CN2114140U - Double light path laser steplength measuring apparatus - Google Patents
Double light path laser steplength measuring apparatus Download PDFInfo
- Publication number
- CN2114140U CN2114140U CN 92200013 CN92200013U CN2114140U CN 2114140 U CN2114140 U CN 2114140U CN 92200013 CN92200013 CN 92200013 CN 92200013 U CN92200013 U CN 92200013U CN 2114140 U CN2114140 U CN 2114140U
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- light path
- measuring
- plane mirror
- measuring apparatus
- step length
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model relates to a double-light path laser step length measuring apparatus, which belongs to the technical field of length metering and testing. The double-light path laser step length measuring apparatus is composed of a light path turning apparatus 1 and a movable measuring apparatus 6. The use of a rectangular prism ensures that the light path is uninterrupted when the movable measuring apparatus comes in or out the step length during the measuring process, and the measuring automatization can be realized. The use of measuring heads with different structures and performancecan measure step length pieces with different shapes and accuracy requirements. The double-light path laser step length measuring apparatus has important practical meaning in measuring step gages, one-dimensional ball arrays, two-dimensional ball arrays and other measured pieces with step length aspects.
Description
The utility model belongs to length metering and technical field of measurement and test.
Carrying out the standard cubing that the precision verification of three-coordinate measuring machine often uses step gage, one dimension spherical column or two-dimentional spherical array etc. to have some standard step pitches (spacing) carries out.
Fig. 1 is the step gage synoptic diagram.
Fig. 2 is the one dimension spherical column synoptic diagram.
Fig. 3 is two-dimentional spherical array synoptic diagram.
Step gage is to form the series of standards step pitch by the distance between the horizontal survey face of equidirectional on it, as shown in Figure 1.One dimension spherical column is that the distance that will form between the equidirectional vertical tangent line of each ball on it is as the standard step pitch, as shown in Figure 2.The two dimension spherical array is that the two dimension of one dimension spherical column embodies, and can have the step pitch of both direction and size, as shown in Figure 3.Because these standard step pitches are used to detect the precision of measuring machine or lathe, itself should have higher calibration accuracy, so will measure to obtain required standard step pitch with high-precision two-frequency laser interferometer.According to the pick-up unit commonly used and the method for two-frequency laser interferometer, in order not to be in the light, laser measurement line and step pitch are necessary at a distance of a segment distance by survey line, but can produce Abbe error like this, thereby reduce measuring accuracy, and measure discontinuous when measuring step pitch.
Introduced a kind of double light path distance measuring equipment that carries out the step gage calibrating at present at " H.J.Rademacher; A COMPARATOR FORCALIBRATION OF LONG STANDARDS OF LENGTH; ACTAIMEKO; 1985 ", this measuring method is to utilize the characteristics of polarized light through 45 ° of quarter wave plate rear polarizer direction rotations, before spectroscopical light hole, add a quarter wave plate, with twice of orthogonal two kinds of polarized light in polarization direction in the double-frequency laser through 90 ° of quarter wave plate post deflections, make transmitted light become reflected light, reflected light becomes transmitted light, utilize two plane mirrors of suitably placing to form two-way light, with the equidistant situation of the contacted measurement point of step gage with the distance of adjacent light path center line and two light path center lines under, the Abbe error that tilts to produce when distance measuring equipment moves can be offset by the optical path difference of two light paths.This distance measuring equipment is with touch sensor measurement face to be aimed at, by crossing prism of corner cube summit and the axis rotation distance measuring equipment parallel with slotted line, can or screw out step gage and light path is not interrupted with the gauge head precession, but this rotary manipulation complexity, be difficult to realize measuring automatically, and the contact measurement precision is lower.
The purpose of this utility model is both can be used to examine and determine step gage, also can examine and determine one dimension spherical column and two-dimentional spherical array, and easy to operate, can realize measuring automatically on three-coordinate measuring machine or other coordinate class lathe instrument, and calibration accuracy also can further improve.
Fig. 4 is the synoptic diagram of double light path laser measurement device at three coordinate airborne measurements one dimension spherical columns.
The technical solution of the utility model as shown in Figure 4.Wherein (1) is the light path turning device, and (6) are removable measurement mechanisms, and said light path turning device (1) is made up of spectroscope (2), plane mirror (3), quarter wave plate (4) and prism of corner cube (5).Plane mirror (3) and prism of corner cube (5) lay respectively at the both sides of spectroscope (2), and plane mirror (3) is parallel with the light splitting surface of spectroscope (2), and quarter wave plate (4) places spectroscope (2) light hole preceding and vertical with light beam.
Said removable measurement mechanism (6) is made up of right-angle prism (7), plane mirror (8), gauge head (9) and supporting (10).The distance at the ridge of right-angle prism (7) and gauge head (9) center equals the twice of the ridge of right-angle prism (7) to the distance of two beam centers of directive and plane mirror (8).Right-angle prism (7), plane mirror (8) and gauge head (9) are installed in the same supporting (10) can do whole moving along laser optical path direction and the direction that parallels with the ridge of right-angle prism (7), and the assurance light path is not interrupted in the moving process.
The concrete form of said gauge head (9) will be selected according to the form of tested standard step pitch.When calibrating during step gage, the spherical gauge head of available inductance amesdial or mechanical clock gauge, the also plane gauge head of available high-accuracy capacitor micrometer etc.When calibrating is the standard step pitch of plane of direction with the sphere, need plane gauge head with capacitance gage or other dial gauge.At present, capacitance gage has 0.1 μ m above resolution and measuring accuracy, and is non-cpntact measurement, so use the electric capacity gauge head to have very high measuring accuracy.
The utility model generally is used on the three coordinate machines standard cubing with step pitch is examined and determine.Light path turning device (1) and standard cubing (12) (representing with one dimension spherical column among the figure) place successively along optical path direction on the worktable of three coordinate machines (13).Removable measurement mechanism (6) is directly installed on the measuring head base (14) of coordinate machine when use has the gauge head of micrometer performance.
Fig. 5 is the removable measurement mechanism with sheet spring structure.
Can equate, be parallel to each other and the sheet spring structure (15) vertical with measuring optical path direction connects removable measurement mechanism (6) and measuring head base (14) by two sizes, as shown in Figure 5, with translation distance (when adding extension rod divided by extension rod length), can obtain the angular motion error of measuring machine; One dimension spherical column is not placed along three diagonal positions of measuring basal plane in the coordinate system respectively, can be measured and calculate three error of perpendicularitys, concrete measurements and calculations process must be according to the pattern and the decision of error composite formula of tested three coordinate machines.
The utility model is compared with existing other gauge head, and its characteristics are:
1. capacitance gage is better than the high precision of 0.1 μ m and the characteristic of non-cpntact measurement has determined the utlity model has very high measuring accuracy.
2. one-shot measurement can obtain three coordinate values of the centre of sphere simultaneously, so have higher efficiency of measurement.
3. also use 21 mechanism errors of the three coordinate machines of can completely measuring accurately with one dimension spherical column.
4. be applicable to three coordinate machines of any pattern.
Claims (1)
1, be used to measure the double light path laser distance measuring equipment of step pitch, this device is made up of light path turning device (1) and removable measurement mechanism (6);
Said light path turning device (1) is made up of spectroscope (2), plane mirror (3), quarter wave plate (4) and prism of corner cube (5); Plane mirror (3) and prism of corner cube (5) lay respectively at the both sides of spectroscope (2), and plane mirror (3) is parallel with the light splitting surface of spectroscope (2), and quarter wave plate (4) places spectroscope (2) light hole preceding and vertical with light beam,
Of the present utility model being characterised in that:
Said removable measurement mechanism (6) is made up of right-angle prism (7), plane mirror (8), gauge head (9) and supporting (10); The centre distance of the ridge of right-angle prism (7) and gauge head (9) equals the twice of the ridge of right-angle prism (7) to the distance of two beam centers of directive plane mirror (8); Right-angle prism (7), plane mirror (8) and gauge head (9) are installed in the same supporting (10), can do whole moving along laser optical path direction and the direction that parallels with the ridge of right-angle prism (7), and light path is not interrupted in the moving process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92200013 CN2114140U (en) | 1992-01-03 | 1992-01-03 | Double light path laser steplength measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92200013 CN2114140U (en) | 1992-01-03 | 1992-01-03 | Double light path laser steplength measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2114140U true CN2114140U (en) | 1992-08-26 |
Family
ID=4947357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 92200013 Granted CN2114140U (en) | 1992-01-03 | 1992-01-03 | Double light path laser steplength measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2114140U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100462736C (en) * | 2006-06-29 | 2009-02-18 | 梁前超 | High accuracy laser folding angle measuring method and system |
| CN104634255A (en) * | 2014-12-12 | 2015-05-20 | 中国航空工业集团公司北京长城计量测试技术研究所 | Non-contact measuring device for step gauge measurement |
-
1992
- 1992-01-03 CN CN 92200013 patent/CN2114140U/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100462736C (en) * | 2006-06-29 | 2009-02-18 | 梁前超 | High accuracy laser folding angle measuring method and system |
| CN104634255A (en) * | 2014-12-12 | 2015-05-20 | 中国航空工业集团公司北京长城计量测试技术研究所 | Non-contact measuring device for step gauge measurement |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |