CN211378247U

CN211378247U - Bone conduction microphone

Info

Publication number: CN211378247U
Application number: CN201922486931.8U
Authority: CN
Inventors: 张金宇; 王凯
Original assignee: AAC Acoustic Technologies Shenzhen Co Ltd
Current assignee: AAC Technologies Holdings Shenzhen Co Ltd
Priority date: 2019-12-30
Filing date: 2019-12-30
Publication date: 2020-08-28
Anticipated expiration: 2029-12-30

Abstract

The utility model provides a bone conduction microphone contains: the bone conduction microphone comprises a substrate, spring pieces and cavity surrounding walls, wherein the spring pieces are arranged on the substrate at intervals relatively, the cavity surrounding walls are arranged between the substrate and the spring pieces, the cavity surrounding walls are respectively connected with the substrate and the edges of the spring pieces, so that a cavity with an accommodating space is formed between the spring pieces and the substrate, the bone conduction microphone further comprises a fixed electrode plate, a mass piece and an electret, the fixed electrode plate is fixed on the surface of the spring pieces, the spring pieces face the surface of the substrate, the electret faces the surface of the substrate, and the electret and the fixed electrode plate are arranged at intervals relatively to form a capacitor. The utility model discloses an electret on the quality piece can constitute with fixed plate electrode and have gapped electric capacity, simple structure, low in manufacturing cost is honest and clean.

Description

Bone conduction microphone

[ technical field ] A method for producing a semiconductor device

The utility model relates to a microphone technical field especially relates to a bone conduction microphone.

[ background of the invention ]

The conventional microphone has high sensitivity of voice recognition, and is widely applied to electronic equipment. However, most vibration sensing microphones have a flat low frequency response curve, i.e. a mechanical resonance frequency below the typical vibration sensor is not attenuated acoustically or in any other way. Since it is advantageous to remove or at least suppress low frequencies due to various factors, such as noise or overload, in particular, electronic filters can be used in the signal processing device to remove or attenuate low frequencies electronically, but the mechanical system of the sensor or the input stage of the signal processing device may suffer from the problem that the low frequency signal removed by the electronic filter is still overloaded; in addition, signal distortion and thermal noise may be caused, thereby reducing the signal-to-noise ratio.

The above drawbacks can be solved by a bone conduction microphone, and the structure of the conventional bone conduction microphone generally comprises: the pressure generator and the MEMS (micro electro mechanical system) microphone are two parts, however, the bone conduction microphone using this structural design includes a signal processor and a plurality of inner cavities, which is complicated in structure and high in cost.

Therefore, there is a need to provide a new bone conduction microphone.

[ summary of the invention ]

An object of the utility model is to provide a bone conduction microphone solves the more complicated technical problem of structure of the vibration sensing microphone among the prior art.

The technical scheme of the utility model as follows: a bone conduction microphone, the bone conduction microphone comprising: the bone conduction microphone comprises a substrate, spring pieces and cavity surrounding walls, wherein the spring pieces are arranged on the substrate at intervals relatively, the cavity surrounding walls are arranged between the substrate and the spring pieces, the cavity surrounding walls are respectively connected with the substrate and the edges of the spring pieces, so that a cavity with an accommodating space is formed between the spring pieces and the substrate, the bone conduction microphone further comprises a fixed electrode plate, a mass piece and an electret, the fixed electrode plate is fixed on the surface of the spring pieces, the spring pieces face the surface of the substrate, the electret faces the surface of the substrate, and the electret and the fixed electrode plate are arranged at intervals relatively to form a capacitor.

Preferably, the spring plate includes: the positioning part, enclose and establish the main part of positioning part and connect the positioning part with the elastic arm of main part, the quality piece with the positioning part is connected.

Preferably, the bone conduction microphone further comprises an integrated circuit module accommodated in the cavity, and the integrated circuit module is electrically connected with the electret and the fixed electrode plate respectively.

Preferably, the main body part is provided with a through hole, the bone conduction microphone further comprises a lead wire connected with the integrated circuit module, the lead wire penetrates through the through hole and is electrically connected with the spring piece, and the spring piece is electrically connected with the electret.

Preferably, the number of the elastic arms is two, and the two elastic arms are respectively located at two opposite ends of the positioning portion.

Preferably, each of the resilient arms comprises: the two symmetrical bending connecting pins are symmetrically arranged, one ends of the bending connecting pins are connected to the middle of the side wall, facing the positioning portion, of the main body portion, and the other ends of the bending connecting pins are connected to the end portion, facing the side wall of the main body portion, of the positioning portion.

Preferably, the cavity is cuboid, the fixed electrode plates and the integrated circuit modules are arranged on the surface of the substrate at intervals, and the fixed electrode plates and the integrated circuit modules are arranged at intervals with the cavity peripheral wall.

Preferably, the microphone further includes: the shell covers one side, far away from the base plate, of the spring piece.

The beneficial effects of the utility model reside in that: the bone conduction microphone protected by the utility model has simple integral structure and is convenient to design and produce; and the manufacturing process of the electret is mature, the cost is low, and the production cost of the bone conduction microphone is reduced.

[ description of the drawings ]

Fig. 1 is a perspective view of a bone conduction microphone according to the present invention;

fig. 2 is a cross-sectional view of the bone conduction microphone of the present invention;

fig. 3 is a schematic diagram of an internal structure of a bone conduction microphone according to an embodiment of the present invention;

fig. 4 is an exploded view of a bone conduction microphone according to an embodiment of the present invention;

fig. 5 is a schematic structural view of a spring plate according to an embodiment of the present invention.

[ detailed description ] embodiments

The present invention will be further described with reference to the accompanying drawings and embodiments.

In order to solve the technical problem that the structure of the vibration sensing microphone among the prior art is more complicated, the utility model provides a bone conduction microphone.

Referring to fig. 1, fig. 2, fig. 3, fig. 4 and fig. 5, fig. 1 is a perspective view of a bone conduction microphone according to the present invention, fig. 2 is a sectional view of the bone conduction microphone according to the present invention, fig. 3 is an internal structure schematic diagram of the bone conduction microphone according to the present invention, fig. 4 is an exploded schematic diagram of the bone conduction microphone according to the present invention, and fig. 5 is a structural schematic diagram of a spring piece according to the present invention.

The technical scheme of the utility model as follows: a bone conduction microphone, the bone conduction microphone comprising: the bone conduction microphone comprises a substrate 11, spring pieces 13 arranged opposite to the substrate 11 at intervals, and cavity surrounding walls 12 arranged between the substrate 11 and the spring pieces 13, wherein the cavity surrounding walls 12 are respectively connected with the edges of the substrate 11 and the spring pieces 13 so as to form a cavity with a containing space between the spring pieces 13 and the substrate 11, the bone conduction microphone further comprises fixed electrode plates 16 fixed on the surface, facing the spring pieces 13, of the substrate 11, mass pieces 15 fixed on the surface, facing the substrate 11, of the spring pieces 13, and electrets arranged on the surface, facing the substrate 11, of the mass pieces 15, and the electrets and the fixed electrode plates 16 are arranged opposite to each other at intervals.

It should be noted that, in the utility model discloses in, the electret can be through ripe electret technology with the coating of electret material on the quality piece 15 towards the surface of base plate to carry out high voltage polarization and make to make the quality piece 15 that has the electret and the fixed electrode plate 16 in the bone conduction microphone constitute electric capacity.

It should be noted that the bone conduction microphone in this embodiment may form a chip package structure, and is electrically connected to an external circuit through the substrate 11.

Through implementing the utility model discloses a scheme is set for to bone conduction microphone's structure, can make the microphone have the advantage of the acoustic pressure discernment of high sensitivity and simplification structure simultaneously, and combine the ripe technology of electret, reduction in production cost by a wide margin.

Further, the spring plate 13 includes: the positioning portion 132, the main body portion 131 enclosing the positioning portion 132, and the elastic arm 133 connecting the positioning portion 132 and the main body portion 131, and the mass plate 15 is connected to the positioning portion 132. In the present embodiment, the spring piece 13 is used for assisting the mass piece 15 to move relative to the base plate 11; specifically, when the bone conduction vibration wave from the outside is transmitted to the bone conduction microphone, the substrate 11 vibrates with the bone conduction vibration wave, and the mass plate 15 is displaced relative to the vibrating substrate 11 due to the inertia effect. Specifically, the spring piece 13 is divided into a positioning portion 132, a main body portion 131 and an elastic arm 133, the main body portion 131 is mainly used for being fixedly connected with the cavity surrounding wall 12, and the spring piece 13 is supported by the cavity surrounding wall 12, so that a space is formed between the mass piece 15 with the electret and the fixed electrode plate 16, meanwhile, the main body portion 131 is also connected with the positioning portion 132 by the elastic arm 133, and the mass piece 15 is fixed on one side of the positioning portion 132 facing the cavity substrate 11.

Further, the bone conduction microphone further comprises an integrated circuit module 17 accommodated in the cavity, and the integrated circuit module 17 is electrically connected with the electret and the fixed electrode plate 16 respectively. When the mass plate 15 with the electret in the bone conduction microphone moves relative to the fixed electrode plate 16, an electric signal is generated, and the integrated circuit module 17 picks up the electric signal and transmits the electric signal to an external circuit.

Further, the main body 131 is provided with a through hole 1311, the bone conduction microphone further includes a lead 18 connected to the integrated circuit module 17, and the lead 18 passes through the through hole 1311 and is electrically connected to the spring plate 13, so as to be electrically connected to the electret.

Further, the number of the elastic arms 133 is two, and the two elastic arms 133 are respectively located at two opposite ends of the positioning portion 132.

Further, each of the elastic arms 133 includes: two bending connection pins 1331 are symmetrically arranged, one end of each bending connection pin 1331 is connected to the middle of the side wall of the main body part 131 facing the positioning part 132, and the other end of each bending connection pin 1331 is connected to the end of the side wall of the positioning part 132 facing the main body part 131.

Further, the cavity is rectangular, the fixed electrode plate 16 and the integrated circuit module 17 are arranged on the surface of the substrate 11 at intervals, and the fixed electrode plate 16 and the integrated circuit module 17 are arranged at intervals with the cavity peripheral wall 12. It should be noted that, on the premise of ensuring a sufficient clearance between the fixed electrode plate 16, the electret and other components (the cavity peripheral wall 12), the surface area of the face of the fixed electrode plate 16 opposite to the electret can be increased as much as possible to generate an electric signal in a small displacement situation, so as to improve the sensitivity of the bone conduction microphone; preferably, by increasing the mass of the mass plate 15, the influence of the thermal motion noise can be reduced.

In an embodiment of the present invention, the microphone further includes: and the shell 14 is covered on one side of the spring piece 13 far away from the base plate 11 by the shell 14. By providing the housing 14 on the side of the spring piece 13 away from the substrate 11, the spring piece 13 in the bone conduction microphone can be protected, and damage to the spring piece 13 by external objects or pressure is prevented.

The bone conduction microphone protected by the utility model has simple integral structure and is convenient to design and produce; and the manufacturing process of the electret is mature, the cost is low, and the production cost of the bone conduction microphone is reduced.

The above embodiments of the present invention are only described, and it should be noted that, for those skilled in the art, modifications can be made without departing from the inventive concept, but these all fall into the protection scope of the present invention.

Claims

1. A bone conduction microphone, comprising: the bone conduction microphone comprises a substrate, spring pieces and cavity surrounding walls, wherein the spring pieces are arranged on the substrate at intervals relatively, the cavity surrounding walls are arranged between the substrate and the spring pieces, the cavity surrounding walls are respectively connected with the substrate and the edges of the spring pieces, so that a cavity with an accommodating space is formed between the spring pieces and the substrate, the bone conduction microphone further comprises a fixed electrode plate, a mass piece and an electret, the fixed electrode plate is fixed on the surface of the spring pieces, the spring pieces face the surface of the substrate, the electret faces the surface of the substrate, and the electret and the fixed electrode plate are arranged at intervals relatively to form a capacitor.

2. The bone conduction microphone of claim 1, wherein the spring plate comprises: the positioning part, enclose and establish the main part of positioning part and connect the positioning part with the elastic arm of main part, the quality piece with the positioning part is connected.

3. The bone conduction microphone according to claim 2, further comprising an integrated circuit module housed in the cavity, the integrated circuit module being electrically connected to the electret and the fixed electrode plate, respectively.

4. The bone conduction microphone according to claim 3, wherein the main body portion is provided with a through hole, the bone conduction microphone further comprising a lead wire connected to the integrated circuit module, the lead wire passing through the through hole and being electrically connected to the spring piece, the spring piece being electrically connected to the electret.

5. The bone conduction microphone according to claim 2, wherein the number of the elastic arms is two, and the two elastic arms are respectively located at opposite ends of the positioning portion.

6. The bone conduction microphone of claim 5, wherein each of the resilient arms comprises: the two symmetrical bending connecting pins are symmetrically arranged, one ends of the bending connecting pins are connected to the middle of the side wall, facing the positioning portion, of the main body portion, and the other ends of the bending connecting pins are connected to the end portion, facing the side wall of the main body portion, of the positioning portion.

7. The bone conduction microphone according to claim 3, wherein the cavity has a rectangular parallelepiped shape, the fixed electrode plate and the integrated circuit module are spaced apart from each other on the surface of the substrate, and the fixed electrode plate and the integrated circuit module are spaced apart from the cavity wall.

8. The bone conduction microphone of claim 1, wherein the microphone further comprises: the shell covers one side, far away from the base plate, of the spring piece.