CN211477065U

CN211477065U - Quartz ring positioning and detecting device

Info

Publication number: CN211477065U
Application number: CN201922340452.5U
Authority: CN
Inventors: 何求; 耿健; 吴然红; 杨军
Original assignee: Hangzhou Dahe Thermo Magnetics Co Ltd
Current assignee: Hangzhou Dahe Thermo Magnetics Co Ltd
Priority date: 2019-12-23
Filing date: 2019-12-23
Publication date: 2020-09-11
Anticipated expiration: 2029-12-23

Abstract

The utility model discloses a quartzy ring location detection device, including bearing tool, processing base plate, positioner and position detection device, the processing base plate is fixed on bearing the tool, the positioner activity sets up on the processing base plate, positioner one side is equipped with the location mouth, position detection device sets up in the positioner top. The utility model discloses following beneficial effect has: (1) accurately positioning the quartz circular ring by arranging a positioning device; (2) the V-shaped positioning port is suitable for positioning circular products with different sizes; (3) the range of applicable products is further expanded by arranging the opening adjusting piece; (4) accurate detection is realized through setting up position detection device, guarantees processingquality, and wide application is freed from the manpower and is detected, the cost of using manpower sparingly.

Description

Quartz ring positioning and detecting device

Technical Field

The utility model relates to a frock field especially relates to a quartzy ring location detection device.

Background

Quartz glass products are important constituent products in semiconductor devices, and demand is increasing. Because the quartz glass has a series of characteristics of high hardness, high purity, low thermal expansion coefficient, electric insulation and the like, the processing technology of the quartz glass is very strict. Particularly, most of machining processes are traditional manual operations, the machining yield and efficiency are generally low, and the requirement on the skill level of operators is high; the structure of a quartz product in the semiconductor equipment is complex and changeable, the quartz ring is processed to bring great processing difficulty for operators, the required time for processing the quartz ring is long, the ring is easy to scratch, the processing efficiency is low, and therefore the production cost is high and the quality is unstable. Common circular ring workpieces are usually positioned by using a clamp, and the common clamp is not suitable for quartz processing because a quartz product is easily worn by the clamp; the quartz circular rings are large in variety and quantity, the size of the circular rings needs to be accurately detected before machining so as to improve machining accuracy, manual detection is usually used at present, time is consumed, and accuracy cannot be guaranteed.

For example, a "positioning and processing device for thin-walled ring-like parts" disclosed in chinese patent document, whose publication No. CN207746719U includes a mandrel including a tooling plate and a central shaft, the central shaft passes through the tooling plate and is provided with an upper locking shaft and a lower taper shank end at the upper and lower ends of the tooling plate, the upper portion of the tooling plate is an integrally provided positioning plate, a ring member is provided along the circumferential direction of the positioning plate, the ring member and the spigot position of the thin-walled ring member form a positioning and fixing, and a U-shaped pressing plate is fixed above the thin-walled ring member, and a locking nut is inserted into the upper locking shaft for fixing. The quartz circular ring positioning fixture has the disadvantages that the end surface of a workpiece is abraded when the fixture is tightly pressed with a circular ring workpiece by utilizing the end surface contact pressing principle, and the quartz circular ring positioning fixture is not suitable for positioning of a quartz circular ring.

Disclosure of Invention

The utility model relates to an overcome complicated difficulty of operation in the quartz ring processing of prior art, processing effect unstable, check-out time is long, the human cost is higher, uses ordinary anchor clamps easily to cause the problem of fish tail to quartz ring, provides a quartz ring location detection device, operation labour saving and time saving, and processing effect is stable, the precision is high, is difficult for causing the fish tail to the quartz product.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a quartzy ring location detection device, is including bearing the tool, processing base plate, positioner and position detection device, the processing base plate is fixed on bearing the tool, positioner activity sets up on the processing base plate, positioner one side is equipped with the location mouth, position detection device sets up in the positioner top.

The utility model is characterized in that a positioning device and a position detection device are arranged, the positioning device is laterally provided with a positioning port, the product is positioned in the horizontal direction by the contact of the positioning port and the quartz ring, the size of the quartz ring is detected before processing by the position detection device, the manpower detection is liberated, and the manpower cost is saved; the bearing jig mainly provides a firm supporting platform for each motion mechanism, and the processing substrate is arranged on the bearing jig platform; the detection method has high accuracy and wide application range, can provide processing quality guarantee for the multi-model quartz circular rings, and lays an important foundation for the multi-model circular ring processing technology to exert the technical advantages and application potential in the field of quartz glass processing. The utility model is suitable for a location and the detection of circular workpiece, especially the product that requires high precision.

Preferably, the positioning device comprises a positioning plate and a guide member, the positioning plate is connected with the guide member in a sliding mode, and the guide member is arranged on the outer side of the processing substrate.

After the quartz circular ring to be processed is placed on the processing substrate, the positioning plate is pushed out from the guide piece, the quartz circular ring is manually adjusted to abut against a positioning opening in the positioning plate, the positioning plate is retracted into the guide piece after the position of the circular ring is confirmed to be correct, and the positioning plate is not in contact with the quartz circular ring in the processing process, so that the processing precision is prevented from being influenced.

Preferably, the opening of the positioning opening faces to one side of the positioning device, and the positioning opening is in a V shape.

Two side walls of the V-shaped positioning opening and a contact point of the quartz ring form two tangent points to position the ring in the horizontal direction, and the V-shaped positioning opening is suitable for positioning the quartz rings with different diameters as long as the quartz ring is in contact with the positioning opening to form the tangent points.

Preferably, an opening adjusting piece is rotatably connected to the positioning opening, and the opening angle of the positioning opening is adjusted along with the rotation of the opening adjusting piece.

The opening angle of the positioning opening is adjusted by arranging the opening adjusting piece, the diameter range of the applicable ring is enlarged, and the smaller the angle is, the smaller the diameter of the applicable ring is.

Preferably, the position detection device includes an X-direction detection device and a Z-direction detection device.

The diameter of the quartz ring is detected by the X-direction detection device, the height of the quartz ring is detected by the Z-direction detection device, and damage to the quartz ring in the manual meter-punching detection and adjustment process is avoided.

Preferably, the Z-direction detection device includes a Z-direction sensor and a sensor mounting plate, and the Z-direction sensor is fixed to the sensor mounting plate.

The Z-direction sensor uses a high-precision detection sensor and is fixed on the machining center through a sensor mounting plate, so that the accurate measurement of the height of the circular ring is realized.

Preferably, the X-direction detection device comprises an X-direction sensor and a driving cylinder which are connected with each other.

The X-direction sensor uses a high-precision detection sensor, and the diameter of the circular ring is measured by driving the telescopic cylinder to accurately move the sensor.

Preferably, the processing substrate is provided with a chip flow hole.

The quartz ring generates scraps in the process, the scraps are generally washed away by cooling liquid, and the scraps are provided with a scrap hole on the processing substrate, and the scraps can be discharged through the scrap hole.

Therefore, the utility model discloses following beneficial effect has: (1) accurately positioning the quartz circular ring by arranging a positioning device; (2) the V-shaped positioning port is suitable for positioning circular products with different sizes; (3) the range of applicable products is further expanded by arranging the opening adjusting piece; (4) accurate detection is realized through setting up position detection device, guarantees processingquality, and wide application is freed from the manpower and is detected, the cost of using manpower sparingly.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic structural view of the positioning device and the X-direction detection device in embodiment 1.

Fig. 3 is a schematic structural view of a positioning plate of embodiment 2.

In the figure: 1. the bearing jig comprises a bearing jig body 11, a bearing jig clamping mechanism 2, a processing substrate 21, a chip flowing hole 22, a substrate clamping mechanism 3, a positioning device 31, a positioning plate 32, a guide piece 33, a positioning hole 331, an opening adjusting piece 332, a guide piece 333, a guide strip 334, a limiting groove, a 4 and X-direction position detecting device, a 41 and X-direction sensor, a 5 and Z-direction position detecting device, a 51 and Z-direction sensor 52, a sensor mounting plate 6 and a quartz ring.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and the detailed description.

Example 1

As shown in fig. 1 and 2, in embodiment 1, a quartz ring positioning and detecting device is detachably and horizontally mounted on a processing center, and comprises a bearing jig 1, a processing substrate 2, a positioning device 3, an X-direction position detecting device 4 and a Z-direction position detecting device 5. The bearing jig 1 is arranged on a machining center, the bearing jig 1 is provided with a bearing jig clamping mechanism 11, a machining substrate 2 made of marble is arranged on the metal bearing jig 1, the machining substrate 2 is provided with a substrate clamping mechanism 22, and the center of the machining substrate 2 is provided with a circular chip flowing hole 21. Be equipped with positioner 3 on processing base plate 2, positioner 3 includes guide 32 and locating plate 31, and processing base plate 2X is to one side being equipped with guide 32, and it is provided with locating plate 31 to slide in guide 32, and locating plate 31 is connected with the machining center drive, and locating plate 31 is followed X and is to the translation at processing base plate 2 upper surface, and one side that locating plate 31 is close to processing base plate 2 center is equipped with V type location mouth 33, and location mouth 33 opening is towards processing base plate 2 center. The X-direction position detection device 4 comprises an X-direction sensor 41 and a driving cylinder, wherein the X-direction sensor 41 is connected with the driving cylinder, and the driving cylinder is connected with the machining center; the Z-direction position detecting device 5 includes a Z-direction sensor 51 and a sensor mounting plate 52, and the Z-direction sensor 51 is fixed to the machining center by the sensor mounting plate 52. Both the X-position detecting device and the Z-position detecting device are disposed above the processing substrate 2.

Firstly, a quartz ring 6 to be processed is placed on a processing substrate 2, the positioning plate 31 is automatically pushed out, the quartz ring is manually adjusted to abut against the positioning opening 33 of the positioning plate 31, the quartz ring is positioned in the Y direction, after the position of the ring is confirmed to be placed correctly, the substrate clamping mechanism 3 clamps the processing substrate 2, the Z-direction sensor 51 starts to detect the height of the ring, and the X-direction sensor 41 detects the diameter of the ring by driving the driving cylinder to stretch, so that the quartz ring is prevented from being damaged in the manual counting detection and adjustment process. And secondly, inputting relevant parameters of the circular ring in the machining program, trying for a section, observing whether the cutter is in a machining safety position, and reserving detection parameters after safety is confirmed. And finally, manually finishing safety check work before machining, confirming the safety check work without errors, automatically running a machining program, and then recording relevant parameters of the circular ring by an operator.

Example 2

In embodiment 2 shown in fig. 3, a quartz ring positioning detection device has a structure substantially the same as that of embodiment 1, and is characterized in that opening adjusting members 331 are rotatably connected to both sides of a V-shaped positioning opening 33 of a positioning plate 31, each opening adjusting member 331 includes a positioning plate 332 and a guide strip 333, each positioning plate 332 is horizontal in a normal direction, one end of each positioning plate 332 is rotatably connected to the bottom end of the positioning opening 33, the other end of each positioning plate is connected to an arc-shaped guide strip 333, the arc-shaped guide strips 333 are slidably disposed in the positioning plate 31, a plurality of limiting grooves 334 are disposed on the upper and lower surfaces of each guide strip 333, and are matched with limiting protrusions inside the positioning plate 31 to limit the moving angle of the opening adjusting members 331, the rotating angles of the opening adjusting members 331 on both sides of the positioning opening 33 should be consistent, and those skilled in. The more the two-side opening adjusting pieces 331 are folded inwards, the smaller the positioning angle is, and the smaller the diameter of the applicable ring is.

Claims

1. The utility model provides a quartzy ring location detection device, characterized by, is including bearing tool (1), processing base plate (2), positioner (3) and position detection device, processing base plate (2) are fixed on bearing tool (1), positioner (3) activity sets up on processing base plate (2), positioner (3) one side is equipped with location mouth (33), position detection device sets up in positioner (3) top.

2. The quartz ring positioning and detecting device as claimed in claim 1, wherein the positioning device (3) comprises a positioning plate (31) and a guide member (32), the positioning plate (31) is slidably connected with the guide member (32), and the guide member (32) is arranged outside the processing substrate (2).

3. The positioning and detecting device for the quartz circular ring as claimed in claim 1, wherein the positioning opening (33) is opened towards one side of the positioning device (3), and the positioning opening (33) is V-shaped.

4. The quartz ring positioning and detecting device as claimed in claim 3, wherein an opening adjusting member (331) is rotatably connected to the positioning port (33), and an opening angle of the positioning port (33) is adjusted along with the rotation of the opening adjusting member (331).

5. The positioning and detecting device for the quartz ring as claimed in claim 1, wherein the position detecting device comprises an X-direction detecting device (4) and a Z-direction detecting device (5).

6. The quartz ring positioning detection device as set forth in claim 5, wherein the Z-direction detection device (5) comprises a Z-direction sensor (51) and a sensor mounting plate (52), and the Z-direction sensor (51) is fixed to the sensor mounting plate (52).

7. The quartz ring positioning and detecting device as claimed in claim 5, wherein the X-direction detecting device (4) comprises an X-direction sensor (41) and a driving cylinder (42) which are connected.

8. The quartz ring positioning and detecting device as claimed in claim 1 or 2, wherein the processing substrate (2) is provided with a chip flow hole (21).