CN107796299B - Gas bath control device - Google Patents
Gas bath control device Download PDFInfo
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- CN107796299B CN107796299B CN201610791444.0A CN201610791444A CN107796299B CN 107796299 B CN107796299 B CN 107796299B CN 201610791444 A CN201610791444 A CN 201610791444A CN 107796299 B CN107796299 B CN 107796299B
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- gas
- gas bath
- tube
- control device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
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- General Physics & Mathematics (AREA)
- Devices For Medical Bathing And Washing (AREA)
Abstract
Gas bath control device provided by the invention homogenizes the double-deck gas bath structure of unit and gas releasing unit using air pressure, and the air pressure, which homogenizes unit, will input gas by multi-pipeline decompression into even body of calming the anger, and is transmitted to the straight through tube at edge；The gas releasing unit includes multiple gas bath air outlets, and the even body of calming the anger is discharged by the gas bath air outlet, forms film gas bath.Gas bath control device structure provided by the invention is ultra-thin, can use under tight space, solves existing gas bath structure size problems of too.
Description
Technical field
The present invention relates to precision machinery instrument technical field, in particular to a kind of gas bath control device.
Background technique
Traditional gas bath control device generally uses normal pressure to blow, in order to guarantee gas bath outlet pressure stability and uniformly
Property, gas bath end equipment is standing to set static pressure cavity configuration and to install the biggish filter of pressure drag equal come the wind speed for guaranteeing entire outlet air surface
Even property, outlet carry out gas bath guiding using grid or shutter.As shown in Figure 1, traditional gas bath end equipment includes gas bath
Static pressure chamber 101, filter 102, gas bath grid 103.In order to stablize gas bath end outlet and import pressure difference, it need to guarantee static pressure chamber
Thickness reaches certain size (thickness is about 50-100mm), along with filter (thickness is about 30-50mm), grid or shutter
Thickness (thickness is about 5-10mm), gas bath control device integral thickness size is larger, will generally be greater than 100mm.
TFT (thin film transistor (TFT)) litho machine of big generation is influenced using splicing object lens, the splicing object lens by depth of focus,
There is the spacing of about 15mm or so in the lower surface of object lens and the upper surface of glass plate, while also to the sky of gas bath control device
Between require (especially thickness) increasingly harsher.Due to above-mentioned traditional gas bath control device can not cover it is whole below object lens
A interferometer light path is thus difficult to ensure the uniformity and stability of the temperature and pressure of interferometer pipeline.
It is therefore desirable to invent a kind of novel gas bath control device, can be useful within the scope of narrow space.
Summary of the invention
The purpose of the present invention is to provide a kind of gas bath control devices of brand new, and thickness is well below existing gas bath
Device allows to to use in narrow space.
In order to solve the above technical problems, the present invention provides a kind of gas bath control device, including air pressure homogenizing unit and gas
Releasing unit: the air pressure homogenizing unit is depressured to form even body of calming the anger for that will input gas；The gas releasing unit includes
Multiple gas bath air outlets, for discharging the even body of calming the anger by the gas bath air outlet.
Specifically, in the gas bath control device, the air pressure homogenous cell include main pipeline, multiple partial pressure pipelines,
Multiple first connecting pipes and multiple first straight through tube；Main pipeline connection gas supply gas source, the partial pressure pipeline and described
First straight through tube is parallel with the main pipeline respectively, and first connecting pipe is connected to the main pipeline, the partial pressure pipeline
With first straight through tube.
Specifically, the gas releasing unit includes multiple gas bath air outlets, Duo Ge in the gas bath control device
Two connecting pipes, multiple third connecting pipes and multiple second straight through tube；The gas bath air outlet setting connects in the third
On adapter tube road, second connecting pipe is connected to second straight through tube.
Optionally, in the gas bath control device, the main pipeline is using wedge-shaped design.
Optionally, in the gas bath control device, the air pressure homogenizing unit is arranged in first straight through tube
Edge.
Optionally, in the gas bath control device, the gas releasing unit is arranged in second straight through tube
Edge.
Optionally, in the gas bath control device, first straight through tube and second straight through tube are communicated.
Optionally, in the gas bath control device, the third connecting pipe is connect with adjacent two described second
Pipeline is connected.
Optionally, in the gas bath control device, the third connecting pipe and the adjacent two gas bath outlet air
Mouth is connected.
Gas bath control device provided by the invention homogenizes the double-deck gas bath knot of unit and gas releasing unit using air pressure
Structure, using compressed gas high-pressure blowing-in, the air pressure homogenizes unit and is depressured to form even body of calming the anger by multi-pipeline by gas is inputted,
The even body of calming the anger is entered in the gas releasing unit by the straight through tube in the even pressure unit of the gas, the gas
Releasing unit discharges the even body of calming the anger by gas bath air outlet, to guarantee the pressure stability and uniformity of gas bath outlet.
Gas bath control device structure provided by the invention is ultra-thin, can use under tight space, solves existing gas bath structure ruler
Very little problems of too.
Detailed description of the invention
Fig. 1 is existing gas bath control device schematic diagram；
Fig. 2 is ultra-thin gas bath control device schematic diagram provided by the invention；
Fig. 3 is Fig. 2 air pressure homogenizing unit structural schematic diagram；
Fig. 4 is Fig. 2 gas releasing unit structural schematic diagram；
Fig. 5 is Fig. 2 gas bath air outlet structure schematic diagram；
Wherein, the reference numerals are as follows in attached drawing 1~5:
101- gas bath static pressure chamber；102- filter；103- gas bath grid；201- air supply inlet；The outlet of 202- gas bath；300-
Main pipeline；The first straight through tube of 301-；302- divides pipeline；The first connecting pipe of 303-；The second straight through tube of 401-；402
(a), 402 (b)-the second connecting pipe；403- third connecting pipe；404- gas bath air outlet.
Specific embodiment
Gas bath control device proposed by the present invention is described in further detail below in conjunction with the drawings and specific embodiments.Root
According to following explanation and claims, advantages and features of the invention will be become apparent from.It should be noted that attached drawing be all made of it is very simple
The form of change and use non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
Fig. 2 is gas bath control device schematic diagram provided by the invention, and the gas bath control device includes air pressure homogenizing unit,
It is depressured to form even body of calming the anger for gas will to be inputted；Gas releasing unit, including multiple gas bath air outlets are used for the even pressure
Gas is discharged by the gas bath air outlet.
Referring to Fig. 3, being the superstructure of the gas bath control device, that is, the air pressure homogenizing unit.In this reality
It applies in example, the air pressure homogenous cell includes main pipeline 300, multiple partial pressure pipelines 302, multiple first connecting pipes 303 and more
A first straight through tube 301；The main pipeline 300 connects the gas supply gas source of external offer, the partial pressure pipeline 302 and described the
One straight through tube 301 is parallel with the main pipeline 300 respectively, and first connecting pipe 303 is connected to the main pipeline 300, institute
State partial pressure pipeline and first straight through tube 301.
Fig. 4 and Fig. 5 are please referred to, is the understructure of the gas bath control device, that is, the gas releasing unit.Institute
Stating gas releasing unit includes that multiple gas bath air outlets 404, multiple second connecting pipes 402 (a) and 402 (b), multiple thirds connect
Adapter tube road 403 and multiple second straight through tube 401；The gas bath air outlet 404 is arranged in the third connecting pipe, described
Second connecting pipe 402 (a) is connected to second straight through tube 401 with 402 (b).
Preferably, the main pipeline 300 is using wedge-shaped design, it is ensured that high pressure gas enters next channel and keeps pressure
The uniformity of power.It is that uniformly just air-flow can be made uniform that wherein the wedgy passage, which need to meet the VELOCITY DISTRIBUTION in entire channel,
Flow to next channel.
Wherein, it is preferred that the VELOCITY DISTRIBUTION are as follows:vyIt is gas in main pipeline
VELOCITY DISTRIBUTION, μ are the coefficient of friction of gas and main pipeline, and z is the radical length that gas flows through in main pipeline, and h is main pipeline
Radially fixed length, p is gas pressure, y airflow direction length, v0For the initial velocity for inputting gas.
Preferably, the edge of the air pressure homogenizing unit, second through tube is arranged in first straight through tube 301
The edge of the gas releasing unit is arranged in road 401, and first straight through tube 301 and second straight through tube 401 are
It is corresponding, it ensure that it is uniform for entering the gas pressure of the gas releasing unit from the air pressure homogenous cell.
Specifically, the third connecting pipe 403 connects with adjacent second connecting pipe 402 (a) and described second
Adapter tube road 402 (b) is connected.Preferably, second connecting pipe 402 (a) and 402 (b) enters the using reversed return system
Three connecting pipes 403, reversed return system even the second connecting pipe 402 (a) reach the third connecting pipe 403 then at first
Two connecting pipes 402 (b) finally reach the third connecting pipe 403, guarantee the two-way for entering the third connecting pipe 403
The stroke that gas is walked be it is identical, just can guarantee that the resistance in the exit of system end is closer to, and is conducive to water conservancy in this way
Balance, therefore the pressure stability of system is good, assignment of traffic is uniform.
Specific gas bath outlet schematic diagram goes out as shown in figure 5, beating many tiny gas baths in the third connecting pipe 403
Air port 404, the third connecting pipe 403 be connected with the adjacent two gas bath air outlets 404, guarantees entire gas with this
The pressure for bathing air outlet is uniform, and wind speed is uniform.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Range.
Claims (6)
1. a kind of gas bath control device, comprising:
Air pressure homogenizing unit is depressured to form even body of calming the anger for that will input gas, and the air pressure homogenizing unit includes main pipeline, more
A partial pressure pipeline, multiple first connecting pipes and multiple first straight through tube；The main pipeline connection gas supply gas source, the partial pressure
Pipeline and first straight through tube are parallel with the main pipeline respectively, and first connecting pipe is connected to the main pipeline, institute
State partial pressure pipeline and first straight through tube；
Gas releasing unit, including multiple gas bath air outlets, for the even body of calming the anger to be discharged by the gas bath air outlet,
The gas releasing unit includes multiple gas bath air outlets, multiple second connecting pipes, multiple third connecting pipes and multiple
Two straight through tube；The gas bath air outlet is arranged in the third connecting pipe, the second connecting pipe connection described the
Two straight through tube；The third connecting pipe is connected with adjacent two second connecting pipes, and adjacent two described
Two connecting pipes enter the third connecting pipe using reversed return system.
2. gas bath control device as described in claim 1, which is characterized in that the main pipeline is using wedge-shaped design.
3. gas bath control device as described in claim 1, which is characterized in that first straight through tube is arranged in the air pressure
The edge of homogenizing unit.
4. gas bath control device as described in claim 1, which is characterized in that second straight through tube is arranged in the gas
The edge of releasing unit.
5. gas bath control device as described in claim 3 or 4, which is characterized in that first straight through tube and described second
Straight through tube communicates.
6. gas bath control device as described in claim 1, which is characterized in that the third connecting pipe and two adjacent institutes
Gas bath air outlet is stated to be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610791444.0A CN107796299B (en) | 2016-08-31 | 2016-08-31 | Gas bath control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610791444.0A CN107796299B (en) | 2016-08-31 | 2016-08-31 | Gas bath control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107796299A CN107796299A (en) | 2018-03-13 |
| CN107796299B true CN107796299B (en) | 2019-11-26 |
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|---|---|---|---|
| CN201610791444.0A Active CN107796299B (en) | 2016-08-31 | 2016-08-31 | Gas bath control device |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110966916B (en) * | 2018-09-30 | 2021-10-15 | 上海微电子装备（集团）股份有限公司 | Gas bath device and photoetching machine |
| CN110068122B (en) * | 2019-03-21 | 2020-12-29 | 中国科学院微电子研究所 | Air bath device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120027846A (en) * | 2010-09-13 | 2012-03-22 | 피엘에이치 프로덕츠 인코포레이티드 | Sauna device |
| CN202585358U (en) * | 2012-02-20 | 2012-12-05 | 睿励科学仪器（上海）有限公司 | Gas bath apparatus, vacuum discharging apparatus and semiconductor semi-conductor equipment |
| CN203772341U (en) * | 2013-12-31 | 2014-08-13 | 北京怡和嘉业医疗科技有限公司 | Flow stabilization device for flow detection and detection device |
| CN205192124U (en) * | 2015-12-01 | 2016-04-27 | 杨娅珊 | Drying cabinet |
-
2016
- 2016-08-31 CN CN201610791444.0A patent/CN107796299B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120027846A (en) * | 2010-09-13 | 2012-03-22 | 피엘에이치 프로덕츠 인코포레이티드 | Sauna device |
| CN202585358U (en) * | 2012-02-20 | 2012-12-05 | 睿励科学仪器（上海）有限公司 | Gas bath apparatus, vacuum discharging apparatus and semiconductor semi-conductor equipment |
| CN203772341U (en) * | 2013-12-31 | 2014-08-13 | 北京怡和嘉业医疗科技有限公司 | Flow stabilization device for flow detection and detection device |
| CN205192124U (en) * | 2015-12-01 | 2016-04-27 | 杨娅珊 | Drying cabinet |
Non-Patent Citations (1)
| Title |
|---|
| 超精密装备恒温气浴关键技术研究;陆叶盛;《中国优秀硕士学位论文全文数据库 工程科技I辑》;20140315;正文第33页-45页，图4-3至图4-18 * |
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| CN107796299A (en) | 2018-03-13 |
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