CN117059508A - Automatic detection method for flatness of retaining ring backboard - Google Patents
Automatic detection method for flatness of retaining ring backboard Download PDFInfo
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- CN117059508A CN117059508A CN202311019857.3A CN202311019857A CN117059508A CN 117059508 A CN117059508 A CN 117059508A CN 202311019857 A CN202311019857 A CN 202311019857A CN 117059508 A CN117059508 A CN 117059508A
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- 238000001514 detection method Methods 0.000 title claims abstract description 127
- 238000000034 method Methods 0.000 claims abstract description 37
- 230000000149 penetrating effect Effects 0.000 claims description 14
- 239000000523 sample Substances 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 239000004579 marble Substances 0.000 claims description 6
- 229910000838 Al alloy Inorganic materials 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 20
- 238000012545 processing Methods 0.000 abstract description 9
- 238000013461 design Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
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- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention provides an automatic detection method for the flatness of a retaining ring backboard, which comprises the following steps: fixing a positioning gauge on a workbench surface, and then placing a to-be-detected retaining ring backboard tightly attached to the positioning gauge upwards; manually detecting a positioning reference by using a three-coordinate detection device on a first retaining ring, and then automatically detecting the planeness of a back plate of the retaining ring; and after the retaining ring with the same structural size which is detected later is placed close to the positioning detection tool, the flatness of the back plate of the retaining ring is directly and automatically detected. According to the invention, through the design of the positioning gauge structure, the retainer ring can be accurately positioned, the automatic detection can be directly carried out without repeated detection of positioning references before the retainer ring with the same structural size is detected, the detection efficiency is greatly improved, the detection process is safe and stable, the product quality and the product processing efficiency are improved, and the instability of operation during manual detection, the risk of damage to the product by a detection needle and the instability of detection speed are avoided.
Description
Technical Field
The invention belongs to the technical field of semiconductor product detection, and relates to an automatic detection method for flatness of a retaining ring backboard.
Background
In the process of semiconductor wafer processing, chemical mechanical polishing is an important process, and chemical mechanical polishing is a processing technology combining chemical corrosion and mechanical removal, and a structural component of a retaining ring is generally used to perform the function of holding and positioning the wafer. The basic structure of holding ring includes annular main part, and divide into two rings that set up from top to bottom, is located the ring body of upside and polishing head direct contact and is called the backplate, is metal material generally, and is higher to its planarization requirement during the use, and does not have the planarization detection process after the backplate grinds among the prior art, only can judge whether product planarization is qualified when the finished product detects, if it is unqualified need carry out multiple operation repair, causes machining efficiency to reduce, increases the risk of scrapping, consequently the best detects the backplate of holding ring in advance.
In the production and use process of workpieces, particularly workpiece products with obvious structural characteristics or higher requirements on size often need to detect three-dimensional sizes of the workpiece products, so that the workpiece products are convenient to apply better; the three-coordinate measuring machine is a device for automatically detecting the three-dimensional size of a product, and a coordinate system needs to be established for the measured product before the product is measured. When the number of products to be measured is large, the positions of different products placed on the workbench in sequence are different, so that a coordinate system needs to be built once every time one product is detected, and a long time is taken to build the coordinate system once, thereby causing the problem of low detection efficiency.
The annular product is one of the workpieces which are used more at present, the retaining ring for chemical mechanical polishing is also an annular workpiece, and in order to ensure the efficiency and accuracy of flatness detection, the position of each placement needs to be fixed, namely, the corresponding positioning assembly is adopted to enable the same product to be positioned accurately, and a coordinate system does not need to be established repeatedly.
CN 205669996U discloses a positioning fixture for three-coordinate detection, which comprises a chuck, a positioning bottom plate, a supporting bottom plate and a positioning mandrel; the chuck is fixed on the positioning mandrel, the positioning mandrel is installed on the positioning bottom plate, the positioning bottom plate is fixedly connected with the supporting bottom plate, the positioning mandrel is composed of a shaft sleeve and an expansion core, the expansion core is embedded into the shaft sleeve, the inside of the shaft sleeve is a conical surface, a shaft sleeve opening is longitudinally formed in the shaft sleeve, and the expansion core is a frustum which is matched with the inner conical surface of the shaft sleeve. The positioning fixture provides a common fixture positioning interface for three-coordinate detection equipment, so that a workpiece to be measured can be directly placed in the chuck to be clamped for measurement, but the fixture is suitable for the influence of the structure and the size of the chuck on the measured workpiece, and can not be used for measuring the annular workpiece, and meanwhile, the positioning fixture is complex in structure, and the operation difficulty of workpiece measurement is increased.
CN 216228039U discloses a positioning fixture for processing a retaining ring, the positioning fixture comprises a base and an annular boss arranged on the surface of the base, a guide assembly is arranged in the center of the base, one end of the guide assembly, which is far away from the center of the base, is propped against the inner wall of the annular boss, at least two positioning pins are arranged on the surface of the annular boss, the retaining ring is arranged on the surface of the annular boss and limited by the positioning pins, and the guide assembly is used for keeping the coaxiality of the annular boss and the retaining ring. The positioning fixture is mainly used for processing the retaining ring to solve the problem of concentric alignment with the lathe spindle in the processing process of the retaining ring, but is not used for accurately detecting the structural size of the retaining ring, and the requirements of application of different positioning fixtures are different.
In summary, for the detection of the structural dimension, especially the flatness, of the retaining ring product, a proper positioning detection tool needs to be selected, and automatic detection is performed by adopting a three-coordinate measurement mode, so that the detection efficiency is improved, and the stability of the multi-product detection chamber is ensured.
Disclosure of Invention
Aiming at the problems existing in the prior art, the invention aims to provide an automatic detection method for the flatness of the back plate of the retaining ring, which can position the retaining ring through the design of a positioning gauge structure, so that repeated detection of positioning references is not needed before detection of a plurality of retaining rings of the same type, the flatness of the back plate of the retaining ring is detected more efficiently, safely and stably in an automatic detection mode, the detection efficiency is improved, and meanwhile, the instability of manual detection and the risk of injuring products by collision are avoided.
To achieve the purpose, the invention adopts the following technical scheme:
the invention provides an automatic detection method for the flatness of a retaining ring backboard, which comprises the following steps:
(1) Fixing a positioning gauge on a workbench surface, and then placing a to-be-detected retaining ring backboard tightly attached to the positioning gauge upwards;
(2) Manually detecting a positioning reference by using a three-coordinate detection device on a first retaining ring, and then automatically detecting the planeness of a back plate of the retaining ring;
(3) And after the retaining ring with the same structural size which is detected later is placed close to the positioning detection tool, the flatness of the back plate of the retaining ring is directly and automatically detected.
In the invention, three-coordinate detection equipment can be adopted for detecting the flatness of the back plate of the retaining ring product, but compared with the traditional manual detection mode, the automatic detection mode is more prone to be adopted at present, the key problem is that the positioning of the product is realized, the product needs to be positioned before each detection, and the product position is required to be consistent when each detection is carried out, so that the positioning detection tool is adopted in the invention, the structural design of the positioning detection tool, such as a symmetrical structure with a two-section disc-shaped structure and a middle straight connecting section, is adopted, when the retaining ring to be detected is placed close to the positioning detection tool, the position consistency of each detection is ensured, the positioning reference is only required to be detected when the first product is detected, the automatic detection can be directly carried out after the subsequent products with the same size are placed, the detection efficiency is greatly improved, the detection process is safe and stable, the standardized operation of batch products can be realized, the product quality and the product processing efficiency are improved, and the risk that the product is easy to be damaged by a detection needle during the manual detection is avoided.
The following technical scheme is a preferred technical scheme of the invention, but is not a limitation of the technical scheme provided by the invention, and the technical purpose and beneficial effects of the invention can be better achieved and realized through the following technical scheme.
As a preferable technical scheme of the invention, the retaining ring backboard is made of stainless steel.
Preferably, the surface of the backboard of the retaining ring is provided with a fixed mounting hole and a positioning pin hole.
Preferably, the fixed mounting holes are circular threaded holes, the number of which comprises at least 10, for example 10, 12, 15, 16 18 or 20 etc. evenly distributed along the circumference of the annular surface.
Preferably, the positioning pin hole comprises a waist-shaped positioning pin hole and a round positioning pin hole, the waist-shaped positioning pin hole and the round positioning pin hole are positioned at two ends on the same diameter line, and the length direction of the waist-shaped positioning pin hole coincides with the diameter direction of the retaining ring.
As a preferable technical scheme of the invention, the positioning gauge in the step (1) comprises a disc-shaped structure at two sides and a straight connecting section in the middle, and the positioning gauge is centrosymmetric.
Preferably, the disc-shaped structure and the straight connecting section have the same thickness, and the width of the straight connecting section is smaller than the diameter of the disc-shaped structure.
Preferably, the width of the straight connecting section is 40-60%, such as 40%, 45%, 50%, 55% or 60% of the diameter of the disc-shaped structure, but is not limited to the recited values, and other non-recited values within the range of values are equally applicable.
Preferably, the length of the straight connecting section is 0.7 to 1.5 times, for example 0.7 times, 0.8 times, 0.9 times, 1 times, 1.2 times, 1.35 times or 1.5 times, etc. the diameter of the disc-shaped structure, but is not limited to the recited values, and other non-recited values within the range of values are equally applicable.
In the invention, the main structure of the positioning gauge is two disc-shaped structures, the two disc-shaped structures are connected through the straight section, and the contact position of the positioning gauge and the retaining ring product can be correspondingly adjusted through controlling the relative size of the positioning gauge and the retaining ring product, especially the diameter change of the disc-shaped structure, so that the positioning gauge can be used for detecting products of different types.
As a preferable technical scheme of the invention, each disc-shaped structure of the positioning gauge in the step (1) is provided with at least one straight groove, for example, one, two or three straight grooves, and the straight grooves penetrate through the surface of the disc.
Preferably, when there are more than two straight grooves per disc-shaped structure, the straight grooves are not parallel nor intersect.
According to the invention, the disc-shaped structure is provided with the plurality of straight grooves with different inclination angles, so that the contact position of the straight grooves with the retaining ring product provided with the kidney-shaped positioning pin holes is easy to control, the positioning of the placement angle position of the retaining ring product is performed, the accuracy is higher, the placement positions and the directions of the products detected successively are consistent, repeated detection positioning references are not needed, and the detection time is saved.
As a preferable technical scheme of the invention, a mounting hole is arranged in the middle of the straight connecting section, and the mounting hole is a through threaded hole.
Preferably, the positioning gauge in step (1) is fixed on the workbench surface by using a screw passing through the mounting hole.
In the invention, the positioning gauge is fixed by adopting a screw, and the positioning gauge is fixed by penetrating through the threaded hole.
As a preferable technical scheme of the invention, when the retaining ring is tightly attached to the positioning gauge in the step (1), the outer circumference of the retaining ring is tightly attached to the disc-shaped structures at two ends of the positioning gauge, and the waist-shaped positioning pin hole on the retaining ring is aligned with the position and the direction of one straight groove on the positioning gauge.
Preferably, the material of the positioning gauge in the step (1) includes any one of aluminum alloy, stainless steel or plastic, wherein the aluminum alloy can be selected from a6061, and the plastic can be selected from acrylic, polycarbonate, polypropylene and the like.
Preferably, the working table in the step (1) comprises a marble working table, the flatness of the marble working table is higher, and the positioning reference is convenient to determine when the retaining ring product and the positioning gauge are placed.
As a preferable technical scheme of the invention, the three-coordinate detection device in the step (2) comprises a three-coordinate measuring machine.
Preferably, the manual detection of step (2) performs a point location measurement for a handheld probe.
Preferably, the positioning reference of step (2) comprises at least 4 points on the table surface, e.g. 4, 5, 6 or 8, etc., and detection of at least 3 points on the outer circle of the retaining ring, e.g. 3, 4, 5 or 6, etc.
As a preferable technical scheme of the invention, the three-coordinate detection device in the step (2) is connected with a control unit, and the control unit comprises a computer.
Preferably, the computer is loaded with an automated inspection program, and after the automated inspection program is started, the movement of the probe is controlled, coordinates of at least 8 points, e.g., 8, 10, 12, 14, 16, etc., on the surface of the retaining ring back plate are inspected, and the flatness of the retaining ring back plate is calculated therefrom.
According to the preferred technical scheme, the positioning reference detected in the step (2) is used as a basis, and when the retaining rings with the same structural size are detected in the step (3), the positioning reference does not need to be detected again after the retaining rings are placed according to requirements.
Preferably, the positioning gauge can be matched with a retaining ring product of a different size, and the detection of the positioning reference is carried out again before the detection of the retaining ring of a new size.
As a preferred technical solution of the present invention, the automated detection method includes the following steps:
(1) The positioning gauge is fixed on a workbench surface and comprises a disc-shaped structure on two sides and a straight connecting section in the middle, the positioning gauge is centrosymmetric, the thickness of the disc-shaped structure is the same as that of the straight connecting section, the width of the straight connecting section is 40-60% of the diameter of the disc-shaped structure, and the length of the straight connecting section is 0.7-1.5 times of the diameter of the disc-shaped structure; at least one straight groove is formed in each disc-shaped structure of the positioning gauge, the straight grooves penetrate through the surface of the disc, when more than two straight grooves are formed in each disc-shaped structure, the straight grooves are not parallel and are not intersected, a mounting hole is formed in the middle of each straight connecting section, the mounting hole is a penetrating threaded hole, and the positioning gauge is fixed on a working table surface by penetrating through the mounting hole through a screw; then the back plate of the retaining ring to be detected is tightly attached to the positioning gauge upwards, the surface of the back plate of the retaining ring is provided with fixed mounting holes and positioning pin holes, the number of the fixed mounting holes is at least 10, the fixed mounting holes are uniformly distributed along the circumference of the annular surface, the positioning pin holes comprise waist-shaped positioning pin holes and circular positioning pin holes, the waist-shaped positioning pin holes and the circular positioning pin holes are positioned at two ends of the same diameter line, the length direction of the waist-shaped positioning pin holes coincides with the diameter direction of the retaining ring, when the retaining ring is tightly attached to the positioning gauge, the outer circumference of the retaining ring is tightly attached to disc-shaped structures at two ends of the positioning gauge, and the waist-shaped positioning pin holes on the retaining ring are aligned with the position and the direction of one straight groove on the positioning gauge;
(2) The method comprises the steps that a first retaining ring is manually detected by a three-coordinate measuring instrument to obtain a positioning reference, the manual detection is used for carrying out point position measurement by a handheld probe, the positioning reference comprises at least 4 points on a workbench surface and at least 3 points on the outer circle of the retaining ring, then the flatness of a back plate of the retaining ring is automatically detected, the three-coordinate detecting equipment is connected with a control unit, the control unit comprises a computer, an automatic detection program is installed in the computer, after the automatic detection program is started, the movement of the probe is controlled, the coordinates of at least 8 points on the surface of the back plate of the retaining ring are detected, and the flatness of the back plate of the retaining ring is calculated;
(3) And (3) taking the positioning reference detected in the step (2) as a basis, placing the retaining ring with the same structural size which is detected later close to the positioning detection tool, directly and automatically detecting the flatness of the back plate of the retaining ring without detecting the positioning reference again, and detecting the positioning reference again when detecting the retaining ring with the new size.
Compared with the prior art, the invention has the following beneficial effects:
(1) According to the method, through the design of the positioning gauge structure, particularly a symmetrical structure with a combination of two sections of disc-shaped structures and a middle straight connecting section is adopted, the retaining ring can be accurately positioned, the position consistency of each time is ensured, the positioning standard is detected only when a first product is detected, the automatic detection can be directly carried out after the subsequent products with the same size are placed, the detection efficiency is greatly improved, the detection time can be shortened to 1 minute/piece from 4 minutes/piece, the detection process is safe and stable, the standardized operation of batch products can be realized, the product quality and the product processing efficiency are improved, and the instability of operation, the risk of damaging the products by a detection needle and the detection speed during manual detection is avoided;
(2) The method disclosed by the invention is simple to operate, the used positioning gauge is simple in structure, simple and convenient to manufacture, low in required cost and wide in application range.
Drawings
Fig. 1 is a schematic structural diagram of a positioning gauge in the process of automatically detecting the flatness of a back plate of a retaining ring according to embodiment 1 of the present invention;
fig. 2 is a schematic diagram of a positional relationship between a retaining ring and a positioning gauge in an automatic detection process of flatness of a back plate of the retaining ring according to embodiment 1 of the present invention;
wherein, 1-disc structure, 2-straight linkage segment, 3-straight groove.
Detailed Description
For better illustrating the present invention, the following further details of the technical solution of the present invention, but the following examples are merely simple examples of the present invention and do not represent or limit the scope of the claims of the present invention.
The invention provides an automatic detection method for the flatness of a retaining ring backboard, which comprises the following steps:
(1) Fixing a positioning gauge on a workbench surface, and then placing a to-be-detected retaining ring backboard tightly attached to the positioning gauge upwards;
(2) Manually detecting a positioning reference by using a three-coordinate detection device on a first retaining ring, and then automatically detecting the planeness of a back plate of the retaining ring;
(3) And after the retaining ring with the same structural size which is detected later is placed close to the positioning detection tool, the flatness of the back plate of the retaining ring is directly and automatically detected.
The following are exemplary but non-limiting examples of the invention:
example 1:
the embodiment provides an automatic detection method for the flatness of a retaining ring backboard, which comprises the following steps:
(1) The method comprises the steps that a positioning gauge is fixed on a marble working table, the structural schematic diagram of the positioning gauge is shown in fig. 1, the positioning gauge comprises disc-shaped structures 1 on two sides and a straight connecting section 2 in the middle, the positioning gauge is centrosymmetric, the thicknesses of the disc-shaped structures 1 and the straight connecting section 2 are the same, the width of the straight connecting section 2 is 40% of the diameter of the disc-shaped structures 1, the length of the straight connecting section 2 is 0.75 times of the diameter of the disc-shaped structures 1, and the positioning gauge is made of stainless steel; two straight grooves 3 are formed in each disc-shaped structure of the positioning detection tool, the straight grooves 3 penetrate through the surface of the disc, the two straight grooves 3 are not parallel or intersect, a penetrating threaded hole is formed in the middle of the straight connecting section 2, and the positioning detection tool is fixed on a workbench surface by penetrating through the penetrating threaded hole through a screw; then the back plate of the retaining ring to be detected is tightly attached to the positioning gauge upwards, the schematic diagram of the position relationship between the back plate and the positioning gauge is shown in fig. 2, the surface of the back plate of the retaining ring is provided with fixed mounting holes and positioning pin holes, the number of the fixed mounting holes is 18, the fixed mounting holes are uniformly distributed along the circumference of the annular surface, the positioning pin holes comprise kidney-shaped positioning pin holes and circular positioning pin holes, 1 positioning pin holes are respectively arranged at two ends on the same diameter line, the length direction of the kidney-shaped positioning pin holes coincides with the diameter direction of the retaining ring, the retaining ring is made of stainless steel, when the retaining ring is tightly attached to the positioning gauge, the outer circumference of the retaining ring is tightly attached to disc-shaped structures 1 at two ends of the positioning gauge, and the kidney-shaped positioning pin holes on the retaining ring are aligned with the position and the direction of one straight groove 3 on the positioning gauge;
(2) The method comprises the steps that a first retaining ring is manually detected by a three-coordinate measuring instrument to obtain a positioning reference, the manual detection is used for carrying out point position measurement by a handheld probe, the positioning reference comprises 4 points on a workbench surface and 3 points on the outer circle of the retaining ring, then the flatness of a back plate of the retaining ring is automatically detected, the three-coordinate measuring instrument is connected with a control unit, the control unit comprises a computer, an automatic detection program is installed in the computer, after the automatic detection program is started, the movement of the probe is controlled, the coordinates of 12 points on the surface of the back plate of the retaining ring are detected, and the flatness of the back plate of the retaining ring is calculated;
(3) And (3) taking the positioning reference detected in the step (2) as a basis, placing the retaining ring with the same structural size which is detected later close to the positioning detection tool, directly and automatically detecting the flatness of the back plate of the retaining ring without detecting the positioning reference again, and detecting the positioning reference again when detecting the retaining ring with the new size.
Example 2:
the embodiment provides an automatic detection method for the flatness of a retaining ring backboard, which comprises the following steps:
(1) Fixing a positioning gauge on a marble working table, wherein the positioning gauge comprises disc-shaped structures 1 on two sides and a straight connecting section 2 in the middle, the positioning gauge is centrosymmetric, the thicknesses of the disc-shaped structures 1 and the straight connecting section 2 are the same, the width of the straight connecting section 2 is 50% of the diameter of the disc-shaped structures 1, the length of the straight connecting section 2 is 1 time of the diameter of the disc-shaped structures 1, and the positioning gauge is made of A6061 aluminum alloy; two straight grooves 3 are formed in each disc-shaped structure of the positioning detection tool, the straight grooves 3 penetrate through the surface of the disc, the two straight grooves 3 are not parallel or intersect, a penetrating threaded hole is formed in the middle of the straight connecting section 2, and the positioning detection tool is fixed on a workbench surface by penetrating through the penetrating threaded hole through a screw; then the back plate of the retaining ring to be detected is tightly attached to the positioning detection tool upwards, the surface of the back plate of the retaining ring is provided with fixed mounting holes and positioning pin holes, the number of the fixed mounting holes is 12, the fixed mounting holes are uniformly distributed along the circumference of the annular surface, the positioning pin holes comprise waist-shaped positioning pin holes and circular positioning pin holes, 1 waist-shaped positioning pin holes and circular positioning pin holes are respectively arranged at two ends on the same diameter line, the length direction of the waist-shaped positioning pin holes coincides with the diameter direction of the retaining ring, the retaining ring is made of stainless steel, when the retaining ring is tightly attached to the positioning detection tool, the circumference of the outer side of the retaining ring is tightly attached to the disc-shaped structures 1 at two ends of the positioning detection tool, and the waist-shaped positioning pin holes on the retaining ring are aligned with the position and the direction of one straight groove 3 on the positioning detection tool;
(2) The method comprises the steps that a first retaining ring is manually detected by a three-coordinate measuring instrument to obtain a positioning reference, the manual detection is used for carrying out point position measurement by a handheld probe, the positioning reference comprises 6 points on a workbench surface and 4 points on the outer circle of the retaining ring, then the flatness of a back plate of the retaining ring is automatically detected, the three-coordinate measuring instrument is connected with a control unit, the control unit comprises a computer, an automatic detection program is installed in the computer, after the automatic detection program is started, the movement of the probe is controlled, the coordinates of 15 points on the surface of the back plate of the retaining ring are detected, and the flatness of the back plate of the retaining ring is calculated;
(3) And (3) taking the positioning reference detected in the step (2) as a basis, placing the retaining ring with the same structural size which is detected later close to the positioning detection tool, directly and automatically detecting the flatness of the back plate of the retaining ring without detecting the positioning reference again, and detecting the positioning reference again when detecting the retaining ring with the new size.
Example 3:
the embodiment provides an automatic detection method for the flatness of a retaining ring backboard, which comprises the following steps:
(1) Fixing a positioning gauge on a marble working table, wherein the positioning gauge comprises disc-shaped structures 1 on two sides and a straight connecting section 2 in the middle, the positioning gauge is centrosymmetric, the thicknesses of the disc-shaped structures 1 and the straight connecting section 2 are the same, the width of the straight connecting section 2 is 60% of the diameter of the disc-shaped structures 1, the length of the straight connecting section 2 is 1.5 times of the diameter of the disc-shaped structures 1, and the positioning gauge is made of acrylic; three straight grooves 3 are formed in each disc-shaped structure of the positioning detection tool, the straight grooves 3 penetrate through the surface of the disc, the two straight grooves are not parallel or intersect, a penetrating threaded hole is formed in the middle of the straight connecting section 2, and the positioning detection tool is fixed on a workbench surface by penetrating the penetrating threaded hole through a screw; then the back plate of the retaining ring to be detected is tightly attached to the positioning detection tool upwards, the surface of the back plate of the retaining ring is provided with fixed mounting holes and positioning pin holes, the number of the fixed mounting holes is 15, the fixed mounting holes are uniformly distributed along the circumference of the annular surface, the positioning pin holes comprise waist-shaped positioning pin holes and circular positioning pin holes, 1 waist-shaped positioning pin holes and circular positioning pin holes are respectively arranged at two ends on the same diameter line, the length direction of the waist-shaped positioning pin holes coincides with the diameter direction of the retaining ring, the retaining ring is made of stainless steel, when the retaining ring is tightly attached to the positioning detection tool, the circumference of the outer side of the retaining ring is tightly attached to the disc-shaped structures 1 at two ends of the positioning detection tool, and the waist-shaped positioning pin holes on the retaining ring are aligned with the position and the direction of one straight groove 3 on the positioning detection tool;
(2) The method comprises the steps that a first retaining ring is manually detected by a three-coordinate measuring instrument to obtain a positioning reference, the manual detection is used for carrying out point position measurement by a handheld probe, the positioning reference comprises 6 points on a workbench surface and 4 points on the outer circle of the retaining ring, then the flatness of a back plate of the retaining ring is automatically detected, the three-coordinate measuring instrument is connected with a control unit, the control unit comprises a computer, an automatic detection program is installed in the computer, after the automatic detection program is started, the movement of the probe is controlled, the coordinates of 15 points on the surface of the back plate of the retaining ring are detected, and the flatness of the back plate of the retaining ring is calculated;
(3) And (3) taking the positioning reference detected in the step (2) as a basis, placing the retaining ring with the same structural size which is detected later close to the positioning detection tool, directly and automatically detecting the flatness of the back plate of the retaining ring without detecting the positioning reference again, and detecting the positioning reference again when detecting the retaining ring with the new size.
The positioning detection tool in the embodiment 1-3 is used for positioning the flatness of the back plate of the retaining ring product during detection, through the arrangement of an automatic detection program, after the positioning reference is detected manually, the three-coordinate measuring instrument is used for automatic detection of the flatness of the back plate, the positioning detection tool can position the retaining ring product with the same structural size at the same position without repeated detection of the positioning reference, so that the detection efficiency is improved, the detection time is saved, the detection time is shortened to 1min from 4min during automatic detection, the detection process is stable, the detection rate is uniform and quick, and the products cannot be damaged.
Example 4:
the present embodiment provides an automated detection method of flatness of a retaining ring back plate, which is different from the method in embodiment 1 only in that: the disc-shaped structure 1 of the positioning gauge is not provided with a straight groove 3.
In this embodiment, since the positioning gauge is not provided with the straight groove, when positioning the retaining ring product, the main body position of the positioning gauge can only be positioned, but the structure on the retaining ring cannot be aligned and positioned, so that the placing position of the retaining ring may not be consistent, that is, the consistency of the detecting position cannot be ensured, the dimension detection is inaccurate easily, and the subsequent use is affected.
Comparative example 1:
this comparative example provides a method of detecting flatness of a retaining ring back plate, which is different from that in example 1 only in that: and each product is manually detected without using a positioning detection tool.
In this comparative example, because the positioning gauge is not used, after the retaining ring to be detected is placed on the working table, each product needs to be first positioned and detected, then flatness is detected, the time consuming time is long, each product takes 4 minutes, the detection efficiency is low, and the manual detection has instability of manual operation, and the product is easily damaged by the detection needle during detection, so that the product is damaged.
According to the method, through the design of the positioning gauge structure, particularly a symmetrical structure formed by combining two sections of disc-shaped structures and a middle straight connecting section, the retaining ring can be accurately positioned, the position of each time is consistent, the positioning standard is detected only when the first product is detected, automatic detection can be directly carried out after the subsequent products with the same size are placed, the detection efficiency is greatly improved, the detection time can be shortened to 1 minute/piece from 4 minutes/piece, the detection process is safe and stable, the standardized operation of batch products can be realized, the product quality and the product processing efficiency are improved, and the instability of operation, the risk of damage to the products due to detection needles and the instability of detection speed during manual detection are avoided; the method is simple to operate, the used positioning gauge has simple structure, simple and convenient manufacture, low cost and wide application range
The applicant states that the detailed method of the present invention is illustrated by the above examples, but the present invention is not limited to the detailed method described above, i.e. it does not mean that the present invention must be practiced in dependence upon the detailed method described above. It should be apparent to those skilled in the art that any modifications of the present invention, equivalent substitutions for the method of the present invention, addition of auxiliary steps, selection of specific modes, etc., are within the scope of the present invention and the scope of the disclosure.
Claims (10)
1. An automated detection method for flatness of a retaining ring back plate is characterized by comprising the following steps:
(1) Fixing a positioning gauge on a workbench surface, and then placing a to-be-detected retaining ring backboard tightly attached to the positioning gauge upwards;
(2) Manually detecting a positioning reference by using a three-coordinate detection device on a first retaining ring, and then automatically detecting the planeness of a back plate of the retaining ring;
(3) And after the retaining ring with the same structural size which is detected later is placed close to the positioning detection tool, the flatness of the back plate of the retaining ring is directly and automatically detected.
2. The automated inspection method of claim 1, wherein the retaining ring back plate comprises stainless steel;
preferably, the surface of the backboard of the retaining ring is provided with a fixed mounting hole and a positioning pin hole;
preferably, the fixed mounting holes are circular threaded holes, the number of the fixed mounting holes at least comprises 10, and the fixed mounting holes are uniformly distributed along the circumference of the annular surface;
preferably, the positioning pin hole comprises a waist-shaped positioning pin hole and a round positioning pin hole, the waist-shaped positioning pin hole and the round positioning pin hole are positioned at two ends on the same diameter line, and the length direction of the waist-shaped positioning pin hole coincides with the diameter direction of the retaining ring.
3. The automated inspection method of claim 1 or 2, wherein the positioning inspection tool in step (1) comprises a disc-shaped structure on both sides and a straight connecting section in the middle, and the positioning inspection tool is centrosymmetric;
preferably, the thicknesses of the disc-shaped structure and the straight connecting section are the same, and the width of the straight connecting section is smaller than the diameter of the disc-shaped structure;
preferably, the width of the straight connecting section is 40-60% of the diameter of the disc-shaped structure;
preferably, the length of the straight connecting section is 0.7 to 1.5 times the diameter of the disc-shaped structure.
4. The automated inspection method of claim 3, wherein each disc-shaped structure of the positioning gauge of step (1) is provided with at least one straight slot, the straight slot extending through the disc surface;
preferably, when there are more than two straight grooves per disc-shaped structure, the straight grooves are not parallel nor intersect.
5. The automated inspection method of claim 3 or 4, wherein a mounting hole is provided in the middle of the straight connecting section, the mounting hole being a through threaded hole;
preferably, the positioning gauge in step (1) is fixed on the workbench surface by using a screw passing through the mounting hole.
6. The automated inspection method of any one of claims 3-5, wherein when the retaining ring is tightly attached to the positioning inspection tool in step (1), the outer circumference of the retaining ring is tightly attached to the disc-shaped structures at both ends of the positioning inspection tool, and the kidney-shaped positioning pin hole on the retaining ring is aligned with the position and direction of one of the straight grooves on the positioning inspection tool;
preferably, the material of the positioning gauge in the step (1) includes any one of stainless steel, aluminum alloy or plastic;
preferably, the working surface of step (1) comprises a marble working surface.
7. The automated inspection method of any one of claims 1-6, wherein the three-coordinate inspection device of step (2) comprises a three-coordinate meter;
preferably, the manual detection in step (2) is to measure the point position for a hand-held probe;
preferably, the positioning reference of step (2) comprises the detection of at least 4 points on the table top and at least 3 points on the outer circle of the retaining ring.
8. The automated inspection method of any one of claims 1-7, wherein the three-coordinate inspection device of step (2) is coupled to a control unit comprising a computer;
preferably, the computer is provided with an automatic detection program, and after the automatic detection program is started, the movement of the detection needle is controlled, the coordinates of at least 8 points on the surface of the retaining ring back plate are detected, and the flatness of the retaining ring back plate is calculated according to the coordinates.
9. The automated inspection method of any one of claims 1-8, wherein the inspection of the step (3) is based on the inspection of the positioning references in step (2), and the inspection of the positioning references is not required after the inspection of the same structural size retaining ring is performed as required;
preferably, the positioning gauge can be matched with a retaining ring product of a different size, and the detection of the positioning reference is carried out again before the detection of the retaining ring of a new size.
10. The automated inspection method of any one of claims 1-9, comprising the steps of:
(1) The positioning gauge is fixed on a workbench surface and comprises a disc-shaped structure on two sides and a straight connecting section in the middle, the positioning gauge is centrosymmetric, the thickness of the disc-shaped structure is the same as that of the straight connecting section, the width of the straight connecting section is 40-60% of the diameter of the disc-shaped structure, and the length of the straight connecting section is 0.7-1.5 times of the diameter of the disc-shaped structure; at least one straight groove is formed in each disc-shaped structure of the positioning gauge, the straight grooves penetrate through the surface of the disc, when more than two straight grooves are formed in each disc-shaped structure, the straight grooves are not parallel and are not intersected, a mounting hole is formed in the middle of each straight connecting section, the mounting hole is a penetrating threaded hole, and the positioning gauge is fixed on a working table surface by penetrating through the mounting hole through a screw; then the back plate of the retaining ring to be detected is tightly attached to the positioning gauge upwards, the surface of the back plate of the retaining ring is provided with fixed mounting holes and positioning pin holes, the number of the fixed mounting holes is at least 10, the fixed mounting holes are uniformly distributed along the circumference of the annular surface, the positioning pin holes comprise waist-shaped positioning pin holes and circular positioning pin holes, the waist-shaped positioning pin holes and the circular positioning pin holes are positioned at two ends of the same diameter line, the length direction of the waist-shaped positioning pin holes coincides with the diameter direction of the retaining ring, when the retaining ring is tightly attached to the positioning gauge, the outer circumference of the retaining ring is tightly attached to disc-shaped structures at two ends of the positioning gauge, and the waist-shaped positioning pin holes on the retaining ring are aligned with the position and the direction of one straight groove on the positioning gauge;
(2) The method comprises the steps that a first retaining ring is manually detected by a three-coordinate measuring instrument to obtain a positioning reference, the manual detection is used for carrying out point position measurement by a handheld probe, the positioning reference comprises at least 4 points on a workbench surface and at least 3 points on the outer circle of the retaining ring, then the flatness of a back plate of the retaining ring is automatically detected, the three-coordinate detecting equipment is connected with a control unit, the control unit comprises a computer, an automatic detection program is installed in the computer, after the automatic detection program is started, the movement of the probe is controlled, the coordinates of at least 8 points on the surface of the back plate of the retaining ring are detected, and the flatness of the back plate of the retaining ring is calculated;
(3) And (3) taking the positioning reference detected in the step (2) as a basis, placing the retaining ring with the same structural size which is detected later close to the positioning detection tool, directly and automatically detecting the flatness of the back plate of the retaining ring without detecting the positioning reference again, and detecting the positioning reference again when detecting the retaining ring with the new size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311019857.3A CN117059508A (en) | 2023-08-14 | 2023-08-14 | Automatic detection method for flatness of retaining ring backboard |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311019857.3A CN117059508A (en) | 2023-08-14 | 2023-08-14 | Automatic detection method for flatness of retaining ring backboard |
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| Publication Number | Publication Date |
|---|---|
| CN117059508A true CN117059508A (en) | 2023-11-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311019857.3A Pending CN117059508A (en) | 2023-08-14 | 2023-08-14 | Automatic detection method for flatness of retaining ring backboard |
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| Country | Link |
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| CN (1) | CN117059508A (en) |
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- 2023-08-14 CN CN202311019857.3A patent/CN117059508A/en active Pending
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