CN211514372U - Gas-liquid mixing regulation and control system - Google Patents

Abstract

A gas-liquid mixing regulation system comprises a liquid supply device, a gas supply device and a mixing tank body, wherein the liquid supply device inputs liquid with a first flow rate, the gas supply device inputs gas with a second flow rate into the mixing tank body, and the liquid and the gas are mixed in the mixing tank body to form mixed fluid; the first end of the output pipeline is communicated with the mixing groove body, the second end of the output pipeline is communicated with the machine table, so that the mixed fluid is output to the machine table through the output pipeline, the mixed fluid in the first end has a third flow rate, and the mixed fluid in the second end has a fourth flow rate; the non-electric control flow regulating device is connected to the output pipeline, and the mixed fluid passing through the non-electric control flow regulating device has a fifth flow; the first flow rate is greater than or equal to the third flow rate, and the first flow rate is greater than or equal to at least one of the fourth flow rate and the fifth flow rate.

Description

Gas-liquid mixing control system

technical field

The utility model relates to a gas-liquid mixing system; in particular, it refers to a gas-liquid mixing control system.

Background technique

In the high-tech field, it is necessary to use a gas-liquid mixed fluid with a stable concentration to manufacture high-tech product components (eg, semiconductor chips, display devices, touch panels, etc.). This kind of gas-liquid mixed fluid with stable concentration is usually supplied to the manufacturing machine of the above-mentioned high-tech product parts with a fixed pressure and a fixed flow rate.

Generally speaking, the gas-liquid mixed flow system uses an electronic control device (such as a mass flow controller; MFC, mass-flow controller) to adjust the pressure and flow of the liquid and gas input into the mixing tank, and then uses another electronic control device to adjust The pressure and flow rate of the gas-liquid mixed fluid output to the manufacturing machine. Therefore, the traditional control method of the gas-liquid mixed fluid needs to be regulated by an electronic control device, which in turn causes a heavy burden of power resource consumption and forms another form of environmental protection. question.

Furthermore, since the above-mentioned traditional gas-liquid mixed fluid regulation method needs to be regulated by an electronic control device, and the flow rate of the gas-liquid mixed fluid that can be supplied by the related electronic control device is quite limited (for example, 6-8 LPM), if When there are multiple manufacturing machines that need to supply a large amount of gas-liquid mixed fluid (for example, 10 to 12 LPM), multiple control units of gas-liquid mixed fluid must be connected in parallel to fully supply the flow rate of gas-liquid mixed fluid required by the manufacturing machine. The parallel connection of multiple gas-liquid mixed fluid control units requires extra space in the workshop and consumes a lot of power, which increases the manufacturing cost of the above-mentioned high-tech product components.

In addition, if the flow rate of the gas-liquid mixed fluid required by the manufacturing machine is low (for example, 2 to 4 LPM), it exceeds the control capability range of the relevant electronic control device, so that the relevant parameters such as the concentration ratio of the gas-liquid mixed fluid are out of balance and cannot be Meet the use requirements of the above-mentioned manufacturing machines.

To sum up, the existing gas-liquid mixing control system still needs to be improved to improve many problems existing in the traditional gas-liquid mixing control system.

Utility model content

In view of this, the purpose of the present invention is to provide a gas-liquid mixing control system and control method, which can control the output flow rate of the gas-liquid mixed fluid in a non-electrically controlled manner, and can supply a large flow range (for example, 2-16 LPM) Therefore, it is convenient to use a single gas-liquid mixing control system to meet the flow requirements of low-flow (2-4LPM) and high-flow (10-14LPM) gas-liquid mixed fluids. In addition, the gas-liquid mixing control system and the control method provided by the present invention do not need to use electric power for control, so the consumption of electric power resources can be avoided, and the environmental protection requirements of the new-type manufacturing industry are met.

In order to achieve the above purpose, a gas-liquid mixing control system provided by the present invention includes a liquid supply device, a gas supply device, a mixing tank, an output pipeline and a non-electrically controlled flow adjustment device; the liquid supply The device is used to provide a liquid with a first fixed pressure and a first flow rate; the gas supply device is used to provide a gas with a second fixed pressure and a second flow rate; the mixing tank system is connected to the liquid supply device and the gas supply device, wherein the liquid supply device inputs the liquid into the mixing tank at the first fixed pressure and the first flow rate, and the gas supply device inputs the gas at the second fixed pressure and the second flow rate into the mixing tank, and the liquid and the gas are mixed in the mixing tank to form a mixed fluid; a first end of the output pipeline is connected to the mixing tank, and a second end is connected to at least one machine station, so that the mixed fluid is output from the mixing tank to the at least one machine through the output pipeline, and the mixed fluid in the first end has a third flow rate, and the mixed fluid in the second end The fluid has a fourth flow; and the non-electrically controlled flow regulating device is communicated with the output pipeline, wherein the mixed fluid passing through the non-electronically controlled flow regulating device has a fifth flow; the first flow is greater than or equal to the The third flow rate is, and the first flow rate is greater than or equal to at least one of the fourth flow rate and the fifth flow rate.

Another object of the present invention is to provide a gas-liquid mixing control method, which comprises at least the following steps:

A liquid with a first fixed pressure and a first flow is provided in a mixing tank;

providing a second fixed pressure and a second flow of a gas in the mixing tank;

mixing the liquid and the gas in the mixing tank to form a mixed fluid; and

The mixed fluid is output from the mixing tank to at least one machine through an output pipeline, wherein a first end of the output pipeline is connected to the mixing tank, and a second end of the output pipeline is connected to the at least one machine, and the mixed fluid in the first end has a third flow rate, and the mixed fluid in the second end has a fourth flow rate; the output pipeline is connected to a non-electrically controlled flow regulating device, and The mixed fluid passing through the non-electrically controlled flow regulating device has a fifth flow;

Wherein, the first flow rate is greater than or equal to the third flow rate, and the first flow rate is greater than or equal to at least one of the fourth flow rate and the fifth flow rate.

The effect of the present invention is that the gas-liquid mixing control system and control method utilize a non-electrically controlled flow control device to control the output flow of the gas-liquid mixed fluid, and can supply a large flow range (for example, 2 to 16 LPM), thereby facilitating the A single gas-liquid mixing control system can meet the flow requirements of low-flow (2-4LPM) and high-flow (10-14LPM) gas-liquid mixed fluids. In addition, the gas-liquid mixing control system and the control method provided by the present invention do not need to use electric power for control, so the consumption of electric power resources can be avoided, and the environmental protection requirements of the new-type manufacturing industry are met.

Description of drawings

1 is a schematic diagram of a gas-liquid mixing control system according to a preferred embodiment of the present invention;

Fig. 2 is the relation diagram of the time and flow rate of the liquid inflow and the outflow of the mixed fluid according to a preferred embodiment of the present utility model;

3 is a flow chart of a gas-liquid mixing control method according to a preferred embodiment of the present invention.

Description of reference numerals

1 Gas-liquid mixing control system

10 Liquid supply device

12 Mechanical pressure flow measuring device

20 Gas supply device

22 Mechanical pressure flow measuring device

30 mixing tank

32 Relief device 34 Gas dispersion device

40 output pipeline

40a first end 40b second end

41, 42 Mechanical pressure flow measuring device 44 Conductivity meter

50 Non-electrically controlled flow regulating device

52 Mechanical pressure flow measuring device

A, B, C, D machines

F1 first flow F2 second flow

F3 third flow F4 fourth flow F5 fifth flow

S02, S04, S06, S08 steps

Detailed ways

In order to illustrate the present invention more clearly, a preferred embodiment is given and described in detail with the accompanying drawings as follows. Please refer to FIG. 1 , which is a schematic diagram of a gas-liquid mixing control system 1 according to a preferred embodiment of the present invention, and the gas-liquid mixing control system 1 provided by the present invention can be used to mix water and carbon dioxide to form carbon dioxide Water fluids, but not limited thereto. The chemical liquid dilution system 1 includes a liquid supply device 10, a gas supply device 20, a mixing tank 30, an output pipeline 40 and a non-electrically controlled flow regulating device 50.

In the embodiment of the present invention, the liquid supply device 10 is used to provide a liquid (for example, water) with a first fixed pressure and a first flow rate; the gas supply device 20 is used to provide a gas with a second fixed pressure and a second flow rate ( For example, carbon dioxide).

In FIG. 1 , the mixing tank 30 is connected to the liquid supply device 10 and the gas supply device 20 . The liquid supply device 10 inputs liquid into the mixing tank 30 at a first fixed pressure and a first flow rate, and the gas supply device 20 inputs gas into the mixing tank 30 at a second fixed pressure and a second flow rate, and the liquid And the gas is mixed in the mixing tank body 30 to form a mixed fluid. In the embodiment of the present invention, the liquid supply device 10 includes a mechanical pressure flow measuring device 12 disposed on the communication pipe between the liquid supply device 10 and the mixing tank 30 to measure the liquid output from the liquid supply device 10 the pressure and flow value, and measure the liquid input first flow F1. In the embodiment of the present invention, the gas supply device 20 includes a mechanical pressure flow measuring device 22 disposed on the communication pipe between the gas supply device 20 and the mixing tank 30 to measure the gas output from the gas supply device 20 pressure and flow values.

In FIG. 1 , the first end 40a of the output pipeline 40 is communicated with the mixing tank body 30 , and the second end 40b thereof is communicated with at least one machine A, B, C, D, so that the mixed fluid flows from the mixing tank body 30 . It is output to machines A, B, C and D through the output pipeline 40 . In the embodiment of the present invention, the mixed fluid in the first end 40a of the output pipeline 40 has a third flow F3, and the mixed fluid in the second end 40b of the output pipeline 40 has a fourth flow F4.

In FIG. 1 , the non-electrically controlled flow regulating device 50 is communicated with the output pipeline 40 , wherein the mixed fluid passing through the non-electronically controlled flow regulating device 50 has a fifth flow rate F5 . In the embodiment of the present invention, the first flow F1 is greater than or equal to the third flow F3, and the first flow F1 is greater than or equal to at least one of the fourth flow F4 and the fifth flow F5; in practice, the first flow The range of F1 may be, for example, 0-16 LPM, the range of the third flow F3 may be, for example, 0-16 LPM, the range of the fourth flow F4 may be 0-16 LPM, and the range of the fifth flow F5 may be 0-16 LPM.

In the embodiment of the present invention, the first flow rate F1 is greater than the sum of the fourth flow rate F4 and the fifth flow rate F5, that is, when F1=16LPM, F4=10LPM, and F5=5.5LPM.

In the embodiment of the present invention, the first flow F1 is equal to the sum of the fourth flow F4 and the fifth flow F5, that is, when F1=16LPM, F4=6LPM, and F5=10LPM.

In the embodiment of the present invention, the first flow rate F1 is a fixed value (the default value is 16LPM, but this is not a limitation, and the value can be adjusted according to actual needs), and when the first flow rate F1 is greater than the fourth flow rate F4, The difference between the first flow F1 and the fourth flow F4 is discharged from the non-electrically controlled flow regulating device 50 . In the embodiment of the present invention, the difference between the first flow F1 and the fourth flow F4 is greater than or equal to the fifth flow F5. For example, when only machine A needs to provide mixed fluid, the fourth flow F4 may only need 2LPM, and when the liquid input to the mixing tank is 16 LPM, the third flow F3 output from the mixing tank 30 is 16 LPM, which is more than 16 LPM. The 14LPM of 12LPM is discharged from the non-electrically controlled flow regulating device 50; and when machines A, B, C, and D need to provide mixed fluid, the fourth flow F4 needs to provide a total flow of 12LPM, and the liquid input to the mixing tank is 16 LPM , the third flow F3 output from the mixing tank 30 is 16 LPM, and the excess 4 LPM is discharged from the non-electrically controlled flow regulating device 50 .

In FIG. 1 , the output pipeline 40 includes a conductivity meter 44 disposed between the first end 40a and the second end 40b for detecting the conductivity value of the mixed fluid. In addition, the output pipeline 40 includes a mechanical pressure flow measuring device 41 disposed between the first end 40a and the second end 40b for measuring the pressure of the mixed fluid and the third flow F3; the output pipeline 40 includes a mechanical pressure flow The measuring device 42 is disposed between the first end 40a and the second end 40b for measuring the pressure of the mixed fluid and the fourth flow rate F4. In the embodiment of the present invention, the non-electrically controlled flow regulating device 50 includes a mechanical pressure flow measuring device 52 disposed on the communication pipe between the non-electrically controlled flow regulating device 50 and the output pipeline 40 to measure the flow rate of the mixed fluid. pressure and fourth flow F4.

In FIG. 1 , the mixing tank body 30 includes a drain device 32 disposed at the top of the mixing tank body 30 for discharging a part of (excessive) gas from the mixing tank body 30 . In the embodiment of the present invention, the drain device 32 can drain a part of (excessive) liquid out of the mixing tank body 30 .

In FIG. 1 , the mixing tank 30 includes a gas dispersing device 34 disposed inside the mixing tank 30 for dispersing the gas in the liquid to form a mixed fluid.

In the embodiment of the present invention, the non-electrically controlled flow regulating device 50 is a mechanical valve body, and the mechanical valve body does not use electricity, that is, it does not need to use electricity for control, so the consumption of electricity resources can be avoided, and it is in line with the new form of manufacturing. environmental protection requirements of the industry.

FIG. 2 is a diagram showing the relationship between the inflow time of the liquid and the outflow of the mixed fluid and the flow rate according to a preferred embodiment of the present invention. In FIG. 2, the first flow F1 is equal to the third flow F3, and the third flow F3 (Δ) is a fixed value (the default value is 18LPM, but it is not limited by this, and the value can be adjusted according to actual needs), and when When the third flow rate F3 (Δ) is greater than the fourth flow rate F4 (★), the difference between the third flow rate F3 (Δ) and the fourth flow rate F4 (★) is discharged from the non-electrically controlled flow regulating device 50 . In the embodiment of the present invention, the difference between the third flow rate F3 (Δ) and the fourth flow rate F4 (★) is equal to the fifth flow rate F5 (◇). For example, when only machine A needs to provide mixed fluid, the fourth flow F4(★) may only need 3LPM, and the third flow F3(△) output from the mixing tank 30 is kept at 18LPM, with an extra 15LPM Then it is discharged from the non-electrically controlled flow regulating device 50, that is, the fifth flow F5 (◇); and when the machines A, B, C, and D are continuously opened along the time axis, and the mixed fluid needs to be provided, the fourth flow F4 ( ★) A total flow of 15LPM needs to be provided, while the third flow F3 (△) output from the mixing tank 30 is kept at 18 LPM, and the extra 3 LPM is discharged from the non-electrically controlled flow regulating device 50, that is, the fifth flow F5 (◇ ). In addition, if all the machines do not need to supply mixed fluid, the fourth flow F4 (★) is 0 LPM, and the third flow F3 (△) output from the mixing tank 30 is maintained at 18 LPM, and all 18 LPM are produced from non-electrical The flow control device 50 discharges, that is, the fifth flow F5 (◇). Accordingly, the gas-liquid mixing control system provided by the embodiments of the present invention can supply a large flow range (for example, 0-18 LPM), so that a single gas-liquid mixing control system can meet the requirements of low flow (0-4 LPM) and high flow rate. Flow requirement of gas-liquid mixed fluid with flow rate (10~18LPM).

Please refer to FIG. 1 and FIG. 3 together, the gas-liquid mixing control method at least includes the following steps:

Step S02, providing the liquid of the first fixed pressure and the first flow F1 in the mixing tank body 30;

Step S04, providing the gas of the second fixed pressure and the second flow F2 in the mixing tank body 30;

Step S06, mixing the liquid and the gas in the mixing tank body 30 to form a mixed fluid;

In step S08, the mixed fluid is output from the mixing tank 30 to at least one machine A, B, C, D through the output pipeline 40, wherein the first end 40a of the output pipeline 40 is connected to the mixing tank 30, and its The second end 40b is communicated with the machines A, B, C, and D; in the embodiment of the present invention, the mixed fluid in the first end 40a of the output pipeline 40 has a third flow rate F3, and the first end 40a of the output pipeline 40 has a third flow rate F3. The mixed fluid in the two ends 40b has a fourth flow F4; the output pipeline 40 is connected to the non-electrically controlled flow regulating device 50, and the mixed fluid passing through the non-electronically controlled flow regulating device 50 has a fifth flow F5; the third flow F3 is greater than or equal to the fourth flow F4 and the fifth flow F5.

In the embodiment of the present invention, the first flow F1 is greater than the sum of the fourth flow F4 and the fifth flow F5. In the embodiment of the present invention, the first flow F1 is equal to the sum of the fourth flow F4 and the fifth flow F5.

In the embodiment of the present invention, the first flow rate F1 is equal to the third flow rate F3, which is a fixed value, and when the third flow rate F3 is greater than the fourth flow rate F4, the difference between the third flow rate F3 and the fourth flow rate F4 changes from the non-electrically controlled The flow regulating device 50 is discharged. In the embodiment of the present invention, the difference between the third flow F3 and the fourth flow F4 is equal to the fifth flow F5.

In the embodiment of the present invention, the mixing tank body 30 includes a gas dispersing device 34 disposed inside the mixing tank body 30 for dispersing the gas in the liquid to form a mixed fluid. The non-electrically controlled flow regulating device 50 is a mechanical valve body, and the mechanical valve body does not use electricity, that is, it does not need to use electricity for control, so the consumption of electricity resources can be avoided, and the environmental protection requirements of the new form of manufacturing can be met.

With the design of the embodiments of the present invention, the gas-liquid mixing control system and the control method provided by the embodiments of the present invention utilize a non-electrically controlled flow regulating device to control the output flow of the gas-liquid mixed fluid, and can supply a large flow range. (for example, 2-16LPM), so that a single gas-liquid mixing control system can meet the flow requirements of low-flow (2-4LPM) and high-flow (10-14LPM) gas-liquid mixed fluids. In addition, the gas-liquid mixing control system and the control method provided by the present invention do not need to use electric power for control, so the consumption of electric power resources can be avoided, and the environmental protection requirements of the new-type manufacturing industry are met.

The above are only preferred and feasible embodiments of the present invention, and all equivalent changes made by applying the description of the present invention and the scope of the patent application should be included in the patent scope of the present invention.

Claims (10)

1. A gas-liquid mixing regulation system comprising:

the liquid supply device is used for providing a liquid with a first fixed pressure and a first flow;

a gas supply device for providing a gas at a second fixed pressure and a second flow rate;

a mixing tank connected to the liquid supply device and the gas supply device, wherein the liquid supply device inputs the liquid into the mixing tank at the first fixed pressure and the first flow rate, the gas supply device inputs the gas into the mixing tank at the second fixed pressure and the second flow rate, and the liquid and the gas are mixed in the mixing tank to form a mixed fluid;

an output pipeline, a first end of which is communicated with the mixing tank and a second end of which is communicated with at least one machine station, so that the mixed fluid is output from the mixing tank to the at least one machine station through the output pipeline, and the mixed fluid in the first end has a third flow rate and the mixed fluid in the second end has a fourth flow rate; and

the non-electric control flow regulating device is communicated with the output pipeline, and the mixed fluid passing through the non-electric control flow regulating device has a fifth flow;

wherein the first flow rate is greater than or equal to at least one of the fourth flow rate and the fifth flow rate.

2. The gas-liquid mixture regulation system of claim 1, wherein the first flow rate is greater than a sum of the fourth flow rate and the fifth flow rate.

3. The gas-liquid mixture regulation system of claim 1, wherein the first flow rate is equal to a sum of the fourth flow rate and the fifth flow rate.

4. The gas-liquid mixture regulation system of claim 1, wherein the third flow rate is a fixed value, and when the third flow rate is greater than the fourth flow rate, a difference between the third flow rate and the fourth flow rate is exhausted from the non-electrically controlled flow regulation device.

5. The gas-liquid mixture regulation system of claim 4, wherein a difference between the third flow rate and the fourth flow rate is equal to the fifth flow rate.

6. The gas-liquid mixing regulation system of claim 1, wherein the output pipeline comprises a conductivity meter disposed between the first end and the second end for detecting a conductivity value of the mixed fluid.

7. The gas-liquid mixing regulation system of claim 1, wherein the mixing tank comprises a drain disposed at a top end of the mixing tank for draining a portion of the gas out of the mixing tank.

8. The gas-liquid mixing regulation system of claim 7, wherein the drain is configured to drain a portion of the liquid out of the mixing tank.

9. The gas-liquid mixing regulation system of claim 1, wherein the mixing tank comprises a gas dispersion device disposed inside the mixing tank for dispersing the gas in the liquid to form the mixed fluid.

10. The gas-liquid mixture regulation system of claim 1, wherein the non-electrically controlled flow regulation device is a mechanical valve body, and the mechanical valve body does not use electricity.

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