CN211376598U - Silicon wafer grooving machine - Google Patents
Silicon wafer grooving machine Download PDFInfo
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- CN211376598U CN211376598U CN202020063404.6U CN202020063404U CN211376598U CN 211376598 U CN211376598 U CN 211376598U CN 202020063404 U CN202020063404 U CN 202020063404U CN 211376598 U CN211376598 U CN 211376598U
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- sealing plate
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- silicon wafer
- acid liquid
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Abstract
The utility model discloses a silicon chip groover, which comprises a frame, the top of frame is provided with the board, the acid liquor groove has been seted up at the top of board, the inside slip of acid liquor groove is provided with movable sealing plate, movable sealing plate's top is provided with the inclined plane one of slope to well, the inboard top of acid liquor groove is provided with the sealed piece of annular, the bottom of the sealed piece of annular is provided with the inclined plane two that matches each other with movable sealing plate's inclined plane, the inboard intermediate position department of the sealed piece of annular is provided with strip type closing plate, movable sealing plate top intermediate position department is provided with the movable rod perpendicularly. The utility model discloses when shifting out the basket of flowers sour cistern, can be to preventing that impurity on the silicon chip from getting into sour cistern inside, postpone the live time of acidizing fluid, can seal the sour cistern is inside simultaneously, prevent that the inside acidizing fluid of sour cistern from volatilizing.
Description
Technical Field
The utility model relates to a groover technical field, specificly relate to a silicon chip groover.
Background
In the processing of semiconductor wafers, grooving treatment needs to be carried out on the surfaces of silicon wafers by acid. In the prior art, the using method of the grooving machine for silicon slice grooving is as follows: and (3) loading the silicon wafer to be grooved into a flower basket, putting the whole flower basket into the mixed acid liquor, and taking out the flower basket from the acid liquor when the corrosion time is up. The machine has the following disadvantages: 1. during the process of etching the silicon wafer by the acid liquor, a large amount of reaction heat is released, and the heat energy cannot be dissipated in time, so that the temperature of the acid liquor is increased, and the normal operation of the reaction is influenced by the high-temperature acid liquor; 2. after the reaction is finished, a large amount of acid liquor is brought out from the flower basket taken out of the acid liquor, and the acid liquor cannot be well treated, so that the pollution to a machine table is easily caused.
The patent of a utility model named as a silicon chip grooving machine is granted by the national intellectual property office 2016 at 5 months and 4 days, and the application number is as follows: 201520934126.6, the patent solves the above problems, but when in use, the following disadvantages still exist: 1. when the silicon chip is put into the acid liquid tank for corrosion, impurities on the silicon chip can be remained in the acid liquid tank, the impurities cannot be taken out, so that the acid liquid needs to be frequently replaced, 2, the acid liquid in the acid liquid tank is not stored in a sealed mode, and the acid liquid is easy to volatilize.
SUMMERY OF THE UTILITY MODEL
1. Technical problem to be solved
An object of the utility model is to provide a silicon chip groover to solve the problem that proposes among the above-mentioned background art.
2. Technical scheme
In order to solve the above problem, the utility model adopts the following technical scheme:
a silicon wafer grooving machine comprises a machine frame, a machine table is arranged above the machine frame, an acid liquid groove is formed in the top of the machine table, a movable sealing plate is arranged in the acid liquid groove in a sliding mode, a first inclined plane inclining towards the middle is arranged at the top of the movable sealing plate, an annular sealing block is arranged at the top of the inner side of the acid liquid groove, a second inclined plane matched with the inclined plane of the movable sealing plate is arranged at the bottom of the annular sealing block, a strip-shaped sealing plate is arranged at the middle position of the inner side of the annular sealing block, a movable rod is vertically arranged at the middle position of the top of the movable sealing plate, one end, away from the movable sealing plate, of the movable rod extends to the top of the strip-shaped sealing plate and is fixedly connected with a cross rod, basket hanging frames are arranged at two ends of the cross rod, an electric, two through holes are arranged on the movable sealing plate below the strip-shaped sealing plate in a penetrating way.
Preferably, a cooling pipe is arranged inside the machine table outside the acid liquid tank.
Preferably, the top of the movable sealing plate on both sides of the strip-shaped sealing plate is vertically provided with a filter screen.
Preferably, a controller used for controlling the electric telescopic rod to stretch is arranged on one side of the machine table.
Preferably, the length of the cross bar is smaller than that of the acid liquor tank.
3. Advantageous effects
1. The utility model is provided with a movable sealing plate in the acid liquid tank in a sliding way, the top of the movable sealing plate is provided with a first inclined plane which inclines inwards, the top of the inner side of the acid liquid tank is provided with an annular sealing block, the bottom of the annular sealing block is provided with a second inclined plane which is matched with the inclined plane of the movable sealing plate, the middle position of the inner side of the annular sealing block is provided with a strip-shaped sealing plate, the middle position of the top of the movable sealing plate is vertically provided with a movable rod, one end of the movable rod far away from the movable sealing plate extends to the top of the strip-shaped sealing plate to be fixedly connected with a cross rod, both ends of the cross rod are provided with a basket hanger, the top of a machine table above the cross rod is vertically provided with an electric telescopic rod, the output end of the electric telescopic rod is fixedly connected with the top of the cross rod, two through holes are, the movable rod moves downwards to enable the movable plate to move downwards, when the movable plate descends to be in contact with acid liquid in the acid liquid groove, the movable plate continues to move downwards, the acid liquid enters the acid liquid cavity above the movable plate through the through hole to immerse the flower basket in the acid liquid, at the moment, the movable rod stops moving, the acid liquid starts to corrode a silicon wafer in the flower basket, after the time is up, the movable plate and the flower basket are driven to ascend by the electric telescopic rod, when the movable plate ascends to a position above the height of the initial acid liquid level, the movable plate stops moving, the acid liquid above the movable plate flows into the acid liquid groove below the movable plate along an inclined plane at the top of the movable plate after being filtered by the filter screen, impurities on the silicon wafer can be prevented from entering the acid liquid groove, the service time of the acid liquid is delayed, when the acid liquid in the flower basket is not left, the movable plate, at this moment, the strip-shaped sealing plate can block the through hole of the movable plate, and the annular sealing block can block the side edge of the movable plate, so that the acid liquid groove is sealed, and the acid liquid is prevented from volatilizing.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a front view schematic diagram of the present invention.
Reference numerals: 1-a cooling pipe, 2-a movable sealing plate, 3-an annular sealing block, 4-an electric telescopic rod, 5-a cross rod, 6-a flower basket hanger, 7-a movable rod, 8-a filter screen, 9-a through hole, 10-a rack, 101-a machine table, 11-an acid liquid tank, 12-a strip-shaped sealing plate and 13-a controller.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Examples
The silicon wafer groover shown in fig. 1-2 comprises a frame 10, a machine table 101 is arranged above the frame 10, an acid liquid tank 11 is arranged at the top of the machine table 101, a cooling pipe 1 is arranged inside the machine table 101 outside the acid liquid tank 11, freon is introduced into the cooling pipe 1 for cooling acid liquid, so as to ensure the stability of reaction temperature, a movable sealing plate 2 is slidably arranged inside the acid liquid tank 11, a first inclined plane inclined towards the middle is arranged at the top of the movable sealing plate 2, an annular sealing block 3 is arranged at the top end of the inner side of the acid liquid tank 11, a second inclined plane matched with the inclined plane of the movable sealing plate 2 is arranged at the bottom of the annular sealing block 3, a strip-shaped sealing plate 12 is arranged at the middle position of the inner side of the annular sealing block 3, a filter screen 8 is vertically arranged at the top of the movable sealing plate 2 at both sides of the strip, and the one end that movable rod 7 kept away from movable seal plate 2 extends to strip type closing plate 12 top and fixedly connects there is horizontal pole 5, the length of horizontal pole 5 is less than acid liquor groove 11 length, the both ends of horizontal pole 5 all are provided with basket of flowers gallows 6, the board 101 top of horizontal pole 5 top is provided with electric telescopic handle 4 perpendicularly, and electric telescopic handle 4's output and horizontal pole 5 top fixed connection, it is provided with two through-holes 9 to run through on the movable seal plate 2 of strip type closing plate 12 below, board 101 one side is provided with and is used for controlling the flexible controller 13 of electric telescopic handle 4.
The working principle is as follows: when the device is used, a flower basket with silicon chips is hung on a flower basket hanging frame 6, the controller 13 controls the electric telescopic rod 4 to move downwards to drive the flower basket and the movable rod 7 to move downwards, the movable rod 7 moves downwards to enable the movable plate 2 to move downwards, when the movable plate 2 descends to be in contact with the acid liquid surface in the acid liquid groove 11, the electric telescopic rod 4 continues to move downwards until the acid liquid enters the acid liquid groove 11 above the movable plate 2 through the through hole 9 to immerse the flower basket in the acid liquid, at the moment, the movement is stopped, the acid liquid starts to corrode the silicon chips in the flower basket, after the time is up, the electric telescopic rod 4 drives the movable plate 2 and the flower basket to ascend, when the movable plate 2 ascends to the height of the initial acid liquid surface, the movement is stopped, at the moment, the acid liquid above the movable plate 2 is filtered by the filter screen 8, the inclined plane at the top of the movable, can prevent that impurity on the silicon chip can get into inside acid solution groove 11, postpone the live time of acidizing fluid, when acidizing fluid is not staying in the basket of flowers, continue to drive the fly leaf through electric telescopic handle 4 and rise to initial position department, bar closing plate 12 can block up the through-hole 9 of fly leaf 2 at this moment, annular seal piece 3 can block up 2 sides of fly leaf, the completion is to the sealed of acid solution groove 11, prevent that acidizing fluid from volatilizing, move aside the basket of flowers at last, clear up 2 tops of fly leaf.
It will be appreciated by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as limitations of the present invention, and that changes and modifications to the above described embodiments will fall within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.
Claims (5)
1. A silicon wafer grooving machine comprises a machine frame (10), a machine table (101) is arranged above the machine frame (10), an acid liquid tank (11) is arranged at the top of the machine table (101), and the silicon wafer grooving machine is characterized in that a movable sealing plate (2) is arranged inside the acid liquid tank (11) in a sliding mode, a first inclined plane inclined towards the middle is arranged at the top of the movable sealing plate (2), an annular sealing block (3) is arranged at the top end of the inner side of the acid liquid tank (11), a second inclined plane matched with the inclined plane of the movable sealing plate (2) is arranged at the bottom of the annular sealing block (3), a strip-shaped sealing plate (12) is arranged at the middle position of the inner side of the annular sealing block (3), a movable rod (7) is vertically arranged at the middle position of the top of the movable sealing plate (2), and a cross rod (5) is fixedly connected to the top of the strip-shaped sealing plate (, the flower basket hanging frame is characterized in that flower basket hanging frames (6) are arranged at two ends of the cross rod (5), an electric telescopic rod (4) is vertically arranged at the top of the machine table (101) above the cross rod (5), the output end of the electric telescopic rod (4) is fixedly connected with the top of the cross rod (5), and two through holes (9) are formed in the movable sealing plate (2) below the strip-shaped sealing plate (12) in a penetrating mode.
2. The silicon wafer grooving machine according to claim 1, wherein a cooling pipe (1) is arranged inside the machine table (101) outside the acid solution tank (11).
3. The silicon wafer slotter according to claim 1, wherein a screen (8) is vertically provided on the top of the movable sealing plate (2) at both sides of the bar-type sealing plate (12).
4. The silicon wafer grooving machine according to claim 1, wherein a controller (13) for controlling the electric telescopic rod (4) to stretch is arranged on one side of the machine table (101).
5. The silicon wafer slotter according to claim 1, wherein the length of the cross bar (5) is smaller than the length of the acid tank (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020063404.6U CN211376598U (en) | 2020-01-13 | 2020-01-13 | Silicon wafer grooving machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020063404.6U CN211376598U (en) | 2020-01-13 | 2020-01-13 | Silicon wafer grooving machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211376598U true CN211376598U (en) | 2020-08-28 |
Family
ID=72152351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020063404.6U Active CN211376598U (en) | 2020-01-13 | 2020-01-13 | Silicon wafer grooving machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211376598U (en) |
-
2020
- 2020-01-13 CN CN202020063404.6U patent/CN211376598U/en active Active
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