CN211528907U

CN211528907U - Automatic glue dripping nano-imprinting equipment

Info

Publication number: CN211528907U
Application number: CN202020348494.3U
Authority: CN
Inventors: 冀然
Original assignee: Germanlitho Co ltd
Current assignee: Germanlitho Co ltd
Priority date: 2020-03-19
Filing date: 2020-03-19
Publication date: 2020-09-18
Anticipated expiration: 2030-03-19

Abstract

The utility model discloses an automatic drip glue nanometer impression equipment, including the cavity, the inner chamber of cavity passes through elevating gear fixedly connected with heating plate, and the last fixed surface of heating plate is equipped with the tray, has seted up first vacuum groove in the tray, and the tray has the base plate through first vacuum groove vacuum adsorption, and the last lateral wall of cavity passes through the fixed bearing plate that is equipped with of link, has seted up second vacuum groove in the bearing plate, and the spout has been seted up to the upper surface of mounting bracket, and sliding connection has automatic glue dripping device in the spout. Be provided with elevating gear, heating plate, tray, base plate and bearing plate in the cavity, accomplish the nanoimprint operation through elevating gear, heating plate, tray, base plate and bearing plate, at the in-process that carries out the nanoimprint, through automatic glue dripping device to the surperficial dropwise add photoresist of base plate to no longer need use the manual work to drip to the surface of base plate, improve the efficiency of impression greatly, reduced manufacturing cost.

Description

Automatic glue dripping nano-imprinting equipment

Technical Field

The utility model relates to an impression technical field specifically is an automatic drip glue nanometer impression equipment.

Background

The nanoimprint technology is a photoetching technology which is invented by Chinese scientists in 1995 and has low cost and high resolution. In nanoimprinting, copies can be made in large quantities by rather expensive lithography that requires only one time to prepare the stamp. Therefore, the field of nano-pattern replication has been a hot spot of research of scientists of various countries, and various nano-imprinting devices have come up. Most of the processes of the current nanoimprint lithography adopt an artificial glue dripping mode, and glue dripping is carried out through the mode, so that a large amount of manpower is wasted, and mass production is not facilitated. To this end, we propose an automatic dispensing nanoimprint apparatus.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an automatic drip nanometer impression equipment that glues to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an automatic drip nanometer impression equipment, includes the cavity, the inner chamber of cavity passes through elevating gear fixedly connected with heating plate, the last fixed surface of heating plate is equipped with the tray, first vacuum groove has been seted up in the tray, the tray has the base plate through first vacuum groove vacuum adsorption, the last lateral wall of cavity is equipped with the bearing plate through the link is fixed, the second vacuum groove has been seted up in the bearing plate, the bearing plate has the mantle through second vacuum groove vacuum adsorption, the last lateral wall fixed mounting of cavity has the ultraviolet lamp, the left side wall fixed mounting of cavity has the mounting bracket, the spout has been seted up to the upper surface of mounting bracket, sliding connection has automatic glue dripping device in the spout, the left side wall fixed mounting of cavity has electric telescopic handle, and electric telescopic handle's output is inserted to automatic glue dripping device.

Preferably, elevating gear includes the elevating platform of fixed mounting at the cavity inner chamber, fixed mounting has the motor in the elevating platform, the output fixedly connected with of motor rotates the screw rod, the top spiro union of rotating the screw rod has the fixed block, fixed block fixed mounting is at the lower lateral wall of heating plate, be equipped with positioning mechanism between the lower lateral wall of heating plate and the cavity.

Preferably, the positioning mechanism comprises a fixed pipe fixedly installed in the cavity, a telescopic rod is inserted in the fixed pipe, and the top end of the telescopic rod is fixedly connected with the heating plate.

Preferably, the automatic glue dripping device comprises an installation shell, an assembly groove is formed in the installation shell, a positioning groove is formed in the right side wall of the installation shell, a clamping plate is fixedly installed in the assembly groove, and a glue dripping pipe is assembled in the assembly groove.

Preferably, the rubber dripping pipe comprises a rubber dripping pipe main body, a rubber pushing rod is assembled in the rubber dripping pipe main body, a stress plate is fixedly installed at one end of the rubber pushing rod, an internal rubber plug is fixedly installed at the other end of the rubber pushing rod, a rubber dripping needle head is inserted into the rubber dripping pipe main body, a positioning plate is sleeved on the outer side wall of the rubber dripping needle head, and the positioning plate is in threaded connection with the positioning groove through a positioning bolt.

Preferably, the lateral wall fixed mounting of installation casing has the stopper, stopper sliding connection is in the spacing inslot, the inside wall at the spout is seted up to the spacing groove.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model provides an automatic drip glue nanometer impression equipment, be provided with elevating gear in the cavity, the heating plate, a tray, base plate and bearing plate, through elevating gear, the heating plate, a tray, nanometer impression operation is accomplished to base plate and bearing plate, be provided with the mounting bracket, connect automatic drip glue device through electric telescopic handle in the mounting bracket, at the in-process that carries out nanometer impression, through automatic drip glue device to the surperficial dropwise add photoresist of base plate, thereby no longer need use the manual work to drip glue to the surface of base plate, the efficiency of impression is greatly improved, and the production cost is reduced.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a top view of the automatic glue dripping device of the present invention.

In the figure: 1. the device comprises a cavity, 2, a lifting device, 21, a lifting platform, 22, a motor, 23, a rotating screw rod, 24, a fixing block, 25, a positioning mechanism, 25-a, a fixing pipe, 25-b, a telescopic rod, 3, a heating plate, 4, a tray, 5, a first vacuum groove, 6, a base plate, 7, a pressure bearing plate, 8, a second vacuum groove, 9, a soft film, 10, an ultraviolet lamp, 11, a mounting rack, 12, a sliding groove, 13, an automatic glue dripping device, 131, a mounting shell, 132, an assembly groove, 133, a positioning groove, 134, a clamping plate, 135, a glue dripping pipe, 135-a, a glue dripping pipe main body, 135-b, a glue pushing rod, 135-c, a stress plate, 135-d, an internal rubber plug, 135-e, a glue dripping needle head, 135-f, a positioning plate, 14, an electric telescopic rod, 15, a limiting groove, 16 and a limiting block.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 and fig. 2, the present invention provides a technical solution: an automatic glue dripping nano-imprinting device comprises a cavity 1, wherein a heating plate 3 is fixedly connected to the inner cavity of the cavity 1 through a lifting device 2, a tray 4 is fixedly assembled on the upper surface of the heating plate 3, the lifting device 2 comprises a lifting table 21 fixedly installed in the inner cavity of the cavity 1, a motor 22 is fixedly installed in the lifting table 21, an output end of the motor 22 is fixedly connected with a rotating screw 23, a fixing block 24 is screwed on the top end of the rotating screw 23, the fixing block 24 is fixedly installed on the lower side wall of the heating plate 3, a positioning mechanism 25 is assembled between the lower side wall of the heating plate 3 and the cavity 1, the positioning mechanism 25 comprises a fixing pipe 25-a fixedly installed in the cavity 1, a telescopic rod 25-b is inserted in the fixing pipe 25-a, the top end of the telescopic rod 25-b is fixedly connected with the heating plate 3, and the motor 22 is connected with an external, the power supply and control are carried out by an external control power supply, the motor 22 is a pulse stepping motor, and the fixed block 24 can be lifted by controlling the positive rotation or the negative rotation of the output end of the motor 22 by sending a pulse signal to the motor 22, so that the tray 4 is lifted.

A first vacuum groove 5 is arranged in the tray 4, the tray 4 is vacuum-adsorbed with a substrate 6 through the first vacuum groove 5, the tray 4 is used for containing the substrate 6, a plurality of micropores connected with an external vacuum pump or an air suction pump are arranged in the first vacuum groove 5, the external vacuum pump is connected with an external control unit, power is supplied by the external control unit, when the external vacuum pump is electrified and opened, the first vacuum groove 5 generates suction force to adsorb and fix the substrate 6, the substrate 6 is silicon chip or glass, a bearing plate 7 is welded on the upper side wall of the cavity 1 through a connecting frame, a second vacuum groove 8 is arranged in the bearing plate 7, a plurality of micropores connected with the external vacuum pump or the air suction pump are also arranged in the second vacuum groove 8, the external vacuum pump is connected with the external control unit and is powered by the external control unit, when the external vacuum pump is electrified and opened, the second vacuum groove 8 generates suction force, make bearing plate 7 have the mantle 9 through 8 vacuum adsorption in second vacuum chamber, the observation window has been seted up in the center department of bearing plate 7, cavity 1's last lateral wall fixed mounting has ultraviolet lamp 10, external power source is connected to ultraviolet lamp 10, it provides the light source to open the solidification of back for the colloid when ultraviolet lamp 10 circular telegram, cavity 1's left side wall fixed mounting has mounting bracket 11, spout 12 has been seted up to mounting bracket 11's upper surface, sliding connection has automatic glue dripping device 13 in spout 12, cavity 1's left side wall fixed mounting has electric telescopic handle 14, and electric telescopic handle 14's output is pegged graft to automatic glue dripping device 13 in, as shown in figure 1, electric telescopic handle 14 connects external control unit, through the flexible of 14 output of external control unit control electric telescopic handle, can operate automatic glue dripping device 13.

Automatic glue dripping device 13 is including installing casing 131, set up assembly groove 132 in the installation casing 131, and the right side wall of installation casing 131 has seted up constant head tank 133, fixed mounting has cardboard 134 in the assembly groove 132, be equipped with glue dripping pipe 135 in the assembly groove 132, the lateral wall fixed mounting of installation casing 131 has stopper 16, stopper 16 sliding connection is in spacing groove 15, the inside wall at spout 12 is seted up to spacing groove 15, as shown in fig. 1, when electric telescopic handle 14 promotes installation casing 131 and removes in spout 12, after installation casing 131 removes the rightmost end of spout 12, the position of installation casing 131 is injectd by spout 12, then electric telescopic handle 14's output is forward once more, glue dripping pipe 135 carries out the glue dripping through the extrusion, through setting up stopper 16 and spacing groove 15, make the removal of installation casing 131 more steady.

The glue dripping pipe 135 comprises a glue dripping pipe main body 135-a, a glue pushing rod 135-b is assembled in the glue dripping pipe main body 135-a, a stress plate 135-c is fixedly installed at one end of the glue pushing rod 135-b, an internal rubber plug 135-d is fixedly installed at the other end of the glue pushing rod 135-b, a glue dripping needle 135-e is inserted in the glue dripping pipe main body 135-a, a positioning plate 135-f is sleeved on the outer side wall of the glue dripping needle 135-e, the positioning plate 135-f is in threaded connection with a positioning groove 133 through a positioning bolt, the glue dripping pipe 135 can be fixed through the threaded connection of the positioning bolt and the positioning groove 133, meanwhile, the glue dripping pipe 135 is convenient to replace, the stress plate 135-c is used for bearing the thrust of the output end of the electric telescopic rod 14, the internal rubber plug 135-d pushes the glue to drip out from the glue dripping needle 135-e through the movement of the glue pushing rod 135-, and (5) finishing glue dripping.

The working principle is as follows: in the using process, the soft film 9 is firstly adsorbed and fixed below the bearing plate 8, then the base plate 6 is adsorbed and fixed on the tray 4, the output end of the electric telescopic rod 14 is controlled to move, the automatic glue dripping device 13 slides in the sliding chute 12, when the automatic glue dripping device 13 moves to the right end, the output end of the electric telescopic rod 14 moves again to push the stress plate 135-c of the glue dripping tube 135, so that the glue dripping tube 135 drips glue on the surface of the base plate 6, after the glue dripping is finished, the electric telescopic rod 14 drives the automatic glue dripping device 13 to reset, then the lifting device 2 drives the substrate 6 to move upwards, so that the substrate 6 is in parallel contact with the soft film 9 at a constant speed, the photoresist is uniformly spread, the ultraviolet lamp 2 or the heating plate 8 is selected according to the type of the colloid to fully cure the colloid, and after the curing is finished, the lifting device 2 controls the substrate 6 to move downwards to finish the separation of the substrate 6 and the soft film 9.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides an automatic drip nanometer stamping equipment, includes cavity (1), its characterized in that: the inner chamber of cavity (1) passes through elevating gear (2) fixedly connected with heating plate (3), the last fixed surface of heating plate (3) is equipped with tray (4), first vacuum groove (5) have been seted up in tray (4), tray (4) have base plate (6) through first vacuum groove (5) vacuum adsorption, the last lateral wall of cavity (1) is equipped with bearing plate (7) through link fixed, second vacuum groove (8) have been seted up in bearing plate (7), bearing plate (7) have mantle (9) through second vacuum groove (8) vacuum adsorption, the last lateral wall fixed mounting of cavity (1) has ultraviolet lamp (10), the left side wall fixed mounting of cavity (1) has mounting bracket (11), spout (12) have been seted up to the upper surface of mounting bracket (11), sliding connection has automatic glue dripping device (13) in spout (12), an electric telescopic rod (14) is fixedly mounted on the left side wall of the cavity (1), and the output end of the electric telescopic rod (14) is inserted into the automatic glue dripping device (13).

2. The automatic dispensing nanoimprint lithography apparatus of claim 1, characterized in that: elevating gear (2) include elevating platform (21) of fixed mounting at cavity (1) inner chamber, fixed mounting has motor (22) in elevating platform (21), the output fixedly connected with of motor (22) rotates screw rod (23), the top spiro union of rotating screw rod (23) has fixed block (24), fixed block (24) fixed mounting is at the lower lateral wall of heating plate (3), be equipped with positioning mechanism (25) between the lower lateral wall of heating plate (3) and cavity (1).

3. The automatic dispensing nanoimprint lithography apparatus of claim 2, characterized in that: the positioning mechanism (25) comprises a fixed pipe (25-a) fixedly installed in the cavity (1), an expansion rod (25-b) is inserted in the fixed pipe (25-a), and the top end of the expansion rod (25-b) is fixedly connected with the heating plate (3).

4. The automatic dispensing nanoimprint lithography apparatus of claim 1, characterized in that: automatic glue dripping device (13) is including installing casing (131), set up assembly groove (132) in installation casing (131), and the right side wall of installing casing (131) has seted up constant head tank (133), fixed mounting has cardboard (134) in assembly groove (132), it drips rubber pipe (135) to assemble the assembly in groove (132).

5. The automatic dispensing nanoimprint lithography apparatus of claim 4, wherein: the rubber dropping tube (135) comprises a rubber dropping tube main body (135-a), a rubber pushing rod (135-b) is assembled in the rubber dropping tube main body (135-a), a stress plate (135-c) is fixedly installed at one end of the rubber pushing rod (135-b), an internal rubber plug (135-d) is fixedly installed at the other end of the rubber pushing rod (135-b), a rubber dropping needle head (135-e) is inserted into the rubber dropping tube main body (135-a), a positioning plate (135-f) is sleeved on the outer side wall of the rubber dropping needle head (135-e), and the positioning plate (135-f) is in threaded connection with a positioning groove (133) through a positioning bolt.

6. The automatic dispensing nanoimprint lithography apparatus of claim 4, wherein: the lateral wall fixed mounting of installation casing (131) has stopper (16), stopper (16) sliding connection is in spacing groove (15), the inside wall at spout (12) is seted up in spacing groove (15).