CN211522302U - Heating device and evaporation equipment of evaporation source - Google Patents

Abstract

The application belongs to the technical field of evaporation, and relates to a heating device of an evaporation source and evaporation equipment. The heating device of the evaporation source comprises a heating element and a fixing element, wherein the heating element is used for heating the evaporation source, and the fixing element is used for fixing the heating element; the fixing piece comprises a first main body and a second main body; the first main part is provided with first recess, the second main part is provided with the second recess, first recess with the second recess cooperatees and forms the fixed part, the fixed part can be used for fixing the heating member. This application simple structure, use, convenient operation arrange more rationally, can not only improve the heating efficiency of heating member, can also improve the mounting structure stability of heating member, guarantee the stability of heating member, also do benefit to the protection to the heating member, finally guaranteed the coating by vaporization quality of product.

Description

Heating device and evaporation equipment of evaporation source

Technical Field

This application belongs to coating by vaporization technical field, concretely relates to heating device and evaporation equipment of evaporation source.

Background

An Organic Light-Emitting Diode (OLED) device has many advantages of being thinner and lighter, high in brightness, low in power consumption, fast in response, high in definition, and the like, and can be widely applied to the display field or the illumination field of various terminal devices. Currently, the common manufacturing methods of the OLED device include evaporation, inkjet printing, thermal transfer printing, and other various methods. The evaporation process is to heat an evaporation material under a certain vacuum condition to melt (or sublimate) the evaporation material into vapor consisting of atoms, molecules or atomic groups, and then the vapor is condensed on the surface of a substrate to form a film, so that a functional layer of the OLED device is formed.

An existing evaporation source (evaporation source) apparatus generally includes a crucible for containing an organic material or a metal material and a heating device for heating the crucible. However, the existing heating device for heating the evaporation material in the crucible has the problem that the stability or firmness of the device are poor, and particularly, the heating effect is influenced due to the fact that the heating element is structurally fixed or is installed complicatedly, and the stability or firmness is poor, so that the evaporation quality of an evaporation source is reduced, and the product yield is reduced.

Therefore, the heating device for the evaporation source, which has the advantages of simple structure, convenience in installation and use and capability of well fixing the heating element, is developed, and has good market popularization value.

SUMMERY OF THE UTILITY MODEL

An object of the present application is to provide a heating device of an evaporation source, which has a simple structure, is convenient to install and use, is more reasonable in arrangement, can improve the structural stability of the heating device, ensures the evaporation quality, and can overcome the above problems or at least partially solve the above technical problems.

It is another object of the present application to provide an evaporation apparatus including the heating device of the evaporation source, which has at least the same advantages as the heating device of the evaporation source.

According to an aspect of the present application, there is provided a heating apparatus of an evaporation source, including a heating member for heating the evaporation source and a fixing member for fixing the heating member;

the fixing piece comprises a first main body and a second main body;

the first main part is provided with first recess, the second main part is provided with the second recess, first recess with the second recess cooperatees and forms the fixed part, the fixed part can be used for fixing the heating member.

Optionally, the heating elements include a plurality of linear heating elements and a plurality of circular arc heating elements, the plurality of linear heating elements are arranged side by side, and two adjacent linear heating elements are connected through the circular arc heating elements;

the fixing piece comprises a plurality of fixing parts, and each fixing part is used for fixing each linear section heating element.

Optionally, the fixing member includes a plurality of the first bodies and a plurality of the second bodies, and the number of the first bodies is equal to the number of the second bodies;

each of the first bodies cooperates with each of the second bodies to form a plurality of the fixing portions adapted to fix a portion of the heating element;

the length of the fixture along the length of the linear segment heating element is less than 1/5 of the length of the linear segment heating element.

Optionally, each of the first bodies and each of the second bodies cooperate to form 2 to 10 of the fixing portions.

Optionally, each of the first bodies and each of the second bodies cooperate to form 4 to 6 of the fixing portions.

Optionally, the fixing member includes one first body and a plurality of second bodies;

the second bodies and the first bodies are matched to form a plurality of fixing parts which are suitable for fixing the whole heating element;

1/5 wherein the length of said fixture along the length of said straightaway heating element is less than the length of said straightaway heating element;

the first body has a length greater than a distance between a first one of the linear section heating elements and a last one of the linear section heating elements.

Optionally, each of the second bodies cooperates with the first body to form 2 to 10 of the fixing portions.

Optionally, each of the second bodies cooperates with the first body to form 4 to 6 of the fixing portions.

Optionally, a protective layer is disposed on one side of the fixing portion close to the heating member.

Optionally, the first body and the second body are detachably connected by screws or the like.

Optionally, the fixing member is an insulating member.

Optionally, the heating device of the evaporation source further comprises a heating box body and a temperature control system;

the fixing pieces are connected with the heating box body, and each heating piece is fixed by at least two fixing pieces which are arranged at intervals up and down;

the temperature control system is arranged in the heating box body, is electrically connected with the heating piece and is used for monitoring the temperature of the evaporation source and controlling the heat generated by the heating piece.

Optionally, the first body or the second body is detachably fixed to the inner side of the sidewall of the heating box body by screws or the like.

Optionally, each linear heating element is fixed by fixing parts arranged in parallel up and down.

Optionally, the heating device of the evaporation source further comprises a connecting piece;

the heating member includes first heating member and the second heating member of interval arrangement, the mounting is including being used for fixing the first mounting of first heating member and being used for fixing the second mounting of second heating member, the connecting piece set up in first mounting with between the second mounting for fixed evaporation source.

According to another aspect of the present application, there is provided an evaporation apparatus comprising an evaporation source, and further comprising a heating device of the evaporation source as described above.

Compared with the prior art, the technical scheme provided by the application can achieve the following beneficial effects:

the application provides a heating device of evaporation source includes heating member and the mounting that is used for fixed heating member, and wherein, the mounting includes first main part and second main part, and first main part is provided with first recess, and the second main part is provided with the second recess, and first recess cooperatees with the second recess and can forms the fixed part, can be used for fixing the heating member through this fixed part. This mounting structure of heating member is simple, and use, convenient operation arrange more rationally, on the one hand, have improved the heating efficiency of heating member, and on the other hand has improved the mounting structure stability of heating member, has guaranteed the stability of heating member, also does benefit to the protection to the heating member, has finally guaranteed the coating by vaporization quality of product.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.

Other features and advantages of the present application will be described in the detailed description which follows, in conjunction with the accompanying drawings.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a heating device of an evaporation source according to an embodiment of the present application;

FIG. 2 is a schematic sectional view taken along line A-A of FIG. 1;

fig. 3 is a schematic structural diagram of a heating box provided in an embodiment of the present application;

FIG. 4 is a schematic structural diagram of a heating element provided in accordance with an embodiment of the present application;

FIG. 5 is a schematic top view of a fastener provided in accordance with an embodiment of the present application;

FIG. 6 is a schematic top view of a fastener provided in accordance with another embodiment of the present application;

fig. 7 is a schematic structural diagram of a first heating element mounted on a first fixing member according to an embodiment of the present application;

fig. 8 is a schematic structural view illustrating a first heating element mounted on a first fixing member according to another embodiment of the present application;

fig. 9 is a schematic control diagram of a heating device of an evaporation source according to an embodiment of the present application.

Reference numerals:

1-heating the box body; 101-a first side wall; 102-a second sidewall; 103-a third side wall; 104-a fourth side wall; 105-a bottom wall; 106-a containment chamber;

2-a heating element; 21-a first heating element; 22-a second heating element; 201-straight section heating element; 202-arc segment heating element;

3-a fixing piece; 31-a first fixture; 32-a second fixture; 301-a first body; 3011-a first groove; 302-a second body; 3021-a second recess; 303-a fixed part; 304-a protective layer;

4-a connector;

5-a temperature sensor; 501-a first set of temperature sensors; 502-a second set of temperature sensors; 503-a third set of temperature sensors; 504-a fourth set of temperature sensors;

6-a reflection part;

7-a support member.

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and together with the description, serve to explain the principles of the application.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application are described in further detail below with reference to the accompanying drawings in the embodiments of the present application. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it is noted that the terms "first", "second", "third", "fourth", and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Unless expressly stated or limited otherwise, the terms "mounted," "connected," "coupled," "secured," and the like are intended to be inclusive and mean that, for example, a "coupled" can be a fixed connection, a removable connection, an integral connection, or an electrical connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

Herein, front, rear, upper, lower, left, right, inner, outer, etc. refer to the orientation conventionally understood when the evaporation apparatus is normally placed.

It is to be understood that unless defined or indicated otherwise, technical and scientific terms used herein have the same meaning as is commonly understood by one of ordinary skill in the art. The embodiments and features of the embodiments in the present application may be combined with each other without conflict. In one embodiment, the present application is described in further detail below with reference to specific embodiments and accompanying drawings.

As will be appreciated by those skilled in the art, as mentioned in the background, the heating device for an evaporation source in the prior art has certain defects, and therefore, in order to overcome the defects of the prior art, the technical solution of the embodiments of the present application provides a heating device for an evaporation source and an evaporation apparatus including the heating device for an evaporation source.

As shown in fig. 1 to fig. 9, the present embodiment provides an evaporation apparatus, which includes a heating device of an evaporation source and an evaporation source (not shown in the drawings), wherein the heating device of the evaporation source is used for heating the evaporation source, the heating device of the evaporation source has a receiving chamber 106 (or evaporation chamber) for receiving the evaporation source, and the evaporation source can be disposed inside the receiving chamber 106 for heating an evaporation material (to-be-evaporated material) to sublimate or vaporize the evaporation material.

In the embodiments of the present application, the evaporation source and the evaporation material are not particularly limited. For example, the evaporation source may be a crucible, a quartz vessel, or a metal having a high melting point, but is not limited thereto. The evaporation material may include an organic material, a metal complex, and the like, without being limited thereto.

For simplicity, in the embodiments of the present application, a crucible is taken as an evaporation source of an evaporation apparatus as an example to specifically describe the evaporation apparatus.

Those skilled in the art will appreciate that a crucible can be used to contain and conduct heat to the vaporized material. Different types of evaporation materials are contained in the crucible, and the materials are heated to be vaporized or sublimated under a high vacuum environment and then are deposited on the substrate to form a thin film layer, so that the functional layer can be used for realizing the OLED device.

The specific structure of the crucible and the arrangement of the crucible with respect to the heating device are not particularly limited, and for example, the conventional art can be referred to.

It can be understood that the evaporation equipment comprises the evaporation source and the heating device of the evaporation source for heating the evaporation source, and the heating efficiency can be improved through the arrangement of the heating device of the specific evaporation source, the stability of the installation structure of the heating element is improved, the installation structure is firm and reliable, and the evaporation quality of the product is finally ensured.

Specifically, as shown in fig. 1 to 9, the present embodiment provides a heating device of an evaporation source, including a heating box 1, a heater, a fixing member 3 and a temperature control system; wherein, the heating box body 1 has a containing chamber 106, and a crucible (not shown in the figure) can be arranged inside the containing chamber 106; the heater comprises a heating element 2, the heating element 2 can generate heat radiation and is used for heating the crucible and heating and vaporizing or sublimating the evaporation material in the crucible; the fixing part 3 can be arranged on the heating box body 1 and is used for fixing the heating part 2; the temperature control system can be arranged in the heating box body 1 and is electrically connected with the heating element 2 and used for detecting the temperature of the crucible and controlling the heat generated by the heating element 2.

[ concerning heating box ]

The evaporation source in this embodiment may be a linear evaporation source, i.e., the crucible may be a linear crucible. The crucible and the heating box 1 may be provided in the same shape, and may be provided in a rectangular parallelepiped shape, for example. Of course, in other embodiments, the shapes of the heating box body 1 and the crucible may also be set according to actual requirements, and may be set to any other shapes known to those skilled in the art, which is not described or limited in this application.

Illustratively, as shown in fig. 3, in some embodiments, the heating chamber 1 has a rectangular parallelepiped shape, and the cross section of the heating chamber 1 has a rectangular shape. Hereinafter, the heating apparatus of the evaporation source will be described in detail by way of example mainly taking the case where the heating chamber 1 has a rectangular parallelepiped shape, and it is to be understood that the shape of the heating chamber 1 is not limited thereto.

Illustratively, the heating chamber 1 has a rectangular parallelepiped shape, and the heating chamber 1 may be opened from one side, for example, from the upper end, for placing or taking out a crucible of an evaporation source.

In some embodiments, the heating box 1 may include four side walls and a bottom wall 105, for example, the heating box 1 includes a first side wall 101 and a second side wall 102 arranged in parallel, a third side wall 103 and a fourth side wall 104 arranged in parallel, and a bottom wall 105 connected to bottom ends of the first side wall 101, the second side wall 102, the third side wall 103 and the fourth side wall 104, respectively. The four side walls and bottom wall 105 may enclose a receiving chamber 106 for receiving a crucible.

Among them, the first sidewall 101 and the second sidewall 102 may be two sidewalls enclosed by a length and a height, and the third sidewall 103 and the fourth sidewall 104 may be two sidewalls enclosed by a width and a height. It is understood that, in relative terms, the first sidewall 101 and the second sidewall 102 are long sides, and the third sidewall 103 and the fourth sidewall 104 are short sides, that is, the area of the first sidewall 101 and the second sidewall 102 is larger than the area of the third sidewall 103 and the fourth sidewall 104, that is, the area of the first sidewall 101 is equal to that of the second sidewall 102, the area of the third sidewall 103 is equal to that of the third sidewall 103, and the area of the first sidewall 101 (or the area of the second sidewall 102) is larger than that of the third sidewall 103 (or the area of the fourth sidewall 104).

As shown in fig. 2, in some embodiments, at least a portion of the heating box 1 may be provided with a heat transfer portion for allowing heat transfer between the heating box 1 and the crucible.

Specifically, at least a portion of the four side walls and the bottom wall 105 are provided with heat transfer portions for allowing heat transfer to occur between the heat transfer portions and the crucible. It can be understood that the heat transfer is a thermal energy transfer phenomenon caused by a temperature difference, and includes three ways of thermal conduction, thermal radiation and thermal convection, the heat transfer way in the embodiment of the present application may be thermal radiation, and the heat transfer part may also be referred to as a thermal radiation part.

The heat transfer part is used for enabling the heat transfer part to be in heat transfer with the crucible, and means that heat radiation can be generated between the heat transfer part and the crucible, the heat transfer part and the crucible can form a reflecting cavity, a part of heat generated by the heating element can be directly absorbed by the crucible for heating the evaporation material, a part of heat which is not directly absorbed by the crucible can be retained in the reflecting cavity, is reflected to the heat transfer part by the crucible and then reflected to the crucible by the heat transfer part, and the part of heat is absorbed by the crucible again for heating the evaporation material. Like this, can improve the utilization ratio to the heat that the heating member produced, reduce and scatter and disappear the outside thermal radiation of evaporation equipment, also change in the control of temperature simultaneously.

The heat transfer portion may be provided only on the bottom wall 105 of the heating cabinet 1, only on one or more of the four side walls of the heating cabinet 1, or both of the four side walls and the bottom wall 105 of the heating cabinet 1. Of course, when a plurality of heat transfer sections are provided in the vapor deposition apparatus, the plurality of heat transfer sections may have the same or different structures.

As shown in fig. 2, in some embodiments, the heat transfer portion includes a reflection portion 6. Through the setting of reflection part 6 for the heat radiation that the heating member produced is heat radiation convection between reflection part 6 and crucible, thereby can improve the crucible to heat radiation's absorption rate, improves the degree of accuracy of heating temperature control, reduces scattering and disappearing of heat radiation, has avoided heat radiation's waste as far as possible, and then improves the coating by vaporization precision.

In some embodiments, the first sidewall 101, the second sidewall 102, the third sidewall 103, the fourth sidewall 104, and the bottom wall 105 may all be reflective plates capable of reflecting heat. That is, the first side wall 101, the second side wall 102, the third side wall 103, the fourth side wall 104, and the bottom wall 105 are each provided with the reflection part 6, and the reflection part 6 is a reflection plate formed by the first side wall 101, the second side wall 102, the third side wall 103, the fourth side wall 104, and the bottom wall 105, respectively. Therefore, the reflecting capacity can be improved, more heat radiation is absorbed by the crucible, the utilization rate of the heat radiation is further improved, the temperature is easy to control, the processing and the manufacturing are convenient, and the stability is good.

In other embodiments, the first sidewall 101, the second sidewall 102, the third sidewall 103, the fourth sidewall 104, and the bottom wall 105 may each be attached with at least one reflective layer capable of reflecting heat. That is, the first, second, third, fourth and bottom walls 101, 102, 103, 104 and 105 are each provided with the reflection part 6, and the reflection part 6 is a reflection layer provided inside the first, second, third, fourth and bottom walls 101, 102, 103, 104 and 105, respectively. Therefore, the reflecting capacity can be improved, more heat radiation is absorbed by the crucible, the utilization rate of the heat radiation is further improved, the temperature is easy to control, the material cost can be reduced, and the processing and the manufacturing are convenient.

The specific structure and material of the reflecting plate or the reflecting layer are not particularly limited, and for example, the conventional art may be referred to as long as the heat radiation can be convected between the reflecting portion 6 and the crucible, and the reflecting portion 6 can reflect the heat radiation to the crucible.

In some embodiments, the reflecting portion 6 of the bottom wall 105 may be provided in plurality, and the plurality of reflecting portions 6 are arranged at intervals along the length direction of the bottom wall 105 of the heating box; further, a support 7 may be disposed at the interval, and the height of the reflecting surface of the reflecting part 6 is slightly lower than the supporting surface of the support 7. The reflective portion 6 may be a reflective layer disposed on the upper surface of the bottom wall 105.

The specific number of the reflecting portions of the bottom wall 105, the length and width of the reflecting portions, and the like are not particularly limited and may be appropriately set according to the specific structure.

It can be seen that the evaporation source includes a crucible in which an evaporation material can be filled, the crucible is heated by a heating device, and the heat reflected by the reflection portion is returned to the crucible, so that the evaporation material can be heated with improved thermal efficiency. So set up, can reduce thermal loss, heat utilization rate is high, and the temperature is changeed in the control.

In some embodiments, the heating elements 2 may be located inside the heating box 1 (four side walls), i.e. on the side close to the crucible, and distributed evenly from top to bottom, which may ensure even heating of the crucible.

[ heating Member ]

As shown in fig. 4, the heating member 2 is capable of generating heat radiation for heating the crucible; the heating member 2 may include a plurality of linear section heating members 201 and a plurality of circular arc section heating members 202, the plurality of linear section heating members 201 being arranged side by side; two adjacent straight section heating elements 201 are connected by a circular arc section heating element 202.

It should be noted that the heating element 2 includes a plurality of linear section heating elements 2021 and a plurality of circular arc section heating elements 202, where a plurality means two or more, for example, the number of the linear section heating elements 201 may be 2, 3, 4, 5, 6, 8, 9, 10, 15, 20, etc., and the number of the circular arc section heating elements 202 may be 2, 3, 4, 5, 6, 8, 9, 10, 12, 15, etc., where the number of the linear section heating elements 201 and the number of the circular arc section heating elements 202 may be selected according to actual use requirements, and the specific number of the linear section heating elements 201 and the circular arc section heating elements 202 is not limited in this embodiment.

It is understood that the heating member 2 can generate heat radiation, and when the heating member 2 heats the crucible of the evaporation source to vaporize the evaporation material inside, the gaseous material can be deposited on the substrate above the evaporation source.

So, be "tortuous" state setting with heating member 2, not only can make full use of heating device's space more, make heating member 2's heating more even moreover, heating efficiency is higher, can realize bigger heating power and rate of heating to treat evaporation material's heating efficiency and quality in the evaporation source has been improved, the quality of product has finally been ensured.

In addition, the structure of the heating element 2 enables each section of the heating element to realize smooth interconnection, avoids stress concentration at the end points or edges of each section, and improves the yield and the use stability of products. Wherein, the advantage of design circular arc section heating member lets adjacent straightway heating member smooth transition, avoids the stress concentration scheduling problem that leads to because of the sudden change, compares in the design of simple linear type or other types of heating member, and convex transition can make full use of heating device's space, better improvement heating efficiency and heating effect, the yield and the stability of improvement product.

In addition to the above embodiments, the arc segment heating element 202 may be semi-circular in shape or other (similar) shapes known to those skilled in the art. Therefore, the heating efficiency and the heating effect are improved, and the yield and the stability of products are improved.

As shown in FIG. 4, in some embodiments, the head ends of two adjacent straight section heating elements 201 are each connected by a radiused section heating element 202; the tail end of one of the linear heating elements 201 is connected to the tail end of another linear heating element 201 adjacent thereto through another one of the circular heating elements 202, respectively.

It will be appreciated that the heating element 2 may be formed integrally from a series of straight section heating elements 201 and circular arc section heating elements 202 connected end to end. Further, in the heating element 2, the head end of one linear heating element 201 can be connected with one end of one circular arc heating element 202, the head end of another linear heating element 201 adjacent to the head end can be connected with the other end of the circular arc heating element 202, the two linear heating elements 201 and the one circular arc heating element 202 can form a combined structure, and the tail ends of the two linear heating elements 201 of each combined structure are respectively connected with the adjacent linear heating element 201 through one circular arc heating element 202; each straight section heating element 201 and the two arc section heating elements 202 connected to the leading and trailing ends thereof may form a "S" like shape.

As shown in fig. 4, in some embodiments, a one-arc section heating element 202 and two straight section heating elements 201 connected thereto form a U-shaped configuration. It will be appreciated that when the radiused heating element 202 is coupled to two of the straightaway heating elements 201, the curvature of the radiused heating element 202 is convex, i.e., the radiused heating element 202 extends to a side away from the straightaway heating element 201.

So set up, can make the heating of heating member more even, heating efficiency is higher, can avoid stress concentration, can also realize bigger heating power and rate of heating, the structural stability of heating member is better moreover, long service life.

In some embodiments, a plurality of linear section heating elements 201 may be arranged in parallel at equal intervals; that is, the distance between any two adjacent linear heating elements 201 is equal, and all the linear heating elements 201 are arranged in parallel.

In some embodiments, the plurality of linear section heating elements 201 are equal in length and equal in diameter; that is, the length and diameter of the plurality of linear heating elements 201 are equal, and in the heating element 2, the same linear heating element 201 is used.

In some embodiments, the plurality of arc segment heating elements 202 are equal in diameter; that is, in the heating member 2, the same circular arc segment heating member 202 is used.

Like this, can make the heating member the heating temperature more even, fully guarantee heating temperature's homogeneity, it is effectual to heat.

In some embodiments, the spacing between two adjacent linear heating elements 201 is less than the length of the linear heating elements 201; the distance between two adjacent linear section heating elements 201 is larger than the diameter of the linear section heating elements 201. As shown in fig. 4, the length of the linear heating element 201 may be understood as the length of the linear heating element 201 in the vertical direction, and the interval between two adjacent linear heating elements 201 may be understood as the distance between two adjacent linear heating elements 201 in the lateral direction. For the difference between the distance between two adjacent linear section heating elements 201 and the length of the linear section heating elements 201, and the difference between the distance between two adjacent linear section heating elements 201 and the diameter of the linear section heating elements 201, the embodiment of the present application does not limit this. So set up, more be favorable to promoting the heating effect.

Illustratively, in some embodiments, the spacing between two adjacent straight section heating elements 201 is less than 1/5 of the length of the straight section heating element 201; the distance between two adjacent linear section heating elements 201 is greater than 2 times the diameter of the linear section heating elements 201. For example, the spacing between two adjacent linear section heating elements 201 may be less than 1/4, 1/3, 1/2 or some other value of the length of the linear section heating elements 201; the interval of two adjacent straightway heating elements 201 is greater than 2.5 times, 3 times, 4 times, 5 times or other numerical values of straightway heating element 201's diameter, can set up according to the actual demand of coating by vaporization crucible and evaporation equipment, and this application embodiment does not limit to this. So set up, more be favorable to promoting the heating effect, the heating member has more excellent heating performance.

In some embodiments, the distance between two adjacent straight section heating elements 201 is equal to the diameter of the circle section heating element 202. That is, the inner diameter of the circle segment heating element 202 is the inner-side distance between the two straight-line segment heating elements 201 connected thereto, and the outer diameter of the circle segment heating element 202 is the outer-side distance between the two straight-line segment heating elements 201 connected thereto. The circular arc segment heating element 202 may be centered at the midpoint of the ends of the two straight section heating elements 201 to which it is attached.

This heating member 2 makes the heating temperature to the crucible more even and have more excellent heating performance through the settlement of above-mentioned parameter, and the heating member has more stable structure simultaneously.

When the heating member 2 is mounted, the length direction of the linear heating member 201 coincides with the depth direction (height direction) of the heating cabinet 1.

As shown in fig. 2, in some embodiments, the heating members 2 include at least one first heating member 21 positioned at an upper portion of four sidewalls and at least one second heating member 22 positioned at a lower portion of four sidewalls, the first heating member 21 and the second heating member 22 may be independent of each other, and the first heating member 21 and the second heating member 22 may be independently temperature-controlled. Therefore, the evaporation temperature can be conveniently adjusted and controlled, and the heating effect is ensured.

It is understood that the first heating member 21 may be provided at the upper portions of the first, second, third and fourth sidewalls 101, 102, 103 and 104, that is, the first heating member 21 is provided around the upper portion of the heating cabinet 1; the second heating member 22 may be disposed at lower portions of the first, second, third and fourth sidewalls 101, 102, 103 and 104, that is, the second heating member 22 is disposed around a lower portion of the heating chamber body 1. In this way, a sufficiently uniform heating can be ensured.

The first heating element 21 and the second heating element 22 can be driven by different voltage sources, different heating powers can be realized, and different heating powers and heating rates of the top and the bottom of the crucible can be realized; alternatively, the first heating member 21 and the second heating member 22 may be driven by the same voltage source.

In some embodiments, the outer sidewall of the crucible is not in contact with the heating element 2, and a predetermined gap is formed between the heating element 2 and the outer sidewall of the crucible, and the gap is reserved to ensure that the metal material peeled off and dropped off does not fall onto the heating element. The specific size of the reserved gap is not specially limited, and the gap can be reasonably arranged according to a specific structure as long as the heating element is not attached to the crucible. In addition, the gaps in the length direction and the width direction can be set to be equal, so that the crucible can be uniformly heated, and the heating effect is better and uniform.

As shown in fig. 2, in some embodiments, the heating members 2 may include first heating members 21 positioned at upper portions of four sidewalls of the heating chamber 1, and second heating members 22 positioned at lower portions of the four sidewalls; and the first heating member 21 and the second heating member 22 located at the four side walls can be independently controlled in temperature; and when the crucible is placed in the heating box body 1, the outer wall of the crucible is not in contact with the first heating member 21 and the second heating member 22, and has a predetermined gap; the first heating member 21 and the second heating member 22 are electrically connected to a controller. So set up, help the even heating to the crucible, fully guaranteed the even heating for the heating effect is better.

It is understood that the first heating member 21 and the second heating member 22 may be arranged vertically symmetrically about the crucible, heating the crucible at upper and lower portions. The structure of the first heating member 21 and the structure of the second heating member 22 may be identical. When the first heating member 21 and the second heating member 22 are mounted, the length direction of the linear heating member 201 is identical to the depth direction of the heating cabinet 1.

[ concerning the fixing parts ]

As shown in fig. 5 to 8, the fixing member 3 is used to fix the heating member 2, and the fixing member 3 includes a first body 301 and a second body 302; the first body 301 is provided with a first recess 3011, the second body 302 is provided with a second recess 3021, the first recess 3011 and the second recess 3021 cooperate to form a fixing portion 303, and the fixing portion 303 can be used to fix the heating member 2.

The first body 301 and the second body 302 may have plate-like structures, and the first body 301 may be a first plate and the second body 302 may be a second plate. The shapes or sizes of the first body 301 and the second body 302 may be designed to be the same or different, and the actual shapes of the first body 301 and the second body 302 may be designed adaptively according to the actual conditions of the heating element or the heating device.

For example, the first body 301 and the second body 302 are rectangular, and the technical solution will be described in detail, it should be understood that the shapes of the first body 301 and the second body 302 are not limited thereto. When the first body 301 is rectangular, a first groove 3011 may be formed inward on a long side of the first body 301, that is, the first groove 3011 is a groove formed along the width direction of the first body 301; similarly, when the second body 302 is rectangular, a second groove 3021 may be formed inward on a long side of the second body 302, that is, the second groove 3021 is formed along the width direction of the second body 302. The cross-sectional shape of the first recess 3011 or the second recess 3021 may be, for example, a semi-circle or other patterns.

The first body 301 and the second body 302 have mating surfaces (attaching surfaces), and a first recess 3011 and a second recess 3021 are respectively disposed on the mating surfaces of the first body 301 and the second body 302, so that an opening surface of the first recess 3011 and an opening surface of the second recess 3021 can be made to correspond to each other to form a fixing portion 303, and the fixing portion 303 can be a through-groove structure and can be used for fixing the heating element 2, for example, can be used for fixing the linear heating element 201 of the heating element 2.

It is to be understood that the fixing portion 303 may be used to fix the linear heating element 201, the shape of the fixing portion 303 may be adapted to the shape of the linear heating element 201, or the inner diameter of the fixing portion 303 may be equal to or larger than the outer diameter of the linear heating element 201. Here, the specific shape and structure of the fixing portion 303 may be selected according to actual needs.

So set up, can be so that the fixed knot of heating member simple structure, firm reliable, easy to assemble and dismantlement.

In some embodiments, the fixing member 3 is an insulating member; the first body 301 and the second body 302 are insulating members, which may only function to fix or protect the heating member, and the specific material of the fixing member is not particularly limited.

In some embodiments, the first body 301 and the second body 302 are connected by screws or other removable means known to those skilled in the art. Therefore, the heating element is easy to mount and dismount, and the heating element is more convenient to fix.

As shown in fig. 5, in some embodiments, each first body 301 is provided with a plurality of first recesses 3011, each second body 302 is provided with a plurality of second recesses 3021, and a plurality of fixing portions 303 are formed. The pitch of the adjacent two fixing portions 303 may be the same as the pitch of the adjacent two linear heating elements 201, so that all the linear heating elements 201 in the heating element 2 are fixed by the fixing member 3.

It is understood that herein, a plurality means at least two, i.e. includes two and more. Each fixing member 3 includes a plurality of fixing portions 303, each fixing portion 303 is used for fixing each linear heating element 201, and the specific number of the fixing portions 303 is not limited, and may be selectively set according to the number of the linear heating elements 201.

As shown in fig. 7, in some embodiments, the fixing member 3 includes a plurality of first bodies 301 and a plurality of second bodies 302, and the number of the first bodies 301 and the number of the second bodies 302 are equal.

It is understood that the fixing member 3 may include a plurality of the first and second bodies 301 and 302 in equal numbers, that is, a plurality of the first and second bodies 301 and 302 arranged at intervals may be used to fix one heating member 2. Each first body 301 may be provided with a plurality of first recesses 3011, and each second body 302 may be provided with a plurality of second recesses 3021, although the number of first recesses 3011 and second recesses 3021 need to be the same.

Each first body 301 cooperates with each second body 302 to form a plurality of securing portions 303 adapted to secure a portion of the heating element 2, meaning that each first body 301 is provided with a plurality of first recesses 3011 and each second body 302 is provided with a plurality of second recesses 3021 to cooperate to form a plurality of securing portions 303, which plurality of securing portions 303 may be used to secure a portion of the linear segment heating element 201 throughout the heating element 2. The entire heating member 2 can be fixed by such a plurality of first and second bodies 301 and 302.

Alternatively, each first body 301 is provided with 2-10 first recesses 3011 and each second body 302 is provided with 2-10 second recesses 3021 to cooperatively form 2-10 anchors 303. Preferably, each first body 301 is provided with 4-6 first recesses 3011, and each second body 302 is provided with 4-6 second recesses 3021, so as to cooperate to form 4-6 fixing portions 303. Therefore, the installation and the fixation are more convenient, and the operation is convenient.

It should be understood that the specific number of the first body 301 and the second body 302 is not limited, and may be selectively set according to the number of the linear segment heating elements.

In some embodiments, the length of the fixture 3 along the length of the linear heating element 201 is less than 1/5 of the length of the linear heating element 201. So set up, be favorable to increasing the heat radiating area of heating member, improve heating efficiency.

In some embodiments, each of the heating members 2 is fixed by two fixing members 3 which are parallel up and down, and the up and down positions of the two fixing members 3 are in one-to-one correspondence with the number of the included first bodies 301 and second bodies 302.

In some embodiments, the fixing member 3 may be connected to the inner sidewall of the heating cabinet 1 by screws or other detachable means known to those skilled in the art. For example, the second body 302 may be connected to the inner sidewall of the heating chamber 1 by screws or other detachable means known to those skilled in the art, and then the first body 301 and the second body 302 may be connected by screws or other detachable means known to those skilled in the art.

Through arranging fixing piece 3 like this, can improve the installation stability of heating member on the one hand, improve heating stability, on the other hand is the heat radiating area of the heating member that increases, improves heating efficiency.

In other embodiments, as shown in fig. 8, the fixing member 3 includes a first body 301 and a plurality of second bodies 302.

It is understood that the fixing member 3 may include a plurality of second bodies 302 and a first body 301, that is, a plurality of second bodies 302 and a first body 301 which are spaced apart may be used to fix a heating member 2. The first bodies 301 may be provided with a plurality of first recesses 3011, each of the second bodies 302 may be provided with a plurality of second recesses 3021, and the total number of the second recesses 3021 provided in the plurality of second bodies 302 may be the same as the number of the first recesses 3011 provided in the first body 301.

The plurality of second bodies 302 cooperate with the first body 301 to form a plurality of fixing portions 303 adapted to fix the entire heating member 2, meaning that the first body 301 is provided with a plurality of first recesses 3011, each second body 302 is provided with a plurality of second recesses 3021, and the plurality of second bodies 302 cooperate with one first body 301 to form a plurality of fixing portions 303, which plurality of fixing portions 303 can be used to fix the entire heating member.

Optionally, each second body 302 is provided with 2-10 second recesses 3021, which cooperate with portions of the first body 301 to form 2-10 fixation portions 303. Preferably, each second body 302 is provided with 4-6 second recesses 3021 that cooperate with portions of the first body 301 to form 4-6 securing portions 303. Like this, the integral erection of being convenient for, more easy to assemble and dismantlement are more convenient for to the whole change of heating member, convenient operation.

Each of the heating members 2 may be fixed by two fixing members 3 which are parallel up and down, and the first bodies 301 of the two fixing members 3 may be integrally connected at both ends. Thus, the arrangement of the whole structure makes it easier to replace the heating element as a whole.

In some embodiments, the plurality of second bodies 302 may be first connected to the inner sidewall of the heating chamber 1 by screws or other detachable means known to those skilled in the art, and then the entire first body 301 and the plurality of second bodies 302 may be connected by screws or other detachable means known to those skilled in the art.

In some embodiments, the first body 301 has a length that is greater than the distance between the first (first) linear segment heating element 201 and the last (last) linear segment heating element 201. That is, the length of the first body 301 is greater than the distance between the linear heating elements 201 at both ends of the heating element 2, so that all the linear heating elements can be fixed, and the structure is stable and reliable.

As shown in fig. 6, in some embodiments, a side of the fixing portion 3 adjacent to the heating member 2 is provided with a protective layer 304. Therefore, the protection of the heating element and the fixing element is facilitated, and the service life can be prolonged.

In some embodiments, the fixing member 3 includes a first fixing member 31 for fixing the first heating member 21 and a second fixing member 32 for fixing the second heating member 21, and both are insulating members. The structures of the first fixing member 31 and the second fixing member 32 may be provided to be the same.

It should be understood that the number of the above-mentioned fixing members 3 corresponds to the number of the heating members 2, and when the heating members 2 include the first heating member 21 and the second heating member 22, the fixing members 3 may include a first fixing member 31 and a second fixing member 32, the first fixing member 31 for fixing the first heating member 21, and the second fixing member 32 for fixing the second heating member 22. In other embodiments, the number of the fixing members may be set according to the requirement of the heating member, which is not limited in the examples of the present application.

Above can know, adopt a plurality of mountings 3 to fix with heating member 2, on the one hand, guaranteed the stability of heating member, also be simultaneously the protection to the heating member fixed part, on the other hand, through setting up a plurality of heating member fixed parts, reduced the heat radiating area's to the heating sheltering from, improved heating device's heating efficiency.

[ regarding the temperature control System ]

As shown in fig. 9, in some embodiments, the temperature control system includes a temperature sensor 5 and a controller, the temperature sensor 5 may be disposed inside the accommodating chamber 106, the temperature sensor 5 is electrically connected to the controller, the controller is electrically connected to the heating member 2, and the controller may be electrically connected to the first heating member 21 and the second heating member 22, respectively. Like this, can carry out the real-time supervision of temperature value to the crucible through temperature sensor 5, controller and 5 signal connection of temperature sensor, gather temperature value through the controller to temperature sensor 5 to acquire the real-time temperature of whole crucible, realize the global temperature monitoring to the crucible.

Those skilled in the art understand that the controller is electrically connected with the temperature sensor 5 and the heater (heating element), respectively, further, the output end of the temperature sensor 5 can be connected with the input end of the controller, and the output end of the controller can be connected with the heater; the controller can be used for receiving or collecting signals (temperature data) of the temperature sensor 5 and controlling the action of the heater, namely controlling the on/off of the heater or adjusting the heating temperature. For example, when the controller receives that the temperature data transmitted from the temperature sensor 5 is not within the preset temperature range, the controller may control the heater to adjust the heating heat amount such that the generated heat amount is within the predetermined temperature range. It should be noted that, the specific connection or control manner between the controller and the temperature sensor 5 and the heating element or the specific type of the controller is known to those skilled in the art, and the embodiment of the present application is not described or limited herein.

The specific type of the temperature sensor 5 may be various, for example, the temperature sensor 5 may be a contact type temperature sensor or a non-contact type temperature sensor.

In some embodiments, the temperature sensor 5 is a contact temperature sensor. Therefore, the accuracy of temperature monitoring is improved, and the cost is low.

In some embodiments, a plurality of temperature sensors 5 may be provided, and the plurality of temperature sensors 5 may be provided at predetermined positions, respectively, to detect the temperature. Therefore, the crucible temperature monitoring device can be used for monitoring the real-time temperature of the crucible in real time, is easy to realize accurate and real-time monitoring of the temperature of the crucible, and is more beneficial to improving the product quality.

In some embodiments, the number of temperature sensors 5 is at least four groups, each group of temperature sensors including at least one temperature sensor. Illustratively, the temperature sensors 5 are provided in four sets including a first set of temperature sensors 501, a second set of temperature sensors 502, a third set of temperature sensors 503, and a fourth set of temperature sensors 504, which are respectively provided on the four side walls of the heating cabinet 1.

In other embodiments, the number of temperature sensors 5 may also be set according to the actual requirements of the evaporation crucible.

The four sets of temperature sensors 5 may be disposed all at the inner sides of the four side walls, i.e., the side close to the crucible.

In some embodiments, the first set of temperature sensors 501 may be disposed in the middle of the first sidewall 101 and near the bottom wall 105, and the second set of temperature sensors 502 may be disposed in the middle of the second sidewall 102 and far from the bottom wall 105;

the third set of temperature sensors 503 may be disposed inside the third sidewall 103, for example, may be disposed on the upper inside of the third sidewall 103, and the fourth set of temperature sensors 504 may be disposed inside the fourth sidewall 104, for example, may be disposed on the upper inside of the fourth sidewall 104.

It can be understood that two of the four groups of temperature sensors are respectively positioned on the opposite short side surfaces of the heating box body 1 and are used for detecting the temperature of two short sides of the linear crucible; the other two groups are respectively positioned on the opposite long side surfaces of the heating box body 1, and are positioned in the middle of the long side surfaces, one group is close to the bottom wall 105, and the other group is far away from the bottom wall 105; the temperature sensors can be in a contact type, and the accurate real-time monitoring of the temperature of the crucible is realized by detecting at least four temperature sensors at preset positions.

Like this, set up above-mentioned four group temperature sensor 5 respectively in the preset position of four lateral walls of heating box 1, can realize the temperature monitoring to the upper and lower, left and right omnidirectional of crucible, then with data transmission to the controller of monitoring, the controller can be controlled heater (heating member) to realize the accurate control to the crucible heating temperature of evaporation source, improved the coating by vaporization quality of evaporation source.

[ connection parts ]

In some embodiments, the heating device of the evaporation source comprises a heating box body 1, a heater, a fixing member 3 and a temperature control system, and further comprises a plurality of connecting members 4; a plurality of connecting members 4 may be equally spaced along the side wall of the heating chamber 1 for holding the crucible. The structures of the heating box 1, the heater, the fixing member 3 and the temperature control system can refer to the above description.

Specifically, the heating member 2 includes a first heating member 21 and a second heating member 22 arranged at an interval from top to bottom, the fixing member 3 includes a first fixing member 31 for fixing the first heating member 21 and a second fixing member 32 for fixing the second heating member 22, the connecting members 4 are disposed between the first fixing member 31 and the second fixing member 32, that is, the top end of each connecting member 4 is connected to the first fixing member 31, and the bottom end of each connecting member 4 is connected to the second fixing member 32; when the crucible is put into the heating box body 1, the connecting piece 4 can be attached to the crucible for fixing the crucible, and meanwhile, the first heating piece 21 and the second heating piece 22 are enabled to have a certain gap with the crucible, so that the heating effect and the heating efficiency are improved.

By applying the technical scheme of the embodiment, the heating element is designed to be in a zigzag state, so that the heating element is heated more uniformly and the heating efficiency is higher; by the arrangement of the fixing piece, the mounting stability and the heating stability of the heating element are improved, the heat dissipation area of the heating element is increased, and the heating efficiency is further improved; in addition, the temperature control system can accurately control the heating temperature, so that the evaporation quality of the evaporation source can be finally improved.

By way of example, the heating device of the evaporation source and the evaporation apparatus including the heating device of the evaporation source provided in the embodiments of the present application may be used in a process of preparing an OLED device or other semiconductor film layer or device, and the embodiments of the present application are not limited thereto.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. The heating device of the evaporation source is characterized by comprising a heating element and a fixing element, wherein the heating element is used for heating the evaporation source, and the fixing element is used for fixing the heating element;

the fixing piece comprises a first main body and a second main body;

the first main part is provided with first recess, the second main part is provided with the second recess, first recess with the second recess cooperatees and forms the fixed part, the fixed part can be used for fixing the heating member.

2. The heating device of the evaporation source according to claim 1, wherein the heating members include a plurality of linear section heating members and a plurality of circular arc section heating members, the plurality of linear section heating members being arranged side by side, and two adjacent linear section heating members being connected by the circular arc section heating members;

the fixing piece comprises a plurality of fixing parts, and each fixing part is used for fixing each linear section heating element.

3. The heating device of the evaporation source according to claim 2, wherein the fixing member comprises a plurality of the first bodies and a plurality of the second bodies, and the number of the first bodies is equal to that of the second bodies;

each of the first bodies cooperates with each of the second bodies to form a plurality of the fixing portions adapted to fix a portion of the heating element;

the length of the fixture along the length of the linear segment heating element is less than 1/5 of the length of the linear segment heating element.

4. The evaporation source heating apparatus according to claim 3, wherein each of the first bodies and each of the second bodies cooperate to form 2-10 of the fixing portions.

5. The evaporation source heating apparatus according to claim 2, wherein the fixing member includes one first body and a plurality of second bodies;

the second bodies and the first bodies are matched to form a plurality of fixing parts which are suitable for fixing the whole heating element;

1/5 wherein the length of said fixture along the length of said straightaway heating element is less than the length of said straightaway heating element;

the first body has a length greater than a distance between a first one of the linear section heating elements and a last one of the linear section heating elements.

6. The evaporation source heating apparatus according to claim 5, wherein each of the second bodies cooperates with the first body to form 2-10 of the fixing portions.

7. The heating device of an evaporation source according to any of claims 1 to 6, wherein a side of the fixing portion adjacent to the heating member is provided with a protective layer.

8. The heating device of an evaporation source according to any of claims 1 to 6, further comprising a heating cabinet and a temperature control system;

the fixing pieces are connected with the heating box body, and each heating piece is fixed by at least two fixing pieces which are arranged at intervals up and down;

the temperature control system is arranged in the heating box body, is electrically connected with the heating piece and is used for monitoring the temperature of the evaporation source and controlling the heat generated by the heating piece.

9. The heating device of an evaporation source according to any of claims 1 to 6, further comprising a connecting member;

the heating member includes first heating member and the second heating member of interval arrangement, the mounting is including being used for fixing the first mounting of first heating member and being used for fixing the second mounting of second heating member, the connecting piece set up in first mounting with between the second mounting for fixed evaporation source.

10. An evaporation apparatus comprising an evaporation source, characterized by comprising a heating device of the evaporation source according to any one of claims 1 to 9.

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