CN211374848U - Space conversion part for probe card - Google Patents
Space conversion part for probe card Download PDFInfo
- Publication number
- CN211374848U CN211374848U CN201921549363.5U CN201921549363U CN211374848U CN 211374848 U CN211374848 U CN 211374848U CN 201921549363 U CN201921549363 U CN 201921549363U CN 211374848 U CN211374848 U CN 211374848U
- Authority
- CN
- China
- Prior art keywords
- electrode pad
- probe card
- hole
- space transformer
- insulating portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Abstract
The utility model relates to a space transform portion for probe card, space transform portion is used for the electrode rewiring of the required probe card of contact check, include: an insulating part made of a non-conductive material; a first electrode pad formed on the insulating portion; a second electrode pad formed under the insulating portion; a wiring section electrically connecting the first electrode pad and the second electrode pad; a first discharge hole vertically penetrating the first electrode pad.
Description
Technical Field
The utility model relates to a space conversion portion for probe card.
Background
As shown in fig. 1, in the probe card for contact inspection, in the space transformer 10 for electrode rewiring, the space transformer 10 includes through holes 510 and 520 electrically connecting the wiring part 400 and the electrode pads 210 and 220.
The through holes 510 and 520 contain air or foreign substances 20 (hereinafter, collectively referred to as "foreign substances 20") in the process of filling the conductive material.
The foreign substance 20 does not seem to have a problem on the surface, but when the probe card performs a high temperature environment inspection, there is a problem in that the foreign substance 20 expands to press the electrode pads 210, 220.
Such a problem has a problem of misalignment of contact of the probe card, and in a serious case, the contact of the electrode pads 210 and 220 with the through holes 510 and 520 is separated, thereby causing a problem that the inspection cannot be normally performed.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
An object of the utility model is to provide a space conversion portion for probe card.
Technical scheme
The utility model discloses space conversion portion for probe card, as the space conversion portion that is used for the electrode rewiring of the required probe card of contact check, include: an insulating part made of a non-conductive material; a first electrode pad formed on the insulating portion; a second electrode pad formed under the insulating portion; a wiring section electrically connecting the first electrode pad and the second electrode pad; a first discharge hole vertically penetrating the first electrode pad.
Preferably, the wiring section includes: a first via hole formed of a conductive material so as to be buried in the insulating portion at a lower position of the first electrode pad; and a second via hole formed of a conductive material so as to be buried in the insulating portion at an upper position of the second electrode pad.
Preferably, the first discharge hole is disposed to at least partially overlap a radius formed by the first through hole.
Preferably, the first discharge holes are formed in plural, and a distance between the closely arranged first discharge holes is 1.5 times or more a diameter of the first discharge hole.
Preferably, the diameter of the first discharge hole is 40 μm or more.
Preferably, the space transformer for a probe card includes a second drain hole vertically penetrating the second electrode pad.
Effect of the utility model
Even if the foreign substance 20 swells, since the foreign substance 20 is discharged through the discharge hole, there is an effect of preventing the problem that the foreign substance 20 presses the electrode pad.
Drawings
Fig. 1 is a sectional view of a space transformer according to a conventional problem.
Fig. 2 is a plan view of an electrode pad according to the conventional problem.
Fig. 3 is a sectional view of the space transformer according to the embodiment of the present invention.
Fig. 4 is a plan view of an electrode pad according to an embodiment of the present invention.
Fig. 5 is a plan view of an electrode pad according to an embodiment of the present invention.
Description of the reference numerals
10: space conversion unit
20: foreign matter
100: insulating part
210: first electrode pad
220: second electrode pad
310: first discharge hole
320: second discharge hole
400: wiring part
510: first through hole
520: second through hole
Detailed Description
As shown in fig. 1, in the probe card for contact inspection, in the space transformer 10 for electrode rewiring, the space transformer 10 includes through holes 510 and 520 electrically connecting the wiring part 400 and the electrode pads 210 and 220.
The through holes 510 and 520 contain air or foreign substances 20 (hereinafter, collectively referred to as "foreign substances 20") in the process of filling the conductive material.
The foreign substance 20 does not seem to have a problem on the surface, but when the probe card performs a high temperature environment inspection, there is a problem in that the foreign substance 20 expands to press the electrode pads 210, 220.
Such a problem has a problem of misalignment of contact of the probe card, and in a serious case, the contact of the electrode pads 210 and 220 with the through holes 510 and 520 is separated, thereby causing a problem that the inspection cannot be normally performed.
In order to solve such a problem, a space transformer 10 for a probe card according to an embodiment of the present invention includes an insulating part 100, a first electrode pad 210, a second electrode pad 220, a wiring part 400, and a first discharge hole 310, as shown in fig. 3.
The insulating portion 100 is made of a non-conductive material.
The insulating part 100 may be formed of ceramic.
The first electrode pad 210 is formed on the insulating part 100.
The second electrode pad 220 is formed at a lower portion of the insulating part 100.
The wiring part 400 electrically connects the first electrode pad 210 and the second electrode pad 220.
The first discharge hole 310 vertically penetrates the first electrode pad 210.
In addition, a second exhaust hole 320 may be further included in addition to the first exhaust hole 310 according to selection.
The second exhaust hole 320 vertically penetrates the second electrode pad 220.
One side of the discharge holes 310 and 320 is disposed to be in contact with or close to the through holes 510 and 520, and the foreign substances 20 are discharged through the discharge holes 310 and 320 (the discharge means includes a state of being discharged through the discharge holes and also including a state of being retained in the discharge holes 310 and 320 without being discharged).
As described above, even if the foreign substance 20 swells, since the foreign substance 20 is discharged through the discharge hole, there is an effect of preventing the problem that the foreign substance 20 presses the electrode pad.
As shown in fig. 3, the wiring part 400 of the space transformer 10 for a probe card according to the embodiment of the present invention includes a first through hole 510 and a second through hole 520.
The first via hole 510 is formed of a conductive material so as to be buried in the insulating portion 100 at a lower position of the first electrode pad 210.
The second via hole 520 is formed of a conductive material so as to be buried in the insulating portion 100 at an upper position of the second electrode pad 220.
The first discharge hole 310 may be disposed to at least partially overlap a radius formed by the first through hole 510.
That is, for electrical contact, the first discharge hole 310 is preferably not formed at the radius formed by the first through hole 510, but the effect of discharging the foreign substance 20 is lower as the distance from the radius formed by the first through hole 510 is larger, and therefore, the first discharge hole 310 is preferably disposed such that only a portion thereof overlaps the radius formed by the first through hole 510.
However, the meaning of the above-described effects is to provide an embodiment having a good effect, and the present invention is not necessarily limited thereto.
In the space transforming part 10 for a probe card according to an embodiment of the present invention, as shown in fig. 4, the first discharging holes 310 are formed in plural, and the distance between the first discharging holes 310 arranged in the proximity may be 1.5 times or more the diameter of the first discharging holes 310.
At this time, the diameter of the first discharge hole 310 is 40 μm or more.
By securing the distance between the first discharge holes 310, the electrical contact is maintained, and the diameter of the first discharge holes 310 is set to be equal to or larger than a predetermined value, so that the effect of discharging the foreign substance 20 is not reduced.
As shown in fig. 4 and 5, the first discharge hole 310 may be formed in a circular shape or a quadrangular shape, and may be formed in any shape as long as it is a shape capable of being arranged, and the electrode pads 210 and 220 may be formed in a quadrangular shape in addition to the circular shape shown in the drawings.
The description of the first discharge hole 310 described above may be applied to the second discharge hole 320 as necessary, and the description thereof will be omitted.
Claims (6)
1. A space transformer for a probe card, which is used for rewiring of electrodes of a probe card required for contact inspection, comprising:
an insulating part made of a non-conductive material;
a first electrode pad formed on the insulating portion;
a second electrode pad formed under the insulating portion;
a wiring section electrically connecting the first electrode pad and the second electrode pad; and
and a first discharge hole vertically penetrating the first electrode pad.
2. The space transformer for probe card according to claim 1, wherein the wiring unit comprises:
a first via hole formed of a conductive material so as to be buried in the insulating portion at a lower position of the first electrode pad; and
and a second via hole formed of a conductive material so as to be buried in the insulating portion at an upper position of the second electrode pad.
3. The space transformer for a probe card according to claim 2, wherein the first discharge hole is disposed to at least partially overlap a radius formed by the first through hole.
4. The space transformer for a probe card according to claim 2, wherein the first discharge holes are formed in plural, and a distance between the first discharge holes arranged close to each other is 1.5 times or more a diameter of the first discharge holes.
5. The space transformer for a probe card according to claim 4, wherein the diameter of the first discharge hole is 40 μm or more.
6. The space transformer for a probe card according to any one of claims 1 to 5, comprising a second drain hole vertically penetrating the second electrode pad.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020180141979A KR20200057494A (en) | 2018-11-16 | 2018-11-16 | The space transformer for the probe card |
| KR10-2018-0141979 | 2018-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211374848U true CN211374848U (en) | 2020-08-28 |
Family
ID=70915330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921549363.5U Active CN211374848U (en) | 2018-11-16 | 2019-09-18 | Space conversion part for probe card |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20200057494A (en) |
| CN (1) | CN211374848U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102594037B1 (en) * | 2021-04-29 | 2023-10-25 | (주)샘씨엔에스 | Method for impedance matching of space transformer for probe card |
-
2018
- 2018-11-16 KR KR1020180141979A patent/KR20200057494A/en active IP Right Grant
-
2019
- 2019-09-18 CN CN201921549363.5U patent/CN211374848U/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20200057494A (en) | 2020-05-26 |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |