CN211514372U - Gas-liquid mixing regulation and control system - Google Patents
Gas-liquid mixing regulation and control system Download PDFInfo
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- CN211514372U CN211514372U CN201922018449.1U CN201922018449U CN211514372U CN 211514372 U CN211514372 U CN 211514372U CN 201922018449 U CN201922018449 U CN 201922018449U CN 211514372 U CN211514372 U CN 211514372U
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Abstract
A gas-liquid mixing regulation system comprises a liquid supply device, a gas supply device and a mixing tank body, wherein the liquid supply device inputs liquid with a first flow rate, the gas supply device inputs gas with a second flow rate into the mixing tank body, and the liquid and the gas are mixed in the mixing tank body to form mixed fluid; the first end of the output pipeline is communicated with the mixing groove body, the second end of the output pipeline is communicated with the machine table, so that the mixed fluid is output to the machine table through the output pipeline, the mixed fluid in the first end has a third flow rate, and the mixed fluid in the second end has a fourth flow rate; the non-electric control flow regulating device is connected to the output pipeline, and the mixed fluid passing through the non-electric control flow regulating device has a fifth flow; the first flow rate is greater than or equal to the third flow rate, and the first flow rate is greater than or equal to at least one of the fourth flow rate and the fifth flow rate.
Description
Technical Field
The utility model relates to a gas-liquid mixing system; in particular to a gas-liquid mixing regulation system.
Background
In the high-tech field, it is required to use a gas-liquid mixed fluid with a stable concentration for manufacturing high-tech product components (e.g., semiconductor wafer, display device, touch panel, etc.). Such a gas-liquid mixture fluid with a stable concentration is usually supplied to the manufacturing machine of the high-tech product component at a fixed pressure and a fixed flow rate.
Generally, a gas-liquid mixed fluid system utilizes an electric control device (such as a Mass Flow Controller (MFC)) to adjust the pressure and flow rate of liquid and gas input into a mixing tank, and then utilizes another electric control device to adjust the pressure and flow rate of the gas-liquid mixed fluid output to a manufacturing machine, so that the conventional gas-liquid mixed fluid adjusting method needs to be adjusted by the electric control device, thereby causing heavy burden of power resource consumption and forming another form of environmental protection problem.
Moreover, since the conventional regulation and control method of the gas-liquid mixed fluid needs to be performed by an electric control device, and the flow rate of the gas-liquid mixed fluid that can be supplied by the related electric control device is greatly limited (e.g., 6 to 8LPM), if a plurality of manufacturing machines need to supply a large amount of gas-liquid mixed fluid (e.g., 10 to 12LPM), a plurality of gas-liquid mixed fluid regulation and control units must be connected in parallel to fully supply the flow rate of the gas-liquid mixed fluid that is required by the manufacturing machines, and the plurality of gas-liquid mixed fluid regulation and control units that are connected in parallel need to occupy additional use space of the factory and consume a large amount of electric power, thereby increasing the manufacturing cost of the high-tech product components.
In addition, if the flow rate of the gas-liquid mixed fluid required by the manufacturing machine is low (for example, 2 to 4LPM), the flow rate exceeds the regulation and control capability range of the related electric control device, so that the concentration ratio and other related parameters of the gas-liquid mixed fluid are unbalanced, and the use requirement of the manufacturing machine cannot be met.
In summary, the existing gas-liquid mixing control system still needs to be improved to solve many problems of the traditional gas-liquid mixing control system.
SUMMERY OF THE UTILITY MODEL
In view of the above, an object of the present invention is to provide a gas-liquid mixing control system and a control method thereof, which can control the output flow of a gas-liquid mixed fluid in a non-electric control manner, and can supply a large flow range (e.g., 2 to 16LPM), so that the flow requirements of the gas-liquid mixed fluid with low flow (2 to 4LPM) and high flow (10 to 14LPM) can be satisfied by a single gas-liquid mixing control system. Furthermore, the utility model provides a gas-liquid mixture regulation and control system and regulation and control method need not to use electric power to control, consequently can avoid the consumption of electric power resource, accord with the environmental protection requirement of new attitude manufacturing.
In order to achieve the above object, the present invention provides a gas-liquid mixing control system, which comprises a liquid supply device, a gas supply device, a mixing tank, an output pipeline and a non-electric control flow rate adjusting device; the liquid supply device is used for providing a liquid with a first fixed pressure and a first flow; the gas supply device is used to provide a gas with a second fixed pressure and a second flow rate; the mixing tank is connected to the liquid supply device and the gas supply device, wherein the liquid supply device inputs the liquid into the mixing tank at the first fixed pressure and the first flow rate, the gas supply device inputs the gas into the mixing tank at the second fixed pressure and the second flow rate, and the liquid and the gas are mixed in the mixing tank to form a mixed fluid; a first end of the output pipeline is communicated with the mixing tank body, and a second end of the output pipeline is communicated with at least one machine table, so that the mixed fluid is output from the mixing tank body to the at least one machine table through the output pipeline, the mixed fluid in the first end has a third flow rate, and the mixed fluid in the second end has a fourth flow rate; the non-electric control flow regulating device is communicated with the output pipeline, wherein the mixed fluid passing through the non-electric control flow regulating device has a fifth flow; the first flow rate is greater than or equal to the third flow rate, and the first flow rate is greater than or equal to at least one of the fourth flow rate and the fifth flow rate.
Another object of the present invention is to provide a gas-liquid mixing control method, which comprises at least the following steps:
providing a liquid with a first fixed pressure and a first flow rate in a mixing tank body;
providing a gas with a second fixed pressure and a second flow rate in the mixing tank body;
mixing the liquid and the gas in the mixing tank to form a mixed fluid; and
outputting the mixed fluid from the mixing tank to at least one machine through an output pipeline, wherein a first end of the output pipeline is communicated with the mixing tank, a second end of the output pipeline is communicated with the at least one machine, the mixed fluid in the first end has a third flow rate, and the mixed fluid in the second end has a fourth flow rate; the output pipeline is communicated with a non-electric control flow regulating device, and the mixed fluid passing through the non-electric control flow regulating device has a fifth flow;
wherein the first flow rate is greater than or equal to the third flow rate, and the first flow rate is greater than or equal to at least one of the fourth flow rate and the fifth flow rate.
The utility model has the effects of, gas-liquid mixture regulation and control system and regulation and control method, it utilizes the automatically controlled flow control device of non-to carry out the regulation and control of gas-liquid mixture fluidic output flow to can supply large-traffic scope (for example 2 ~ 16LPM), and then be convenient for can satisfy the gas-liquid mixture fluidic flow demand of low flow (2 ~ 4LPM) and high flow (10 ~ 14LPM) with single gas-liquid mixture regulation and control system. Furthermore, the utility model provides a gas-liquid mixture regulation and control system and regulation and control method need not to use electric power to control, consequently can avoid the consumption of electric power resource, accord with the environmental protection requirement of new attitude manufacturing.
Drawings
Fig. 1 is a schematic view of a gas-liquid mixing control system according to a preferred embodiment of the present invention;
FIG. 2 is a graph showing the relationship between the outflow time and the outflow rate of the liquid and the mixed fluid according to a preferred embodiment of the present invention;
fig. 3 is a flowchart of a gas-liquid mixing control method according to a preferred embodiment of the present invention.
Description of the reference numerals
1 gas-liquid mixing regulation and control system
10 liquid supply device
12 mechanical pressure flow measuring device
20 gas supply device
22 mechanical pressure flow measuring device
30 mixing tank
32-flow-discharging device 34 gas dispersing device
40 output pipeline
40a first end 40b second end
41. 42 mechanical pressure flow measuring device 44 conductivity meter
50 non-electric control flow regulator
52 mechanical pressure flow measuring device
A. B, C, D machine platform
F1 first flow F2 second flow
F3 third flow F4 fourth flow F5 fifth flow
S02, S04, S06 and S08 steps
Detailed Description
In order to explain the present invention more clearly, a preferred embodiment will be described in detail below with reference to the accompanying drawings. Referring to fig. 1, fig. 1 is a schematic view of a gas-liquid mixing regulation system 1 according to a preferred embodiment of the present invention, and the gas-liquid mixing regulation system 1 provided by the present invention can be used for mixing water and carbon dioxide to form a carbon dioxide water fluid, but not limited thereto. The chemical liquid dilution system 1 includes a liquid supply device 10, a gas supply device 20, a mixing tank 30, an output pipeline 40, and a non-electrically controlled flow rate adjusting device 50.
In the embodiment of the present invention, the liquid supply device 10 is used to provide a first fixed pressure and a first flow rate of liquid (for example, water); the gas supply device 20 is used for providing a second fixed pressure and a second flow rate of gas (for example, carbon dioxide).
In fig. 1, a mixing tank 30 is connected to the liquid supply device 10 and the gas supply device 20. The liquid supply device 10 inputs liquid into the mixing tank 30 at a first fixed pressure and a first flow rate, the gas supply device 20 inputs gas into the mixing tank 30 at a second fixed pressure and a second flow rate, and the liquid and the gas are mixed in the mixing tank 30 to form a mixed fluid. In the embodiment of the present invention, the liquid supply device 10 includes a mechanical pressure-flow measuring device 12 disposed on the communication pipeline between the liquid supply device 10 and the mixing tank 30 for measuring the pressure and flow value of the liquid output from the liquid supply device 10 and measuring the input first flow F1 of the liquid. In the embodiment of the present invention, the gas supply device 20 includes a mechanical pressure and flow measuring device 22 disposed on the communication pipeline between the gas supply device 20 and the mixing tank 30 for measuring the pressure and flow of the gas output from the gas supply device 20.
In fig. 1, the first end 40a of the output pipeline 40 is connected to the mixing tank 30, and the second end 40b thereof is connected to at least one station A, B, C, D, so that the mixed fluid is output from the mixing tank 30 to the station A, B, C, D through the output pipeline 40. In an embodiment of the present invention, the mixed fluid in the first end 40a of the output line 40 has a third flow rate F3, and the mixed fluid in the second end 40b of the output line 40 has a fourth flow rate F4.
In fig. 1, the non-electrically controlled flow regulator 50 is connected to the output line 40, wherein the mixed fluid passing through the non-electrically controlled flow regulator 50 has a fifth flow F5. In the embodiment of the present invention, the first flow rate F1 is greater than or equal to the third flow rate F3, and the first flow rate F1 is greater than or equal to at least one of the fourth flow rate F4 and the fifth flow rate F5; in practice, the first flow rate F1 may range from 0 to 16LPM, the third flow rate F3 may range from 0 to 16LPM, the fourth flow rate F4 may range from 0 to 16LPM, and the fifth flow rate F5 may range from 0 to 16 LPM.
In the embodiment of the present invention, the first flow rate F1 is greater than the sum of the fourth flow rate F4 and the fifth flow rate F5, that is, when F1 is 16LPM, F4 is 10LPM, and F5 is 5.5 LPM.
In the present embodiment, the first flow rate F1 is equal to the sum of the fourth flow rate F4 and the fifth flow rate F5, i.e., when F1 is 16LPM, F4 is 6LPM, and F5 is 10 LPM.
In the embodiment of the present invention, the first flow F1 is a fixed value (preset to 16LPM, but not limited thereto, the value can be adjusted according to actual requirements), and when the first flow F1 is greater than the fourth flow F4, the difference between the first flow F1 and the fourth flow F4 is discharged from the non-electrically controlled flow regulator 50. In the embodiment of the present invention, the difference between the first flow rate F1 and the fourth flow rate F4 is greater than or equal to the fifth flow rate F5. For example, when only station a needs to provide the mixed fluid, the fourth flow F4 may only need 2LPM, and when the input mixed tank liquid is 16LPM, the third flow F3 output from the mixed tank 30 is 16LPM, and the excess 14LPM is discharged from the non-electrically controlled flow regulator 50; when the station A, B, C, D needs to provide the mixed fluid, the fourth flow F4 needs to provide a total of 12LPM, and the input mixing tank liquid is 16LPM, the third flow F3 output from the mixing tank 30 is 16LPM, and the excess 4LPM is discharged from the non-electrically controlled flow regulator 50.
In fig. 1, the output pipeline 40 includes a conductivity meter 44 disposed between the first end 40a and the second end 40b for detecting the conductivity value of the mixed fluid. In addition, the output pipeline 40 includes a mechanical pressure and flow measuring device 41 disposed between the first end 40a and the second end 40b for measuring the pressure and the third flow F3 of the mixed fluid; the output line 40 includes a mechanical pressure-flow measuring device 42 disposed between the first end 40a and the second end 40b for measuring the pressure and the fourth flow F4 of the mixed fluid. In the embodiment of the present invention, the non-electrically controlled flow regulator 50 includes a mechanical pressure and flow measuring device 52 disposed on the communication pipeline between the non-electrically controlled flow regulator 50 and the output pipeline 40 for measuring the pressure of the mixed fluid and the fourth flow F4.
In FIG. 1, the mixing tank 30 includes a drain 32 disposed at the top of the mixing tank 30 for draining a portion (excess) of the gas out of the mixing tank 30. In the present embodiment, the drainage device 32 can drain a part (too much) of the liquid out of the mixing tank 30.
In fig. 1, the mixing tank 30 includes a gas dispersion device 34 disposed inside the mixing tank 30 for dispersing gas in liquid to form a mixed fluid.
The embodiment of the present invention provides an electrically controlled flow regulator 50, which is a mechanical valve, and the mechanical valve does not use power, i.e. it is not necessary to use power to control, so as to avoid the consumption of power resources and meet the environmental protection requirement of new-state manufacturing industry.
Fig. 2 is a graph showing the relationship between the outflow time and the outflow rate of the liquid and the mixed fluid according to a preferred embodiment of the present invention. In fig. 2, the first flow rate F1 is equal to the third flow rate F3, the third flow rate F3(Δ) is a fixed value (preset to 18LPM, but not limited thereto, and a value can be adjusted according to actual demand), and when the third flow rate F3(Δ) is greater than the fourth flow rate F4 (major), the difference between the third flow rate F3(Δ) and the fourth flow rate F4 (major) is discharged from the electronically-controllable flow regulator 50. In the present embodiment, the difference between the third flow F3(Δ) and the fourth flow F4 (key) is equal to the fifth flow F5 (o). For example, when only station a needs to provide the mixed fluid, the fourth flow F4(═ 3 LPM) may be needed, while the third flow F3(Δ) output from the mixing tank 30 remains 18LPM, and the excess 15LPM is discharged from the non-electronically controlled flow regulator 50, i.e., the fifth flow F5 (); when the console A, B, C, D is continuously opened over time and it is necessary to supply mixed fluid, the fourth flow F4(∞) is required to supply a total of 15LPM, while the third flow F3(Δ) output from the mixing tank 30 is maintained at 18LPM, and the excess 3LPM is discharged from the non-electrically controlled flow adjustment device 50, i.e., the fifth flow F5 (#). Further, if the mixed fluid is not required to be supplied from all the stations, the fourth flow F4(·) is 0LPM, and the third flow F3(Δ) output from the mixing tank 30 is kept at 18LPM, and all the 18LPM are discharged from the electronically non-controlled flow rate adjustment device 50, i.e., the fifth flow F5 (#). Therefore, the embodiment of the utility model provides a gas-liquid mixture regulation and control system can supply large-traffic scope (for example 0 ~ 18LPM), and then be convenient for can satisfy the gas-liquid mixture fluidic flow demand of low flow (0 ~ 4LPM) and high flow (10 ~ 18LPM) with single gas-liquid mixture regulation and control system.
Referring to fig. 1 and fig. 3, the gas-liquid mixing control method at least includes the following steps:
step S02, providing a first fixed pressure and a first flow F1 of liquid in the mixing tank 30;
step S04, providing a second fixed pressure and a second flow rate F2 of gas in the mixing tank 30;
step S06, mixing the liquid and the gas in the mixing tank 30 to form a mixed fluid;
step S08, outputting the mixed fluid from the mixing tank 30 to at least one machine A, B, C, D through an output pipeline 40, wherein a first end 40a of the output pipeline 40 is connected to the mixing tank 30, and a second end 40b thereof is connected to the machine A, B, C, D; in an embodiment of the present invention, the mixed fluid in the first end 40a of the output line 40 has a third flow rate F3, and the mixed fluid in the second end 40b of the output line 40 has a fourth flow rate F4; the output pipeline 40 is communicated with the non-electric control flow regulating device 50, and the mixed fluid passing through the non-electric control flow regulating device 50 has a fifth flow F5; the third flow rate F3 is greater than or equal to the fourth flow rate F4 and the fifth flow rate F5.
In the embodiment of the present invention, the first flow rate F1 is greater than the sum of the fourth flow rate F4 and the fifth flow rate F5. In the embodiment of the present invention, the first flow rate F1 is equal to the sum of the fourth flow rate F4 and the fifth flow rate F5.
In the embodiment of the present invention, the first flow F1 is equal to the third flow F3 and is a fixed value, and when the third flow F3 is greater than the fourth flow F4, the difference between the third flow F3 and the fourth flow F4 is discharged from the non-electrically controlled flow regulator 50. In the present embodiment, the difference between the third flow F3 and the fourth flow F4 is equal to the fifth flow F5.
In the embodiment of the present invention, the mixing tank 30 includes a gas dispersing device 34 disposed inside the mixing tank 30 for dispersing gas in liquid to form a mixed fluid. The non-electric control flow regulating device 50 is a mechanical valve body, and the mechanical valve body does not use electric power, i.e. does not need to use electric power for control, so that the consumption of electric power resources can be avoided, and the environmental protection requirement of the new-form manufacturing industry is met.
Borrow by the utility model discloses by the design, the embodiment of the utility model provides a gas-liquid mixture regulation and control system and regulation and control method, it utilizes the automatically controlled flow control device of non-to carry out the regulation and control of gas-liquid mixture fluidic output flow to can supply large-traffic scope (for example 2 ~ 16LPM), and then be convenient for can satisfy low flow (2 ~ 4LPM) and high flow (10 ~ 14LPM) gas-liquid mixture fluidic flow demand with single gas-liquid mixture regulation and control system. Furthermore, the utility model provides a gas-liquid mixture regulation and control system and regulation and control method need not to use electric power to control, consequently can avoid the consumption of electric power resource, accord with the environmental protection requirement of new attitude manufacturing.
The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications to the application of the present invention and the claims should be considered to be included in the scope of the present invention.
Claims (10)
1. A gas-liquid mixing regulation system comprising:
the liquid supply device is used for providing a liquid with a first fixed pressure and a first flow;
a gas supply device for providing a gas at a second fixed pressure and a second flow rate;
a mixing tank connected to the liquid supply device and the gas supply device, wherein the liquid supply device inputs the liquid into the mixing tank at the first fixed pressure and the first flow rate, the gas supply device inputs the gas into the mixing tank at the second fixed pressure and the second flow rate, and the liquid and the gas are mixed in the mixing tank to form a mixed fluid;
an output pipeline, a first end of which is communicated with the mixing tank and a second end of which is communicated with at least one machine station, so that the mixed fluid is output from the mixing tank to the at least one machine station through the output pipeline, and the mixed fluid in the first end has a third flow rate and the mixed fluid in the second end has a fourth flow rate; and
the non-electric control flow regulating device is communicated with the output pipeline, and the mixed fluid passing through the non-electric control flow regulating device has a fifth flow;
wherein the first flow rate is greater than or equal to at least one of the fourth flow rate and the fifth flow rate.
2. The gas-liquid mixture regulation system of claim 1, wherein the first flow rate is greater than a sum of the fourth flow rate and the fifth flow rate.
3. The gas-liquid mixture regulation system of claim 1, wherein the first flow rate is equal to a sum of the fourth flow rate and the fifth flow rate.
4. The gas-liquid mixture regulation system of claim 1, wherein the third flow rate is a fixed value, and when the third flow rate is greater than the fourth flow rate, a difference between the third flow rate and the fourth flow rate is exhausted from the non-electrically controlled flow regulation device.
5. The gas-liquid mixture regulation system of claim 4, wherein a difference between the third flow rate and the fourth flow rate is equal to the fifth flow rate.
6. The gas-liquid mixing regulation system of claim 1, wherein the output pipeline comprises a conductivity meter disposed between the first end and the second end for detecting a conductivity value of the mixed fluid.
7. The gas-liquid mixing regulation system of claim 1, wherein the mixing tank comprises a drain disposed at a top end of the mixing tank for draining a portion of the gas out of the mixing tank.
8. The gas-liquid mixing regulation system of claim 7, wherein the drain is configured to drain a portion of the liquid out of the mixing tank.
9. The gas-liquid mixing regulation system of claim 1, wherein the mixing tank comprises a gas dispersion device disposed inside the mixing tank for dispersing the gas in the liquid to form the mixed fluid.
10. The gas-liquid mixture regulation system of claim 1, wherein the non-electrically controlled flow regulation device is a mechanical valve body, and the mechanical valve body does not use electricity.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112823865A (en) * | 2019-11-21 | 2021-05-21 | 信纮科技股份有限公司 | Gas-liquid mixing regulation and control system and regulation and control method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112823865A (en) * | 2019-11-21 | 2021-05-21 | 信纮科技股份有限公司 | Gas-liquid mixing regulation and control system and regulation and control method |
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