CN211492476U

CN211492476U - Nano-imprinting equipment capable of automatically demoulding

Info

Publication number: CN211492476U
Application number: CN202020089014.6U
Authority: CN
Inventors: 冀然
Original assignee: Germanlitho Co ltd
Current assignee: Germanlitho Co ltd
Priority date: 2020-01-16
Filing date: 2020-01-16
Publication date: 2020-09-15
Anticipated expiration: 2030-01-16

Abstract

The utility model discloses a but nanoimprint equipment of automatic demoulding, including the cavity, the inner chamber of cavity is equipped with the locating plate through the support frame is fixed, and the upper surface of locating plate is through first supporting mechanism, second supporting mechanism and third supporting mechanism fixedly connected with heating plate, and the upper surface of heating plate is equipped with tray and base plate in proper order. Through the control to first supporting mechanism, second supporting mechanism and third supporting mechanism, can make first supporting mechanism, second supporting mechanism and third supporting mechanism independent motion also can the joint motion, carry out the in-process of drawing of patterns after accomplishing the impression, through control second supporting mechanism and the slow decline of third supporting mechanism, make and form certain contained angle between soft mould and the base plate to alleviate the influence of drawing of patterns power and adhesion to drawing of patterns process among the drawing of patterns process, improve the reuse rate of soft mould.

Description

Nano-imprinting equipment capable of automatically demoulding

Technical Field

The utility model relates to a nanometer impression technical field specifically is a nanometer impression equipment that can automatic drawing of patterns.

Background

The nanoimprint technology is known as one of the ten new and emerging technologies for changing the world, and the basic idea is to transfer the pattern on the mask plate onto the substrate through a transfer medium, wherein the transfer medium mostly uses a polymer film (such as PMMA, PDMS, and the like). The technology is simple in equipment and short in preparation time, and the imprinting template can be repeatedly used, so that the technology is concerned by researchers all over the world, but demolding is one of bottlenecks which restrict the nano imprinting from entering industrial application. At present, for parallel demoulding, namely parallel separation between a flexible mould and a cured photoresist, the defects of local tearing of the flexible mould, substrate fracture and the like are easily caused in the demoulding process due to the large demoulding force required in the demoulding process, and the parallel demoulding is mainly realized by manual separation.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a but nanoimprint equipment of automatic demoulding to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a nanometer impression equipment that can automatic drawing of patterns, includes the cavity, the inner chamber of cavity is equipped with the locating plate through support frame is fixed, the upper surface of locating plate is through first supporting mechanism, second supporting mechanism and third supporting mechanism fixedly connected with heating plate, the upper surface of heating plate has assembled tray and base plate in proper order, the fixed ultraviolet lamp that is equipped with of lateral wall on the inner chamber of cavity, lateral wall bilateral symmetry fixed mounting has the support on the inner chamber of cavity, the bottom fixedly connected with clamp plate of support, the lower lateral wall of clamp plate has assembled soft mould and anchor clamps in proper order.

Preferably, first supporting mechanism, second supporting mechanism and third supporting mechanism are triangular distribution, first supporting mechanism, second supporting mechanism and third supporting mechanism's structure is the same, first supporting mechanism includes the casing, be equipped with servo motor through motor cabinet fixed mounting in the casing, servo motor's output fixedly connected with conical gear, the upper surface of locating plate rotates and is connected with the swivel becket, the center department spiro union of swivel becket has the screw rod that runs through the casing, the top of screw rod and the lower lateral wall fixed connection of heating plate, the drive tooth's socket has been seted up to the lateral wall of swivel becket, drive tooth's socket meshes with conical gear mutually.

Preferably, a transparent part is arranged in the middle of the pressing plate, and the size of the transparent part is the same as that of the tray.

Preferably, the substrate is fixed to the tray by suction through a vacuum chamber.

Preferably, the flexible mold is fixed to the lower side wall of the pressing plate through a vacuum groove in an adsorption manner, and the clamp is fixed to the lower side wall of the pressing plate through a magnet in an adsorption manner.

Preferably, the middle part of the clamp is hollowed out, and the hollowed-out part of the clamp is larger than the size of the tray.

Compared with the prior art, the beneficial effects of the utility model are that: a nanometer stamping device capable of demoulding automatically is provided, a first supporting mechanism, a second supporting mechanism and a third supporting mechanism are arranged to connect a positioning plate with a heating plate, the first supporting mechanism, the second supporting mechanism and the third supporting mechanism are distributed on the positioning plate in a triangular shape, and through controlling the first supporting mechanism, the second supporting mechanism and the third supporting mechanism, the first supporting mechanism, the second supporting mechanism and the third supporting mechanism can be moved independently or in combination, in the process of demoulding after finishing impressing, the second supporting mechanism and the third supporting mechanism are controlled to slowly descend to form a certain included angle between the flexible mould and the substrate, therefore, the influence of the demolding force and the adhesion force on the demolding process in the demolding process is relieved, the repeated utilization rate of the flexible mold is improved, and the demolding process is completed along with the slow descending of the first supporting mechanism, the second supporting mechanism and the third supporting mechanism.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a detailed view of fig. 1 at a.

Fig. 3 is a schematic structural view of the mold release start position of the present invention.

Fig. 4 is a schematic structural view of the positioning plate of the present invention.

In the figure: 1. the device comprises a cavity, 2, a support frame, 3, a positioning plate, 4, a first support mechanism, 41, a shell, 42, a motor base, 43, a servo motor, 44, a bevel gear, 45, a rotating ring, 46, a screw rod, 47, a driving tooth groove, 5, a second support mechanism, 6, a third support mechanism, 7, a heating plate, 8, a tray, 9, a base plate, 10, an ultraviolet lamp, 11, a support, 12, a pressing plate, 13, a soft mold, 14, a clamp, 15, a transparent part, 16 and a magnet.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, fig. 2, fig. 3 and fig. 4, the present invention provides a technical solution: a nanometer stamping device capable of automatically demoulding comprises a cavity 1, a positioning plate 3 is fixedly assembled in the inner cavity of the cavity 1 through a supporting frame 2, the bottom end of the supporting frame 2 is welded in the cavity 1, the top end of the supporting frame 2 is welded with the positioning plate 3, the upper surface of the positioning plate 3 is fixedly connected with a heating plate 7 through a first supporting mechanism 4, a second supporting mechanism 5 and a third supporting mechanism 6, the heating plate 7 is electrically connected with an external power supply and can heat a tray 8 after being electrified and opened, the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 are distributed in a triangular shape, the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 are identical in structure, the first supporting mechanism 4 comprises a shell 41, a servo motor 43 is fixedly assembled in the shell 41 through a motor base 42, and a bevel gear 44 is fixedly connected with the output end of the servo motor 43, the upper surface of the positioning plate 3 is rotatably connected with a rotating ring 45, the center of the rotating ring 45 is screwed with a screw 46 penetrating through the shell 41, the top end of the screw 46 is fixedly connected with the lower side wall of the heating plate 7, the outer side wall of the rotating ring 45 is provided with a driving tooth socket 47, the driving tooth socket 47 is meshed with a bevel gear 44, the top ends of the screws 46 of the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 are all welded with the bottom of the heating plate 7, the servo motors 43 of the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 are all electrically connected with an external PLC controller, the PLC is used for supplying power to the servo motor 43 and controlling linkage of the servo motor 43, single movement of the servo motor 43 can be realized through a servo driver, and after the output end of the servo motor 43 drives the bevel gear 44 to rotate the rotating ring 45, the screw rod 46 screwed in the rotating ring 45 can move up and down.

The upper surface of heating plate 7 is equipped with tray 8 and base plate 9 in proper order, base plate 9 adsorbs fixedly through vacuum groove and tray 8, the fixed ultraviolet lamp 10 that is equipped with of lateral wall on the inner chamber of cavity 1, lateral wall bilateral symmetry fixed mounting has support 11 on the inner chamber of cavity 1, the bottom fixedly connected with clamp plate 12 of support 11, the middle part of clamp plate 12 is equipped with transparent portion 15, the size of transparent portion 15 is the same with tray 8's size, ultraviolet lamp 10 electricity is connected with external power source, can heat the below through transparent portion 15 after the circular telegram is opened, the lower lateral wall of clamp plate 12 is equipped with soft mould 13 and anchor clamps 14 in proper order, soft mould 13 adsorbs fixedly through vacuum groove and clamp plate 12's lower lateral wall, anchor clamps 14 pass through magnet 16 and adsorb the lower lateral wall of fixing at clamp plate 12, the mid portion fretwork of anchor clamps 14, the fretwork part of anchor.

The working principle is as follows: in the using process, the servo motors 43 of the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 are respectively controlled to enable the top ends of the screws 46 of the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 to be at the same horizontal position, so that the heating plate 7 and the pressing plate 12 are kept parallel, photoresist is dripped on the surface of the substrate 9, the servo motors 43 of the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 are simultaneously controlled to rotate at a constant speed after the dripping is finished, the substrate 9 rises at a constant speed to be in contact with the soft mold 13 to finish imprinting, then the heating plate 7 or the ultraviolet lamp 10 is opened to solidify the photoresist, in the demolding process, the three servo motors 43 of the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 are linked first, the substrate 9 is lowered to the position just separated from the soft mold 16 at a set speed and then stops moving, as shown in fig. 3, according to the position where the demolding starts, the servo motors 43 of the second supporting mechanism 5 and the third supporting mechanism 6 are started to make the screws 46 of the second supporting mechanism 5 and the third supporting mechanism 6 slowly descend to appropriate heights respectively, and at this time, a certain included angle is formed between the flexible mold 13 and the substrate 9, so that the influence of the demolding force and the adhesion force on the demolding process in the demolding process is relieved, the repeated utilization rate of the flexible mold 13 is improved, and finally, the screws 46 of the first supporting mechanism 4, the second supporting mechanism 5 and the third supporting mechanism 6 are controlled to slowly descend to complete the demolding process.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A nanoimprint equipment capable of automatically demolding comprises a cavity (1), and is characterized in that: the inner chamber of cavity (1) is equipped with locating plate (3) through support frame (2) fixed mounting, the upper surface of locating plate (3) is through first supporting mechanism (4), second supporting mechanism (5) and third supporting mechanism (6) fixedly connected with heating plate (7), the upper surface of heating plate (7) has been equipped with tray (8) and base plate (9) in proper order, the fixed assembly of lateral wall is equipped with ultraviolet lamp (10) on the inner chamber of cavity (1), lateral wall bilateral symmetry fixed mounting has support (11) on the inner chamber of cavity (1), the bottom fixedly connected with clamp plate (12) of support (11), the lower lateral wall of clamp plate (12) has been equipped with soft mould (13) and anchor clamps (14) in proper order.

2. An automatically releasable nanoimprinting apparatus as claimed in claim 1, characterized in that: the first supporting mechanism (4), the second supporting mechanism (5) and the third supporting mechanism (6) are distributed in a triangular shape, the first supporting mechanism (4), the second supporting mechanism (5) and the third supporting mechanism (6) have the same structure, the first supporting mechanism (4) comprises a shell (41), a servo motor (43) is fixedly assembled in the shell (41) through a motor base (42), the output end of the servo motor (43) is fixedly connected with a bevel gear (44), the upper surface of the positioning plate (3) is rotatably connected with a rotating ring (45), the center of the rotating ring (45) is screwed with a screw rod (46) penetrating through the shell (41), the top end of the screw rod (46) is fixedly connected with the lower side wall of the heating plate (7), the outer side wall of the rotating ring (45) is provided with a driving tooth groove (47), and the driving tooth groove (47) is meshed with the conical gear (44).

3. An automatically releasable nanoimprinting apparatus as claimed in claim 1, characterized in that: the middle part of the pressing plate (12) is provided with a transparent part (15), and the size of the transparent part (15) is the same as that of the tray (8).

4. An automatically releasable nanoimprinting apparatus as claimed in claim 1, characterized in that: the substrate (9) is fixedly adsorbed with the tray (8) through the vacuum groove.

5. An automatically releasable nanoimprinting apparatus as claimed in claim 1, characterized in that: the flexible mold (13) is fixedly adsorbed to the lower side wall of the pressing plate (12) through a vacuum groove, and the clamp (14) is fixedly adsorbed to the lower side wall of the pressing plate (12) through a magnet (16).

6. An automatically releasable nanoimprinting apparatus as claimed in claim 1, characterized in that: the middle part of the clamp (14) is hollowed, and the hollowed part of the clamp (14) is larger than the size of the tray (8).