CN211528136U - Optical processing device required for measuring ultra-small contact angle value - Google Patents
Optical processing device required for measuring ultra-small contact angle value Download PDFInfo
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- CN211528136U CN211528136U CN201921832582.4U CN201921832582U CN211528136U CN 211528136 U CN211528136 U CN 211528136U CN 201921832582 U CN201921832582 U CN 201921832582U CN 211528136 U CN211528136 U CN 211528136U
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Abstract
The utility model discloses an optical processing device that measurement of super little contact angle value required adoption belongs to interface chemistry analysis test technical field. The device comprises an optical mechanism, a sample measuring mechanism and an imaging device. The utility model effectively reduces the problem that the background light diffuse reflection in the small contact angle liquid drop causes the ineffective imaging or the liquid drop edge profile is not clear; meanwhile, due to the fact that the micron-sized two-dimensional horizontal adjusting mechanism is adopted in the sample stage and the imaging system, the problem that background light is used for blocking light or liquid drops are blocked integrally is effectively solved, the purpose that small contact angles can be measured conveniently with high precision is achieved, the possibility of testing small contact angle values in high-precision industries such as semiconductors, wafers, air conditioners and the like is provided, the precision and the reliability of measured values are greatly improved, the measured values are high in precision, operation is convenient, and the method has high popularization value.
Description
Technical Field
The utility model relates to an optical processing device that measurement of super little contact angle value required adoption belongs to interface chemistry analysis test technical field.
Background
The contact angle is the most important index for characterizing the physicochemical properties of the solid material, and in general, in the case where the probe liquid is distilled water or ultrapure water, a contact angle value of less than 10 degrees is called a hydrophilic contact angle; for contact angle values greater than 140 degrees, a hydrophobic contact angle is referred to.
Typically, the contact angle measuring device comprises a background light source, an XYZ-movable sample stage, and an imaging system comprising a camera, a microscope, and is substantially similar in composition to a horizontal microscope or a flatness tester. The commercial or conventional contact angle testing device can meet the requirements under the conditions of low requirements or non-strict requirements on precision, but in special cases, particularly when the contact angle value or the hydrophilic contact angle is measured at an ultra-small value, the precision of the measured value result is seriously influenced by the cooperation of the conventional optical design and the mechanical structure, and even the problem that effective imaging cannot be realized occurs.
Under the combined conditions of conventional optical design and mechanical bonding thereof, after a water drop is dropped on the tested solid material, no effective image is formed at all, and thus an effective contact angle value cannot be tested. The main reason why the image cannot be formed or the outline edge of the liquid drop is not clear is that the backlight imaging optical structure comprises a light source and a light softening plate, and the light softening plate can cause the background light to form diffuse scattering light. When the contact angle is small (typically less than 15 degrees), a limit angle of total reflection can be reached and light from the upper part of the light source can be reflected from the top of the drop, resulting in no or an unclear image profile of the drop.
Meanwhile, for a droplet with a small angle contact angle value, especially a contact angle lower than 10 degrees or 5 degrees, the droplet height is usually very small, about 0.2mm or less, so that the levelness of the upper surface of the mechanism of the sample is consistent with the imaging system (including a camera and a microscope lens), which obviously affects the accurate measurement of the height and the final angle measurement. In the actual measurement process, the situation that the background light is blocked or the whole liquid drops are blocked due to inconsistent levelness often occurs.
At present, only the pitching adjustment function under the one-dimensional condition of the lens and the adjustment functions of the four supporting legs of the instrument with adjustable height are considered in the commercialized contact angle measuring instrument or flatness measuring instrument. Under the structural design condition, the upper surface of the mechanism of the sample stage is generally adjusted to be horizontal through the adjustment of four (or three) supporting legs with adjustable height, and then the pitching angle of the lens is adjusted; in the case where the top surface of the sample is not horizontal, it is highly likely that the droplet is blocked by light or the whole is blocked.
The ultra-small contact angle or hydrophilic contact angle is widely applied to the research of new materials, the semiconductor industry, the production industry of wafers and silicon wafers and the air conditioner industry. Therefore, a new optical structure and a new testing device for mechanical structure cooperating with the optical structure are urgently needed to meet the requirements of research and development and high-precision measurement of quality control in these industries.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve lies in: the optical processing device is used for measuring the ultra-small contact angle value, and solves the problem that the outline edge of a liquid drop with a small-angle contact angle value or a liquid drop with a small-angle contact angle cannot be effectively imaged at present.
The utility model discloses the technical problem that will solve takes following technical scheme to realize:
an optical processing device required for measuring an ultra-small contact angle value comprises an optical mechanism, a sample measuring mechanism and an imaging device, the optical mechanism comprises an electrical box, a background light, a triangular supporting block, a movable structure, a light screen, a light softening plate and a light path structure, the sample measuring mechanism comprises a sample table and two-dimensional horizontal adjusting mechanisms, the electric box, the sample measuring mechanism and the imaging device are sequentially arranged from left to right, the background light and the light softening plate are respectively and fixedly arranged at two sides of the interior of the electrical box, the triangular supporting block is fixedly arranged at the top of the electrical box, the light screen is fixed at one side of the triangular supporting block through a movable structure, and one side of the light screen is close to the light softening plate, the sample stage is fixedly arranged on one of the two-dimensional horizontal adjusting mechanisms, and the imaging device is fixedly arranged on the other two-dimensional horizontal adjusting mechanism.
As a preferred example, the light shielding plate may adopt a grating structure, and a movable structure that can move the light shielding plate left and right is also added.
By adopting the scheme, the light shielding plate adopts a grating structure, and a movable structure capable of moving left and right is added to adjust the position of the processed background light source, and the deletion precision of the diffuse reflection light is adjusted at high precision by moving the grating position up and down, left and right; by rotating the knob of the grating, the quantity of the background light is enlarged or contracted, and the diffuse reflection quantity of the background light is effectively reduced.
Through the two light shading plate technologies, diffuse reflection light of background light is effectively deleted, so that the influence of the diffuse reflection background light on the imaging of the small-contact-angle liquid drop or the influence of the definition is effectively solved, and the most scientific, reasonable and high-precision solution is provided for the measurement of the small-angle contact angle.
As preferred example, but movable structure includes lead screw, guide rail, fixed block, slider, the fixed block passes through the screw fixation in one side of triangular support block, the guide rail is also fixed in one side of triangular support block to be located the bottom of fixed block, the lead screw thread cup joints on the fixed block, just the bottom and the slider fixed connection of lead screw, one side and the guide rail sliding connection of slider, the top of light screen is fixed on the slider, just light screen, the board of softening all are located same one side of electric box, the one end tip of lead screw still is equipped with the knob.
Adopt above-mentioned scheme, through rotating the knob on the lead screw, drive the slider and remove on the guide rail, drive the light screen then and reciprocate for the sheen board is doing to when the light screen is opened, the backlight diffuse reflection appears, when the light screen passes through the formation of image diagonal position that the knob slowly is close the liquid drop, forms background light's deletion effect, thereby the diffuse reflection light problem of the light on liquid drop upper portion when having solved the backlight diffuse reflection.
As a preferred example, each of the two-dimensional horizontal adjusting mechanisms includes a mechanism upper surface, a plurality of fixed seats, two movable mechanisms, a mechanism lower surface, two tension springs and a steel ball, wherein the tension springs are provided at two ends of each tension spring respectively fixed to the mechanism upper surface and the mechanism lower surface, the mechanism upper surface is movably connected to the two fixed seats through the movable mechanisms, the fixed seats are provided at two ends, the mechanism lower surfaces are jointly and fixedly mounted on the tops of the two fixed seats, the movable mechanisms are also provided at two ends, the two movable mechanisms are respectively disposed on the two fixed seats, and the steel ball and the two movable mechanisms are respectively disposed at three edges between the mechanism upper surface and the mechanism lower surface.
By adopting the scheme, the purpose is that the upper surface of the mechanism moves relative to the lower surface of the mechanism through the movement of the movable mechanism and under the assistance of the tension springs, so that the two-dimensional horizontal adjusting mechanism can realize the adjustment on the two-dimensional levelness.
As a preferred example, the sample stage and/or the fixing plate are fixed on the upper surface of the mechanism.
By adopting the scheme, the purpose is to adjust the sample table and/or the fixing plate along with the adjustment of the two-dimensional horizontal adjusting mechanism on the two-dimensional level along with the adjustment of the two-dimensional levelness.
As a preferred example, the imaging device includes a microscope, a camera, and a fixing plate, the microscope is fixedly connected with the camera through a screw, and the microscope and the camera are fixed on the fixing plate through a bolt, and the fixing plate is further fixed with the upper surface of the other two-dimensional horizontal adjusting mechanism through a screw.
By adopting the scheme, the whole formed by the microscope and the camera is adjusted on the two-dimensional levelness along with the fixed plate by adjusting the fixed plate on the upper surface of the mechanism on the two-dimensional levelness, so that the high precision of the whole formed by the camera and the microscope is ensured.
As a preferred example, each of the movable mechanisms includes a supporting triangle block, a differential head and a pin, the supporting triangle block is fixed on the fixed seat through the pin, the differential head is fixedly installed on the fixed seat through a jackscrew, and the fixed seat is fixedly installed on the upper surface of the mechanism through a bolt.
By adopting the scheme, the moving position of the differential head is adjusted, the upper surface of the mechanism is jacked up or the distance between the upper surface of the mechanism and the lower surface of the mechanism is tightened by the tension spring when the differential head retracts, so that the levelness problem under the condition of high-precision adjustment in a two-dimensional space is realized.
The utility model has the advantages that: the utility model effectively reduces the problem that the background light diffuse reflection in the small contact angle liquid drop causes the ineffective imaging or the liquid drop edge profile is not clear; meanwhile, due to the fact that micron-sized two-dimensional horizontal adjusting mechanisms are adopted in the sample stage and the imaging system, the problem that background light is used for blocking light or liquid drops are blocked integrally is effectively solved, the purpose of conveniently measuring small contact angles with high precision is achieved, the possibility of testing small contact angle values in high-precision industries such as semiconductors, wafers, air conditioners and the like is provided, the precision and the reliability of measured values are greatly improved, the measured values are high in precision, operation is convenient, and the method has high popularization value.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a diagram illustrating a state of the optical shutter of the middle optical mechanism according to the present invention when it is opened;
FIG. 3 is a diagram illustrating a state of the light shielding plate of the optical mechanism of the present invention during light shielding;
FIG. 4 is a diagram of the optical mechanism according to the present invention, showing a state when the rear shielding plate is opened;
FIG. 5 is a state diagram of the optical mechanism of the present invention when the rear light shielding plate shields light;
FIG. 6 is a front view of a two-dimensional horizontal adjusting mechanism of the sample stage and the imaging system apparatus of the present invention;
fig. 7 is a top view of the two-dimensional horizontal adjusting mechanism of the sample stage and the imaging system device of the present invention.
In the figure: the device comprises a background lamp 1, a triangular support block 2, a movable structure 3, a light screen 4, a light path structure 5, a mechanism lower surface 6, a sample table 7, a microscope 8, a camera 9, a two-dimensional horizontal adjusting mechanism 10, a movable mechanism 11, a light softening plate 12, a screw rod 13, a guide rail 14, a fixed block 15, a sliding block 16, a mechanism upper surface 17, a fixed seat 18, a small liquid droplet 19, a triangular support block 20, a differential head 21, a tension spring 22, a steel ball 23 and a pin 24.
Detailed Description
In order to make the technical means, the creation features, the achievement purposes and the functions of the present invention easy to understand and understand, the present invention is further explained by combining the following specific drawings.
As shown in fig. 1-7, an optical processing device required for measuring an ultra-small contact angle value comprises an optical mechanism, a sample measuring mechanism and an imaging device, wherein the optical mechanism comprises an electrical box, a background lamp 1, a triangular support block 2, a movable structure 3, a light screen 4, a light softening plate 12 and a light path structure 5, the sample measuring mechanism comprises a sample stage 7 and two-dimensional horizontal adjusting mechanisms 10, the electrical box, the sample measuring mechanism and the imaging device are sequentially arranged from left to right, the background lamp 1 and the light softening plate 12 are respectively and fixedly arranged at two sides of the interior of the electrical box, the triangular support block 2 is fixedly arranged at the top of the electrical box, the light screen 4 is fixed at one side of the triangular support block 2 through the movable structure 3, one side of the light shading plate 4 is close to the light softening plate 12, the sample table 7 is fixedly arranged on one two-dimensional horizontal adjusting mechanism 10, and the imaging device is fixedly arranged on the other two-dimensional horizontal adjusting mechanism 10.
But movable structure 3 includes lead screw 13, guide rail 14, fixed block 15, slider 16, fixed block 15 passes through the screw fixation in one side of triangular support block 2, guide rail 14 also fixes in one side of triangular support block 2, and be located the bottom of fixed block 15, lead screw 13 screw thread cup joints on fixed block 15, and the bottom and the slider 16 fixed connection of lead screw 13, one side and the guide rail 14 sliding connection of slider 16, the top of light screen 4 is fixed on slider 16, and light screen 4, the board 12 that softens all is located the same one side of electric box, the one end tip of lead screw 13 still is equipped with the knob.
Every two-dimentional horizontal adjustment mechanism 10 includes mechanism upper surface 17, fixing base 18, moving mechanism 11, mechanism lower surface 6, extension spring 22 and steel ball 23, and the number of extension spring 22 is a plurality of, the both ends of every extension spring 22 are fixed mutually with mechanism upper surface 17 and mechanism lower surface 6 respectively, mechanism upper surface 17 still passes through moving mechanism 11 and two fixing base 18 swing joint, the number of fixing base 18 is two, mechanism lower surface 6 is common fixed mounting at the top of two fixing base 18, moving mechanism 11's number also is two, and two moving mechanism 11 establish respectively on two fixing base 18, and steel ball 23 and two moving mechanism are located the three edge between the mechanism upper surface 17 and the mechanism lower surface 6 two respectively.
The sample stage 7 and/or the holding plate are fixed to the upper surface 17 of the mechanism.
The imaging device comprises a microscope 8, a camera 9 and a fixing plate, wherein the microscope 8 is fixedly connected with the camera 9 through screws, the microscope 8 and the camera 9 are fixed on the fixing plate through bolts, and the fixing plate is further fixed with the mechanism upper surface 17 of the other two-dimensional horizontal adjusting mechanism 10 through screws.
Each movable mechanism 11 comprises a triangular supporting block 20, a differential head 21 and a pin 24, the triangular supporting block 20 is fixed on a fixed seat 18 through the pin 24, the differential head 21 is fixedly installed on the fixed seat 18 through a jackscrew, and the fixed seat 18 is fixedly installed on the upper surface 17 of the mechanism through a bolt.
The light path is emitted by the backlight 1, emitted onto the droplet 19 and then captured by the camera 9 and microscope 8.
The working principle is as follows:
firstly, adjusting the two-dimensional levelness of the imaging device through one two-dimensional horizontal adjusting mechanism 10;
II, dripping the small liquid drops 19 on the upper surface of the mechanism of the tested sample, and then adjusting the two-dimensional horizontal adjusting mechanism 10 of the sample table 7 for bearing the tested sample, namely adjusting the profiles of the water drops by adjusting different positions of the differential heads 21 and the movable mechanism 26 to form the condition that the background light is not blocked and the whole water drops are not blocked;
III, a knob on a screw rod 13 is rotated to drive a sliding block 16 to move on a guide rail 14, and then a light shielding plate 4 is driven to move up and down relative to a light softening plate 12, so that when the light shielding plate 14 is opened, diffuse reflection of a background light 1 occurs, and when the light shielding plate 14 is slowly close to the imaging diagonal position of the liquid drop through the knob, a background light deleting effect is formed, and therefore the problem of diffuse reflection of light on the upper part of the liquid drop during diffuse reflection of the background light is solved;
IV, through the mutual cooperation of I, II, III, finally solve the present unable liquid drop of effective formation of image low angle contact angle value or the unclear problem of the profile edge formation of low angle contact angle liquid drop, promoted the precision and the reliability of survey value, survey value precision is high, convenient operation has very high spreading value.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that various changes and modifications may be made without departing from the spirit and scope of the invention, and such changes and modifications fall within the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. An optical processing device required for measuring an ultra-small contact angle value is characterized in that: including optical mechanism, survey appearance mechanism and imaging device, optical mechanism includes electric box, background light, triangular support piece, movable structure, light screen, gentle worn plate, light path structure, survey appearance mechanism includes sample platform and two-dimentional horizontal adjustment mechanism, electric box, survey appearance mechanism and imaging device from left to right set gradually, background light and gentle worn plate are fixed mounting respectively in the inside both sides of electric box, triangular support piece fixed mounting is at the top of electric box, the light screen passes through movable structure to be fixed in one side of triangular support piece, just one side of light screen is close to gentle worn plate, sample platform fixed mounting is on one of them two-dimentional horizontal adjustment mechanism, imaging device fixed mounting is another on the two-dimentional horizontal adjustment mechanism.
2. The optical processing device for measuring the ultra-small contact angle value according to claim 1, wherein: but mobile structure includes lead screw, guide rail, fixed block, slider, the fixed block passes through the screw fixation in one side of triangular support piece, the guide rail is also fixed in one side of triangular support piece to be located the bottom of fixed block, the lead screw thread cup joints on the fixed block, just the bottom and the slider fixed connection of lead screw, one side and the guide rail sliding connection of slider, the top of light screen is fixed on the slider, just light screen, sheen board all are located same one side of electric box, the one end tip of lead screw still is equipped with the knob.
3. The optical processing device for measuring the ultra-small contact angle value according to claim 1, wherein: every two-dimentional horizontal adjustment mechanism includes mechanism upper surface, fixing base, moving mechanism, mechanism lower surface, extension spring and steel ball, and the number of extension spring is a plurality of, the both ends of every extension spring are fixed mutually with mechanism upper surface and mechanism lower surface respectively, the mechanism upper surface still passes through moving mechanism and two fixing base swing joint, the number of fixing base is two, the common fixed mounting at the top of two fixing bases of mechanism lower surface, moving mechanism's number also is two, and two moving mechanism establish respectively on two fixing bases, and steel ball and two moving mechanism are located the three edge between the two of mechanism upper surface and mechanism lower surface respectively.
4. An optical processing device required for measuring the value of the ultra-small contact angle according to claim 3, characterized in that: the sample stage and/or the fixing plate are/is fixed on the upper surface of the mechanism.
5. An optical processing device required for measuring the value of the ultra-small contact angle according to claim 3, characterized in that: the imaging device comprises a microscope, a camera and a fixing plate, wherein the microscope is fixedly connected with the camera through a screw, the microscope and the camera are fixed on the fixing plate through bolts, and the fixing plate is fixed on the upper surface of the two-dimensional horizontal adjusting mechanism through another screw.
6. An optical processing device required for measuring the value of the ultra-small contact angle according to claim 3, characterized in that: each movable mechanism comprises a triangular supporting block, a differential head and a pin, the triangular supporting block is fixed on a fixed seat through the pin, the differential head is fixedly installed on the fixed seat through a jackscrew, and the fixed seat is fixedly installed on the upper surface of the mechanism through a bolt.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921832582.4U CN211528136U (en) | 2019-10-29 | 2019-10-29 | Optical processing device required for measuring ultra-small contact angle value |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921832582.4U CN211528136U (en) | 2019-10-29 | 2019-10-29 | Optical processing device required for measuring ultra-small contact angle value |
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| CN211528136U true CN211528136U (en) | 2020-09-18 |
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| CN201921832582.4U Active CN211528136U (en) | 2019-10-29 | 2019-10-29 | Optical processing device required for measuring ultra-small contact angle value |
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