat, comprising:
the boat comprises a boat body (1), wherein a plurality of first card plates (11) are arranged at intervals and in pairs on the inner bottom surface and two opposite side surfaces of the boat body (1), a first clamping groove is formed between every two first card plates (11) in pairs, the boat body (1) is provided with an opening structure at the position of every two adjacent first clamping grooves, and the other two side surfaces of the boat body (1) are provided with opening structures;
the boat cover (2) can be covered on the boat body (1), a plurality of second card plates (21) are arranged on the top surface of the boat cover (2) at intervals in pairs, and a second clamping groove is formed between the two second card plates (21) in pairs;
the boat cover (2) is arranged on the boat body (1) in a covering mode, a square clamping groove is formed between the first clamping groove and the second clamping groove corresponding to the first clamping groove, two silicon wafers (100) can be contained in the square clamping groove, and the square clamping groove is in interference fit with the edges of the silicon wafers (100).
2. The quartz boat of claim 1, wherein the slot width of the first slot and the slot width of the second slot are both the sum of the thicknesses of the two silicon wafers (100).
3. The quartz boat of claim 2, wherein an elastic layer is disposed on both the slot wall of the first slot and the slot wall of the second slot.
4. The quartz boat of claim 1, wherein the first slot has a flared opening at an end thereof adjacent to the second slot.
5. Quartz boat according to any of claims 1 to 4, characterized in that the boat cover (2) is rotatably arranged on the boat body (1).
6. The quartz boat according to claim 5, further comprising a rotating shaft (3), wherein the rotating shaft (3) is inserted into the boat cover (2), and both ends of the rotating shaft (3) are fixed on the boat body (1), and the boat cover (2) can rotate around the rotating shaft (3).
7. The quartz boat according to claim 6, wherein the rotating shaft (3) is a screw rod, and both ends of the screw rod are fixed on the boat body (1) through nuts (4).
8. The quartz boat according to any of claims 1 to 4, further comprising a latch assembly (5), the latch assembly (5) being configured to latch the boat body (1) and the boat cover (2).
9. The quartz boat according to claim 8, wherein the locking assembly (5) comprises a protrusion (51) and a locking piece (52), the locking piece (52) is disposed on the boat cover (2) when the protrusion (51) is disposed on the boat body (1), and the protrusion (51) is disposed on the boat cover (2) when the locking piece (52) is disposed on the boat body (1);
be provided with recess (521) on the closure (52), arch (51) can the joint in recess (521).
10. The quartz boat according to claim 1, characterized in that the boat cover (2) is provided with a handle (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922254289.0U CN211546662U (en) | 2019-12-16 | 2019-12-16 | Quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922254289.0U CN211546662U (en) | 2019-12-16 | 2019-12-16 | Quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211546662U true CN211546662U (en) | 2020-09-22 |
Family
ID=72506119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922254289.0U Expired - Fee Related CN211546662U (en) | 2019-12-16 | 2019-12-16 | Quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211546662U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114212824A (en) * | 2022-02-23 | 2022-03-22 | 浙江大学杭州国际科创中心 | Method for controllable growth of hexagram single-layer MoS2 |
-
2019
- 2019-12-16 CN CN201922254289.0U patent/CN211546662U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114212824A (en) * | 2022-02-23 | 2022-03-22 | 浙江大学杭州国际科创中心 | Method for controllable growth of hexagram single-layer MoS2 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee after: CSI Cells Co.,Ltd. Patentee after: Atlas sunshine Power Group Co.,Ltd. Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee before: CSI Cells Co.,Ltd. Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200922 Termination date: 20211216 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |