CN211374830U - Needle card conveyer and probe station - Google Patents
Needle card conveyer and probe station Download PDFInfo
- Publication number
- CN211374830U CN211374830U CN201922062815.3U CN201922062815U CN211374830U CN 211374830 U CN211374830 U CN 211374830U CN 201922062815 U CN201922062815 U CN 201922062815U CN 211374830 U CN211374830 U CN 211374830U
- Authority
- CN
- China
- Prior art keywords
- needle card
- handling device
- overturning
- needle
- connecting part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a needle card conveyer and probe platform. A needle card carrying device is characterized in that a turnover part is rotatably connected to a first connecting part, so that the turnover part can rotate to a first plane; the needle card connecting part is in planar motion connection with the turnover part, so that the needle card connecting part can move in a first plane relative to the turnover part. A probe station comprising the probe card handling device. The needle card or the needle card connecting plate can be carried to the mounting position corresponding to the needle card mounting plate, and the needle card or the needle card connecting plate is safe and convenient to use compared with the manual needle card or needle card connecting plate carrying method.
Description
Technical Field
The utility model relates to a needle card conveyer and probe platform.
Background
The needle card in the probe station needs to be replaced after being used for a period of time, and the needle card needs to be transported between the objective table and the needle card mounting plate for replacement; in order to improve the safety of the needle card replacement, the needle card conveying device is required to convey the needle card to a position corresponding to the needle card mounting plate.
SUMMERY OF THE UTILITY MODEL
In order to satisfy the requirement that is used for the installation with the needle card transport to the needle card mounting panel, the utility model provides a needle card conveyer and probe platform.
The technical scheme of the utility model is that: a needle card carrying device is provided with a needle card carrying mechanism,
the overturning part is rotationally connected with the first connecting part, so that the overturning part can rotate to a first plane; the needle card connecting part is in planar motion connection with the turnover part, so that the needle card connecting part can move in a first plane relative to the turnover part.
Further, the first connecting part is connected to the base part in a linear motion along a direction perpendicular to the first plane.
Furthermore, the turning part is pivoted to the first connecting part, the rotation control part is connected between the turning part and the first connecting part, and the rotation control part is used for driving the turning part to rotate relative to the first connecting part and is positioned on the first plane.
Further, the rotation control part is a linear telescopic cylinder.
Furthermore, the needle card carrying device also comprises a safety protection device;
the safety protection device comprises a supporting part, a stop block and a safety cylinder; one end of the supporting part is pivoted to the overturning part, and the end, far away from the overturning part, of the supporting part is connected to the first connecting part through a sliding groove; the supporting part is connected with the safety cylinder, the safety cylinder is arranged on the first connecting part, the supporting part is connected with the sliding groove, the supporting part is connected with the safety cylinder, the safety cylinder is arranged on the first connecting part, the supporting part is located on the sliding groove, the safety cylinder controls the supporting part to leave the sliding groove, and the supporting part can be located on the sliding groove.
Further, the planar kinematic connection includes a linear motion and/or a rotational motion.
Furthermore, the needle card connecting part is connected to the turnover part through a linear guide rail.
Furthermore, the first connecting portion is provided with an elastic stop block, and the overturning portion can abut against the elastic stop block along the rotating direction.
Further, the first connecting portion is connected to the base portion in a vertical direction.
A probe station comprising the needle card handling device of any one of the above.
The beneficial effects of the utility model reside in that: the needle card or the needle card connecting plate can be carried to the mounting position corresponding to the needle card mounting plate, and the needle card or the needle card connecting plate is safe and convenient to use compared with the manual needle card or needle card connecting plate carrying method.
Drawings
FIG. 1 is a schematic view of the position of a probe card mounting plate and a stage;
FIG. 2 is a schematic view of the needle card handling device of the present invention in a folded state;
FIG. 3 is a schematic diagram of the turnover part of the needle card carrying device of the present invention turning over relative to the first connecting part;
FIG. 4 is a schematic view of the movement of the pin card connecting portion in the first plane of the pin card transporting device of the present invention;
FIG. 5 is a schematic view of the needle card connecting plate of the needle card transporting device of the present invention approaching the needle card mounting plate in the vertical direction;
fig. 6 is a schematic structural view of a probe station with a needle card handling device installed thereon.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention for those skilled in the art, the technical solutions of the present invention will be described in further detail with reference to specific embodiments.
As shown in fig. 1, 2, 3, 4, 5 and 6, a pincard transfer apparatus 100 for transferring a pincard connecting plate to a pincard mounting plate 300 on a probe station 200, in order to reduce damage to the pincard, the pincard is required to be fixed on the pincard connecting plate 101, and the pincard is replaced by replacing the pincard connecting plate 101;
the turning part 20 is rotatably connected to the first connecting part 30, so that the turning part 20 can rotate to a first plane S (along the horizontal plane direction in fig. 1 and 2), and the usage space occupied by the turning part 20 and the first connecting part 30 is reduced due to relative rotation, thereby facilitating the purpose of reducing the space occupied by the pincard conveying device 100; the pin card connecting part 40 is connected to the overturning part 20 in a planar motion manner, so that the pin card connecting part 40 can move in a first plane S relative to the overturning part 20, and because the pin card mounting plate 300 is positioned above the object stage 400 (used for placing a wafer to be tested), in order to reduce the volume of the probe station 100, the motion track of the object stage 400 does not need to be increased, and the pin card can be mounted by transporting the pin card to the space between the pin card mounting plate 300 and the object stage 400; the pincard connecting portion 40 fixes the pincard connecting plate 101, and the pincard connecting plate 101 is conveyed by the pincard conveying apparatus 100 to a space where the pincard mounting plate 300 is located, in which the pincard can be mounted.
By adopting the technical scheme, the pin card connecting plate 101 can be conveyed to the pin card mounting plate 300 or the pin cards of the pin card mounting plate 300 can be taken down without changing the layout or the volume of the probe station 200; the volume of the probe station 200 is not increased; meanwhile, the needle card does not need to be replaced one day by one day, so that the needle card is operated at a low frequency (generally replaced once a month); by rotating and folding the turnover part 20 relative to the first connecting part 30, the space occupied by the turnover part 20 and the first connecting part 30 when the needle card does not need to be replaced can be reduced on the premise of meeting the use requirement of the turnover part 20; carry the needle card mounting panel 300 with the needle card for adopting by hand, the utility model discloses the technical scheme of transport needle card connecting plate 101 is reliable and more stable.
As shown in fig. 1, 2, 3, 4, 5 and 6, the first connecting portion 30 is connected to the base portion 50 along a linear motion perpendicular to the first plane direction S; thereby realizing the adjustment of the movement of the pincard connecting plate 101 approaching/departing from the pincard mounting plate 300 by driving the first connecting part 30 to move linearly relative to the base part 50, thereby facilitating the control of the spatial position of the pincard connecting plate 101 between the pincard mounting plate 300 and the stage 400, and facilitating the position of the pincard connecting plate 101 to meet the replacement requirement; the mechanism for fixing the pin card connecting plate 101 on the pin card mounting plate 300 is matched, so that full-automatic operation of replacing the pin card is convenient to realize.
As shown in fig. 1, 2, 3, 4, 5 and 6, the turning part 20 is pivoted to the first connecting part 30 so that the turning part 20 can rotate relative to the first connecting part 30; the rotation control part 21 is connected between the turning part 20 and the first connecting part 30, so that the turning part 20 can be automatically controlled to rotate relative to the first connecting part 30; the rotation control part 21 is used for driving the turning part 20 to rotate relative to the first connecting part 30 and is positioned on the first plane S;
by adopting the technical scheme, the turnover part 20 can rotate to the first plane S relative to the first connecting part 30, so that the pin card connecting plate 101 is positioned on the first plane S, and the process of conveying the pin card connecting plate 101 to the pin card mounting plate 300 is simplified; the efficiency of changing the pincer card is improved.
As shown in fig. 1, 2, 3, 4, 5 and 6, the rotation control unit 21 is a linear telescopic cylinder; this is one way to drive the turning part 20 to rotate, and those skilled in the art can also use other equivalent solutions to realize the control of the turning part 20 to rotate.
As shown in fig. 1, 2, 3, 4, 5 and 6, the card handling device 100 further includes a safety guard 60;
the safety protection device 60 comprises a support part 61, a stop block 62 and a safety cylinder 63; one end of the supporting part 61 is pivoted to the turning part 20, and one end of the supporting part 61, which is far away from the turning part 20, is connected to the first connecting part 30 through a sliding chute; the abutting block 62 is connected to the safety cylinder 63, the safety cylinder 63 is mounted on the first connecting portion 30, the abutting block 62 is located in the sliding groove, the safety cylinder 63 controls the abutting block 62 to leave the sliding groove, and the supporting portion 61 can pass through the position of the sliding groove where the abutting block 62 is located; when the device for driving the turning part 20 is out of order (or is powered off/de-energized), the turning part 20 may freely rotate along the first connection part 30 due to unstable position, thereby causing a safety hazard; at this time, the turning part 20 can be turned over and reset only by controlling the safety cylinder 63 to enable the abutting block 62 to move; enhanced control of the roll-over 20 by the safety device 60; when the turning driving mechanism of the turning part 20 is a cylinder (including but not limited to a linear telescopic cylinder) and the safety cylinder 63 is driven by air pressure, when the air pressure fails, the safety cylinder 63 cannot work, so that the turning part 20 is positioned at a position where the turning part cannot be freely turned under the action of the stopping block 62, and the safety is ensured.
As shown in fig. 1, 2, 3, 4, 5 and 6, the planar kinematic connection includes linear and/or rotational motion; it is sufficient that the pin card connecting plate 101 can be transported to a position corresponding to the pin card mounting plate 300.
As shown in fig. 1, 2, 3, 4, 5 and 6, the needle card connecting part 40 is connected to the turning part 20 through a linear guide; the card connecting portion 40 can move linearly in the first plane S with respect to the turning portion 20, thereby transporting the card connecting plate 101 to a position corresponding to the card mounting plate 300.
As shown in fig. 1, 2, 3, 4, 5 and 6, the first connecting portion 30 is provided with an elastic stopper 31, and the turning portion 20 can be stopped against the elastic stopper 31 in the rotating direction; the impact noise and vibration caused by the rotation of the turnover part 20 to be attached to the first connection part 30 are buffered.
As shown in fig. 1, 2, 3, 4, 5 and 6, the first connection portion 30 is connected to the base portion 50 in a vertical direction; because the needle card is changed and need to place needle card connecting plate 101 along the level, adopt the technical scheme of the utility model, can also make needle card connecting plate 101 be close to/keep away from needle card mounting panel 300 (needle card connecting plate 101 is located between needle card mounting panel 300 and objective table 400) along vertical direction through the motion of controlling first connecting portion 30 along vertical direction.
As shown in fig. 1, 2, 3, 4, 5 and 6, a probe station 200 comprising the needle card handling apparatus 100 of claim; the needle card of the probe station 200 is easily replaced.
The above is the preferred embodiment of the present invention, and is not used to limit the protection scope of the present invention. It should be recognized that non-inventive variations and modifications to the disclosed embodiments, as understood by those skilled in the art, are intended to be included within the scope of the present invention as claimed and claimed.
Claims (10)
1. A needle card handling device which characterized in that:
the overturning part is rotationally connected with the first connecting part, so that the overturning part can rotate to a first plane; the needle card connecting part is in planar motion connection with the turnover part, so that the needle card connecting part can move in a first plane relative to the turnover part.
2. The pin card handling device according to claim 1, wherein:
the first connecting part is connected to the base part in a linear motion along a direction perpendicular to the first plane.
3. The pin card handling device according to claim 1, wherein:
the overturning part is pivoted on the first connecting part, the rotation control part is connected between the overturning part and the first connecting part, and the rotation control part is used for driving the overturning part to rotate relative to the first connecting part and is positioned on a first plane.
4. The pin card handling device according to claim 3, wherein:
the rotation control part is a linear telescopic cylinder.
5. The pin card handling device according to any one of claims 1 to 4, wherein: the needle card carrying device also comprises a safety protection device;
the safety protection device comprises a supporting part, a stop block and a safety cylinder; one end of the supporting part is pivoted to the overturning part, and the end, far away from the overturning part, of the supporting part is connected to the first connecting part through a sliding groove; the supporting part is connected with the safety cylinder, the safety cylinder is arranged on the first connecting part, the supporting part is connected with the sliding groove, the supporting part is connected with the safety cylinder, the safety cylinder is arranged on the first connecting part, the supporting part is located on the sliding groove, the safety cylinder controls the supporting part to leave the sliding groove, and the supporting part can be located on the sliding groove.
6. The pin card handling device according to claim 1, wherein: the planar kinematic connection includes a linear motion and/or a rotational motion.
7. The pin card handling device of claim 6, wherein: the needle card connecting part is connected to the overturning part through a linear guide rail.
8. The pin card handling device according to claim 1, wherein: the first connecting portion is provided with an elastic stop block, and the overturning portion can be abutted to the elastic stop block along the rotating direction.
9. The pincard handling device according to claim 1 or 2, characterized in that: the first connecting portion is connected to the base portion in a vertical direction.
10. A probe station, characterized by: the probe station comprising the needle card handling device of any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922062815.3U CN211374830U (en) | 2019-11-26 | 2019-11-26 | Needle card conveyer and probe station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922062815.3U CN211374830U (en) | 2019-11-26 | 2019-11-26 | Needle card conveyer and probe station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211374830U true CN211374830U (en) | 2020-08-28 |
Family
ID=72150620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922062815.3U Active CN211374830U (en) | 2019-11-26 | 2019-11-26 | Needle card conveyer and probe station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211374830U (en) |
-
2019
- 2019-11-26 CN CN201922062815.3U patent/CN211374830U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107857118B (en) | Full-automatic glass production line of piece from top to bottom | |
| CN106626801A (en) | Character jet printing machine | |
| CN108724150B (en) | Robot device | |
| TW201837000A (en) | Substrate processing device | |
| CN219031131U (en) | Unloading device for logistics freight transportation | |
| CN212504583U (en) | Glass cutting processing line | |
| CN211374830U (en) | Needle card conveyer and probe station | |
| CN209275717U (en) | A kind of feeding device and circuit board processing device | |
| CN210654959U (en) | Kiln car conveyer and kiln car transfer equipment | |
| CN106081518B (en) | Airdrome luggage conveying device and method | |
| CN103889779B (en) | Goods conveyor | |
| KR101121073B1 (en) | Apparatus for attaching label | |
| CN110850123A (en) | Needle card conveyer and probe station | |
| JP3163138U (en) | Transport device with lifting function | |
| CN206912494U (en) | A kind of battery core welding equipment | |
| JP2020070155A (en) | Article transfer facility | |
| CN107855746A (en) | A kind of vehicle GPS support frame feed mechanism | |
| CN109051803B (en) | Platform handling mechanism and handling storage system | |
| CN208728934U (en) | A kind of laser marking machine | |
| CN210763278U (en) | Automatic unloading device | |
| CN215281937U (en) | Long-distance electromagnetic suction type carrying device | |
| CN108569542A (en) | Mattress turnover device | |
| KR102353206B1 (en) | Scribing apparatus | |
| CN209815140U (en) | Power battery apron upset feeder | |
| CN107037620A (en) | Locating tool and alignment method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |